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Digital Integrated Circuits A Design Perspective Jan M. Rabaey Anantha Chandrakasan Borivoje Nikolic Coping with Interconnect December 15, 2002 © Digital Integrated Circuits2nd Interconnect Impact of Interconnect Parasitics • Reduce Robustness • Affect Performance • Increase delay • Increase power dissipation Classes of Parasitics • Capacitive • Resistive • Inductive © Digital Integrated Circuits2nd Interconnect INTERCONNECT © Digital Integrated Circuits2nd Interconnect Capacitive Cross Talk X CXY VX Y CY © Digital Integrated Circuits2nd Interconnect Capacitive Cross Talk - Dynamic Node V DD CLK CXY Y In 1 In 2 In 3 CY PDN X 2.5 V 0V CLK 3 x 1 mm overlap: 0.19 V disturbance © Digital Integrated Circuits2nd Interconnect Capacitive Cross Talk - Driven Node 0.5 Voltage disturbance 0.45 V (Volt) 0.4 tr↑ 0.35 X VX Y CY tXY = RY(CXY+CY) 0.25 CXY RY 0.3 0.2 0.15 0.1 0.05 0 0 0.2 0.4 0.6 0.8 1 t (nsec) Keep time-constant smaller than rise time © Digital Integrated Circuits2nd Interconnect Dealing with Capacitive Cross Talk Avoid floating nodes Protect sensitive nodes Make rise and fall times as large as possible Differential signaling Do not run wires together for a long distance Use shielding wires Use shielding layers © Digital Integrated Circuits2nd Interconnect Shielding Shielding wire GND V DD Shielding layer GND Substrate (GND ) © Digital Integrated Circuits2nd Interconnect Cross Talk and Performance - When neighboring lines switch in opposite direction of victim line, delay increases Cc DELAY DEPENDENT UPON ACTIVITY IN NEIGHBORING WIRES Miller Effect - Both terminals of capacitor are switched in opposite directions (0 Vdd, Vdd 0) - Effective voltage is doubled and additional charge is needed (from Q=CV) © Digital Integrated Circuits2nd Interconnect Impact of Cross Talk on Delay r is ratio between capacitance to GND and to neighbor © Digital Integrated Circuits2nd Interconnect Structured Predictable Interconnect V S G S V S S G S V S V Example: Dense Wire Fabric ([Sunil Kathri]) Trade-off: • Cross-coupling capacitance 40x lower, 2% delay variation • Increase in area and overall capacitance © Digital Integrated Circuits2nd Interconnect Interconnect Projections Low-k dielectrics Both delay and power are reduced by dropping interconnect capacitance Types of low-k materials include: inorganic (SiO2), organic (Polyimides) and aerogels (ultra low-k) The numbers below are on the conservative side of the NRTS roadmap Generation Dielectric Constant 0.25 mm 3.3 © Digital Integrated Circuits2nd 0.18 mm 2.7 0.13 mm 2.3 0.1 mm 2.0 0.07 mm 1.8 e 0.05 mm 1.5 Interconnect Encoding Data Avoids Worst-Case Conditions In Avoid large number of bits change when a signal value changes a little Encoder Bus Decoder Out © Digital Integrated Circuits2nd Interconnect Driving Large Capacitances V DD V in V out CL Use • Transistor Sizing • Cascaded Buffers © Digital Integrated Circuits2nd Interconnect Using Cascaded Buffers In Out 1 2 0.25 mm process Cin = 2.5 fF tp0 = 30 ps N CL = 20 pF F = CL/Cin = 8000 fopt = 3.6 N = 7 tp = 0.76 ns (See Chapter 5) © Digital Integrated Circuits2nd Interconnect Output Driver Design Trade off Performance for Area and Energy Given tpmax find N and f Area f 1 F 1 A 1 f f ... f A A A f 1 f 1 2 N N 1 driver Energy min 2 Edriver 1 f f 2 ... f N 1 CiVDD © Digital Integrated Circuits2nd min min F 1 C 2 2 CiVDD L VDD f 1 f 1 Interconnect Delay as a Function of F and N 10,000 F = 10,000 Do not drive the output in the min time if not necessary to save energy tp/tp0 1000 100 F = 1000 10 1 3 5 7 F = 100 9 11 Number of buffer stages N © Digital Integrated Circuits2nd Interconnect Output Driver Design 0.25 mm process, CL = 20 pF Transistor Sizes for optimally-sized cascaded buffer tp = 0.76 ns Transistor Sizes of redesigned cascaded buffer tp = 1.8 ns © Digital Integrated Circuits2nd Interconnect How to Design Large Transistors D(rain) Multiple Contacts Reduces diffusion capacitance Reduces gate resistance S(ource) G(ate) small transistors in parallel © Digital Integrated Circuits2nd Interconnect Bonding Pad Design Bonding Pad - design for electrical and mechanical reqs GND 100 mm Out VDD © Digital Integrated Circuits2nd In GND Out Interconnect ESD Protection When a chip is connected to a board, there is unknown (potentially large) static voltage difference Equalizing potentials requires large charge flow through the pads Diodes sink this charge into the substrate – need guard rings to pick it up. © Digital Integrated Circuits2nd Interconnect ESD Protection V DD R D1 X PAD D2 C Diode © Digital Integrated Circuits2nd Interconnect Chip Packaging Bonding wire Chip L Mounting cavity L´ Lead frame Pin •Bond wires (~25mm) are used to connect the package to the chip • Pads are arranged in a frame around the chip • Pads are relatively large (~100mm in 0.25mm technology), with large pitch (100mm) •Many chips areas are ‘pad limited’ © Digital Integrated Circuits2nd Interconnect Pad Frame Layout © Digital Integrated Circuits2nd Insert guard rings to reduce the noise particularly to isolate analog parts Die Photo Interconnect Chip Packaging An alternative is ‘flip-chip’: Pads are distributed around the chip The soldering balls are placed on pads The chip is ‘flipped’ onto the package Can have many more pads © Digital Integrated Circuits2nd Interconnect Tristate Buffers V DD V DD En En Out Out In En In En Increased output drive Out = In.En + Z.En © Digital Integrated Circuits2nd Interconnect Reducing the swing tpHL = CL Vswing/2 Iav Reducing the swing potentially yields linear reduction in delay Also results in reduction in power dissipation Delay penalty is paid by the receiver Requires use of “sense amplifier” to restore signal level Frequently designed with differential signals © Digital Integrated Circuits2nd Interconnect Single-Ended Static Driver and Receiver VDD VDD VDD VDD L Out In VDD L Out CL Driver © Digital Integrated Circuits2nd Receiver with low to high voltage conversion Interconnect Dynamic Reduced Swing Network f VDD VDD M2 M4 Bus In1.f M1 In2.f Cbus Out M3 Bus line pulled down a little by an input M3 and M4 designed to detect this pull with strong M4 Cout 2.5 V 2 V asym bus V 1.5 V(Volt) sym f 1 0.5 0 © Digital Integrated Circuits2nd 0 2 4 6 time (ns) 8 10 12 Interconnect INTERCONNECT © Digital Integrated Circuits2nd Interconnect Impact of Resistance We have already learned how to drive RC interconnect Impact of resistance is commonly seen in power supply distribution: IR drop Voltage variations Power supply is distributed to minimize the IR drop and the change in current due to switching of gates © Digital Integrated Circuits2nd Interconnect RI Introduced Noise V DD f pre I R9 V DD -V9 I VGND=RI X M1 R © Digital Integrated Circuits2nd Interconnect Power Dissipation Trends 160 140 120 100 80 60 40 20 0 3.5 2.5 2 1.5 1 0 EV4 EV5 EV6 EV7 EV8 Supply Current 3.5 120 3 100 2.5 80 2 60 1.5 40 1 20 0.5 0 Better cooling technology needed Supply current is increasing faster! OnOn-chip signal integrity will be a major issue Power and current distribution are critical Opportunities to slow power growth Voltage (V) Current (A) 0.5 140 Power consumption is increasing 3 Voltage (V) Power (W) Power Dissipation Accelerate Vdd scaling Low κ dielectrics & thinner (Cu) interconnect SOI circuit innovations Clock system design micromicro-architecture L o w κ d i e l e c t r i c s & t h i n n e r ( C u ) 0 EV4 EV5 EV6 EV7 EV8 © Digital Integrated Circuits2nd ASP DAC 2000 19 Interconnect Resistance and the Power Distribution Problem After Before • Requires fast and accurate peak current prediction • Heavily influenced by packaging technology © Digital Integrated Circuits2nd Source: Cadence Interconnect Power Distribution Low-level distribution is in Metal 1 Power has to be ‘strapped’ in higher layers of metal. The spacing is set by IR drop, electromigration, inductive effects Always use multiple contacts on straps © Digital Integrated Circuits2nd Interconnect Power and Ground Distribution GND VDD Logic Logic VDD GND (a) Finger-shaped network © Digital Integrated Circuits2nd VDD GND (b) Network with multiple supply pins Interconnect 3 Metal Layer Approach (EV4) 3rd “coarse and thick” metal layer added to the technology for EV4 design Power supplied from two sides of the die via 3rd metal layer 2nd metal layer used to form power grid 90% of 3rd metal layer used for power/clock routing Metal 3 Metal 2 Metal 1 © Digital Integrated Circuits2nd Courtesy Compaq Interconnect 4 Metal Layers Approach (EV5) 4th “coarse and thick” metal layer added to the technology for EV5 design Power supplied from four sides of the die Grid strapping done all in coarse metal 90% of 3rd and 4th metals used for power/clock routing Metal 4 Metal 3 Metal 2 Metal 1 © Digital Integrated Circuits2nd Courtesy Compaq Interconnect 6 Metal Layer Approach – EV6 2 reference plane metal layers added to the technology for EV6 design Solid planes dedicated to Vdd/Vss Significantly lowers resistance of grid Lowers on-chip inductance RP2/Vdd Metal 4 Metal 3 RP1/Vss Metal 2 Metal 1 © Digital Integrated Circuits2nd Courtesy Compaq Interconnect Electromigration (1) Limits dc-current to 1 mA/mm © Digital Integrated Circuits2nd Interconnect Electromigration (2) © Digital Integrated Circuits2nd Interconnect Resistivity and Performance Tr The distributed rc-line R1 RN-1 R2 C1 C2 RN CN-1 CN Vin 2.5 Delay ~ L2 x = L/4 voltage (V) Diffused signal propagation x= L/10 2 1.5 x = L/2 1 x= L 0.5 0 © Digital Integrated Circuits2nd 0 0.5 1 1.5 2 2.5 3 time (nsec) 3.5 4 4.5 5 Interconnect The Global Wire Problem Td 0.377 RwCw 0.693Rd Cout Rd Cw RwCout Challenges No further improvements to be expected after the introduction of Copper (superconducting, optical?) Design solutions Use of fat wires Insert repeaters — but might become prohibitive (power, area) Efficient chip floorplanning Towards “communication-based” design How to deal with latency? Is synchronicity an absolute necessity? © Digital Integrated Circuits2nd Interconnect Interconnect Projections: Copper Copper is planned in full sub-0.25 mm process flows and large-scale designs (IBM, Motorola, IEDM97) With cladding and other effects, Cu ~ 2.2 mW-cm vs. 3.5 for Al(Cu) 40% reduction in resistance Electromigration improvement; 100X longer lifetime (IBM, IEDM97) Electromigration is a limiting factor beyond 0.18 mm if Al is used (HP, IEDM95) © Digital Integrated Circuits2nd Vias Interconnect Interconnect: # of Wiring Layers # of metal layers is steadily increasing due to: = 2.2 mW-cm M6 • Increasing die size and device count: we need more wires and longer wires to connect everything Tins • Rising need for a hierarchical wiring network; M5 W local wires with high density and global wires with low RC S M4 H 3.5 Minimum Widths (Relative) 4.0 3.5 3.0 M3 3.0 2.5 2.5 2.0 M2 1.5 M1 1.0 poly 0.5 0.25 mm wiring stack 0.0 M5 M4 M3 M2 substrate © Digital Integrated Circuits2nd Minimum Spacing (Relative) M5 2.0 M4 M3 1.5 M1 1.0 Poly 0.5 M2 M1 Poly 0.0 m m m m m m m m m m Interconnect Diagonal Wiring destination diagonal y source x Manhattan • 20+% Interconnect length reduction • Clock speed Signal integrity Power integrity • 15+% Smaller chips plus 30+% via reduction © Digital Integrated Circuits2nd Courtesy Cadence X-initiative Interconnect Using Bypasses Driver WL Polysilicon word line Metal word line Driving a word line from both sides Metal bypass WL K cells Polysilicon word line Using a metal bypass © Digital Integrated Circuits2nd Interconnect Reducing RC-delay Repeater (chapter 5) © Digital Integrated Circuits2nd Interconnect Repeater Insertion (Revisited) Taking the repeater loading into account For a given technology and a given interconnect layer, there exists an optimal length of the wire segments between repeaters. The delay of these wire segments is independent of the routing layer! © Digital Integrated Circuits2nd Interconnect INTERCONNECT © Digital Integrated Circuits2nd Interconnect L di/dt V DD L i(t) V ’DD V out V in CL Impact of inductance on supply voltages: • Change in current induces a change in voltage • Longer supply lines have larger L GND ’ L © Digital Integrated Circuits2nd Interconnect 2.5 2.5 2 2 1.5 1.5 out (V) L di/dt: Simulation 1 0.5 0.5 V 1 0 0 0 0.5 1 1.5 2 x 10 Without inductors With inductors 0.02 0 decoupled 0 0.5 1 1.5 1 1.5 2 x 10 -9 0.02 0 0 0.5 1 1.5 -9 x 10 1 0.5 2 -9 0.5 L V (V) 2 x 10 1 0.5 0.04 L i (A) 0.04 0 -9 0 0 0 0.5 1 time (nsec) 1.5 2 x 10 -9 Input rise/fall time: 50 psec © Digital Integrated Circuits2nd 0 0.5 1 time (nsec) 1.5 2 x 10 -9 Input rise/fall time: 800 psec Interconnect Dealing with Ldi/dt Separate power pins for I/O pads and chip core. Multiple power and ground pins. Careful selection of the positions of the power and ground pins on the package. Increase the rise and fall times of the off-chip signals to the maximum extent allowable. Schedule current-consuming transitions. Use advanced packaging technologies. Add decoupling capacitances on the board. Add decoupling capacitances on the chip. © Digital Integrated Circuits2nd Interconnect Choosing the Right Pin Bonding wire Chip L Mounting cavity L´ Lead frame Pin © Digital Integrated Circuits2nd Interconnect Decoupling Capacitors 1 Board wiring Bonding wire Cd SUPPLY CHIP 2 Decoupling capacitor Decoupling capacitors are added: • on the board (right under the supply pins) • on the chip (under the supply straps, near large buffers) © Digital Integrated Circuits2nd Interconnect De-coupling Capacitor Ratios EV4 total effective switching capacitance = 12.5nF 128nF of de-coupling capacitance de-coupling/switching capacitance ~ 10x EV5 13.9nF of switching capacitance 160nF of de-coupling capacitance EV6 34nF of effective switching capacitance 320nF of de-coupling capacitance -- not enough! © Digital Integrated Circuits2nd Source: B. Herrick (Compaq) Interconnect EV6 De-coupling Capacitance Design for Idd= 25 A @ Vdd = 2.2 V, f = 600 MHz 0.32-µF of on-chip de-coupling capacitance was added – Under major busses and around major gridded clock drivers – Occupies 15-20% of die area 1-µF 2-cm2 Wirebond Attached Chip Capacitor (WACC) significantly increases “Near-Chip” decoupling – 160 Vdd/Vss bondwire pairs on the WACC minimize inductance © Digital Integrated Circuits2nd Source: B. Herrick (Compaq) Interconnect EV6 WACC 389 Signal - 198 VDD/VSS Pins 389 Signal Bondwires 395 VDD/VSS Bondwires 320 VDD/VSS Bondwires WACC Microprocessor Heat Slug 587 IPGA © Digital Integrated Circuits2nd Source: B. Herrick (Compaq) Interconnect The Transmission Line l V in l r l r g c l r g c x g c r V out g c The Wave Equation © Digital Integrated Circuits2nd Interconnect Design Rules of Thumb Transmission line effects should be considered when the rise or fall time of the input signal (tr, tf) is smaller than the time-of-flight of the transmission line (tflight). tr (tf) << 2.5 tflight Transmission line effects should only be considered when the total resistance of the wire is limited: R < 5 Z0 The transmission line is considered lossless when the total resistance is substantially smaller than the characteristic impedance, R < Z0/2 © Digital Integrated Circuits2nd Interconnect Should we be worried? Transmission line effects cause overshooting and non-monotonic behavior Clock signals in 400 MHz IBM Microprocessor (measured using e-beam prober) [Restle98] © Digital Integrated Circuits2nd Interconnect Matched Termination Z0 Z0 ZL Series Source Termination ZS Z0 Z0 Parallel Destination Termination © Digital Integrated Circuits2nd Interconnect Segmented Matched Line Driver In VDD Z0 s0 s1 c1 © Digital Integrated Circuits2nd s2 c2 ZL sn cn GND Interconnect Parallel Termination─ Transistors as Resistors V dd Mr Out Vdd Mr V dd M rp M rn V bb Out Out V 2 1.9 1.8 1.7 1.6 1.5 1.4 1.3 1.2 1.1 1 0 Normalized Resistance NMOS only PMOS only NMOS-PMOS PMOS with-1V bias 0.5 1 1.5 V R (Volt) 2 2.5 Termination resistance © Digital Integrated Circuits2nd Interconnect Output Driver with Varying Terminations Vout 4 V d 3 V V 2 V DD in s 1 L = 2.5 nH 120 L = 2.5 nH V in Vs 275 Z 0 = 50 W C L= 5 pF Vd CL Clamping Diodes 0 V DD 1 0 1 2 3 Vout 4 5 6 7 8 Initial design 4 3 V V d in L= 2.5 nH 2 V s 1 0 1 0 1 2 3 4 5 6 7 8 time (sec) Revised design with matched driver impedance © Digital Integrated Circuits2nd Interconnect The “Network-on-a-Chip” Embedded Processors Memory Sub-system Interconnect Backplane Accelators © Digital Integrated Circuits2nd Configurable Accelerators Peripherals Interconnect