Download Specification of bias power supply

BOMB Ⅲ-series Bias Power Supply
Operation Manual
Tangshan Biaoxian Electronic co., LTD
EDITION 2014
Attention！
Please operate with caution as there is a high output voltage!
 Any incorrect operation may have life risk
 Please read this manual carefully in the "warning" operation, to avoid
accidents
 In order to better use of power, please put the manual on the power
supply
 Statement: the company may have on the performance, structure,
function, appearance of the product, accessories, packaging and
instruction manual for perfect and improve, without prior notice!
Such as to cause confusion, please contact with the company
Directory
I.
Use and Main Technical Specifications of the Bias Power Supply
II.
Structure
III.
Working principle
IV.
Installation and Use
V.
The matters needing attention
VI.
General issues to deal with
VII. One set of BOMB Ⅲ-series Power Supply
-1-
Attention！
Please operate with caution as there is a high output voltage!
Ⅰ.Use and Main Technical Specifications of the Bias Power
Supply
1.use
As one of an important parts of vacuum arc ion plating and other vacuum .BOMB Ⅲ
series of power supply is operated at high physical vapor deposition equipment, it
provides a negative (or positive) bias for artifacts in the coating process .
Function as follows:
1) Improve the vacuum plasma body charged particle energy, bombardment
cleaning the surface of the workpiece which is plated , to make the surface of the
workpiece through a high-energy particle collision, so as to get a new surface, To
improve the adhesion strength of the subsequent deposited film layer
2) Improve and control the vacuum plasma body charged particles of energy,
improve the membrane layer and substrate
3) Rely on the different way of voltage output polarity or change the
sedimentary rules, adjust the color of the film
4) Overcoming the bias power supply working in vacuum plasma environment,
caused by high voltage cathode arc discharge burn artifact
BOMB III-series power supply is operated at high frequency and with a single polar
pulse. The width of voltage and pulse is adjusted respectively. Low-temperature depo
sition process of ion plating is conveniently realized by continuously regulating the
voltage from zero to the maximum value in the same grade while the duty ratio is
also continuously adjusted from 10% to 90%. This feature can make power in the
output of high voltage by adjusting the pulse width to control the workpiece after get
the bombardment energy, to control unnecessary workpiece temperature rise, so as to
realize the high pressure and low temperature deposition of ion plating process.
BOMB III series power supply enjoys the voltage stability system, so voltage
fluctuation caused by power net work or load change can be adjusted automatically.
The controlling feature of power supply makes it can be used in a more widely
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equipment environment.
2. Main Technical Specifications
2.1 Output Power Grade
3-120kw
2.2 Input Power Supply
Three Phase Four Wire 380V±10% 50-60Hz
2.3 Output Voltage
0-180V 0-500V 0-1000V (Pulse value)
2.4 Whole Efficiency
≥85%
2.5 Arc-extinguishing Speed
3μS
2.6 Environmental Temperature
Environmental Humidity
2.7 *Cooling Water
0℃－＋40 ℃
≤85%
Temperature20-40℃，Pressure 0.15±0.05Mp
2.8** External control
2.8.1 Voltage control signal
0-5V correspond 0-180V
0-5V correspond 0-500V
0-5V correspond 0-1000V
2.8.2 Pulse Control Signal
0-5V
2.8.3 Current Display Signal
0-5V display 0- maximum current
2.8.4 Pulse Display Signal
0-5V display 0-100%
2.8.5 Voltage Display Signal
0-5V display 0-1000V
2.8.6 Setting signal
When L for high potential, low voltage output,
When M for high potential, medium voltage output
When L and M are low potential, high voltage output
2.8.7Power-on Signal
FOR EXTERNAL CONTRO : P9 and p10 connecting together, the power to start
II Structure
Refer to figure 2.1
BOMBⅢ series of bias power structure diagram
Refer to figure** 3.1
BOMBⅢ series bias power supply principl diagram
Refer figure 3.1
BOMBⅢ series of bias power supply principle diagram
-3-
1. Input Parts
Consists of circuit breaker CB1 ，Soft start contactor K1 , Main
contactor K2
2.Rectifier- Filter
and
Soft start resistance R1-R3
Consists of Three-phase rectifier module D1 and Filter capacitor
C1 C2 and Discharge resistance R4 R5
3. Voltage Stability System
Consists of switch regulator Q5 , Fly-wheel diode D2 ,
Regulating control circuit board ZLTY , Regulating driver
circuit board ZPQD , Output Filter capacitor C3 C4, Discharge
resistance R5 R6 .
4.High frequency conversion isolation
High frequency conversion is consists of Switch module Q1-Q4 ,
driver circuit board HPFQD and Control circuit board HPZK3 ,
Isolation is by the Many winding high-frequency Transformer
Completed .
5. Output Voltage Switching
Consists of KL,KM and KH
6.High-frequency Rectification
Consists of D2 and
In the absorbing circuit
beside
7. Current and Voltage Checking
Consists of LEM.A2 , LEM.A3 and Voltage
detection circuit board
ZLAV .
8** Computer Connecting
8.1 Signal acquisition circuit board ZLAV
8.2 Internal and External Conversion and Analog signal output circuit board APVS
III Working Principle
Refer figure 3.1 BOMB Ⅲ series of bias power supply principle diagram
Refer to figure **3.1 BOMB Ⅲseries bias power supply principle diagram
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1 Main Circuit
1.1
Input three-phase alternating current (ac) by the three-phase bridge rectifier (D1)
filter (C1 and C2), after converting Direct current, voltage adjustment tube (Q5)
and voltage stabilizing circuit through the high frequency filter capacitor (C3,
C4) output 0-500V adjustable regulated dc power supply
1.2 Direct current is converted to high frequency alternate current supply by bridge
invert circuit (Q1-Q4) and coupled to voltage switching path (KL-LM-KH) by
high frequency transformer, at last the direct pulse current voltage will be
output by high frequency rectification D3 .
1.3 The power output of electricity through the current sensor after sampling as
sampling signal input control circuit(HPZK3)
1.4 Buffering absorption line and overcurrent and overvoltage protective circuit is
set in the circuit, which aims to protect the power supply can work in a reliable
way.
2 Control Circuit
2.1 Control circuit will make a judgment about the mode of operation automatically
according to the sampled signal. If spark appears in coating process, the circuit
will cut off the output voltage immediately.
2.2
If the working current rises to the maximum set value, another back up
protective circuit begins to work and cut off the power supply.
2.3 Both of time delay mode and flexible rising mode are adopted for the resuming
of the output voltage that is the voltage value will rise in a rising rate regularly
to the set value after the power is cut off and the delayed for some time.
For details, please see diagram 3.2
3 Voltage Regulating Modes
A preregulator is adopted for power supply regulating, that is the output voltage is
regulated by regulating the input voltage at the regulating switch. The voltage
regulation system enjoys automatic voltage stabilizing function and it is used to
compensate power network and load change.
-5-
4 Adjustment Modes for Duty Ratio
Pulse duty ratio adjustment is realized by changing the pulse width in unit time.
5 **Connecting with Computer
Refer to figure** 3.1 BOMB Ⅲ series bias power supply principle diagram
5.1
ZLAV is voltage and current detection circuit board , The power supply output voltage after
the ZLAV plate V.I N treatment, 0 to 5 v voltage analog is outputed.
LEM. A3 for the
output current sensor , and it will output a 0－5V voltage analog quantity after being
processed by ZLAV .Analog voltage and current is divided into two road. One are Drive the
voltmeter and ammeter , another input APVS isolation treatment, the analog output port
EXTERNAL CONTRO output 1, 2 feet, Pulse signal is produced by PWM50JK board,
After APVS plate isolation treatment by the analog output port EXTERNAL CONTRO 3
foot 0 to 5 v analog pulse .
5.2
Outside of a given (APVS)voltage setting: 0 to 5 v, (PWM)pulse through the adjustment of 0
to 5 v analog input port EXTERNAL input APVS CONTRO board 4, 5 feet, isolation,
respectively, after separation by B/S - C input suppression ZLTY, used to adjust the output
voltage, the BOMB1 input PWM50JK is used to adjust the pulse width
5.3
Analog input port EXTERNAL CONTRO - 6 and 7 respectively corresponding to the power
supply output voltage is low, the setting in the end.when 6, 7 terminal are respectively
5-10V high voltage power supply, respectively, in the output low voltage grade two, when 6,
7 terminal 0V power output will be the highest voltage grade
5.4
When the analog input port EXTERNAL CONTRO-9 is on 5-10V high voltage, power
supply will be opened and converted to external control state
5.5
Analog input port EXTERNAL CONTRO - 10 for auxiliary high potential, EXTERNAL
CONTRO - 11 for a total of location, EXTERNAL CONTRO - 12 for signal cable shielding
layer
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IV Installation and Use
1 Installation
Refer to the diagram in figure 4.1
1.1 With high insulated wires, POWER OUT black terminals and coating machine equipment
biasing input connection reliably, With high insulated wires, will take iron mark red
terminals connected to the equipment enclosure
The conductor with a soft copper wire ，Withstand voltage ≥2000V(AC)
Cross-sectional area： (＜20KW) —16mm²，(25-30KW)—35 mm²，(40-60KW)—50mm²
80KW—75mm²，100KW—95mm²，120KW—120mm² .The output wire of this power
supply shall be completely occluded and the positive pole (grounding wire) shall
be connected to the nearest point of the bias power input end
1.2 Among the rubber electric cables of power supply A B C shall be connected(phase
sequence is not distinguished) with the three－phrase livewire of the power network，
N（the thinner black or greenyellow wire）is connected to the zero line of the power
network.
Attention! The zero line can not be wrong then the fire line,otherwise
cause the power supply damage
1.3 The safe grounding position of the power supply shall be connected to the ground
and the grounding resistances will be≤10Ω.
Attention! As this grounding end owns double functions of safe
grounding and working grounding, it is must be handled properly!
1.4 According to figure** 3.1 BOMB Ⅲseries bias power supply principle diagram Figure
in the EXTERNAL CONTRO aviation receptacle pin definition leads to control wire. Wire
with 12 line screen magnetic lines, EXTERNAL CONTRO 12 feet shielding layer and the
EXTERNAL control circuit of analog ground connection
1.5 *Installed electromagnetic valve of flooding water side and connecting line (the valve for
options)
-7-
1.6 *WATER IN is Cooling WATER inlet ,and With clean water or deionized water source
connection ,WATER OUT is Cooling WATER outlet , With the cooling water return
connection. Inlet water temperature of 20-30 ℃, the pressure of 0.15 + / - 0.05 Mp
1.7 Power back to contact with ON/OFF, with 220V high voltage, please pay
attention to safety!
2 Use
2.1
See figure 4.2
Argon ion Bombardment（This function is only available for high voltage power supply）
The coating room shall be filled with argon according to the process value and turn on
the switch. Turn the voltage selecting switch to HIGH and turn the knob VOLTAGE
to process value, then glow will be produced in the vacuum room. Usually it will take
ten minutes finish this procedure and the knob PWM will be turned to the maximum
value at this moment.
2.2
Arc Bombardment
Turn the voltage selecting switch to the middle position (it shall be turned to HIGH
position for low voltage type) and turn the knob VOLTAGE to the process value. Several
arc sources (two to three in normal) shall be arcing according to the period. Close the
fires arc source as the first period is finished and the arcing the next period of arc source. It
will take 30 seconds to one minute for one period normally. The knob PWM can be turned
to the proper position according to temperature of the working piece. The temperature of
the working piece will rise more rapidly as the duty ratio value is larger.
2.3
Coating
The voltage shall be turned to LOW position and all the other arc source shall be opened
when the main arc bombardment is in the last period. Turn the knob VOLTAGE to the
proper position according to the process value and turn off the power supply as finishing
coating.
2.4
Display
CURRENT on the operation panel displays the supply current value, VOLTAGE
displays average voltage and PEAK VALUE displays the peak point of pulse voltage.
2.5
Operating Adjustment
For details, please see diagram 4.3
-8-
If the voltage can not be added or the voltage disappears gradually as arc ignition is too fast during
operation, it indicates that arcextinguishing has a high sensitivity; if arc injury exists frequently,
it means that arcextinguishing gets a low sensitivity.
It can be adjusted in accordance with the diagram 4.3. For the control panel can not
be over one small scale of the Potentiometer scale.
Attention ! The adjustment should be operated in 10 minutes after
the power is cut off. This is to prevent electric shock caused by the in
ner energy storage components or damaging the power supply by tou
ching with the body.
Attention ! The potentiometer without set values can not be adjusted
otherwise the power supply can not work smoothly or damage.
V Cautions for Using
1. The Environmental humidity for power supply operation can not over 90% (RH).The
temperature 5-40℃ and corrosive gas shall not exit in the surrounding areas . Never
expose to direct sunshine.
2. No blocks should exit at the air vent set in sideways and top when it is stored, otherwise inner
heat dissipating will be affected.
3. If it is drenched by water with carelessness, the shell must be opened and it can only
be used after drying by sun exposure or electric drier.
4
Clean the dust of the machine regularly according to the using conditions.
5
* Flow and temperature of cooling water shall be checked at times.
6. Be sure to check the power insulation performance state
7. You can consult our institution for other related information or search the website
http://www.bovceed.com
8. As the product updates, instruction content or adjustment of technical parameters are change
without prior notice.Everything in kind prevail
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VI Treatment for Common Problems
Phenomenon
Treatment Method
Power indicator is not lighted ,
Confirm the power cord connected properly,
The power supply cannot be started
check whether the reserve power supply circuit
breaker is opened
With voltage but without current
To check if the connection between power
supply output line and main part (ground
wire) of the equipment as well as the bias
input line is correct and reliable.
With current but nearly without
To check if the power output line is
voltage
connected reversely.
Irregular swing of current and voltage
The power supply got a high protective
and no sign of improving as
sensitivity. Please adjust according to the
time passes.
instructions in IV-2.5 of this paper.
Arc injury during operation
The power supply got a low protective
sensitivity. Please adjust according to the
instructions in IV-2.5 of this paper.
Intermittent swing of current and
Over load of supply. Please turn the set
voltage during operation
value properly.
Extreme low value of voltage and
Short-circuit discharge by power supply to
small current during operation
ground. To check if there is short circuit
existing to the ground by insulation parts
or work piece
*Disappearance of voltage and current
To check if the cooling water way is
during operation
blocked.
* Hand －motion is normal but the
To check if the connection between the
external control is abnormal
controls line J1 and industrial control
machine is correct.
VII Accessories for the Product
One set of BOMB Ⅲ-series Power Supply
One copy of Instruction for Use
One copy of Product Qualification Certification
- 10 -
One copy of Product Warranty
Note: The contents may change as the products upgrades.
* Only for Cooling Water Type
** Only for Computer Control type
Note: The contents may change as the products upgrades.
- 11 -
- 12 -
- 13 -
- 14 -
supply
power
the
of
panel
rear
The
4.1
Figure
AC380V/3#+1/50-60HZ
X
U
A
OUT
POWER
B/+
RS-485
RS-232
ANALOG
A/-
ON/OFF
supply
power
the
of
panel
rear
The
4.1
*Figure
AC380V/3#+1/50-60HZ
X
U
A
IN
WATER
OUT
POWER
B/+
RS-485
RS-232
ANALOG
OUT
WATER
A/-
ON/OFF
supply
power
the
of
panel
front
The
4.2
Figure
PWM
t
e
s
n
o
arc
L
M
H
grade
width[%]
pulse
voltage
current
off
SERIES
III
BOMB
- 15 -
adjustment
sensitivity
arc
Extinguishing
4.3
Figure
L
E
N
A
P
L
O
R
T
N
O
C
HPZKN
potentiometer
the
of
rest
the
all
adjusting
NO
2
W
1
W
clockwise
them
turning
by
extinction
arc
of
sensitivity
the
Drop
- 16 -
OUT"
WATER
IN
WATER
"
equip
supply
power
water-cooled
*NOTE:Only
supply
power
the
of
panel
rear
The
4.1
Figure
AC380V/3#+1/50-60HZ
OUT
WATER
IN
WATER
+
OUT
POWER
-
COMMAND
EXTERNAL
ON/OFF
RS-485
RS-232
ANALOG
SWITCH
- 17 -
- 18 -
- 19 -