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BOMB Ⅲ-series Bias Power Supply Operation Manual Tangshan Biaoxian Electronic co., LTD EDITION 2014 Attention! Please operate with caution as there is a high output voltage! Any incorrect operation may have life risk Please read this manual carefully in the "warning" operation, to avoid accidents In order to better use of power, please put the manual on the power supply Statement: the company may have on the performance, structure, function, appearance of the product, accessories, packaging and instruction manual for perfect and improve, without prior notice! Such as to cause confusion, please contact with the company Directory I. Use and Main Technical Specifications of the Bias Power Supply II. Structure III. Working principle IV. Installation and Use V. The matters needing attention VI. General issues to deal with VII. One set of BOMB Ⅲ-series Power Supply -1- Attention! Please operate with caution as there is a high output voltage! Ⅰ.Use and Main Technical Specifications of the Bias Power Supply 1.use As one of an important parts of vacuum arc ion plating and other vacuum .BOMB Ⅲ series of power supply is operated at high physical vapor deposition equipment, it provides a negative (or positive) bias for artifacts in the coating process . Function as follows: 1) Improve the vacuum plasma body charged particle energy, bombardment cleaning the surface of the workpiece which is plated , to make the surface of the workpiece through a high-energy particle collision, so as to get a new surface, To improve the adhesion strength of the subsequent deposited film layer 2) Improve and control the vacuum plasma body charged particles of energy, improve the membrane layer and substrate 3) Rely on the different way of voltage output polarity or change the sedimentary rules, adjust the color of the film 4) Overcoming the bias power supply working in vacuum plasma environment, caused by high voltage cathode arc discharge burn artifact BOMB III-series power supply is operated at high frequency and with a single polar pulse. The width of voltage and pulse is adjusted respectively. Low-temperature depo sition process of ion plating is conveniently realized by continuously regulating the voltage from zero to the maximum value in the same grade while the duty ratio is also continuously adjusted from 10% to 90%. This feature can make power in the output of high voltage by adjusting the pulse width to control the workpiece after get the bombardment energy, to control unnecessary workpiece temperature rise, so as to realize the high pressure and low temperature deposition of ion plating process. BOMB III series power supply enjoys the voltage stability system, so voltage fluctuation caused by power net work or load change can be adjusted automatically. The controlling feature of power supply makes it can be used in a more widely -2- equipment environment. 2. Main Technical Specifications 2.1 Output Power Grade 3-120kw 2.2 Input Power Supply Three Phase Four Wire 380V±10% 50-60Hz 2.3 Output Voltage 0-180V 0-500V 0-1000V (Pulse value) 2.4 Whole Efficiency ≥85% 2.5 Arc-extinguishing Speed 3μS 2.6 Environmental Temperature Environmental Humidity 2.7 *Cooling Water 0℃-+40 ℃ ≤85% Temperature20-40℃,Pressure 0.15±0.05Mp 2.8** External control 2.8.1 Voltage control signal 0-5V correspond 0-180V 0-5V correspond 0-500V 0-5V correspond 0-1000V 2.8.2 Pulse Control Signal 0-5V 2.8.3 Current Display Signal 0-5V display 0- maximum current 2.8.4 Pulse Display Signal 0-5V display 0-100% 2.8.5 Voltage Display Signal 0-5V display 0-1000V 2.8.6 Setting signal When L for high potential, low voltage output, When M for high potential, medium voltage output When L and M are low potential, high voltage output 2.8.7Power-on Signal FOR EXTERNAL CONTRO : P9 and p10 connecting together, the power to start II Structure Refer to figure 2.1 BOMBⅢ series of bias power structure diagram Refer to figure** 3.1 BOMBⅢ series bias power supply principl diagram Refer figure 3.1 BOMBⅢ series of bias power supply principle diagram -3- 1. Input Parts Consists of circuit breaker CB1 ,Soft start contactor K1 , Main contactor K2 2.Rectifier- Filter and Soft start resistance R1-R3 Consists of Three-phase rectifier module D1 and Filter capacitor C1 C2 and Discharge resistance R4 R5 3. Voltage Stability System Consists of switch regulator Q5 , Fly-wheel diode D2 , Regulating control circuit board ZLTY , Regulating driver circuit board ZPQD , Output Filter capacitor C3 C4, Discharge resistance R5 R6 . 4.High frequency conversion isolation High frequency conversion is consists of Switch module Q1-Q4 , driver circuit board HPFQD and Control circuit board HPZK3 , Isolation is by the Many winding high-frequency Transformer Completed . 5. Output Voltage Switching Consists of KL,KM and KH 6.High-frequency Rectification Consists of D2 and In the absorbing circuit beside 7. Current and Voltage Checking Consists of LEM.A2 , LEM.A3 and Voltage detection circuit board ZLAV . 8** Computer Connecting 8.1 Signal acquisition circuit board ZLAV 8.2 Internal and External Conversion and Analog signal output circuit board APVS III Working Principle Refer figure 3.1 BOMB Ⅲ series of bias power supply principle diagram Refer to figure **3.1 BOMB Ⅲseries bias power supply principle diagram -4- 1 Main Circuit 1.1 Input three-phase alternating current (ac) by the three-phase bridge rectifier (D1) filter (C1 and C2), after converting Direct current, voltage adjustment tube (Q5) and voltage stabilizing circuit through the high frequency filter capacitor (C3, C4) output 0-500V adjustable regulated dc power supply 1.2 Direct current is converted to high frequency alternate current supply by bridge invert circuit (Q1-Q4) and coupled to voltage switching path (KL-LM-KH) by high frequency transformer, at last the direct pulse current voltage will be output by high frequency rectification D3 . 1.3 The power output of electricity through the current sensor after sampling as sampling signal input control circuit(HPZK3) 1.4 Buffering absorption line and overcurrent and overvoltage protective circuit is set in the circuit, which aims to protect the power supply can work in a reliable way. 2 Control Circuit 2.1 Control circuit will make a judgment about the mode of operation automatically according to the sampled signal. If spark appears in coating process, the circuit will cut off the output voltage immediately. 2.2 If the working current rises to the maximum set value, another back up protective circuit begins to work and cut off the power supply. 2.3 Both of time delay mode and flexible rising mode are adopted for the resuming of the output voltage that is the voltage value will rise in a rising rate regularly to the set value after the power is cut off and the delayed for some time. For details, please see diagram 3.2 3 Voltage Regulating Modes A preregulator is adopted for power supply regulating, that is the output voltage is regulated by regulating the input voltage at the regulating switch. The voltage regulation system enjoys automatic voltage stabilizing function and it is used to compensate power network and load change. -5- 4 Adjustment Modes for Duty Ratio Pulse duty ratio adjustment is realized by changing the pulse width in unit time. 5 **Connecting with Computer Refer to figure** 3.1 BOMB Ⅲ series bias power supply principle diagram 5.1 ZLAV is voltage and current detection circuit board , The power supply output voltage after the ZLAV plate V.I N treatment, 0 to 5 v voltage analog is outputed. LEM. A3 for the output current sensor , and it will output a 0-5V voltage analog quantity after being processed by ZLAV .Analog voltage and current is divided into two road. One are Drive the voltmeter and ammeter , another input APVS isolation treatment, the analog output port EXTERNAL CONTRO output 1, 2 feet, Pulse signal is produced by PWM50JK board, After APVS plate isolation treatment by the analog output port EXTERNAL CONTRO 3 foot 0 to 5 v analog pulse . 5.2 Outside of a given (APVS)voltage setting: 0 to 5 v, (PWM)pulse through the adjustment of 0 to 5 v analog input port EXTERNAL input APVS CONTRO board 4, 5 feet, isolation, respectively, after separation by B/S - C input suppression ZLTY, used to adjust the output voltage, the BOMB1 input PWM50JK is used to adjust the pulse width 5.3 Analog input port EXTERNAL CONTRO - 6 and 7 respectively corresponding to the power supply output voltage is low, the setting in the end.when 6, 7 terminal are respectively 5-10V high voltage power supply, respectively, in the output low voltage grade two, when 6, 7 terminal 0V power output will be the highest voltage grade 5.4 When the analog input port EXTERNAL CONTRO-9 is on 5-10V high voltage, power supply will be opened and converted to external control state 5.5 Analog input port EXTERNAL CONTRO - 10 for auxiliary high potential, EXTERNAL CONTRO - 11 for a total of location, EXTERNAL CONTRO - 12 for signal cable shielding layer -6- IV Installation and Use 1 Installation Refer to the diagram in figure 4.1 1.1 With high insulated wires, POWER OUT black terminals and coating machine equipment biasing input connection reliably, With high insulated wires, will take iron mark red terminals connected to the equipment enclosure The conductor with a soft copper wire ,Withstand voltage ≥2000V(AC) Cross-sectional area: (<20KW) —16mm²,(25-30KW)—35 mm²,(40-60KW)—50mm² 80KW—75mm²,100KW—95mm²,120KW—120mm² .The output wire of this power supply shall be completely occluded and the positive pole (grounding wire) shall be connected to the nearest point of the bias power input end 1.2 Among the rubber electric cables of power supply A B C shall be connected(phase sequence is not distinguished) with the three-phrase livewire of the power network, N(the thinner black or greenyellow wire)is connected to the zero line of the power network. Attention! The zero line can not be wrong then the fire line,otherwise cause the power supply damage 1.3 The safe grounding position of the power supply shall be connected to the ground and the grounding resistances will be≤10Ω. Attention! As this grounding end owns double functions of safe grounding and working grounding, it is must be handled properly! 1.4 According to figure** 3.1 BOMB Ⅲseries bias power supply principle diagram Figure in the EXTERNAL CONTRO aviation receptacle pin definition leads to control wire. Wire with 12 line screen magnetic lines, EXTERNAL CONTRO 12 feet shielding layer and the EXTERNAL control circuit of analog ground connection 1.5 *Installed electromagnetic valve of flooding water side and connecting line (the valve for options) -7- 1.6 *WATER IN is Cooling WATER inlet ,and With clean water or deionized water source connection ,WATER OUT is Cooling WATER outlet , With the cooling water return connection. Inlet water temperature of 20-30 ℃, the pressure of 0.15 + / - 0.05 Mp 1.7 Power back to contact with ON/OFF, with 220V high voltage, please pay attention to safety! 2 Use 2.1 See figure 4.2 Argon ion Bombardment(This function is only available for high voltage power supply) The coating room shall be filled with argon according to the process value and turn on the switch. Turn the voltage selecting switch to HIGH and turn the knob VOLTAGE to process value, then glow will be produced in the vacuum room. Usually it will take ten minutes finish this procedure and the knob PWM will be turned to the maximum value at this moment. 2.2 Arc Bombardment Turn the voltage selecting switch to the middle position (it shall be turned to HIGH position for low voltage type) and turn the knob VOLTAGE to the process value. Several arc sources (two to three in normal) shall be arcing according to the period. Close the fires arc source as the first period is finished and the arcing the next period of arc source. It will take 30 seconds to one minute for one period normally. The knob PWM can be turned to the proper position according to temperature of the working piece. The temperature of the working piece will rise more rapidly as the duty ratio value is larger. 2.3 Coating The voltage shall be turned to LOW position and all the other arc source shall be opened when the main arc bombardment is in the last period. Turn the knob VOLTAGE to the proper position according to the process value and turn off the power supply as finishing coating. 2.4 Display CURRENT on the operation panel displays the supply current value, VOLTAGE displays average voltage and PEAK VALUE displays the peak point of pulse voltage. 2.5 Operating Adjustment For details, please see diagram 4.3 -8- If the voltage can not be added or the voltage disappears gradually as arc ignition is too fast during operation, it indicates that arcextinguishing has a high sensitivity; if arc injury exists frequently, it means that arcextinguishing gets a low sensitivity. It can be adjusted in accordance with the diagram 4.3. For the control panel can not be over one small scale of the Potentiometer scale. Attention ! The adjustment should be operated in 10 minutes after the power is cut off. This is to prevent electric shock caused by the in ner energy storage components or damaging the power supply by tou ching with the body. Attention ! The potentiometer without set values can not be adjusted otherwise the power supply can not work smoothly or damage. V Cautions for Using 1. The Environmental humidity for power supply operation can not over 90% (RH).The temperature 5-40℃ and corrosive gas shall not exit in the surrounding areas . Never expose to direct sunshine. 2. No blocks should exit at the air vent set in sideways and top when it is stored, otherwise inner heat dissipating will be affected. 3. If it is drenched by water with carelessness, the shell must be opened and it can only be used after drying by sun exposure or electric drier. 4 Clean the dust of the machine regularly according to the using conditions. 5 * Flow and temperature of cooling water shall be checked at times. 6. Be sure to check the power insulation performance state 7. You can consult our institution for other related information or search the website http://www.bovceed.com 8. As the product updates, instruction content or adjustment of technical parameters are change without prior notice.Everything in kind prevail -9- VI Treatment for Common Problems Phenomenon Treatment Method Power indicator is not lighted , Confirm the power cord connected properly, The power supply cannot be started check whether the reserve power supply circuit breaker is opened With voltage but without current To check if the connection between power supply output line and main part (ground wire) of the equipment as well as the bias input line is correct and reliable. With current but nearly without To check if the power output line is voltage connected reversely. Irregular swing of current and voltage The power supply got a high protective and no sign of improving as sensitivity. Please adjust according to the time passes. instructions in IV-2.5 of this paper. Arc injury during operation The power supply got a low protective sensitivity. Please adjust according to the instructions in IV-2.5 of this paper. Intermittent swing of current and Over load of supply. Please turn the set voltage during operation value properly. Extreme low value of voltage and Short-circuit discharge by power supply to small current during operation ground. To check if there is short circuit existing to the ground by insulation parts or work piece *Disappearance of voltage and current To check if the cooling water way is during operation blocked. * Hand -motion is normal but the To check if the connection between the external control is abnormal controls line J1 and industrial control machine is correct. VII Accessories for the Product One set of BOMB Ⅲ-series Power Supply One copy of Instruction for Use One copy of Product Qualification Certification - 10 - One copy of Product Warranty Note: The contents may change as the products upgrades. * Only for Cooling Water Type ** Only for Computer Control type Note: The contents may change as the products upgrades. - 11 - - 12 - - 13 - - 14 - supply power the of panel rear The 4.1 Figure AC380V/3#+1/50-60HZ X U A OUT POWER B/+ RS-485 RS-232 ANALOG A/- ON/OFF supply power the of panel rear The 4.1 *Figure AC380V/3#+1/50-60HZ X U A IN WATER OUT POWER B/+ RS-485 RS-232 ANALOG OUT WATER A/- ON/OFF supply power the of panel front The 4.2 Figure PWM t e s n o arc L M H grade width[%] pulse voltage current off SERIES III BOMB - 15 - adjustment sensitivity arc Extinguishing 4.3 Figure L E N A P L O R T N O C HPZKN potentiometer the of rest the all adjusting NO 2 W 1 W clockwise them turning by extinction arc of sensitivity the Drop - 16 - OUT" WATER IN WATER " equip supply power water-cooled *NOTE:Only supply power the of panel rear The 4.1 Figure AC380V/3#+1/50-60HZ OUT WATER IN WATER + OUT POWER - COMMAND EXTERNAL ON/OFF RS-485 RS-232 ANALOG SWITCH - 17 - - 18 - - 19 -