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Transcript
High Voltage Power Supply
VAPTEC
LITEC
PLASMATEC
WELTEC
GLOWTEC
Electronics in highest voltage
High Voltage
Planning, developing and producing new technologies our know-how means complete solutions.
In the High Voltage (HV) division of J. Schneider Elektrotechnik GmbH high voltage and DC power supplies for
the high voltage and vacuum process equipment are designed and manufactured. Schneider DC power supplies
range in the output rating from 1kW - 120kW and output voltages from 150V up to 150kV.
J. Schneider built up its reputation as a competent supplier of high voltage power supplies for ion and electron
beam applications, x-ray, laser and high voltage plasma processes. The high reliability and robustness of the
products in a variety of customer application environments led to this reputation. Typical applications we serve in
the industrial and research markets include e-beam evaporation, e-beam welding, ion beam systems, capacitor
charge systems, glow discharge, x-ray supplies and sputter supplies.
Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected]
2
From a vision to the final product
At Schneider, technology is backed up by an innovative
development team. Our engineers and technicians respond to constant market observation at an early stage;
client's projects for the future are identified and jointly realised. This high degree of engineering potential reflects
our feeling for quality, so that we are open for tomorrow's
ideas and tasks.
New developments open new horizons
In order to survive in the global market, we constantly
and continually redefine our product range: together with
the customer and in close cooperation with technical institutes and universities, new products are developed and
produced.
Customized Solutions
We have made our web site easy to use in order to assist
you in finding the DC power supply to satisfy your requirements. If you are not finding a DC power supply
which meets your requirements, we would be pleased to
develop a customized solution for you.
Distribution and Service
Since development, production, distribution and service
lay at the company of J. Schneider Elektrotechnik GmbH
in one hand, a close teamwork in each stage of the
lifecycle is granted. Further developments are made
close to the market requirements, customer specified
modifications are realized in tight cooperation between
sales department and development department. Very
good product acknowledgement guarantees an optimised
service and maintenance.
Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected]
3
Product overview
CAPTEC
The primary switched high voltage power supplies of the series CAPTEC work according the resonance
converter principle with a frequency of 100kHz. Adverse to the normally used pulse width modulation in
which the regulation is realized by the variation of the power-on time, in this technique the regulation is
realized by the variation of the pause time during fixed power-on time. The generation of the high voltage
is effected in the CAPTEC series via converter cascades.
The CAPTEC series is specially designed for the requirements to charge condensers. Four different
charge powers with 500J/sec, 1500J/sec, 2500J/sec, 5000J/sec and nine different output voltages from
2kV up to 30kV are available.
GLOWTEC
The primary switched high voltage power supplies of the series GLOWTEC work according to the same
technology as the CAPTEC series. The GLOWTEC series is specially adapted for high voltage plasma
processes / glow processes. Options for the devices are an integrated interlock for the safe separation of
the power converter from the mains, a patented ARC-current limitation which limits current peaks to five
times the rated current as well as an ARC-counter.
The GLOWTEC series is available in the different output ratings of 1kW, 3kW, 5kW und 10kW as single
device with output voltages of 2kV, 3kV, 5kV, 8kV, 10kV, 15kV, 20kV, 25kV and 30kV. Parallel operation
to increase power and current capabilities is possible for 10kW models.
VAPTEC
The switch mode power supplies of the VAPTEC series are specially designed for electron-beam evaporation processes. This series includes the actual high voltage power supply NHRR which provides an output voltage of 8 – 10kV at an output power of 3, 5, 10kW as well as the necessary cathode-heat transformer NDRG and the XY-sweep amplifier RNTR.
Furthermore we recently developed a new device technology NHCR (current-fed-push-pull) with a digital
regulation. Recently a 2kW and 10kW version is available. At the 2kW supply the high voltage power
supply also includes the cathode heat transformer in one cabinet. The 2kW high voltage power supply delivers an output voltage of 8kV and the 10kW a output voltage of 10kV. The integrated cathode transformer of the 2kW version provides a heat current of 26A at an output voltage of 8V DC.
Because at the most evaporation processes an ion-source is used to accelerate the electrons, the necessary ion supply NDOR was be developed in the VAPTEC series.
LITEC
The primary switched high voltage power supplies of the series LITEC are specially developed for the requirement of linear ion-sources which work according the anode layer principle. The LITEC products are
available with two different output voltages of 3kV or 5kV and output ratings of 6kW, 12kW and 24KW.
The LITEC series is extremely compact because it is water cooled.
PLASMATEC
The power supplies of the PLASMATEC series are primary switched and specially developed for plasma
processes with 800 – 1000V. These power supplies are characterized by smallest output energy as well
as by a sophisticated arc management.
With these devices a DC voltage, and uni-polar pulsed or a bipolar pulsed operation is possible. Output
ratings of 8kW up to 72kW are available.
WELTEC
The power supplies of the WELTEC series are primary switched and specially developed for e-beam
welding and x-ray applications. They are water- / oil cooled and it is possible to integrate the necessary
auxiliary supply such as heat or wehnelt supply. They are available with output voltages of 40kV, 60kV up
to 150kV and with output ratings of 5kW, 10kW and 15KW.
Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected]
4
Product choice table
Voltage / Power
If you do not find a module in the table below which meets your requirements, we are ready to develop a customized solution for you. Therefore regard the below listed power supplies only as a basic device for a product, which
full fills your requirements. We would be pleased if you would send us your complete specification at [email protected] or fill out the quote request form at our web-page http://www.j-schneider.de/.
power
voltage
device series
type
6
13
V
150
V
180
V
300
V
600
V
800
V
1
kV
2
kV
3
kV
5
kV
6
kV
8
kV
10
kV
15
30
kV
40
60
kV
80
150
kV
page
NRSG
6
0,3 W
NDRR
1kW
CAPTEC
500J/s
to
5000J/s
GLOWTEC
1kW
to
70kW
LITEC
6kW
to
24kW
VAPTEC
1kW
to
70kW
VAPTEC
1kW
to
70kW
VAPTEC
400W
7
CAPTEC
8
GLOWTEC
9
LITEC
10
NHRR
12
NHCR
13
NDRG
Type: NDRG-L031M01
Ue: 2 x400V AC +/-10%
50/60Hz
Ua: 6V DC Pa: 360W Ia: 60°
Kom. Nr. 607994 externe Absicherung: 5A
Seriennr.: 00751329
14
RNTR
15
VAPTEC
NDOR
VAPTEC
1080W/
1000W
VAPTEC
2kW
5kW
to
15kW
NHCG
WELTEC
10kW
to
15kW
NHRG
WELTEC
PLASMATEC
8kW
to
72kW
16
NHCR
17
20
21
NDCR
22
cable &
accessories
25
Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected]
5
NRSG 2–6kV
 COMPACT DESIGN
 CURRENT REGULATION
 OEM CUSTOMIZATION AVAILABLE
The NRSG power supplies are primary switched DC/DCconverters with an input voltage of 24V DC. The 24V input voltage is fed to a single frequency square wave generator. The square wave is then transformed upwards,
rectified and filtered and provides the precise output voltage. The output is controlled by means of pulse-width
modulation of the square wave. The output voltage is related to 0V (negative connection) of the input voltage. All
versions are continuously short circuit proof and can operate in current and voltage source mode. The output
voltage and current are set by using the 0 - 10V analogue
interface or by an external potentiometer, by using the
available reference voltage. For acknowledgement of the
actual voltage and current, a 0 - 10V output is provided. A
failure message is also generated if a specific current limit is exceeded. This specific current limit can also be adjusted by a 0 - 10V external control voltage. To detect
short over-current impulses the failure message will be
extended about 5 ms.
T Y PIC AL AP P LI C AT I O N S
Photo-multiplier
Test applications
An a log ue I /O - int erf a c e:
Output voltage and current are continuously adjustable over 0 - 10 V analogue inputs. The output voltage and output current is given out by a 0
- 10V analogue output.
Vo lta ge R eg ul ati on:
Load dependent: 0,05% at 100 % load step
input voltage dependent: ± 0,05% within defined
input voltage range
Cu rr ent R egu l atio n:
Load dependent: 0,05% at nominal current at
each voltage jump
input voltage dependent: ± 0,05% within defined
input voltage range
Re si du al r ipp le :
≤ 0,1% pp. related to nominal voltage
≤ 0,5% pp. related to nominal current
Pow e r con ne ct ion s:
AC input
DC output
combicon connector
HV connector
Dim en s ion s ( H x W x D):
130 x 159 x 300 mm
CE M ar k:
EN 50081 part 1/03-93
EN 55022 class B
EN 50082 part 2/03-93
EN 61000 part 4 / inspection severity: 2
EN 60801-2
EN 60950
O PT IO N S
Other output voltages
S P EC IF IC AT IO N
Input:
24VDC 10%
S EL E CT IO N T AB L E
O utput:
3 models with output voltages of 2kV, 3kV and 6kV
are available. Each model is available with positive
or negative polarity.
MAXIMUME RATING
kV DC
mA
W
2
0,1
0,2
3
0,1
0,3
3
1
3
6
0,1
0,6
MODUL NUMBER
NRSG 20001
NRSG 30001
NRSG 30010
NRSG 60001
Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected]
6
NDRR 150–600V / 1kW
 COMPACT DESIGN
 CURRENT REGULATION
 OEM CUSTOMIZATION AVAILABLE
NDRR switch mode power supplies are available in 3
models with voltage outputs ranging from 150V to 600V.
The NDRR series is specially designed for extremely
harsh conditions.
Cu rr ent R egu l atio n:
Load: 0,3% of full current for any voltage change.
Line: : ± 0,1% of full current over specified input
range.
T Y PIC AL AP P LI C AT I O N S
Re si du al r ipp le :
≤ 1% rms. related to nominal voltage
Pow e r con ne ct ion s:
AC Input connector power combicon connector
DC output connector power combicon connector
O PT IO N S
Dim en s ion (H x W x D) :
3U x 19” x 310mm
Constant power regulation
Constant voltage regulation
Manual programming on front panel
Digital display
CE M ar k:
EN50178
EN50081-2
EN50082-2
S P EC IF IC AT IO N
Input:
400Vac 10%, 50 or 60Hz, three phase
O utput:
3 models from 150V to 600V are available. Each
model is available with positive or negative polarity.
O utput Co ntr ol s:
Current is continuously adjustable over 0 –10 V analogue inputs. Optionally voltage or power regulation
and control is possible over analogue input.
S EL E CT IO N T AB L E
Vo lta ge R eg ul at i on:
Load: 0,3% of full voltage for full load change.
Line: ± 0,1% of full voltage over specified input
range
MAXIMUM RATING
V DC
A
150
7
300
3,5
600
1,7
MODUL NUMBER
NDRR 150007
NDRR 3003k5
NDRR 6001k7
Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected]
7
CAPTEC 2 - 30kV / 500- 5000J/sec
The primary switched high voltage power supplies CAPTEC are specially designed for the requirements to charge
condensers. Four different charge powers with 500J/sec, 1500J/sec, 2500J/sec, 5000J/sec and nine different output voltages from 2kV up to 30kV are available. The charge voltage as well as the charge current can be independently adjusted. The actual value is issued at the analogue interface. By enabling the charge process, the voltage mounts linear up to the desired voltage value. If the desired value of the voltage is reached, the power supply
switches automatically over from current regulation to voltage regulation and you get the status message HV-OK
from the digital interface. The voltage at the condenser is kept constant.
For the CAPTEC series a manual programming and digital LCD displays on the front panel is available. Each model is available with positive or negative polarity.
S P EC IF IC AT IO N
S EL E CT IO N T AB L E
Input:
400Vac 10%, 50 or 60Hz, three phase
O utput:
36 models from 2kV up to 30kV with a charge power
of 500J/sec to 5000J/sec. Every model is available
with positive or negative polarity.
An a log ue I /O - Int erf a c e:
Voltage and current are continuously adjustable over
0 – 10 V analogue inputs. Optionally power regulation and control is possible over an analogue input.
Vo lta ge R eg ul at i on:
Load: 0,01% of full voltage for full load change.
Line: ± 0,01% of full voltage over specified input
range
Cu rr ent R egu l at io n:
Load: 0,1% of full current for any voltage change.
Line: : ± 0,1% of full current over specified input
range.
Re si du al r ipp le :
≤ 1% rms. related to nominal voltage
Pow e r con ne ct ion s:
AC input
terminal connector
HV output
Lemo connector with 10m
shielded HV cable
Dim en s ion (H x W x D) :
3HE x 19” x 580mm, 2kV - 10kV to 1500J/sec
6HE x 19” x 680mm, 15kV - 30kV to 1500J/sec
9HE x 19” x 550mm, 2kV - 10kV to 5000J/sec
9HE x 19” x 710mm, 15kV - 30kV to 5000J/sec
CE M ar k:
EN55011/03.91 (limit value class A)
EN50082-2/03.95
MAXIMUM RATING
kV DC
mA
J / sec
2
500
500
2
1500
1500
2
2500
2500
2
5000
5000
MODUL NUMBER
CAPTEC 002500
CAPTEC 0021k5
CAPTEC 0022k5
CAPTEC 0025k0
3
3
3
3
333
1000
1666
3333
500
1500
2500
5000
CAPTEC 003333
CAPTEC 0031k0
CAPTEC 0031k6
CAPTEC 0033k3
5
5
5
5
200
600
1000
2000
500
1500
2500
5000
CAPTEC 005200
CAPTEC 005600
CAPTEC 0051k0
CAPTEC 0052k0
8
8
8
8
125
375
625
1250
500
1500
2500
5000
CAPTEC 008125
CAPTEC 008375
CAPTEC 008625
CAPTEC 0081k2
10
10
10
10
100
300
500
1000
500
1500
2500
5000
CAPTEC 010100
CAPTEC 010300
CAPTEC 010500
CAPTEC 0101k0
15
15
15
15
66
200
333
666
500
1500
2500
5000
CAPTEC 015066
CAPTEC 015200
CAPTEC 015333
CAPTEC 015666
20
20
20
20
50
150
250
500
500
1500
2500
5000
CAPTEC 020050
CAPTEC 020150
CAPTEC 020250
CAPTEC 020500
25
25
25
25
40
120
200
400
500
1500
2500
5000
CAPTEC 025040
CAPTEC 025120
CAPTEC 025200
CAPTEC 025400
30
30
30
30
33
100
166
333
500
1500
2500
5000
CAPTEC 030033
CAPTEC 030100
CAPTEC 030166
CAPTEC 030333
Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected]
8
GLOWTEC 2 – 30kV / 1 – 70kW
The primary switched high voltage power supplies of the series GLOWTEC work according the same
technology as the CAPTEC series. The GLOWTEC series is specially adapted for high voltage plasma
processes / glow processes. Optionally the devices can be delivered with an integrated interlock for safe
separation of the power converter from the mains, a patented ARC-current limitation which limits current
peaks to five times of the rated current as well as an ARC-counter.
The GLOWTEC series is available with different output ratings of 1kW, 3kW, 5kW and 10kW as single device with output voltages of 2kV, 3kV, 5kV, 8kV, 10kV, 15kV, 20kV, 25kV and 30kV. Parallel operation to
increase power and current capabilities is possible for 10kW models.
.
S P EC IF IC AT IO N
S EL E CT IO N T AB L E
Input:
400Vac 10%, 50 or 60Hz, three phase
O utput:
36 models from 2kV up to 30kV. Each model is
available with positive or with negative polarity. Output voltages up to 10kV are available with reversible
polarity referring to earth.
An a log ue I /O - Int erf a c e:
Voltage and current are continuously adjustable over
0 – 10 V analogue inputs. Optionally power regulation and control is possible over analogue input.
Vo lta ge R eg ul at i on:
Load: 0,01% of full voltage for full load change.
Line: ± 0,01% of full voltage over specified input
range
Cu rr ent R egu l at io n:
Load: 0,1% of full current for any voltage change.
Line: : ± 0,1% of full current over specified input
range.
Re si du al r ipp le :
≤ 1% rms. related to nominal voltage
P ate nte d Ar c - Cu rr ent li mit at ion:
Limits the output current peaks to five times of the
rated current.
Pow e r con ne ct ion s:
AC input
terminal connector
HV output
HV connector with 10m
shielded HV cable
Dim en s ion (H x W x D) :
3HE x 19” x 580mm, 2kV - 10kV to 3kW
6HE x 19” x 680mm, 15kV - 30kV to 3kw
9HE x 19” x 550mm, 2kV - 10kV to 10kW
9HE x 19” x 665mm, 15kV - 30kV to 10kW
CE M ar k:
EN55011/03.91 (limit value class A)
EN50082-2/03.95
MAXIMUM RATING
kV DC
mA
kW
2
500
1
2
1500
3
2
2500
5
2
5000
10
MODUL NUMBER
GLOWTEC 002500
GLOWTEC 0021k5
GLOWTEC 0022k5
GLOWTEC 0025k0
3
3
3
3
333
1000
1666
3333
1
3
5
10
GLOWTEC 003333
GLOWTEC 0031k0
GLOWTEC 0031k6
GLOWTEC 0033k3
5
5
5
5
200
600
1000
2000
1
3
5
10
GLOWTEC 005200
GLOWTEC 005600
GLOWTEC 0051k0
GLOWTEC 0052k0
8
8
8
8
125
375
625
1250
1
3
5
10
GLOWTEC 008125
GLOWTEC 008375
GLOWTEC 008625
GLOWTEC 0081k2
10
10
10
10
100
300
500
1000
1
3
5
10
GLOWTEC 010100
GLOWTEC 010300
GLOWTEC 010500
GLOWTEC 0101k0
15
15
15
15
66
200
333
666
1
3
5
10
GLOWTEC 015066
GLOWTEC 015200
GLOWTEC 015333
GLOWTEC 015666
20
20
20
20
50
150
250
500
1
3
5
10
GLOWTEC 020050
GLOWTEC 020150
GLOWTEC 020250
GLOWTEC 020500
25
25
25
25
40
120
200
400
1
3
5
10
GLOWTEC 025040
GLOWTEC 025120
GLOWTEC 025200
GLOWTEC 025400
30
30
30
30
33
100
166
333
1
3
5
10
GLOWTEC 030033
GLOWTEC 030100
GLOWTEC 030166
GLOWTEC 030333
Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected]
9
LITEC 3 – 5kV / 6 – 24kW
 COMPACT DESIGN
 CONSTANT VOLTAGE / POWER OPERATION
WITH AUTOMATIC CROSSOVER
 WIDE OUTPUT POWER OPERATING RANGE
 EXTREM LOW ARC ENERGY
 OEM CUSTOMIZATION AVAILABLE
The water-cooled switch mode power supplies LITEC are
available with output voltages of 3kV and 5kV. The
LITEC power supply series provides 6kW or 12kW and is
specially designed for applications which need extreme
low arc energy and the full output power over a wide
range. Parallel operation to increase power and current
capabilities are available as option.
T Y PIC AL AP P LI C AT I O N S
Vo lta ge R eg ul ati on:
Load: 0,01% of full voltage for full load change.
Line: ± 0,01% of full voltage over specified input
range
Cu rr ent R egu l atio n:
Load: 0,1% of full current for any voltage change.
Line: : ± 0,1% of full current over specified input
range.
Re si du al r ipp le :
≤ 50% rms. related to nominal voltage smaller
ripples are possible depending on arc-energy.
Anode layer systems
Capacitor charging
High-Voltage plasma
Pow e r con ne ct ion s:
AC Input connector 3-pin Han modular
HV output connector HV power connectors with
10m shielded HV cable.
O PT IO N S
RS232
Patented arc-current limitation
Current regulation
Manual programming on front panel
CE M ar k:
EN55011/03.91 (limit value class A)
EN50082-2/03.95
Dim en s ion (H x W x D):
4U x 19” x 650mm, 6kV / 12kW.
8U x 19” x 650mm, 24kW.
S P EC IF IC AT IO N
Input:
400Vac 10%, 50 or 60Hz, three phase
O utput:
Models with output voltages of 3kV or 5kV and with
two different output powers of 6 or 12kW are available. To increase power capabilities parallel operation
for the 12kW model is available as option. Each
model is available with either positive, negative, or
reversible polarity referring to earth.
An a log ue I /O - int erf a c e:
Voltage and power are continuously adjustable over
0 –10 V analogue inputs. The actual value is issued
at the analogue interface with 0 –10 V.
Dig it al I/ O - in t e rf ac e:
Over the digital interface the power supply can be
released as well as device-specific and processspecific messages are issued.
S EL E CT IO N T AB L E
MAXIMUM RATING
KV
mA
kW
3
2000
6
3
4000
12
3
8000
24
5
1200
6
5
2400
12
5
4800
24
MODUL NUMBER
LITEC 0032k0
LITEC 0034k0
LITEC 0038k0
LITEC 0051k2
LITEC 0052k4
LITEC 0034k8
Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected]
10
VAPTEC
The switch mode power supplies of the VAPTEC series are specially designed for electron-beam evaporation processes. This series contains the actual high voltage power supply NHRR which provides an output
voltage of 8 – 10kV at an output power of 3, 5, 10kW as well as the necessary cathode-heat transformer
NDRG and the XY-sweep amplifier RNTR.
Furthermore we recently developed a new device technology NHCR (current-fed-push-pull) with a digital
regulation. Recently a 2kW, 3kW and 10kW version is available. At the 2kW, 3kW supply the high voltage
power supply also includes the cathode heat transformer in one cabinet. The 2kW, 3kW high voltage power supply delivers an output voltage of 8kV and the 10kW an output voltage of 10kV. The integrated cathode transformer of the 2kW, 3kW version provides a heat current of 26A, 35A at an output voltage of 8V
DC.
Because for the most evaporation processes an ion-source is used to accelerate the electrons, the necessary Ion supply NDOR was developed within the VAPTEC series.
RNTR
Substrat
Vapor
Vapor
Vapor
Ionenquelle
XY coil
E
B
E
A
M
E
B
E
A
M
E
B
E
A
M
filament
filament
filament
NDRG 3
NDRG 2
NDRG 1
Type: NDRG-L031M01
Ue: 2 x400V AC +/-10%
50/60Hz
Ua: 6V DC Pa: 360W Ia: 60°
Kom. Nr. 607994 externe Absicherung: 5A
Seriennr.: 00751329
NDOR
Type: NDRG-L031M01
Ue: 2 x400V AC +/-10%
50/60Hz
Ua: 6V DC Pa: 360W Ia: 60°
Kom. Nr. 607994 externe Absicherung: 5A
Seriennr.: 00751329
NHCR
NHCR

Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected]
11
VAPTEC
NHRR 8-10kV / 3-30kW
 COMPACT DESIGN
 CONSTANT VOLTAGE / CONSTANT CURRENT
OPERATION WITH AUTOMATIC CROSSOVER
 ARC DETECTION, PATENTED ARC-CURRENT
LIMITATION AND ARC COUNTER
 UP TO THREE HV-OUTPUTS POSSIBLE
Vo lta ge R eg ul ati on:
Load: 0,01% of full voltage for full load change.
Line: ± 0,01% of full voltage over specified input
range
The switch mode power supply NHRR is available with
three different output ratings with output voltages of 8kV
– 10kV. The NHRR series is specially designed for electron beam evaporation processes. This power supplies
contain an ARC-counter and a patented ARC-current
limitation which limits the output current peaks to five
times of the rated current. Parallel operation to increase
power and current capabilities is possible for 10kW models.
Cu rr ent R egu l atio n:
Load: 0,1% of full current for any voltage change.
Line: : ± 0,1% of full current over specified input
range
O PT IO N S
AR C - Co unt er :
With the ARC-Counter a flash-over can be detected and counted.
RS232
emission current survey per HV-output
HV-ripple generator for sweeping
Re si du al r ipp le :
≤ 1% rms. related to nominal voltage
P ate nte d Ar c - Cu rr ent li mit at ion:
Limits the output current peaks to five times of
rated current.
Pow e r con ne ct ion s:
AC input
terminal connector
HV output
Lemo connector with 10m
shielded HV cable
S P EC IF IC AT IO N
Input:
400Vac 10%, 50 or 60Hz, three phase
O utput:
3 models from -8kV up to -10kV with output ratings
of 3kW, 5kW and 10kW are available.
An a log ue I /O - Int erf a c e:
Voltage and current are continuously adjustable over
0 – 10 V analogue inputs. Optionally power regulation and control is possible over analogue input.
Dig it al I/ O - In t e rf ac e:
With the digital interface the power supply can be
enabled and device-specific and process-specific
messages are issued.
Dim en s ion (H x W x D):
3HE x 19” x 580mm, 3kW
9HE x 19” x 550mm, 5kW to 10kW
CE M ar k:
EN55011/03.91 (limit value class A)
EN50082-2/03.95
S EL E CT IO N T AB L E
MAXIMUM RATING
kV
mA
KW
-8
375
3
-10
500
5
-10
1000
10
-10
2000
20
-10
3000
30
MODUL NUMBER
NHRR 008375
NHRR 010500
NHRR 0100k1
NHRR 0102k0
NHRR 0103k0
Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected]
12
VAPTEC
NHCR 10kV /10-70kW
 EXTREM COMPACT DESIGN
 CONSTANT VOLTAGE / CONSTANT / POWER
OPERATION WITH AUTOMATIC CROSSOVER
NEW
 ARC DETECTION, PATENTED ARC-CURRENT
LIMITATION AND ARC COUNTER
 UP TO THREE HV-OUTPUTS POSSIBLE
The switch mode power supply NHCR delivers a output
voltage of 10kV at 10kW. It is specially designed for electron beam evaporation processes, and comes with digital
regulation, configurable ARC management, (via RS232Interface) as well as a patented ARC-current limitation. Is
an arc recognized the ARC-current limitation limits the
output current peaks to four times of the rated current. To
increase the output power the NHCR 10kW module a
parallel operation is included.
Vo lta ge R eg ul ati on :
Load: 0,01% of full voltage for full load change.
Line: ± 0,01% of full voltage over specified input
range
Cu rr ent R egu l atio n:
Load: 0,1% of full current for any voltage change.
Line: : ± 0,1% of full current over specified input
range
Re si du al r ipp le :
≤ 1% rms. related to nominal voltage
P ate nte d Ar c - Cu rr ent li mit at ion:
Limits the output current peaks to four times of
rated current.
O PT IO N S
Field bus
Emission current measuring per HV output
HV ripple generator to wobble
AR C - Co unt er :
With the ARC-Counter a flash-over can be detected and counted.
S P EC IF IC AT IO N
Pow e r con ne ct ion s:
AC Input
combicon plug
HV output
special HV-ODU-female
Input :
Power: 400Vac 10%, 50 or 60Hz, three phase
Regulation: 24VDC 20%, max. 2A
Dim en s ion (H x W x D):
4HE x 19” x 660mm (incl. plug) 10kW
O utput :
High voltage: -10kV / 1000mA/ 10kW
W eig ht:
35k g
An a log ue I /O - Int erf a c e :
Voltage and current are continuously adjustable over
0 – 10 V analogue inputs. Optionally power regulation and control is possible over analogue input.
CE M ar k:
EN55011/03.91 ((limit value class A)
EN50082-2/03.95
Dig it al I / O - In t e rf ac e :
With the digital interface the power supply can be
enabled and device-specific and process-specific
messages are issued.
S EL E CT IO N T AB L E
RS 2 32 - Int e rf ac e :
With this interface the set points for the output values could be given and read out. Further more the
device could be enabled / disabled, failure messages could be read out and advanced arc management setting could be done.
MAXIMUM RATING
kV
mA
KW
-10
1000
10
MODUL NUMBER
NHCR 0101k0
Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected]
13
VAPTEC
NDRG 6-13V / 5-60A
(Filament supply)
Type: NDRG-L031M01
Ue: 2 x400V AC +/-10%
50/60Hz
Ua: 6V DC Pa: 360W Ia: 60°
Kom. Nr. 607994 externe Absicherung: 5A
Seriennr.: 00751329
 COMPACT DESIGN
 SELECTION BETWEEN HEAT-CURRENT OR
EMISSION CURRENT REGULATION
 ADJUSTABLE HEAT-CURRENT LIMITATION
 CONTROL PATH LINEARISATION FOR YOUR
E-BEAM SOURCE
 OEM CUSTOMIZATION AVAILABLE
NDRG switch mode power supplies are used to heat a
cathode or a filament in applications such as evaporation
or x-ray. In principle the power supply is a current source.
It has two control circuits. One regulates the current
through the cathode (heating current control system) and
the other regulates the emission current of the tube
(emission current control system). The emission current
control system can be switched on via an external signal
and overrides the heating current control. Both control
systems are controlled by using an external set value.
He at Cu r re nt Re gul at ion:
Load: 1% of full current for any voltage change.
Line: ± 0,1% of full current over specified input
range.
O PT IO N S
Dim en s ion (H x W x D):
190mm x 238mm x 370mm
Up to 15 different control path linearisations are programmable. Under voltage detection for emission
current stop
Re si du al r ipp le :
≤ 5% rms. related to nominal voltage
Pow e r con ne ct ion s:
AC Input connector
HV input connector
HV output connector
circular plug-in connector
HV power connector
HV power connectors
P rot ect ion S yst em :
IP 54
CE M ar k:
PrEN50178
S P EC IF IC AT IO N
Input:
400Vac 10%, 50 or 60Hz, two phase
O utput:
4 models are available. 6V/60A, 8V/30A, 8V/50A
and 13V/5A.
O utput Co ntr ol s:
Heat current and emission current are continuously
adjustable over 0 –10 V analogue inputs. For the
emission current, there are two measuring ranges
(1A or 500mA). They can be switched over via an
external signal.
Em i ss ion Cu r r ent R e gul at io n:
Load: 0,1% of full current for any voltage change.
Line: ± 0,1% of full current over specified input
range.
S EL E CT IO N T AB L E
MAXIMUM RATING
V DC
A
6
60
8
30
8
50
13
5
MODUL NUMBER
NDRG 0660
NDRG 0830
NDRG 0850
NDRG 1305
Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected]
14
VAPTEC
RNTR 2403 (XY Sweep amplifier)
 COMPACT DESIGN
 LOW COST
 OVER CURRENT PROTECTION
 OEM CUSTOMIZATION AVAILABLE
RNTR 2403 XY sweep amplifier consolidates the sweep
patterns to drive the X and Y coils of electron beam deposition sources. The sweep patterns must be generated
by the higher level control system.
Coils of up to 8 ohms @ 2,8 Amps can be driven.
S EL E CT IO N T AB L E
MAXIMUM RATING
V
A
24
3
MODUL NUMBER
RNTR 2403
S P EC IF IC AT IO N
PO W E R I N PUT
Pow e r Inpu t:
24VDC 10%
X0
+24V
GND
PE
M ax. O utput v olt ag e:
Uo = Ui – 2,5V
SIGNAL
+24VDC
GND
EARTH
AN AL O G I N PUT
O utput cu r r ent :
0 – 3A
X1
O utput co nt rol:
Output current is continuously adjustable over 0 –
10V analogue input. 0 – 10V DC = 0 - 3A
Fr equ en c y ra ng e:
DC .... 1kHz (3dB)
1
2
3
4
5
SIGNAL
SET VALUE SWEEP COIL X+
SET VALUE SWEEP COIL XSET VALUE SWEEP COIL Y+
SET VALUE SWEEP COIL YEARTH
DIG IT AL IN P UT / O UT PU T
Re info r ce m ent dev i at ion:
0,2% to final value  100 ppm/K
Pow e r con ne ct ion s:
DC Input connector combicon power connectors
Output connector
combicon power connectors
Dim en s ion (H x W x D) :
3HU x 21TE x 300mm
X2
E+
ENO
COM
NC
SIGNAL
RELEASE +
RELEASE GENERAL ERROR
GENERAL ERROR
GENERAL ERROR
O UT PUT
X3
X3A/1
X3A/2
X3B/1
X3B/2
P rot ect ion S yst em :
IP 20
CE M ar k:
EN50178
SIGNAL
OUTPUT SWEEP COIL X+
OUTPUT SWEEP COIL XOUTPUT SWEEP COIL Y+
OUTPUT SWEEP COIL Y-
Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected]
15
VAPTEC
NDOR 180006 (Ion Supply)
 COMPACT DESIGN
 INTEGRATED ANODE AND FILAMENT SUPPLY
 INTEGRATED MEASUREMENT OF
NEUTRALISATION CURRENT
 OEM CUSTOMIZATION AVAILABLE
The power supply NDOR 180006 is a switch mode power
supply which is specially designed for ion sources. It includes the anode power supply, the filament power supply and measurements for the neutralisation current.
The anode power supply is frequency controlled. Contrary to the normally used pulse width modulation this principle provides a short circuit proof, a better efficiency and
a lower charge of the electronic switches.
Pow e r con ne ct ion s:
AC Input connector combicon power connectors
Output connector
combicon power connectors
Dim en s ion (H x W x D):
3HU x 19” x 396mm
P rot ect ion S yst em :
IP 20
CE M ar k:
EN50178 / EN61558
S P EC IF IC AT IO N
Input:
400Vac 10%, 50 or 60Hz, three phase
O utput An ode Pow e r Sup pl y:
180V / 6A
O utput Fi la m ent P ow er Sup pl y:
40V / 25A
O utput Co ntr ol s:
Anode voltage and filament current are continuously
adjustable over 0 –10 V analogue inputs. For the
neutralisation current, a measuring range (+250mA
up to –750mA) exists.
An od e V olt ag e Re gul at i on:
Load: 1% of full current for any voltage change.
Line: ± 1% of full current over specified input range.
Fil am ent C ur r ent R eg ula t ion :
Load: 1% of full current for any voltage change.
Line: ± 1% of full current over specified input range.
Ac c u r ac y of n eu t r al i s at i on cu r re nt :
± 0,2% related to final value
S EL E CT IO N T AB L E
MAXIMUM RATING
Anode
Filament
180V / 6A
40V / 25A
MODUL NUMBER
NDOR 180006
Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected]
16
VAPTEC
NHCR -8kV-2kW or 3kW
 COMPACT DESIGN
 INTEGRATED FILAMENT SUPPLY
 ARC DETECTION
PATENTED ARC LIMITATION
 OEM CUSTOMIZATION AVAILABLE
The switch mode power supply consists of two independent power elements. One of them generates the high
voltage, the other the filament current. Both have a common control-regulation-unit.
The power supply has an configurable ARC-management
and a patented ARC-current limitation, which limits the
output current in case of an ARC to the maximum of five
times of the rated output current.
For the operation and adjustment of the unit an analogue
/ digital interface is available. In addition the unit includes
a RS232-interface for the service.
O PT IO N S
Vo lta ge R eg ul ati on:
Load: 0,01% of full voltage for full load change.
Line: ± 0,01% of full voltage over specified input
range
Cu rr ent R egu l atio n:
Load: 0,1% of full current for any voltage change
Line: ± 0,1% of full current over specified input
range.
Re si du al r ipp le :
≤ 1% eff. related to nominal voltage
P ate nte d Ar c - Cu rr ent li mit at ion:
Limits the output current peaks to five times of
the rated current.
Fieldbus
high voltage ripple generator
Ar c - Count e r:
With the arc-counter a flash-over can be detected
and counted.
S P EC IF IC AT IO N
Input:
Power: 400Vac 10%, 50 or 60Hz, three phase
Regulation: 24VDC 20%, max. 2A
Pow e r con ne ct ion s:
AC input
terminal connector
DC input
terminal connector
HV output
Special HV-female
O utput:
High voltage: -8kV / 250mA/ 2kW
Filament:: 8Vdc / 27,5Adc / 220W
Dim en s ion (H x B x T ):
3HE x 19” x 580mm
An a log ue I /O - Int erf a c e:
Voltage and current are continuously adjustable over
0 – 10V analogue inputs. The actual values are issued at the analogue interface with 0 – 10V.
Dig it al I/ O - In t e rf ac e:
Over the digital interface the power supply can be
released as well as device-specific and process
specific messages are issued.
RS 2 32 - Int e rf ac e :
With this interface the set points for the output values could be given and read out. Further more the
device could be enabled / disabled, failure messages could be read out and advanced arc management setting could be done.
W eig ht:
30kg
CE M ar k:
EN50178, EN60950
EN55011/03.91 (limit value class A)
EN50082-2/03.95
IEC801-3/02.88, IEC85A-77B
IEC801 part 2 u. part 4
S EL E CT IO N T AB L E
MAXIMUM RATING
kV
mA
KW
-8
250
2
-8
375
3
MODUL NUMBER
NHCR 008250
NHCR 008375
Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected]
17
High power high voltage supplies
CAPTEC
GLOWTEC
VAPTEC
>10kW till 80kW
The primary switched high voltage power supply of the type series CAPTEC, GLOWTEC und VAPTEC could be
work in parallel mode to increase the output power. In parallel mode the output power could be increased up to
80kW. Output voltages from 2kV, 3kV, 5kV, 8kV, 10kV till 80kW are available and 15kV, 20kV, 25kV, 30kV till
40kW. To increase the power the 10kW-modules will operate in parallel mode and will be installed in 19“-switch
cabinets completely wired.
By the use of the application specific 10kW modules of the type series CAPTEC, GLOWTEC or VAPTEC in parallel operation there are high power high voltage power supplies available which are suitable for your special application.
The devices come with a digital regulation as well as a RS232-Interface. With this RS232-Interface the set points
for the output values could be given and read out. Further more the device could be enabled / disabled, failure
messages could be read out and advanced arc management setting could be done. The RS232-Interface could be
work in two operation methods, the terminal-mode and the SPS-mode.
At the terminal-mode characters could be interpreted on the control side with a terminal program, e.g. as the hyper
terminal from windows. At the terminal program you could see a operation interface with which you could give settings to the power supply and also get information from the power supply.
At the SPS-mode a specific count of bytes will be send over the interface, which will be interpreted e.g. from a SPS.
To control the power supply you have to send a specific byte sequence with predefined contents to the power supply.
All options (such as patented Arc-current limitation, field bus, special voltages, and much more) which are available
for the single modules are also available for the high power series.
.
S P EZI FI K AT IO N EN
Input :
400Vac 10%, 50 or 60Hz, three phase
O utput :
Output voltages from 2kV till 30kV with positive or
negative output are available.
Optional output voltages up to 10kV are with floating
output available.
Pow e r con ne ct ion :
AC Input
terminal connector
HV Output
HV-plug with 10m cable
Vo lta ge R eg ul ati on :
Load: 0,01% of full voltage for full load change.
Line: ± 0,01% of full voltage over specified input
range.
Cu rr ent R egu l atio n :
Load: 0,1% of full current for any voltage change
Line: ± 0,1% of full current over specified input
range.
Re si du al r ipp le :
≤ 1% eff. related to nominal voltage
An a log ue I /O - Int erf a c e :
Voltage and current are continuously adjustable over
0 – 10V analogue inputs. The actual values are issued at the analogue interface with 0 – 10V.
Dig it al I/ O - In t e rf ac e :
Over the digital interface the power supply can be
released as well as device-specific and process
specific messages are issued.
RS 2 32 - Int e rf ac e :
With this interface the set points for the output values could be given and read out. Further more the
device could be enabled / disabled, failure messages could be read out and advanced arc management setting could be done.
P ate nt e d AR C - Li mi tat ion (O pt ion):
Limits the output current peaks to five times of
the rated current.
AR C - Co unt er (O pt ion ):
With the arc-counter a flash-over can be detected
and counted.
Dim en s ion s ( H x W x D) :
please see selection table
CE M ar k:
EN55011/03.91 (limit value class A)
EN50082-2/03.95
Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected]
18
S EL E CT IO N T AB L E
MODUL
NUMBER
NHCG 0036k6
NHCG 00310k
NHCG 00313k
NHCG 00316k
NHCG 00320k
NHCG 00323k
NHCG 00326k
MAXIMUM
RATING
kV
A
kW
DC
3
6,6
20
3
10
30
3
13,3
40
3
16,6
50
3
20
60
3
23,3
70
3
26,6
80
DIMENSIONS
NHCG 0102k0
NHCG 0103k0
NHCG 0104k0
NHCG 0105k0
NHCG 0106k0
NHCG 0107k0
NHCG 0108k0
10
10
10
10
10
10
10
2
3
4
5
6
7
8
20
30
40
50
60
70
80
600
NHCG 0201k0
NHCG 0201k5
NHCG 0202k0
20
20
20
1
1,5
2
20
30
40
600
NHCG 030600
NHCG 0301k0
NHCG 0301k3
30
30
30
0,6
1
1,3
20
30
40
600
NHCG 040750
NHCG 0401k1
NHCG 0401k5
40
40
40
0,75
1,125
1,5
30
45
60
600
NHCG 060500
NHCG 060750
NHCG 0601k0
60
60
60
0,5
0,75
1
30
45
60
600
Wide
[mm]
high
[mm]
deep
[mm]
1600
33HE
600
800
2000
42HE
1600
800
2000
1600
2000
800
1600
2000
800
1600
2000
800
1600
2000
800
US E R INT ERF AC E
a t H y p e r t e r m i n a l f r o m W i n d o ws
Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected]
19
WELTEC
NHCG 40-60kV / 15kW
 COMPACT DESIGN
 CONSTANT VOLTAGE / CONSTANT CURRENT
OPERATION WITH AUTOMATIC CROSSOVER
 ARC DETECTION AND ARC COUNTER
 OEM CUSTOMIZATION AVAILABLE
The switch mode power supplies of the series WELTEC
are at the primary side air cooled and at the secondary
side water cooled and oil insulated. For each application
the necessary auxiliary power supplies (grid, filament, bias) are included optionally.
4 models with voltage outputs ranging from 40kV to 60kV
are available. To increase the output power of the pure
high voltage module a parallel operation is included.
The pure high voltage power supply
T Y PIC AL AP P LI C AT I O N S
Dig it al I/ O - In te rf ac e:
Over the digital interface the power supply can
be released as well as device-specific and process specific messages are issued.
RS 2 32 - Int e rf ac e :
With this interface the set points for the output
values could be given and read out. Further more
the device could be enabled / disabled, failure
messages could be read out and advanced arc
management setting could be done.
Vo lta ge R eg ul ati on:
Load: 0,01% of full voltage for full load change.
Line: ± 0,01% of full voltage over specified input
range
Electron beam systems
X-ray
Ion implantation
Capacitor charging
Cu rr ent R egu l atio n:
Load: 0,1% of full current for any voltage change.
Line: : ± 0,1% of full current over specified input
range.
O PT IO N S
Integrated grid and filament supply
Integrated bias supply for x-ray applications
Constant power regulation
RS232 / manual programming on front panel
Adjustable soft start ramp
Adjustable delay time after arc
Digital display
Re si du al r ipp le :
≤ 1% rms. related to nominal voltage
Pow e r con ne ct ion s:
AC Input connector terminal connector
HV output connector HV connectors
Dim en s ion (H x W x D):
40kV:
19” x 7HU x 705 mm
60kV:
19” x 9HU x 705 mm
S P EC IF IC AT IO N
Input:
400Vac 10%, 50 or 60Hz, three phase
O utput:
4 models from 40kV to 60kV. Each model is available with positive and negative polarity.
O utput Co ntr ol s:
Voltage and current are continuously adjustable over
0 –10 V analogue inputs. Optionally power regulation and control is possible over analogue input.
CE M ar k:
EN55011/03.91 (limit value class A)
EN50082-2/03.95
S EL E CT IO N T AB L E
MAXIMUM RATING
kV DC
mA
40
250
40
375
60
166
60
250
MODUL NUMBER
WELTEC 040250
WELTEC 040375
WELTEC 060166
WELTEC 060250
Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected]
20
WELTEC
NHRG 80-170kV / 15kW
 COMPACT DESIGN
 CONSTANT VOLTAGE / CONSTANT CURRENT
OPERATION WITH AUTOMATIC CROSSOVER
 ARC DETECTION AND ARC COUNTER
 OEM CUSTOMIZATION AVAILABLE
NHRG 15kW switch mode power supplies are oil insulated and are available for different applications. For each
application the necessary power supplies (grid, filament,
bias) are included optionally.
5 models with voltage outputs from 80kV to 170kV are
available. The NHRG series is specially designed for extremely harsh conditions.
T Y PIC AL AP P LI C AT I O N S
Electron beam systems
Ion implantation
Capacitor charging
Vo lta ge R eg ul ati on:
Load: 0,01% of full voltage for full load change.
Line: ± 0,01% of full voltage over specified input
range
Cu rr ent R egu l atio n:
Load: 0,1% of full current for any voltage change.
Line: : ± 0,1% of full current over specified input
range.
Re si du al r ipp le :
≤ 1% rms. related to nominal voltage
Pow e r con ne ct ion s:
AC Input connector terminal connector
HV output connector HV power connectors one
end manufactured with 5m
shielded HV cable.
O PT IO N S
Integrated grid and filament supply
Constant power regulation
RS232
Manual programming on front panel
Adjustable soft start ramp
Adjustable delay time after arc
Digital display
Dim en s ion (H x W x D):
up to 150kV = 360 x 910 x 1185 mm
CE M ar k:
EN55011/03.91 (limit value class A)
EN50082-2/03.95
S P EC IF IC AT IO N
Input:
400Vac 10%, 50 or 60Hz, three phase
O utput:
5 models from 80kV to 170kV. Each model is available with positive and negative polarity.
O utput Co ntr ol s:
Voltage and current are continuously adjustable over
0 –10 V analogue inputs. Optionally power regulation and control is possible over analogue input.
S EL E CT IO N T AB L E
MAXIMUM RATING
kV DC
MA
80
187
100
150
120
125
150
100
170
90
MODUL NUMBER
NHRG 080187
NHRG 100150
NHRG 120125
NHRG 150100
NHRG 170090
Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected]
21
PLASMATEC
The power supplies of the PLASMATEC series are primary switched and specially developed for plasma
processes with 400 – 800V. Other output voltages are available optionally. These power supplies are
characterized by smallest output energy, by a sophisticated arc management, a very high power density
as well as water cooling. With these devices a DC voltage, a uni polar pulsed or a bipolar pulsed operation
is possible. Output ratings of 8kW up to 72kW are available.
Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected]
22
PLASMATEC
NDCR
(DC, unipolar- or bipolarpulsed Plasma power supply)
 COMPACT DESIGN
NEW
 MINIMAL LOW STORED ENERGY AND
RAPID ARC RECOVERY
 SERVICE INTERFACE RS232
 WATER COOLING
 OPTIONAL FIELDBUS
 CUSTOMIZED SOLUTIONS AVAILABLE
The switched mode power supply NDCR provides selectively a DC, unipolar or bipolar pulsed output voltage of 400V to
800V. At pulsed mode the power supply delivers at fix output
frequency. The pulse width modulation can be adjusted over
the RS232 interface by free selection of the pulse duration
from 1µsec to 10µsec. This corresponds to a pulse width
modulation of 7,6% to 85%. The positive and negative pulses have the same output voltage. The numbers of positive
and negative pulses is adjustable by the RS232 interface. To
increase the power parallel operation is possible.
S P EC IF IC AT IO N
Input:
Input voltage
400Vac 10%
50 or 60Hz, three phase
Input current
max. 20A
O utput:
Output power
Output voltage
Ignition voltage
Output frequency
Output current
U
,
Ignition
10kW at 400 till 800V (DC-Mode)
10kW at 400 till 800V (Pulse-Mode)
400 - 800V DC or pulse (average)
1400V
unipolar
bipolar
76kHz
38kHz
DC-Mode
Pulse-Mode
12,5 at 800V
9,6Aav at 800V
25 at 400V
19,2Aav at 400V
O utput Co ntr ol s:
Regulation
voltage, current, power
Arc detection
< 1µsec
Arc trip level
from 0-800V adjustable
Arc feeding time from 0-100µsec adjustable
Arc pause time
von 0-1000µsec adjustable
Arc energy
<3mJ at 800V
Setting range of pulses:
positive pulse
0–255 in single step
negative pulse
0–255 in single step
duty cycle
from 1µsec till 11µsec
from 7,6% till 85%
Cool ing s yst em:
Water cooling
Temperature
non condensing
Water flow
Water connector
yes
5°C min., 35°C max.
4 l/min., > 3.5bar < 6bar
quick connector 10mm
Pow e r con ne ct ion s:
Input
3-pin Han modular (Harting)
Output
Lapp-Epic HB16
with 2 GES-HV-Modules
Output cable
2 x RG213/U
Dim en s ion s ( H x B x T ):
3HE x 19“ x 600mm (695mm incl. connector)
P rot ect i on S yst em :
IP 54
voltage
current
CE M ar k:
DIN VDE 0160 / EN50178
transient emission: EN55011 group 2, class A
interference resistance: EN 61000-6-2
S EL E CT IO N T AB L E
t
MAXIMUM RATING
V
A
400-800
19,2 – 9,6
MODUL NUMBER
kW
10
NDCR0739F01001
Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected]
23
Patented ARC-current limitation
The patented arc current limitation works like a non-linear resistance. Until a specific current level is reached, it has
low Ohm resistance. Once that level is exceeded, the resistance changes, so that current remains constant, whatever voltage applies. A graph showing the idealized voltage/current relationship across the resistance is given below.
voltage
Once the current threshold
is reached, current remains
constant despite increasing
voltage. The resistance progressively increases in this
area.
threshold
current
The arc current limiter is switched into the high voltage circuit like a resistance. If there is an arc, it is absolutely
sure, that current stays limited at the threshold level.
ARC current
limitation
short circuit
U, I
voltage in case of short circuit
current without arc-limitation
current with arc-limitation
current propagation with and without patented arc-limitation
t
Without arc current limiting, current peaks up to 1000 times the rated current can occur. Our patented arc current
limitation keeps current peaks down to 4 times of the rated current, at the very most.
Advantages:

Prolonged life of filament in electronic beam guns

Processes, such as coating, run more smoothly as arcs are suppressed, instantly

Almost complete elimination of the contamination of deposited film which normally arises from the extremely
high currents associated with arcs

higher stoichiometry

Enhanced equipment reliability

Due to the very small current fluctuations (di/dt), there are fewer breakdowns. This leads to cost savings on
such items as cables, filters and surge-voltage protection devices.
The Arc current limiter can be configured to meet your specific requirements. Versions for continuous current levels
of 10A and voltages of 100kV can be provided.
Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected]
24
High voltage cables
The high voltage cables, shown in the table below, as well as the plugs and sockets are suitable for voltages til
10kVDC. If you need cables or plugs for a higher voltage we would be pleased to offer them.
article no.
from <====> to
end 1
convert with
Cable length
end 2
convert with
NHRR to universal
NHRR to universal
HV-right angle plug
HV-right angle plug
10m
20m
-
RG213
RG213
Both ends converted
NHR40505E01001
NHR40505E02001
NHR40505E04001
NHR40505E06001
NHR40505E08001
NHR40505E10001
NHRR to NDRG
NHRR to NDRG
NHRR to NDRG
NHRR to NDRG
NHRR to NDRG
NHRR to NDRG
HV-right angle plug
HV-right angle plug
HV-right angle plug
HV-right angle plug
HV-right angle plug
HV-right angle plug
1,5m
2,0m
4,0m
6,0m
8,0m
10,0m
ODU- female 4mm
ODU- female 4mm
ODU- female 4mm
ODU- female 4mm
ODU- female 4mm
ODU- female 4mm
RG213
RG213
RG213
RG213
RG213
RG213
NHR40505E01002
NHR40505E02002
NHR40505E04002
NHR40505E06002
NHR40505E08002
NHR40505E10002
NHRR to ground
NHRR to ground
NHRR to ground
NHRR to ground
NHRR to ground
NHRR to ground
HV-right angle plug
HV-right angle plug
HV-right angle plug
HV-right angle plug
HV-right angle plug
HV-right angle plug
1,5m
2,0m
4,0m
6,0m
8,0m
10,0m
cable lug M8
cable lug M8
cable lug M8
cable lug M8
cable lug M8
cable lug M8
RG213
RG213
RG213
RG213
RG213
RG213
article no.
from <====> to
end 1
convert with
Cable length
end 2
convert with
NHCR to universal
NHCR to universal
ODU- female 4mm
ODU- female 4mm
10m
20m
-
RG213
RG213
Both ends converted
NHC41001E01001
NHC41001E02001
NHC41001E04001
NHC41001E06001
NHC41001E08001
NHC41001E10001
NHCR to NDRG
NHCR to NDRG
NHCR to NDRG
NHCR to NDRG
NHCR to NDRG
NHCR to NDRG
ODU- female 4mm
ODU- female 4mm
ODU- female 4mm
ODU- female 4mm
ODU- female 4mm
ODU- female 4mm
1,5m
2,0m
4,0m
6,0m
8,0m
10,0m
ODU- female 4mm
ODU- female 4mm
ODU- female 4mm
ODU- female 4mm
ODU- female 4mm
ODU- female 4mm
RG213
RG213
RG213
RG213
RG213
RG213
NHC41001E01002
NHC41001E02002
NHC41001E04002
NHC41001E06002
NHC41001E08002
NHC41001E10002
NHCR to ground
NHCR to ground
NHCR to ground
NHCR to ground
NHCR to ground
NHCR to ground
ODU- female 4mm
ODU- female 4mm
ODU- female 4mm
ODU- female 4mm
ODU- female 4mm
ODU- female 4mm
1,5m
2,0m
4,0m
6,0m
8,0m
10,0m
cable lug M8
cable lug M8
cable lug M8
cable lug M8
cable lug M8
cable lug M8
RG213
RG213
RG213
RG213
RG213
RG213
One end converted
3059.2
3059.5
Cable type
Cable type
One end converted
HV-right angle plug
ODU-female
reference
module
FLA
dimensions [mm]
series
4S
A
28
A1
28
H
56
L
49
M
31
dimensions [mm]
S1
20
d
4
S2
19
D
8
L
15
s
22,5
g
12,5
Q
6
electrical
data
INom
Imax
55A
80A
Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected]
25
LWL-cables
The LWL-cables, shown in the table below, are useable to synchronization or to put the power supplies in parallel
mode to increase the output power.
article no.
51523.29
from <====> to
NDCR to NDCR
NHCR to NHCR
Cable length
0,5m
fibre
I-VH 2G 50/125µ
cable colour
orange
Plug type
ST, ST
51523.30
NDCR to NDCR
NHCR to NHCR
2,0m
I-VH 2G 50/125µ
orange
ST, ST
picture
Filter pad for replacement
article no.
type
usable for
protection class
1740005.18
RFF 120
IP20
1740005.35
FP80T
NDRR
CAPTEC
GLOWTEC
NHRR
NHCR (10kW)
NDOR
SXEG
NHCR (2kW)
dimensions
[mm]
120 x 120
IP20
80 x 80
10
1740005.26
AFF 01
NDRG
IP54
118 x 118
10
pieces / VE
picture
10
In- and output plug for PLASMATEC
article no.
type
Input plug
extant from
1 connector housing, 1 module f. female connector, 3
female connector, 1 module frame HAN-Modular, 1 cable screw connection PG16
pieces / VE
1
Output plug
1 connector housing, 1 module frame for 5 modules, 3
Blind module, 2 HV-plug insert, 2 cable screw connection M25
1
picture
Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected]
26
Customized Solutions
This catalogue only contains our standard product portfolio of power supplies for High Voltage- and VacuumProcess applications. Should you did not find any power supply which comes up to your application or your specification, please let us know and do not hesitate to contact us. Many power supplies we sell are indeed customized
power supplies.
Often it is possible to modify a standard power supply to meet your specific requirements. Should this not be possible, we are pleased to develop and produce a customized solution for your application. Therefore at J. Schneider
Elektrotechnik a staff of high sophisticated development engineers is available.
Enclosed some examples for customized solutions:
Fig. 1: Electron beam power supply
with integrated sweep generator ± 500V, 3,5kHz
Fig. 3: 3kV High voltage power supply
with output pulser of 2kHz
Fig. 2: DC-Sputter power supply
400V – 800V
water cooled, IP54
Fig. 4: Sputtersupply 90kW
400-800V
DC
unipolar pulsed 76kHz
bipolar pulsed 38kHz
Fig. 5: 12-fold Heather test cabinet
Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected]
27
J. Schneider Elektrotechnik GmbH
Helmholtzstrasse 13
D-77652 Offenburg
Deutschland
Tel. : +49 / (0) 781 / 206-0
Fax : +49 / (0) 781 / 25318
www.j-schneider.de
[email protected]
HV_Prospekt_15_englisch_150210