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High Voltage Power Supply VAPTEC LITEC PLASMATEC WELTEC GLOWTEC Electronics in highest voltage High Voltage Planning, developing and producing new technologies our know-how means complete solutions. In the High Voltage (HV) division of J. Schneider Elektrotechnik GmbH high voltage and DC power supplies for the high voltage and vacuum process equipment are designed and manufactured. Schneider DC power supplies range in the output rating from 1kW - 120kW and output voltages from 150V up to 150kV. J. Schneider built up its reputation as a competent supplier of high voltage power supplies for ion and electron beam applications, x-ray, laser and high voltage plasma processes. The high reliability and robustness of the products in a variety of customer application environments led to this reputation. Typical applications we serve in the industrial and research markets include e-beam evaporation, e-beam welding, ion beam systems, capacitor charge systems, glow discharge, x-ray supplies and sputter supplies. Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected] 2 From a vision to the final product At Schneider, technology is backed up by an innovative development team. Our engineers and technicians respond to constant market observation at an early stage; client's projects for the future are identified and jointly realised. This high degree of engineering potential reflects our feeling for quality, so that we are open for tomorrow's ideas and tasks. New developments open new horizons In order to survive in the global market, we constantly and continually redefine our product range: together with the customer and in close cooperation with technical institutes and universities, new products are developed and produced. Customized Solutions We have made our web site easy to use in order to assist you in finding the DC power supply to satisfy your requirements. If you are not finding a DC power supply which meets your requirements, we would be pleased to develop a customized solution for you. Distribution and Service Since development, production, distribution and service lay at the company of J. Schneider Elektrotechnik GmbH in one hand, a close teamwork in each stage of the lifecycle is granted. Further developments are made close to the market requirements, customer specified modifications are realized in tight cooperation between sales department and development department. Very good product acknowledgement guarantees an optimised service and maintenance. Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected] 3 Product overview CAPTEC The primary switched high voltage power supplies of the series CAPTEC work according the resonance converter principle with a frequency of 100kHz. Adverse to the normally used pulse width modulation in which the regulation is realized by the variation of the power-on time, in this technique the regulation is realized by the variation of the pause time during fixed power-on time. The generation of the high voltage is effected in the CAPTEC series via converter cascades. The CAPTEC series is specially designed for the requirements to charge condensers. Four different charge powers with 500J/sec, 1500J/sec, 2500J/sec, 5000J/sec and nine different output voltages from 2kV up to 30kV are available. GLOWTEC The primary switched high voltage power supplies of the series GLOWTEC work according to the same technology as the CAPTEC series. The GLOWTEC series is specially adapted for high voltage plasma processes / glow processes. Options for the devices are an integrated interlock for the safe separation of the power converter from the mains, a patented ARC-current limitation which limits current peaks to five times the rated current as well as an ARC-counter. The GLOWTEC series is available in the different output ratings of 1kW, 3kW, 5kW und 10kW as single device with output voltages of 2kV, 3kV, 5kV, 8kV, 10kV, 15kV, 20kV, 25kV and 30kV. Parallel operation to increase power and current capabilities is possible for 10kW models. VAPTEC The switch mode power supplies of the VAPTEC series are specially designed for electron-beam evaporation processes. This series includes the actual high voltage power supply NHRR which provides an output voltage of 8 – 10kV at an output power of 3, 5, 10kW as well as the necessary cathode-heat transformer NDRG and the XY-sweep amplifier RNTR. Furthermore we recently developed a new device technology NHCR (current-fed-push-pull) with a digital regulation. Recently a 2kW and 10kW version is available. At the 2kW supply the high voltage power supply also includes the cathode heat transformer in one cabinet. The 2kW high voltage power supply delivers an output voltage of 8kV and the 10kW a output voltage of 10kV. The integrated cathode transformer of the 2kW version provides a heat current of 26A at an output voltage of 8V DC. Because at the most evaporation processes an ion-source is used to accelerate the electrons, the necessary ion supply NDOR was be developed in the VAPTEC series. LITEC The primary switched high voltage power supplies of the series LITEC are specially developed for the requirement of linear ion-sources which work according the anode layer principle. The LITEC products are available with two different output voltages of 3kV or 5kV and output ratings of 6kW, 12kW and 24KW. The LITEC series is extremely compact because it is water cooled. PLASMATEC The power supplies of the PLASMATEC series are primary switched and specially developed for plasma processes with 800 – 1000V. These power supplies are characterized by smallest output energy as well as by a sophisticated arc management. With these devices a DC voltage, and uni-polar pulsed or a bipolar pulsed operation is possible. Output ratings of 8kW up to 72kW are available. WELTEC The power supplies of the WELTEC series are primary switched and specially developed for e-beam welding and x-ray applications. They are water- / oil cooled and it is possible to integrate the necessary auxiliary supply such as heat or wehnelt supply. They are available with output voltages of 40kV, 60kV up to 150kV and with output ratings of 5kW, 10kW and 15KW. Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected] 4 Product choice table Voltage / Power If you do not find a module in the table below which meets your requirements, we are ready to develop a customized solution for you. Therefore regard the below listed power supplies only as a basic device for a product, which full fills your requirements. We would be pleased if you would send us your complete specification at [email protected] or fill out the quote request form at our web-page http://www.j-schneider.de/. power voltage device series type 6 13 V 150 V 180 V 300 V 600 V 800 V 1 kV 2 kV 3 kV 5 kV 6 kV 8 kV 10 kV 15 30 kV 40 60 kV 80 150 kV page NRSG 6 0,3 W NDRR 1kW CAPTEC 500J/s to 5000J/s GLOWTEC 1kW to 70kW LITEC 6kW to 24kW VAPTEC 1kW to 70kW VAPTEC 1kW to 70kW VAPTEC 400W 7 CAPTEC 8 GLOWTEC 9 LITEC 10 NHRR 12 NHCR 13 NDRG Type: NDRG-L031M01 Ue: 2 x400V AC +/-10% 50/60Hz Ua: 6V DC Pa: 360W Ia: 60° Kom. Nr. 607994 externe Absicherung: 5A Seriennr.: 00751329 14 RNTR 15 VAPTEC NDOR VAPTEC 1080W/ 1000W VAPTEC 2kW 5kW to 15kW NHCG WELTEC 10kW to 15kW NHRG WELTEC PLASMATEC 8kW to 72kW 16 NHCR 17 20 21 NDCR 22 cable & accessories 25 Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected] 5 NRSG 2–6kV COMPACT DESIGN CURRENT REGULATION OEM CUSTOMIZATION AVAILABLE The NRSG power supplies are primary switched DC/DCconverters with an input voltage of 24V DC. The 24V input voltage is fed to a single frequency square wave generator. The square wave is then transformed upwards, rectified and filtered and provides the precise output voltage. The output is controlled by means of pulse-width modulation of the square wave. The output voltage is related to 0V (negative connection) of the input voltage. All versions are continuously short circuit proof and can operate in current and voltage source mode. The output voltage and current are set by using the 0 - 10V analogue interface or by an external potentiometer, by using the available reference voltage. For acknowledgement of the actual voltage and current, a 0 - 10V output is provided. A failure message is also generated if a specific current limit is exceeded. This specific current limit can also be adjusted by a 0 - 10V external control voltage. To detect short over-current impulses the failure message will be extended about 5 ms. T Y PIC AL AP P LI C AT I O N S Photo-multiplier Test applications An a log ue I /O - int erf a c e: Output voltage and current are continuously adjustable over 0 - 10 V analogue inputs. The output voltage and output current is given out by a 0 - 10V analogue output. Vo lta ge R eg ul ati on: Load dependent: 0,05% at 100 % load step input voltage dependent: ± 0,05% within defined input voltage range Cu rr ent R egu l atio n: Load dependent: 0,05% at nominal current at each voltage jump input voltage dependent: ± 0,05% within defined input voltage range Re si du al r ipp le : ≤ 0,1% pp. related to nominal voltage ≤ 0,5% pp. related to nominal current Pow e r con ne ct ion s: AC input DC output combicon connector HV connector Dim en s ion s ( H x W x D): 130 x 159 x 300 mm CE M ar k: EN 50081 part 1/03-93 EN 55022 class B EN 50082 part 2/03-93 EN 61000 part 4 / inspection severity: 2 EN 60801-2 EN 60950 O PT IO N S Other output voltages S P EC IF IC AT IO N Input: 24VDC 10% S EL E CT IO N T AB L E O utput: 3 models with output voltages of 2kV, 3kV and 6kV are available. Each model is available with positive or negative polarity. MAXIMUME RATING kV DC mA W 2 0,1 0,2 3 0,1 0,3 3 1 3 6 0,1 0,6 MODUL NUMBER NRSG 20001 NRSG 30001 NRSG 30010 NRSG 60001 Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected] 6 NDRR 150–600V / 1kW COMPACT DESIGN CURRENT REGULATION OEM CUSTOMIZATION AVAILABLE NDRR switch mode power supplies are available in 3 models with voltage outputs ranging from 150V to 600V. The NDRR series is specially designed for extremely harsh conditions. Cu rr ent R egu l atio n: Load: 0,3% of full current for any voltage change. Line: : ± 0,1% of full current over specified input range. T Y PIC AL AP P LI C AT I O N S Re si du al r ipp le : ≤ 1% rms. related to nominal voltage Pow e r con ne ct ion s: AC Input connector power combicon connector DC output connector power combicon connector O PT IO N S Dim en s ion (H x W x D) : 3U x 19” x 310mm Constant power regulation Constant voltage regulation Manual programming on front panel Digital display CE M ar k: EN50178 EN50081-2 EN50082-2 S P EC IF IC AT IO N Input: 400Vac 10%, 50 or 60Hz, three phase O utput: 3 models from 150V to 600V are available. Each model is available with positive or negative polarity. O utput Co ntr ol s: Current is continuously adjustable over 0 –10 V analogue inputs. Optionally voltage or power regulation and control is possible over analogue input. S EL E CT IO N T AB L E Vo lta ge R eg ul at i on: Load: 0,3% of full voltage for full load change. Line: ± 0,1% of full voltage over specified input range MAXIMUM RATING V DC A 150 7 300 3,5 600 1,7 MODUL NUMBER NDRR 150007 NDRR 3003k5 NDRR 6001k7 Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected] 7 CAPTEC 2 - 30kV / 500- 5000J/sec The primary switched high voltage power supplies CAPTEC are specially designed for the requirements to charge condensers. Four different charge powers with 500J/sec, 1500J/sec, 2500J/sec, 5000J/sec and nine different output voltages from 2kV up to 30kV are available. The charge voltage as well as the charge current can be independently adjusted. The actual value is issued at the analogue interface. By enabling the charge process, the voltage mounts linear up to the desired voltage value. If the desired value of the voltage is reached, the power supply switches automatically over from current regulation to voltage regulation and you get the status message HV-OK from the digital interface. The voltage at the condenser is kept constant. For the CAPTEC series a manual programming and digital LCD displays on the front panel is available. Each model is available with positive or negative polarity. S P EC IF IC AT IO N S EL E CT IO N T AB L E Input: 400Vac 10%, 50 or 60Hz, three phase O utput: 36 models from 2kV up to 30kV with a charge power of 500J/sec to 5000J/sec. Every model is available with positive or negative polarity. An a log ue I /O - Int erf a c e: Voltage and current are continuously adjustable over 0 – 10 V analogue inputs. Optionally power regulation and control is possible over an analogue input. Vo lta ge R eg ul at i on: Load: 0,01% of full voltage for full load change. Line: ± 0,01% of full voltage over specified input range Cu rr ent R egu l at io n: Load: 0,1% of full current for any voltage change. Line: : ± 0,1% of full current over specified input range. Re si du al r ipp le : ≤ 1% rms. related to nominal voltage Pow e r con ne ct ion s: AC input terminal connector HV output Lemo connector with 10m shielded HV cable Dim en s ion (H x W x D) : 3HE x 19” x 580mm, 2kV - 10kV to 1500J/sec 6HE x 19” x 680mm, 15kV - 30kV to 1500J/sec 9HE x 19” x 550mm, 2kV - 10kV to 5000J/sec 9HE x 19” x 710mm, 15kV - 30kV to 5000J/sec CE M ar k: EN55011/03.91 (limit value class A) EN50082-2/03.95 MAXIMUM RATING kV DC mA J / sec 2 500 500 2 1500 1500 2 2500 2500 2 5000 5000 MODUL NUMBER CAPTEC 002500 CAPTEC 0021k5 CAPTEC 0022k5 CAPTEC 0025k0 3 3 3 3 333 1000 1666 3333 500 1500 2500 5000 CAPTEC 003333 CAPTEC 0031k0 CAPTEC 0031k6 CAPTEC 0033k3 5 5 5 5 200 600 1000 2000 500 1500 2500 5000 CAPTEC 005200 CAPTEC 005600 CAPTEC 0051k0 CAPTEC 0052k0 8 8 8 8 125 375 625 1250 500 1500 2500 5000 CAPTEC 008125 CAPTEC 008375 CAPTEC 008625 CAPTEC 0081k2 10 10 10 10 100 300 500 1000 500 1500 2500 5000 CAPTEC 010100 CAPTEC 010300 CAPTEC 010500 CAPTEC 0101k0 15 15 15 15 66 200 333 666 500 1500 2500 5000 CAPTEC 015066 CAPTEC 015200 CAPTEC 015333 CAPTEC 015666 20 20 20 20 50 150 250 500 500 1500 2500 5000 CAPTEC 020050 CAPTEC 020150 CAPTEC 020250 CAPTEC 020500 25 25 25 25 40 120 200 400 500 1500 2500 5000 CAPTEC 025040 CAPTEC 025120 CAPTEC 025200 CAPTEC 025400 30 30 30 30 33 100 166 333 500 1500 2500 5000 CAPTEC 030033 CAPTEC 030100 CAPTEC 030166 CAPTEC 030333 Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected] 8 GLOWTEC 2 – 30kV / 1 – 70kW The primary switched high voltage power supplies of the series GLOWTEC work according the same technology as the CAPTEC series. The GLOWTEC series is specially adapted for high voltage plasma processes / glow processes. Optionally the devices can be delivered with an integrated interlock for safe separation of the power converter from the mains, a patented ARC-current limitation which limits current peaks to five times of the rated current as well as an ARC-counter. The GLOWTEC series is available with different output ratings of 1kW, 3kW, 5kW and 10kW as single device with output voltages of 2kV, 3kV, 5kV, 8kV, 10kV, 15kV, 20kV, 25kV and 30kV. Parallel operation to increase power and current capabilities is possible for 10kW models. . S P EC IF IC AT IO N S EL E CT IO N T AB L E Input: 400Vac 10%, 50 or 60Hz, three phase O utput: 36 models from 2kV up to 30kV. Each model is available with positive or with negative polarity. Output voltages up to 10kV are available with reversible polarity referring to earth. An a log ue I /O - Int erf a c e: Voltage and current are continuously adjustable over 0 – 10 V analogue inputs. Optionally power regulation and control is possible over analogue input. Vo lta ge R eg ul at i on: Load: 0,01% of full voltage for full load change. Line: ± 0,01% of full voltage over specified input range Cu rr ent R egu l at io n: Load: 0,1% of full current for any voltage change. Line: : ± 0,1% of full current over specified input range. Re si du al r ipp le : ≤ 1% rms. related to nominal voltage P ate nte d Ar c - Cu rr ent li mit at ion: Limits the output current peaks to five times of the rated current. Pow e r con ne ct ion s: AC input terminal connector HV output HV connector with 10m shielded HV cable Dim en s ion (H x W x D) : 3HE x 19” x 580mm, 2kV - 10kV to 3kW 6HE x 19” x 680mm, 15kV - 30kV to 3kw 9HE x 19” x 550mm, 2kV - 10kV to 10kW 9HE x 19” x 665mm, 15kV - 30kV to 10kW CE M ar k: EN55011/03.91 (limit value class A) EN50082-2/03.95 MAXIMUM RATING kV DC mA kW 2 500 1 2 1500 3 2 2500 5 2 5000 10 MODUL NUMBER GLOWTEC 002500 GLOWTEC 0021k5 GLOWTEC 0022k5 GLOWTEC 0025k0 3 3 3 3 333 1000 1666 3333 1 3 5 10 GLOWTEC 003333 GLOWTEC 0031k0 GLOWTEC 0031k6 GLOWTEC 0033k3 5 5 5 5 200 600 1000 2000 1 3 5 10 GLOWTEC 005200 GLOWTEC 005600 GLOWTEC 0051k0 GLOWTEC 0052k0 8 8 8 8 125 375 625 1250 1 3 5 10 GLOWTEC 008125 GLOWTEC 008375 GLOWTEC 008625 GLOWTEC 0081k2 10 10 10 10 100 300 500 1000 1 3 5 10 GLOWTEC 010100 GLOWTEC 010300 GLOWTEC 010500 GLOWTEC 0101k0 15 15 15 15 66 200 333 666 1 3 5 10 GLOWTEC 015066 GLOWTEC 015200 GLOWTEC 015333 GLOWTEC 015666 20 20 20 20 50 150 250 500 1 3 5 10 GLOWTEC 020050 GLOWTEC 020150 GLOWTEC 020250 GLOWTEC 020500 25 25 25 25 40 120 200 400 1 3 5 10 GLOWTEC 025040 GLOWTEC 025120 GLOWTEC 025200 GLOWTEC 025400 30 30 30 30 33 100 166 333 1 3 5 10 GLOWTEC 030033 GLOWTEC 030100 GLOWTEC 030166 GLOWTEC 030333 Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected] 9 LITEC 3 – 5kV / 6 – 24kW COMPACT DESIGN CONSTANT VOLTAGE / POWER OPERATION WITH AUTOMATIC CROSSOVER WIDE OUTPUT POWER OPERATING RANGE EXTREM LOW ARC ENERGY OEM CUSTOMIZATION AVAILABLE The water-cooled switch mode power supplies LITEC are available with output voltages of 3kV and 5kV. The LITEC power supply series provides 6kW or 12kW and is specially designed for applications which need extreme low arc energy and the full output power over a wide range. Parallel operation to increase power and current capabilities are available as option. T Y PIC AL AP P LI C AT I O N S Vo lta ge R eg ul ati on: Load: 0,01% of full voltage for full load change. Line: ± 0,01% of full voltage over specified input range Cu rr ent R egu l atio n: Load: 0,1% of full current for any voltage change. Line: : ± 0,1% of full current over specified input range. Re si du al r ipp le : ≤ 50% rms. related to nominal voltage smaller ripples are possible depending on arc-energy. Anode layer systems Capacitor charging High-Voltage plasma Pow e r con ne ct ion s: AC Input connector 3-pin Han modular HV output connector HV power connectors with 10m shielded HV cable. O PT IO N S RS232 Patented arc-current limitation Current regulation Manual programming on front panel CE M ar k: EN55011/03.91 (limit value class A) EN50082-2/03.95 Dim en s ion (H x W x D): 4U x 19” x 650mm, 6kV / 12kW. 8U x 19” x 650mm, 24kW. S P EC IF IC AT IO N Input: 400Vac 10%, 50 or 60Hz, three phase O utput: Models with output voltages of 3kV or 5kV and with two different output powers of 6 or 12kW are available. To increase power capabilities parallel operation for the 12kW model is available as option. Each model is available with either positive, negative, or reversible polarity referring to earth. An a log ue I /O - int erf a c e: Voltage and power are continuously adjustable over 0 –10 V analogue inputs. The actual value is issued at the analogue interface with 0 –10 V. Dig it al I/ O - in t e rf ac e: Over the digital interface the power supply can be released as well as device-specific and processspecific messages are issued. S EL E CT IO N T AB L E MAXIMUM RATING KV mA kW 3 2000 6 3 4000 12 3 8000 24 5 1200 6 5 2400 12 5 4800 24 MODUL NUMBER LITEC 0032k0 LITEC 0034k0 LITEC 0038k0 LITEC 0051k2 LITEC 0052k4 LITEC 0034k8 Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected] 10 VAPTEC The switch mode power supplies of the VAPTEC series are specially designed for electron-beam evaporation processes. This series contains the actual high voltage power supply NHRR which provides an output voltage of 8 – 10kV at an output power of 3, 5, 10kW as well as the necessary cathode-heat transformer NDRG and the XY-sweep amplifier RNTR. Furthermore we recently developed a new device technology NHCR (current-fed-push-pull) with a digital regulation. Recently a 2kW, 3kW and 10kW version is available. At the 2kW, 3kW supply the high voltage power supply also includes the cathode heat transformer in one cabinet. The 2kW, 3kW high voltage power supply delivers an output voltage of 8kV and the 10kW an output voltage of 10kV. The integrated cathode transformer of the 2kW, 3kW version provides a heat current of 26A, 35A at an output voltage of 8V DC. Because for the most evaporation processes an ion-source is used to accelerate the electrons, the necessary Ion supply NDOR was developed within the VAPTEC series. RNTR Substrat Vapor Vapor Vapor Ionenquelle XY coil E B E A M E B E A M E B E A M filament filament filament NDRG 3 NDRG 2 NDRG 1 Type: NDRG-L031M01 Ue: 2 x400V AC +/-10% 50/60Hz Ua: 6V DC Pa: 360W Ia: 60° Kom. Nr. 607994 externe Absicherung: 5A Seriennr.: 00751329 NDOR Type: NDRG-L031M01 Ue: 2 x400V AC +/-10% 50/60Hz Ua: 6V DC Pa: 360W Ia: 60° Kom. Nr. 607994 externe Absicherung: 5A Seriennr.: 00751329 NHCR NHCR Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected] 11 VAPTEC NHRR 8-10kV / 3-30kW COMPACT DESIGN CONSTANT VOLTAGE / CONSTANT CURRENT OPERATION WITH AUTOMATIC CROSSOVER ARC DETECTION, PATENTED ARC-CURRENT LIMITATION AND ARC COUNTER UP TO THREE HV-OUTPUTS POSSIBLE Vo lta ge R eg ul ati on: Load: 0,01% of full voltage for full load change. Line: ± 0,01% of full voltage over specified input range The switch mode power supply NHRR is available with three different output ratings with output voltages of 8kV – 10kV. The NHRR series is specially designed for electron beam evaporation processes. This power supplies contain an ARC-counter and a patented ARC-current limitation which limits the output current peaks to five times of the rated current. Parallel operation to increase power and current capabilities is possible for 10kW models. Cu rr ent R egu l atio n: Load: 0,1% of full current for any voltage change. Line: : ± 0,1% of full current over specified input range O PT IO N S AR C - Co unt er : With the ARC-Counter a flash-over can be detected and counted. RS232 emission current survey per HV-output HV-ripple generator for sweeping Re si du al r ipp le : ≤ 1% rms. related to nominal voltage P ate nte d Ar c - Cu rr ent li mit at ion: Limits the output current peaks to five times of rated current. Pow e r con ne ct ion s: AC input terminal connector HV output Lemo connector with 10m shielded HV cable S P EC IF IC AT IO N Input: 400Vac 10%, 50 or 60Hz, three phase O utput: 3 models from -8kV up to -10kV with output ratings of 3kW, 5kW and 10kW are available. An a log ue I /O - Int erf a c e: Voltage and current are continuously adjustable over 0 – 10 V analogue inputs. Optionally power regulation and control is possible over analogue input. Dig it al I/ O - In t e rf ac e: With the digital interface the power supply can be enabled and device-specific and process-specific messages are issued. Dim en s ion (H x W x D): 3HE x 19” x 580mm, 3kW 9HE x 19” x 550mm, 5kW to 10kW CE M ar k: EN55011/03.91 (limit value class A) EN50082-2/03.95 S EL E CT IO N T AB L E MAXIMUM RATING kV mA KW -8 375 3 -10 500 5 -10 1000 10 -10 2000 20 -10 3000 30 MODUL NUMBER NHRR 008375 NHRR 010500 NHRR 0100k1 NHRR 0102k0 NHRR 0103k0 Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected] 12 VAPTEC NHCR 10kV /10-70kW EXTREM COMPACT DESIGN CONSTANT VOLTAGE / CONSTANT / POWER OPERATION WITH AUTOMATIC CROSSOVER NEW ARC DETECTION, PATENTED ARC-CURRENT LIMITATION AND ARC COUNTER UP TO THREE HV-OUTPUTS POSSIBLE The switch mode power supply NHCR delivers a output voltage of 10kV at 10kW. It is specially designed for electron beam evaporation processes, and comes with digital regulation, configurable ARC management, (via RS232Interface) as well as a patented ARC-current limitation. Is an arc recognized the ARC-current limitation limits the output current peaks to four times of the rated current. To increase the output power the NHCR 10kW module a parallel operation is included. Vo lta ge R eg ul ati on : Load: 0,01% of full voltage for full load change. Line: ± 0,01% of full voltage over specified input range Cu rr ent R egu l atio n: Load: 0,1% of full current for any voltage change. Line: : ± 0,1% of full current over specified input range Re si du al r ipp le : ≤ 1% rms. related to nominal voltage P ate nte d Ar c - Cu rr ent li mit at ion: Limits the output current peaks to four times of rated current. O PT IO N S Field bus Emission current measuring per HV output HV ripple generator to wobble AR C - Co unt er : With the ARC-Counter a flash-over can be detected and counted. S P EC IF IC AT IO N Pow e r con ne ct ion s: AC Input combicon plug HV output special HV-ODU-female Input : Power: 400Vac 10%, 50 or 60Hz, three phase Regulation: 24VDC 20%, max. 2A Dim en s ion (H x W x D): 4HE x 19” x 660mm (incl. plug) 10kW O utput : High voltage: -10kV / 1000mA/ 10kW W eig ht: 35k g An a log ue I /O - Int erf a c e : Voltage and current are continuously adjustable over 0 – 10 V analogue inputs. Optionally power regulation and control is possible over analogue input. CE M ar k: EN55011/03.91 ((limit value class A) EN50082-2/03.95 Dig it al I / O - In t e rf ac e : With the digital interface the power supply can be enabled and device-specific and process-specific messages are issued. S EL E CT IO N T AB L E RS 2 32 - Int e rf ac e : With this interface the set points for the output values could be given and read out. Further more the device could be enabled / disabled, failure messages could be read out and advanced arc management setting could be done. MAXIMUM RATING kV mA KW -10 1000 10 MODUL NUMBER NHCR 0101k0 Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected] 13 VAPTEC NDRG 6-13V / 5-60A (Filament supply) Type: NDRG-L031M01 Ue: 2 x400V AC +/-10% 50/60Hz Ua: 6V DC Pa: 360W Ia: 60° Kom. Nr. 607994 externe Absicherung: 5A Seriennr.: 00751329 COMPACT DESIGN SELECTION BETWEEN HEAT-CURRENT OR EMISSION CURRENT REGULATION ADJUSTABLE HEAT-CURRENT LIMITATION CONTROL PATH LINEARISATION FOR YOUR E-BEAM SOURCE OEM CUSTOMIZATION AVAILABLE NDRG switch mode power supplies are used to heat a cathode or a filament in applications such as evaporation or x-ray. In principle the power supply is a current source. It has two control circuits. One regulates the current through the cathode (heating current control system) and the other regulates the emission current of the tube (emission current control system). The emission current control system can be switched on via an external signal and overrides the heating current control. Both control systems are controlled by using an external set value. He at Cu r re nt Re gul at ion: Load: 1% of full current for any voltage change. Line: ± 0,1% of full current over specified input range. O PT IO N S Dim en s ion (H x W x D): 190mm x 238mm x 370mm Up to 15 different control path linearisations are programmable. Under voltage detection for emission current stop Re si du al r ipp le : ≤ 5% rms. related to nominal voltage Pow e r con ne ct ion s: AC Input connector HV input connector HV output connector circular plug-in connector HV power connector HV power connectors P rot ect ion S yst em : IP 54 CE M ar k: PrEN50178 S P EC IF IC AT IO N Input: 400Vac 10%, 50 or 60Hz, two phase O utput: 4 models are available. 6V/60A, 8V/30A, 8V/50A and 13V/5A. O utput Co ntr ol s: Heat current and emission current are continuously adjustable over 0 –10 V analogue inputs. For the emission current, there are two measuring ranges (1A or 500mA). They can be switched over via an external signal. Em i ss ion Cu r r ent R e gul at io n: Load: 0,1% of full current for any voltage change. Line: ± 0,1% of full current over specified input range. S EL E CT IO N T AB L E MAXIMUM RATING V DC A 6 60 8 30 8 50 13 5 MODUL NUMBER NDRG 0660 NDRG 0830 NDRG 0850 NDRG 1305 Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected] 14 VAPTEC RNTR 2403 (XY Sweep amplifier) COMPACT DESIGN LOW COST OVER CURRENT PROTECTION OEM CUSTOMIZATION AVAILABLE RNTR 2403 XY sweep amplifier consolidates the sweep patterns to drive the X and Y coils of electron beam deposition sources. The sweep patterns must be generated by the higher level control system. Coils of up to 8 ohms @ 2,8 Amps can be driven. S EL E CT IO N T AB L E MAXIMUM RATING V A 24 3 MODUL NUMBER RNTR 2403 S P EC IF IC AT IO N PO W E R I N PUT Pow e r Inpu t: 24VDC 10% X0 +24V GND PE M ax. O utput v olt ag e: Uo = Ui – 2,5V SIGNAL +24VDC GND EARTH AN AL O G I N PUT O utput cu r r ent : 0 – 3A X1 O utput co nt rol: Output current is continuously adjustable over 0 – 10V analogue input. 0 – 10V DC = 0 - 3A Fr equ en c y ra ng e: DC .... 1kHz (3dB) 1 2 3 4 5 SIGNAL SET VALUE SWEEP COIL X+ SET VALUE SWEEP COIL XSET VALUE SWEEP COIL Y+ SET VALUE SWEEP COIL YEARTH DIG IT AL IN P UT / O UT PU T Re info r ce m ent dev i at ion: 0,2% to final value 100 ppm/K Pow e r con ne ct ion s: DC Input connector combicon power connectors Output connector combicon power connectors Dim en s ion (H x W x D) : 3HU x 21TE x 300mm X2 E+ ENO COM NC SIGNAL RELEASE + RELEASE GENERAL ERROR GENERAL ERROR GENERAL ERROR O UT PUT X3 X3A/1 X3A/2 X3B/1 X3B/2 P rot ect ion S yst em : IP 20 CE M ar k: EN50178 SIGNAL OUTPUT SWEEP COIL X+ OUTPUT SWEEP COIL XOUTPUT SWEEP COIL Y+ OUTPUT SWEEP COIL Y- Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected] 15 VAPTEC NDOR 180006 (Ion Supply) COMPACT DESIGN INTEGRATED ANODE AND FILAMENT SUPPLY INTEGRATED MEASUREMENT OF NEUTRALISATION CURRENT OEM CUSTOMIZATION AVAILABLE The power supply NDOR 180006 is a switch mode power supply which is specially designed for ion sources. It includes the anode power supply, the filament power supply and measurements for the neutralisation current. The anode power supply is frequency controlled. Contrary to the normally used pulse width modulation this principle provides a short circuit proof, a better efficiency and a lower charge of the electronic switches. Pow e r con ne ct ion s: AC Input connector combicon power connectors Output connector combicon power connectors Dim en s ion (H x W x D): 3HU x 19” x 396mm P rot ect ion S yst em : IP 20 CE M ar k: EN50178 / EN61558 S P EC IF IC AT IO N Input: 400Vac 10%, 50 or 60Hz, three phase O utput An ode Pow e r Sup pl y: 180V / 6A O utput Fi la m ent P ow er Sup pl y: 40V / 25A O utput Co ntr ol s: Anode voltage and filament current are continuously adjustable over 0 –10 V analogue inputs. For the neutralisation current, a measuring range (+250mA up to –750mA) exists. An od e V olt ag e Re gul at i on: Load: 1% of full current for any voltage change. Line: ± 1% of full current over specified input range. Fil am ent C ur r ent R eg ula t ion : Load: 1% of full current for any voltage change. Line: ± 1% of full current over specified input range. Ac c u r ac y of n eu t r al i s at i on cu r re nt : ± 0,2% related to final value S EL E CT IO N T AB L E MAXIMUM RATING Anode Filament 180V / 6A 40V / 25A MODUL NUMBER NDOR 180006 Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected] 16 VAPTEC NHCR -8kV-2kW or 3kW COMPACT DESIGN INTEGRATED FILAMENT SUPPLY ARC DETECTION PATENTED ARC LIMITATION OEM CUSTOMIZATION AVAILABLE The switch mode power supply consists of two independent power elements. One of them generates the high voltage, the other the filament current. Both have a common control-regulation-unit. The power supply has an configurable ARC-management and a patented ARC-current limitation, which limits the output current in case of an ARC to the maximum of five times of the rated output current. For the operation and adjustment of the unit an analogue / digital interface is available. In addition the unit includes a RS232-interface for the service. O PT IO N S Vo lta ge R eg ul ati on: Load: 0,01% of full voltage for full load change. Line: ± 0,01% of full voltage over specified input range Cu rr ent R egu l atio n: Load: 0,1% of full current for any voltage change Line: ± 0,1% of full current over specified input range. Re si du al r ipp le : ≤ 1% eff. related to nominal voltage P ate nte d Ar c - Cu rr ent li mit at ion: Limits the output current peaks to five times of the rated current. Fieldbus high voltage ripple generator Ar c - Count e r: With the arc-counter a flash-over can be detected and counted. S P EC IF IC AT IO N Input: Power: 400Vac 10%, 50 or 60Hz, three phase Regulation: 24VDC 20%, max. 2A Pow e r con ne ct ion s: AC input terminal connector DC input terminal connector HV output Special HV-female O utput: High voltage: -8kV / 250mA/ 2kW Filament:: 8Vdc / 27,5Adc / 220W Dim en s ion (H x B x T ): 3HE x 19” x 580mm An a log ue I /O - Int erf a c e: Voltage and current are continuously adjustable over 0 – 10V analogue inputs. The actual values are issued at the analogue interface with 0 – 10V. Dig it al I/ O - In t e rf ac e: Over the digital interface the power supply can be released as well as device-specific and process specific messages are issued. RS 2 32 - Int e rf ac e : With this interface the set points for the output values could be given and read out. Further more the device could be enabled / disabled, failure messages could be read out and advanced arc management setting could be done. W eig ht: 30kg CE M ar k: EN50178, EN60950 EN55011/03.91 (limit value class A) EN50082-2/03.95 IEC801-3/02.88, IEC85A-77B IEC801 part 2 u. part 4 S EL E CT IO N T AB L E MAXIMUM RATING kV mA KW -8 250 2 -8 375 3 MODUL NUMBER NHCR 008250 NHCR 008375 Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected] 17 High power high voltage supplies CAPTEC GLOWTEC VAPTEC >10kW till 80kW The primary switched high voltage power supply of the type series CAPTEC, GLOWTEC und VAPTEC could be work in parallel mode to increase the output power. In parallel mode the output power could be increased up to 80kW. Output voltages from 2kV, 3kV, 5kV, 8kV, 10kV till 80kW are available and 15kV, 20kV, 25kV, 30kV till 40kW. To increase the power the 10kW-modules will operate in parallel mode and will be installed in 19“-switch cabinets completely wired. By the use of the application specific 10kW modules of the type series CAPTEC, GLOWTEC or VAPTEC in parallel operation there are high power high voltage power supplies available which are suitable for your special application. The devices come with a digital regulation as well as a RS232-Interface. With this RS232-Interface the set points for the output values could be given and read out. Further more the device could be enabled / disabled, failure messages could be read out and advanced arc management setting could be done. The RS232-Interface could be work in two operation methods, the terminal-mode and the SPS-mode. At the terminal-mode characters could be interpreted on the control side with a terminal program, e.g. as the hyper terminal from windows. At the terminal program you could see a operation interface with which you could give settings to the power supply and also get information from the power supply. At the SPS-mode a specific count of bytes will be send over the interface, which will be interpreted e.g. from a SPS. To control the power supply you have to send a specific byte sequence with predefined contents to the power supply. All options (such as patented Arc-current limitation, field bus, special voltages, and much more) which are available for the single modules are also available for the high power series. . S P EZI FI K AT IO N EN Input : 400Vac 10%, 50 or 60Hz, three phase O utput : Output voltages from 2kV till 30kV with positive or negative output are available. Optional output voltages up to 10kV are with floating output available. Pow e r con ne ct ion : AC Input terminal connector HV Output HV-plug with 10m cable Vo lta ge R eg ul ati on : Load: 0,01% of full voltage for full load change. Line: ± 0,01% of full voltage over specified input range. Cu rr ent R egu l atio n : Load: 0,1% of full current for any voltage change Line: ± 0,1% of full current over specified input range. Re si du al r ipp le : ≤ 1% eff. related to nominal voltage An a log ue I /O - Int erf a c e : Voltage and current are continuously adjustable over 0 – 10V analogue inputs. The actual values are issued at the analogue interface with 0 – 10V. Dig it al I/ O - In t e rf ac e : Over the digital interface the power supply can be released as well as device-specific and process specific messages are issued. RS 2 32 - Int e rf ac e : With this interface the set points for the output values could be given and read out. Further more the device could be enabled / disabled, failure messages could be read out and advanced arc management setting could be done. P ate nt e d AR C - Li mi tat ion (O pt ion): Limits the output current peaks to five times of the rated current. AR C - Co unt er (O pt ion ): With the arc-counter a flash-over can be detected and counted. Dim en s ion s ( H x W x D) : please see selection table CE M ar k: EN55011/03.91 (limit value class A) EN50082-2/03.95 Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected] 18 S EL E CT IO N T AB L E MODUL NUMBER NHCG 0036k6 NHCG 00310k NHCG 00313k NHCG 00316k NHCG 00320k NHCG 00323k NHCG 00326k MAXIMUM RATING kV A kW DC 3 6,6 20 3 10 30 3 13,3 40 3 16,6 50 3 20 60 3 23,3 70 3 26,6 80 DIMENSIONS NHCG 0102k0 NHCG 0103k0 NHCG 0104k0 NHCG 0105k0 NHCG 0106k0 NHCG 0107k0 NHCG 0108k0 10 10 10 10 10 10 10 2 3 4 5 6 7 8 20 30 40 50 60 70 80 600 NHCG 0201k0 NHCG 0201k5 NHCG 0202k0 20 20 20 1 1,5 2 20 30 40 600 NHCG 030600 NHCG 0301k0 NHCG 0301k3 30 30 30 0,6 1 1,3 20 30 40 600 NHCG 040750 NHCG 0401k1 NHCG 0401k5 40 40 40 0,75 1,125 1,5 30 45 60 600 NHCG 060500 NHCG 060750 NHCG 0601k0 60 60 60 0,5 0,75 1 30 45 60 600 Wide [mm] high [mm] deep [mm] 1600 33HE 600 800 2000 42HE 1600 800 2000 1600 2000 800 1600 2000 800 1600 2000 800 1600 2000 800 US E R INT ERF AC E a t H y p e r t e r m i n a l f r o m W i n d o ws Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected] 19 WELTEC NHCG 40-60kV / 15kW COMPACT DESIGN CONSTANT VOLTAGE / CONSTANT CURRENT OPERATION WITH AUTOMATIC CROSSOVER ARC DETECTION AND ARC COUNTER OEM CUSTOMIZATION AVAILABLE The switch mode power supplies of the series WELTEC are at the primary side air cooled and at the secondary side water cooled and oil insulated. For each application the necessary auxiliary power supplies (grid, filament, bias) are included optionally. 4 models with voltage outputs ranging from 40kV to 60kV are available. To increase the output power of the pure high voltage module a parallel operation is included. The pure high voltage power supply T Y PIC AL AP P LI C AT I O N S Dig it al I/ O - In te rf ac e: Over the digital interface the power supply can be released as well as device-specific and process specific messages are issued. RS 2 32 - Int e rf ac e : With this interface the set points for the output values could be given and read out. Further more the device could be enabled / disabled, failure messages could be read out and advanced arc management setting could be done. Vo lta ge R eg ul ati on: Load: 0,01% of full voltage for full load change. Line: ± 0,01% of full voltage over specified input range Electron beam systems X-ray Ion implantation Capacitor charging Cu rr ent R egu l atio n: Load: 0,1% of full current for any voltage change. Line: : ± 0,1% of full current over specified input range. O PT IO N S Integrated grid and filament supply Integrated bias supply for x-ray applications Constant power regulation RS232 / manual programming on front panel Adjustable soft start ramp Adjustable delay time after arc Digital display Re si du al r ipp le : ≤ 1% rms. related to nominal voltage Pow e r con ne ct ion s: AC Input connector terminal connector HV output connector HV connectors Dim en s ion (H x W x D): 40kV: 19” x 7HU x 705 mm 60kV: 19” x 9HU x 705 mm S P EC IF IC AT IO N Input: 400Vac 10%, 50 or 60Hz, three phase O utput: 4 models from 40kV to 60kV. Each model is available with positive and negative polarity. O utput Co ntr ol s: Voltage and current are continuously adjustable over 0 –10 V analogue inputs. Optionally power regulation and control is possible over analogue input. CE M ar k: EN55011/03.91 (limit value class A) EN50082-2/03.95 S EL E CT IO N T AB L E MAXIMUM RATING kV DC mA 40 250 40 375 60 166 60 250 MODUL NUMBER WELTEC 040250 WELTEC 040375 WELTEC 060166 WELTEC 060250 Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected] 20 WELTEC NHRG 80-170kV / 15kW COMPACT DESIGN CONSTANT VOLTAGE / CONSTANT CURRENT OPERATION WITH AUTOMATIC CROSSOVER ARC DETECTION AND ARC COUNTER OEM CUSTOMIZATION AVAILABLE NHRG 15kW switch mode power supplies are oil insulated and are available for different applications. For each application the necessary power supplies (grid, filament, bias) are included optionally. 5 models with voltage outputs from 80kV to 170kV are available. The NHRG series is specially designed for extremely harsh conditions. T Y PIC AL AP P LI C AT I O N S Electron beam systems Ion implantation Capacitor charging Vo lta ge R eg ul ati on: Load: 0,01% of full voltage for full load change. Line: ± 0,01% of full voltage over specified input range Cu rr ent R egu l atio n: Load: 0,1% of full current for any voltage change. Line: : ± 0,1% of full current over specified input range. Re si du al r ipp le : ≤ 1% rms. related to nominal voltage Pow e r con ne ct ion s: AC Input connector terminal connector HV output connector HV power connectors one end manufactured with 5m shielded HV cable. O PT IO N S Integrated grid and filament supply Constant power regulation RS232 Manual programming on front panel Adjustable soft start ramp Adjustable delay time after arc Digital display Dim en s ion (H x W x D): up to 150kV = 360 x 910 x 1185 mm CE M ar k: EN55011/03.91 (limit value class A) EN50082-2/03.95 S P EC IF IC AT IO N Input: 400Vac 10%, 50 or 60Hz, three phase O utput: 5 models from 80kV to 170kV. Each model is available with positive and negative polarity. O utput Co ntr ol s: Voltage and current are continuously adjustable over 0 –10 V analogue inputs. Optionally power regulation and control is possible over analogue input. S EL E CT IO N T AB L E MAXIMUM RATING kV DC MA 80 187 100 150 120 125 150 100 170 90 MODUL NUMBER NHRG 080187 NHRG 100150 NHRG 120125 NHRG 150100 NHRG 170090 Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected] 21 PLASMATEC The power supplies of the PLASMATEC series are primary switched and specially developed for plasma processes with 400 – 800V. Other output voltages are available optionally. These power supplies are characterized by smallest output energy, by a sophisticated arc management, a very high power density as well as water cooling. With these devices a DC voltage, a uni polar pulsed or a bipolar pulsed operation is possible. Output ratings of 8kW up to 72kW are available. Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected] 22 PLASMATEC NDCR (DC, unipolar- or bipolarpulsed Plasma power supply) COMPACT DESIGN NEW MINIMAL LOW STORED ENERGY AND RAPID ARC RECOVERY SERVICE INTERFACE RS232 WATER COOLING OPTIONAL FIELDBUS CUSTOMIZED SOLUTIONS AVAILABLE The switched mode power supply NDCR provides selectively a DC, unipolar or bipolar pulsed output voltage of 400V to 800V. At pulsed mode the power supply delivers at fix output frequency. The pulse width modulation can be adjusted over the RS232 interface by free selection of the pulse duration from 1µsec to 10µsec. This corresponds to a pulse width modulation of 7,6% to 85%. The positive and negative pulses have the same output voltage. The numbers of positive and negative pulses is adjustable by the RS232 interface. To increase the power parallel operation is possible. S P EC IF IC AT IO N Input: Input voltage 400Vac 10% 50 or 60Hz, three phase Input current max. 20A O utput: Output power Output voltage Ignition voltage Output frequency Output current U , Ignition 10kW at 400 till 800V (DC-Mode) 10kW at 400 till 800V (Pulse-Mode) 400 - 800V DC or pulse (average) 1400V unipolar bipolar 76kHz 38kHz DC-Mode Pulse-Mode 12,5 at 800V 9,6Aav at 800V 25 at 400V 19,2Aav at 400V O utput Co ntr ol s: Regulation voltage, current, power Arc detection < 1µsec Arc trip level from 0-800V adjustable Arc feeding time from 0-100µsec adjustable Arc pause time von 0-1000µsec adjustable Arc energy <3mJ at 800V Setting range of pulses: positive pulse 0–255 in single step negative pulse 0–255 in single step duty cycle from 1µsec till 11µsec from 7,6% till 85% Cool ing s yst em: Water cooling Temperature non condensing Water flow Water connector yes 5°C min., 35°C max. 4 l/min., > 3.5bar < 6bar quick connector 10mm Pow e r con ne ct ion s: Input 3-pin Han modular (Harting) Output Lapp-Epic HB16 with 2 GES-HV-Modules Output cable 2 x RG213/U Dim en s ion s ( H x B x T ): 3HE x 19“ x 600mm (695mm incl. connector) P rot ect i on S yst em : IP 54 voltage current CE M ar k: DIN VDE 0160 / EN50178 transient emission: EN55011 group 2, class A interference resistance: EN 61000-6-2 S EL E CT IO N T AB L E t MAXIMUM RATING V A 400-800 19,2 – 9,6 MODUL NUMBER kW 10 NDCR0739F01001 Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected] 23 Patented ARC-current limitation The patented arc current limitation works like a non-linear resistance. Until a specific current level is reached, it has low Ohm resistance. Once that level is exceeded, the resistance changes, so that current remains constant, whatever voltage applies. A graph showing the idealized voltage/current relationship across the resistance is given below. voltage Once the current threshold is reached, current remains constant despite increasing voltage. The resistance progressively increases in this area. threshold current The arc current limiter is switched into the high voltage circuit like a resistance. If there is an arc, it is absolutely sure, that current stays limited at the threshold level. ARC current limitation short circuit U, I voltage in case of short circuit current without arc-limitation current with arc-limitation current propagation with and without patented arc-limitation t Without arc current limiting, current peaks up to 1000 times the rated current can occur. Our patented arc current limitation keeps current peaks down to 4 times of the rated current, at the very most. Advantages: Prolonged life of filament in electronic beam guns Processes, such as coating, run more smoothly as arcs are suppressed, instantly Almost complete elimination of the contamination of deposited film which normally arises from the extremely high currents associated with arcs higher stoichiometry Enhanced equipment reliability Due to the very small current fluctuations (di/dt), there are fewer breakdowns. This leads to cost savings on such items as cables, filters and surge-voltage protection devices. The Arc current limiter can be configured to meet your specific requirements. Versions for continuous current levels of 10A and voltages of 100kV can be provided. Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected] 24 High voltage cables The high voltage cables, shown in the table below, as well as the plugs and sockets are suitable for voltages til 10kVDC. If you need cables or plugs for a higher voltage we would be pleased to offer them. article no. from <====> to end 1 convert with Cable length end 2 convert with NHRR to universal NHRR to universal HV-right angle plug HV-right angle plug 10m 20m - RG213 RG213 Both ends converted NHR40505E01001 NHR40505E02001 NHR40505E04001 NHR40505E06001 NHR40505E08001 NHR40505E10001 NHRR to NDRG NHRR to NDRG NHRR to NDRG NHRR to NDRG NHRR to NDRG NHRR to NDRG HV-right angle plug HV-right angle plug HV-right angle plug HV-right angle plug HV-right angle plug HV-right angle plug 1,5m 2,0m 4,0m 6,0m 8,0m 10,0m ODU- female 4mm ODU- female 4mm ODU- female 4mm ODU- female 4mm ODU- female 4mm ODU- female 4mm RG213 RG213 RG213 RG213 RG213 RG213 NHR40505E01002 NHR40505E02002 NHR40505E04002 NHR40505E06002 NHR40505E08002 NHR40505E10002 NHRR to ground NHRR to ground NHRR to ground NHRR to ground NHRR to ground NHRR to ground HV-right angle plug HV-right angle plug HV-right angle plug HV-right angle plug HV-right angle plug HV-right angle plug 1,5m 2,0m 4,0m 6,0m 8,0m 10,0m cable lug M8 cable lug M8 cable lug M8 cable lug M8 cable lug M8 cable lug M8 RG213 RG213 RG213 RG213 RG213 RG213 article no. from <====> to end 1 convert with Cable length end 2 convert with NHCR to universal NHCR to universal ODU- female 4mm ODU- female 4mm 10m 20m - RG213 RG213 Both ends converted NHC41001E01001 NHC41001E02001 NHC41001E04001 NHC41001E06001 NHC41001E08001 NHC41001E10001 NHCR to NDRG NHCR to NDRG NHCR to NDRG NHCR to NDRG NHCR to NDRG NHCR to NDRG ODU- female 4mm ODU- female 4mm ODU- female 4mm ODU- female 4mm ODU- female 4mm ODU- female 4mm 1,5m 2,0m 4,0m 6,0m 8,0m 10,0m ODU- female 4mm ODU- female 4mm ODU- female 4mm ODU- female 4mm ODU- female 4mm ODU- female 4mm RG213 RG213 RG213 RG213 RG213 RG213 NHC41001E01002 NHC41001E02002 NHC41001E04002 NHC41001E06002 NHC41001E08002 NHC41001E10002 NHCR to ground NHCR to ground NHCR to ground NHCR to ground NHCR to ground NHCR to ground ODU- female 4mm ODU- female 4mm ODU- female 4mm ODU- female 4mm ODU- female 4mm ODU- female 4mm 1,5m 2,0m 4,0m 6,0m 8,0m 10,0m cable lug M8 cable lug M8 cable lug M8 cable lug M8 cable lug M8 cable lug M8 RG213 RG213 RG213 RG213 RG213 RG213 One end converted 3059.2 3059.5 Cable type Cable type One end converted HV-right angle plug ODU-female reference module FLA dimensions [mm] series 4S A 28 A1 28 H 56 L 49 M 31 dimensions [mm] S1 20 d 4 S2 19 D 8 L 15 s 22,5 g 12,5 Q 6 electrical data INom Imax 55A 80A Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected] 25 LWL-cables The LWL-cables, shown in the table below, are useable to synchronization or to put the power supplies in parallel mode to increase the output power. article no. 51523.29 from <====> to NDCR to NDCR NHCR to NHCR Cable length 0,5m fibre I-VH 2G 50/125µ cable colour orange Plug type ST, ST 51523.30 NDCR to NDCR NHCR to NHCR 2,0m I-VH 2G 50/125µ orange ST, ST picture Filter pad for replacement article no. type usable for protection class 1740005.18 RFF 120 IP20 1740005.35 FP80T NDRR CAPTEC GLOWTEC NHRR NHCR (10kW) NDOR SXEG NHCR (2kW) dimensions [mm] 120 x 120 IP20 80 x 80 10 1740005.26 AFF 01 NDRG IP54 118 x 118 10 pieces / VE picture 10 In- and output plug for PLASMATEC article no. type Input plug extant from 1 connector housing, 1 module f. female connector, 3 female connector, 1 module frame HAN-Modular, 1 cable screw connection PG16 pieces / VE 1 Output plug 1 connector housing, 1 module frame for 5 modules, 3 Blind module, 2 HV-plug insert, 2 cable screw connection M25 1 picture Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected] 26 Customized Solutions This catalogue only contains our standard product portfolio of power supplies for High Voltage- and VacuumProcess applications. Should you did not find any power supply which comes up to your application or your specification, please let us know and do not hesitate to contact us. Many power supplies we sell are indeed customized power supplies. Often it is possible to modify a standard power supply to meet your specific requirements. Should this not be possible, we are pleased to develop and produce a customized solution for your application. Therefore at J. Schneider Elektrotechnik a staff of high sophisticated development engineers is available. Enclosed some examples for customized solutions: Fig. 1: Electron beam power supply with integrated sweep generator ± 500V, 3,5kHz Fig. 3: 3kV High voltage power supply with output pulser of 2kHz Fig. 2: DC-Sputter power supply 400V – 800V water cooled, IP54 Fig. 4: Sputtersupply 90kW 400-800V DC unipolar pulsed 76kHz bipolar pulsed 38kHz Fig. 5: 12-fold Heather test cabinet Helmholtzstrasse 13, D-77652 Offenburg, Tel. +49/(0)781/206-0, Fax +49/(0)781/25318, www.j-schneider.de, [email protected] 27 J. Schneider Elektrotechnik GmbH Helmholtzstrasse 13 D-77652 Offenburg Deutschland Tel. : +49 / (0) 781 / 206-0 Fax : +49 / (0) 781 / 25318 www.j-schneider.de [email protected] HV_Prospekt_15_englisch_150210