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INVESTIGATION OF INJECTION MOLDING PROCESS FOR HIGH PRECISION POLYMER LENS MANUFACTURING DISSERTATION Presented in Partial Fulfillment of the Requirements for the Degree Doctor of Philosophy in the Graduate School of The Ohio State University By Chunning Huang, M.S. ***** The Ohio State University 2008 Dissertation Committee: Approved by Professor Allen Y. Yi, Adviser Professor Jose M. Castro Professor L. James Lee Adviser Industrial and Systems Engineering Graduate Program ABSTRACT Injection molding polymer optical components have long been used for its high volume, low cost and lightweight capability over traditional glass optics. However, the process has not been readily accepted in precision optical fabrication industry because several difficult issues such as geometry deviation, inhomogeneous index distribution, birefringence and freeform fabrication have hindered the implementation of injection molding process in high precision optical applications. This dissertation research was an attempt to create a methodology for injection molding process for high precision polymer lens manufacturing. The study included both experimental approach and numerical modeling in order to identify the proper polymer lens manufacturing processes. The scope of this research involved in both fundamental and systematic investigation in optical design, mold and lens fabrication, as well as optical metrology issues related to polymer lens manufacturing to obtain precision macro and micro polymer freeform optics with accurate geometry and proper optical performance by the state-of-the-art mold fabrication and molding technology. With the aid of DOE (design of experiment) and DEA (data envelopment analysis) methods, the critical process parameters were narrowed down and the optimal conditions ii were determined for lens geometry compensation. The mold compensation methodology was developed based on advanced freeform measurement and data analysis technology and STS (slow tool servo) freeform mold fabrication. The effects of the process parameters on optical performance such as birefringence, index distribution and surface scattering were carefully studied by theoretical and empirical analysis. Due to the complexity of the injection molding process, single process condition cannot fulfill all the requirements for lens quality, therefore balanced process parameters need to be selected as a compromise for desired specifications. Moreover, fabrication of macro Alvarez lens, micro Alvarez lens array, diffractive lens and Fresnel lens has proven that the advanced mold fabrication and injection molding process can provide an easy and quick solution for freeform optics. In addition, simulation with Moldflow Plastic Insight 6.1 was implemented to verify the experiment results and the prediction of the simulation results was validated using experiment results. Experimental results also showed that injection molding process is capable for precision optics manufacturing with accurate mold compensation and process control. iii Dedicated to my parents iv ACKNOWLEDGMENTS I would like to express my sincere gratitude to my advisor, Professor Allen Yi, for his guidance and support throughout my PhD study and during the completion of this dissertation. I have learned a great deal from his intellectual insight and knowledgeable expertise. It was an invaluable opportunity to work with him and this experience will enrich me for the rest of my life. I also would like to thank Professor Jose M. Castro, Professor L. James Lee and Professor Rebecca B. Dupaix for their service and suggestions on my doctoral committee. I also appreciate the assistance from Professor Thomas Raasch on SHS (Shack-Hartmann Sensor) and Alvarez lens research. I sincerely thank Dr. Nelson Claytor for his valuable discussions during a visit to his company, Fresnel Technologies, Inc. and at CAPCE meetings and for his generous financial support. I would like to thank the members of Professor Yi’s group, for their suggestions and help to my dissertation research. Lei Li helped me in ultraprecision machining and measurement setup. He never hesitated to share with me his invaluable experience. Dr. Chunhe Zhang helped me with machining setup. Greg Firestone taught me how to use CMM (Coordinate Measuring Machine) and thermocouples. Thanks also go to Dr. Anurag Jain, Yang Chen and Lijuan Su for their advice to my research. Special thanks v go to Denia R. Coatney for our cooperation on geometry measurement study and friendship. I also want to thank for the help from the machine shop supervisors in Department of Industrial, Welding and Systems Engineering. Bob Miller provided assistance in setting up the injection molding process which is very important for my research. Mary Hartzler taught me and allowed me use the machines in the basement. The financial support from the graduate school and CAPCE of OSU is gracefully appreciated. Last, but not the least, I would like to thank my parents, Xuye and Xiuhua, and my husband, Jianqing, for their encouragement and support. Without their support, I would not have accomplished what I have. vi VITA April 19, 1977………………………… Born –Anshan, China 2000…………………………................ B.S. Precision Instruments, Measurement and Control Technology, Tsinghua University, Beijing, China 2002…………………………………… M.S. Optical Engineering, Tsinghua University, Beijing, China 2002 – 2004…………………………… Engineer, Nuctech Company Limited, Beijing, China 2004 – 2005…………………………… University Fellow, The Ohio State University 2005 – 2008…………………………… Graduate Fellow, Center for Advanced Polymer and Composite Engineering, College of Engineering, The Ohio State University PUBLICATIONS Research Publication 1. L. Li, A. Y. Yi, C. Huang, D. A. Grewell, A. Benatar, and Y. Chen, “Fabrication of Diffractive Optics by Use of Slow Tool Servo Diamond Turning Process,” Optical Engineering, Vol.45, No.11, 113401, November, 2006. vii 2. A. Y. Yi, C. Huang, F. Klocke, C. Brecher, G. Pongs, M. Winterschladen, A. Demmer, S. Lange, T. Bergs, M. Merz, and F. Niehaus, “Development of A Compression Molding Process for Three-dimensional Tailored Free-form Glass Optics,” Applied Optics, Vol.45, No.25, 6511-6518, September, 2006. 3. L. Li, C. Huang, and A. Y. Yi, “Fabrication of micro and diffractive optical devices by use of slow tool servo diamond turning process,” ASPE Annual Meeting, Norfolk, VA, October 9-14, 2005. FIELDS OF STUDY Major Field: Industrial and Systems Engineering viii TABLE OF CONTENTS Page ABSTRACT………………………………………………………………………… ii DEDICATION……………………………………………………………………… iv ACKNOWLEDGMENTS…………………………………………………………... v VITA………………………………………………………………………………... vii LIST OF TABLES...................................................................................................... xiii LIST OF FIGURES…………………………………………………………………. xiv CHAPTER 1 INTRODUCTION............................................................................... 1 1.1 Research Motivation……………………………………………………………. 1 1.2 Literature Review……………………………………………………………….. 4 1.3 Theoretical models…………………………………………................................ 6 1.4 Research Objective................................................................................................ 10 CHAPTER 2 PRECISION MOLD DESIGN AND FABRICATION ……............. 14 2.1 Lens Design……………………………………………………………………... 15 2.2 Mold Inserts Fabrication………………………………………………………... 16 2.3 Injection Molding Experiments…………………………………………………. 19 CHAPTER 3 GEOMOETERY MEASUREMENT AND COMPENSATION…… 21 3.1 Basic Measurement……………………………………………………………... 21 3.2 Surface Geometry and Part Thickness………………………………………….. 24 ix 3.3 Mold Compensation…………………………………………………………….. 29 3.4 Freeform Measurement…………………………………………………………. 31 3.4.1 Surface Measurement……………………………………………………... 33 3.4.2 Image Reconstruction……………………………………………………... 38 CHAPTER 4 OPTICAL MEASUREMENT……………………………………… 43 4.1 Birefringence (Residual Stress) Measurement………………………………….. 43 4.2 Refractive Index Measurement…………………………………………………. 52 4.3 Optical Effects of Surface Finish……………………………………………….. 57 4.3.1 Theoretical Analysis………………………………………………………. 59 4.3.1.1 Surface Characteristics of a Diamond Machined Surface………... 59 4.3.1.2 Scalar Method for Diffraction and Scattering Calculation……….. 61 4.3.2 Experiment and Measurement…………………………………………….. 63 4.3.3 Results…………………………………………………………………….. 66 4.3.3.1 Comparison of Surface Profile Measurement and Direct Scattering Measurement………………………………………………….. 66 4.3.3.2 Relationship of Molded Surface Quality and Injection Molding Process Conditions………………………………………………………... 71 CHAPTER 5 ALVAREZ LENS MANUFACTURING…………………………... 80 5.1 Alvarez Lens……………………………………………………………………. 80 5.1.1 Alvarez Lens Design……………………………………………………… 80 5.1.2 Alvarez Lens Fabrication…………………………………………………. 84 5.1.3 Alvarez Lens Measurement……………………………………………….. 86 5.1.3.1 Zernike Polynomials……………………………………………… 86 5.1.3.2 Wavefront Aberration Measurement……………………………... 89 x 5.1.3.3 Surface Measurement…………………………………………….. 94 5.2 Micro Alvarez Lens Array……………………………………………………… 96 5.2.1 Mold Design and Fabrication……………………………………………... 97 5.2.2 Measurement……………………………………………………………… 100 5.2.2.1 Microlens Array…………………………………………………... 100 5.2.2.2 Geometry Measurement…………………………………………... 101 5.2.2.3 Surface Roughness………………………………………………... 103 5.2.2.4 Adjustable Focal Length Measurement…………………………... 104 CHAPTER 6 DIFFRACTIVE LENS MANUFACTURING……………………… 108 6.1 Diffractive Lens………………………………………………………………… 108 6.1.1 Lens Design……………………………………………………………….. 108 6.1.2 DOEs Fabrication…………………………………………………………. 110 6.1.2.1 Polar Coordinate – Spiral Tool Path……………………………… 112 6.1.2.2. Cartesian Coordinate – Broaching……………………………….. 113 6.1.3 Profile Measurement……………………………………………………… 114 6.2 Fresnel Lens…………………………………………………………………….. 119 6.2.1 Lens Design……………………………………………………………….. 119 6.2.2 Mold Fabrication………………………………………………………….. 120 6.2.3 Profile Measurement……………………………………………………… 121 6.2.4 Optical Performance Simulation………………………………………….. 125 CHAPTER 7 CONCLUSION……………………………………………………... 129 CHAPTER 8 FUTURE WORK…………………………………………………… 134 APPENDIX A SPECIFICATION OF MOLDING MATERIAL………………….. 136 APPENDIX B SH50M MAIN SPECIFICATION………………………………… 139 xi APPENDIX C PROCESS CONDITIONS FOR FULL FRACTIONAL FACTORIAL EXPERIMENTS………………………………..…………………… 141 APPENDIX D ANOVA RESULTS FOR FULL FRACTIONAL FACTORIAL EXPERIMENTS………………………………..…………………………………... 144 APPENDIX E DEA RESULTS FOR FULL FRACTIONAL FACTORIAL EXPERIMENTS………………………………..…………………………………... 146 REFERENCE……………………………………………………………………….. 149 xii LIST OF TABLES Table Page 3.1 Thermal Properties of Mold insert materials………………………………. 26 3.2 Thickness Measurement Locations………………………………………... 27 5.1 Zernike Polynomials (up to 4th order)……………………………………... 88 B.1 Main specification of SH50M injection molding machine………………... 140 C.1 Process conditions for full fractional factorial experiments……………….. 142 D.1 ANOVA results for full fractional factorial experiments………………….. 145 E.1 DEA results for full fractional factorial experiments……………………… 147 xiii LIST OF FIGURES Figure Page 1.1 Some applications of injection molding optics. (a) f-θ lenses for laser scanner (b) Projection lenses for television (c) Domes for surveillance camera…………………………………………………………………….... 3 1.2 Narrow gap geometry as analyzed by the Hele-Shaw approximation…….. 6 1.3 Advanced Compensation procedure for quality lens injection molding…... 12 2.1 Nanotech 350FG ultra precision machine…………………………………. 17 2.2 Schematic drawing of the ultraprecision machine and diamond machining process (a) Ultraprecision machine (b) Close up view of diamond machining process…………………………………………………………. 18 2.3 Sumitomo SH50M injection molding machine……………………………. 20 3.1 DEA method for total weight vs. standard deviation……………………… 3.2 Thickness and surface measurement setup………………………………… 25 3.3 Thickness measurement comparison between the molded lenses from nickel inserts and aluminum inserts……………………………………….. 28 3.4 Thickness distribution on the molded lens………………………………… 3.5 First round compensated mold insert surface……………………………… 30 3.6 Lens thickness measurement result………………………………………... 31 3.7 Schematic of illumination principle……………………………………….. 32 3.8 Finished nickel mold………………………………………………………. 33 3.9 MicroGlider profilometer………………………………………………….. 34 xiv 23 29 3.10 Measurement coordinate system manipulation……………………………. 3.11 Measurement result of the freeform molded lens (a) Targeted design surface (b) Molded lens surface (c) error between design and molded lens surface………………………………………………………………............ 37 3.12 Snell’s Law………………………………………………………………… 38 3.13 Needed points for refractive ray calculation………………………………. 3.14 Image reconstruction using the CMM measurement………………………. 41 3.15 Image formed by the molded freeform optics……………………………... 41 4.1 Principle sketch of plane polariscope……………………………………… 44 4.2 Retardation comparison with different packing pressure………………….. 47 4.3 Retardation comparison with different mold temperature…………………. 48 4.4 Retardation comparison with different melt temperature………………….. 49 4.5 3D model and birefringence simulation result from Moldflow……………. 50 4.6 Retardation simulation result comparison with different packing pressure…………………………………………………………………….. 51 4.7 Calculation of the slope of the wavefront at individual lenslet……………. 53 4.8 Index measurement setup………………………………………………….. 54 4.9 Wavefront error of the molded lens under different mold temperature in fluid (a) Lower mold temperature (b) Higher mold temperature………….. 55 4.10 Wavefront error of the molded lens under different packing pressure in fluid (a) Higher packing pressure (b) Lower packing pressure………….… 56 4.11 Wavefront error of the molded lens under different packing pressure in air................................................................................................................... 57 4.12 Profile of a typical diamond machined surface……………………………. 4.13 Specular reflection, high order diffraction and scattering from the diamond machined surface in Figure 4.12………………………………… 60 4.14 Diffraction from a diamond machined surface…………………………….. 62 xv 35 39 59 4.15 Schematic of phase shift interferometry ………………………………….. 64 4.16 Setup of the scattering measurement device………………………………. 65 4.17 Scattering measurement system…………………………………………… 66 4.18 Comparison of the mold insert and molded lens (a) 3D surface profile of a 20 μm tool mark spacing mold insert, measured by Veeco white light profilometer (b) 3D surface profile of the molded lens, measured by Veeco white light profilometer (c) Calculated average 1D spectrum of the same mold surface (d) Calculated average 1D spectrum of the same molded lens surface (e) Directly measured surface scattering of the same mold surface (f) Directly measured surface scattering of the same molded lens surface……………………………….................................................... 70 4.19 Experimental results of the lens molded under different packing pressure (a) First order diffraction intensity (b) Surface roughness measured by Veeco (c) Measured tool mark depth……………………………………… 73 4.20 Experimental results of the lens molded under different mold temperature (a) First order diffraction intensity (b) Surface roughness measured by Veeco (c) Measured tool mark depth……………………………………… 76 4.21 Experimental results of the lens molded under different melt temperature (a) First order diffraction intensity (b) Surface roughness measured by Veeco (c) Measured tool mark depth……………………………………… 78 5.1 Schematic drawing of Alvarez lens pair…………………………………… 81 5.2 Alvarez lens mold insert and molded lens (a) Alvarez lens mold (b) Molded freeform lenses………………………………………………... 85 5.3 Measurement Setup for Alvarez Lens……………………………………... 5.4 Low order Zernike coefficients of the molded Alvarez lens pair while the relative x-axis translation………………………………………………….. 91 5.5 RMS value of the molded Alvarez lens pair while the relative x-axis translation………………………………………………………………….. 92 5.6 RMS value of the molded Alvarez lens pair while the relative x-axis translation under different packing pressure………………………………. 93 5.7 RMS value of the molded Alvarez lens pair while the relative x-axis translation under different mold temperature……………………………… 93 xvi 90 5.8 Retardation of the molded Alvarez lens under different process parameters………………………………………………………………….. 94 5.9 Alvarez lens geometry measurement………………………………………. 95 5.10 Schematic drawing of Alvarez lens array………………………………….. 98 5.11 Broaching CNC tool path………………………………………………….. 99 5.12 Machined micro Alvarez lens array mold insert…………………………... 101 5.13 Design and 3D measurement results (a) Design (b) Measurement result of lenslet in the middle of the array (c) Difference between the lenslet in the middle of the array and design (d) Difference between the lenslet in the middle and at the edge on the molded microlens array……………………. 103 5.14 Test setup for measuring the focal length of a molded microlens array pair…………………………………………………………………………. 105 5.15 Focal length measurement result…………………………………………... 6.1 General concept of a DOE’s function (amplitude type)…………………… 109 6.2 Design of 256 level DOE………………………………………………….. 110 6.3 SEM picture of the half-radius diamond tool……………………………… 111 6.4 Spiral CNC tool path for DOE fabrication………………………………… 113 6.5 Broaching CNC tool path for DOE fabrication……………………………. 114 6.6 Sectional SEM scan of a 256-level DOE………………………………….. 116 6.7 Sectional AFM scan of the 256-level DOE design………………………... 117 6.8 Sectional AFM line scan of the 256-level DOE design…………………… 118 6.9 Fresnel lens design……………………………………………………........ 120 6.10 Fresnel lens mold insert and molded lens………………………………….. 121 6.11 Measurement result from SEM……………………………………………. 122 6.12 Feature comparison with different mold temperature……………………... 123 6.13 Feature comparison with different packing pressure………………………. 124 xvii 106 6.14 Feature comparison with different melt temperature……………………… 125 6.15 Designed lens diffractive pattern distribution……………………………... 127 6.16 Lens 1 which is under higher packing pressure diffractive pattern distribution…………………………………………………………………. 127 6.17 Lens 2 which is under lower packing pressure diffractive pattern distribution…………………………………………………………………. 128 A.1 Product data sheet for Plexiglas® V825…………………………………… A.2 Product data sheet for Plexiglas® V825 (Figure A.1 continued)…………... 138 xviii 137 CHAPTER 1 INTRODUCTION 1.1 Research Motivation A lens is an optical device that transmits or refracts light to either concentrate or diverge. It is usually formed from a piece of shaped high purity glass or plastic. A high precision lens is manufactured with very high tolerances, and a slight defect in the lens can cause it to focus the light beam improperly, making it completely ineffective for its intended purpose. The optical aberrations can result from geometry deviation, surface roughness, sub-surface defects from fabrication process, physical and mechanical properties of the optical material and optical conditions, etc. Applications that use high precision lens include medical and military equipment, collision-avoidance devices for the transportation industry, and scientific testing devices. High precision lenses are generally made of glass and require high shape accuracy (a few microns or less) and smooth surfaces (Ra ~ 2 ~ 20 nanometers) and a minimum subsurface damage (< 50 nm) [Fahnle, 1988]. The performance of a lens therefore largely depends upon the fabrication process which needs to be carefully designed in order to meet optical requirements. 1 Due to some theoretical limitation of the traditional symmetrical optical elements, freeform elements are now beginning to be used in more applications, such as photograph, illumination, optometry and many others. Freeform optical surfaces are defined as those that do not have rotational symmetry and sometimes cover those that have rotational symmetry but with aspheric surface. The lens arrays are also included among freeform optics, since they face the same problems in fabrication, alignment and metrology as the general freeform optics. This category of optics has its obvious advantages in reduction of optical aberrations, system components and favorable positioning of optical elements. This means that freeform optics can replace some of the spherical optics if they can be improved with respect to geometry accuracy and ease of production at a comparable cost. However, the design, fabrication (including direct fabrication and molding) and metrology for freeform elements remain a difficult, case by case and complex task. The conventional production of precision lenses is by all means a complicated process and involves progressive material removal from a raw glass blank by grinding, lapping and polishing operations to obtain a finished optical component. This process is more suitable for manufacturing spherical glass lenses because of their simple geometry. However, the grinding and polishing process makes it difficult to produce freeform surface shapes economically other than sphere or flat using glass materials. As compared to glass optics fabrication, the injection molding process makes it feasible to economically produce more complicated optical shapes such as aspheric lenses, diffractive lenses and freeform lenses in plastic when the optical mold is well designed (compensated) and fabricated. Moreover, injection molding process can be used for high 2 volume production, thus the unit cost can be very low. For these apparent advantages, injection molded polymer optics become alternative components in many applications. For example, the pickup lenses for DVD (digital video disk) or CD (compact disk) players and micro lenses for cellular phones are injection-molded of plastics. Figure 1.1 shows some examples of injection molded optics. These optics include f-θ lenses used in scanner, projection lenses for rear projection television and plastic domes for camera systems. (a) (b) (c) Figure 1.1: Some applications of injection molding optics. (a) f-θ lenses for laser scanner (b) Projection lenses for television (c) Domes for surveillance camera Although injection molding polymer optics is increasingly used in industry for many applications, the requirements for image quality are not demanding. However, for precision optical components, optical functionality is always the most important concern for producers and consumers. Recently more requirements in product quality for the injection molding optics are expected. For example, at Videolarm corporate (www.videolarm.com), improvements in domes for surveillance camera are needed for 3 both geometry accuracy and residual stress level to match the high resolution cameras that are being introduced to the system. Some of the drawbacks for injection molded optics include geometry deviation from the original mold design and inhomogeneous index distribution during manufacturing. The geometry deviation resulted from volume shrinkage and warpage are strongly dependent on process conditions. The inhomogeneous index distribution resulted from the residual stresses and non-uniform molecular orientation in the injection molded parts. These are the main reasons that injection molded polymer optics are not suited for high precision applications. Therefore, investigation in injection molding process for high precision polymer lenses is critical to solving the technical issues associated with surface conformance to design and ultimately providing an affordable high precision manufacturing process for satisfactory optical performance. This dissertation research is focused on precision polymer optics fabrication by injection molding. The study involves both experimental approach and numerical modeling in order to identify the proper polymer lens manufacturing processes. The scope of this research includes investigation in optical design, mold and lens fabrication, as well as optical metrology related to polymer lens manufacturing. 1.2 Literature Review In previous research involving in polymer injection molding, most of the work was focused on determining of process parameters in order to optimize part quality. 4 Many approaches, including mathematical modeling, numerical simulation, process windows, design of experiment, expert systems, artificial neural networks, case based reasoning, genetic algorithms, and evolutionary strategies, have been tested [Isayev, 1987; Mok, 1999; Kwak, 2005; Shen, 2004; Tan, 1997; Kumar, 2002; Lu, 2001]. With an ever increasing demand on molded part quality, more sophisticated studies were carried out. Shape deformation including shrinkage and warpage, residual stress distribution, molecular orientation, and cooling system were performed by many researchers [Young, 2004; Choi, 1999; Wimberger-Friedl, 1995; Kang, 1998; Liou, 1989]. The above mentioned research activities were conducted with great details but did not address the issues concerning mold compensation for high precision polymer lenses. This dissertation research will demonstrate our efforts to modify the mold design and fabrication in order to compensate the geometrical and optical deviation from design. Our investigation will be focused on study of the effects of the process parameters and on development of the process and methodology to fabricate the freeform lenses with high accuracy and efficiency. On a different note, for high precision optical systems, freeform optics can provide a practical solution for some design and manufacturing problems. Notably, microlens arrays or diffractive optical elements can be injection molded in high volume at a low cost. Numerous publications highlighted the contributions to this field such as the effects of the process variables and size of the micro features for the molded parts [Gale, 1997; Sha, 2007]. However the success of the process also relies on the fabrication of the mold inserts. Fewer articles discussed the advanced mold fabrication 5 issue. This dissertation research will develop a methodology that is different from the traditional fabrication processes in the sense that not only macro size but micro lenses mold was also simultaneously machined using STS (slow tool servo) process. In addition, contact and non-contact measurement and data analysis methods will be developed for freeform polymer lens replication technology in this dissertation research. 1.3 Theoretical models Because most injection molded polymer products have asymmetrical configurations and the rheological response of polymer melt is generally non-Newtonian and non-isothermal, it is difficult to analyze the filling process without simplifications. The GHS (generalized Hele-Shaw) flow model is the most common approximation that provides simplified governing equations for non-isothermal, non-Newtonian and inelastic flows in a thin cavity as shown in Figure 1.2 which is recreated from [Dantzig, 2001]. z y x Vin or Pin Polymer melt 2b Figure 1.2: Narrow gap geometry as analyzed by the Hele-Shaw approximation 6 The assumptions [Su, 2004] of the GHS flow model are: (1) The thickness of the cavity is much smaller than the other dimensions. (2) The velocity component in the direction of thickness is neglected, and pressure is a function of x and y only. (3) The flow regions are considered to be fully developed Hele-Shaw flows in which inertia and gravitational forces are much smaller than viscous forces. (4) The flow kinematics is shear-dominated and the shear viscosity is taken to be both temperature and shear rate dependent. The detailed derivation has been developed by Hieber and Shen [Hieber, 1980]. In view of these assumptions and neglecting compressibility during the filling stages, the momentum equation in the Cartesian coordinate system reduces to: 0= ∂ ⎡ ∂υ x ⎤ ∂P − η ∂z ⎢⎣ ∂z ⎥⎦ ∂x (1-1) 0= ∂ ⎡ ∂υ y ⎤ ∂P ⎢η ⎥− ∂z ⎣ ∂z ⎦ ∂y (1-2) Where υ x and υ y are velocity components in the x and y directions, respectively; P(x, y) is the pressure, η (γ&, T ) is the shear viscosity, γ& is the shear rate and T is temperature. Under the present assumptions, γ& is given by 7 1/ 2 ⎧⎪ ⎡ ∂υ ⎤ 2 ⎡ ∂υ y ⎤ 2 ⎫⎪ γ& = ⎨ ⎢ x ⎥ + ⎢ ⎥ ⎬ ⎪⎩ ⎣ ∂z ⎦ ⎣ ∂z ⎦ ⎪⎭ (1-3) Because of the temperature difference between mold and polymer melt and the viscous heating inside the flow, the filling process should be treated as a non-isothermal case. Heat conduction in the direction of flow is neglected based on the assumption that the thickness 2b is much smaller than the other two dimensions. The energy equation in the melt region becomes ⎡ ∂T ∂T ∂T ⎤ ∂ 2T +υx +υy = k + ηγ& 2 2 ⎥ ∂x ∂y ⎦ ∂z ⎣ ∂t ρc p ⎢ (1-4) Where the ηγ& 2 is the viscous heating term, and ρ , c p and k are density, specific heat and thermal conductivity, respectively. For simplicity, it is assumed that the velocities of polymer melt on the mold surfaces are zero and the temperature of mold remains at Tw during filling. The boundary conditions are given by υ x = υ y = 0 at z = b T = Tw ∂v x ∂v y = = 0 at z = 0 ∂z ∂z ∂T at z = ±b = 0 at z = 0 ∂z (1-5) Applying the lubrication approximation, the thickness-averaged continuity equation results in 8 ∂ (bυ x ) ∂ (bυ y ) + =0 ∂x ∂y (1-6) Where υ x and υ y are averaged velocities over z, and b is half of the thickness. The velocities and shear rate can be obtained as υx = Λ x ∫ b z ~ b ~ z ~ z dz , υ y = Λ y ∫ d~ z η z (1-7) η zΛ γ& = (1-8) η Where Λx = − ∂P , ∂x Λy = − ∂P ∂y and [ Λ = Λ2x + Λ2y ] 1/ 2 (1-9) In addition, the gapwise-averaged velocities are obtained as: υ x = (Λ x / b) S , υ y = (Λ y / b) S (1-10) Where S is the flow conductance which is defined as b z2 0 η S=∫ dz Hence, substituting (1-10) into (1-6) gives: 9 (1-11) ∂ ⎡ ∂P ⎤ ∂ ⎡ ∂P ⎤ S S + =0 ∂x ⎢⎣ ∂x ⎥⎦ ∂y ⎢⎣ ∂y ⎥⎦ (1-12) As can be seen, the equations of this model are nonlinear and coupled. It is difficult to solve them analytically. In this dissertation research, simulation software Moldflow Plastic Insight 6.1 will be used to simulate the process and experiments will be conducted to verify the theory and simulation results. 1.4 Research Objective Modeling and optimization of injection molding process for polymer optics have been studied extensively for a long time. Previous studies were focused on the effects of the process variables and material properties to obtain the optimal condition and improve the part quality. However, only a few publications showed efforts in modifying mold design and fabrication to compensate the geometry and optical deviation from design. None provided a general strategy for low cost, high precision lens manufacturing. Also fabrication and measurement of macro and micro freeform polymer optics were not systematically studied before. Thus the overall objective of the dissertation research is to develop a methodology to obtain high precision macro and micro polymer freeform optics with accurate geometry and proper optical performance by the state-of-the-art mold fabrication technology. The polymer optics fabricated by injection molding are usually not suitable for high precision applications due to issues related to geometry deviation, inhomogeneous index distribution, birefringence and thermal instability of molded polymer lenses. The 10 geometrical deviation of the molded lenses will be used for mold compensation in this dissertation research. In an optical assembly, optical path length is equal to the product of the physical dimension of the medium and the refractive index. Therefore, the index deviation should also be included for mold compensation. By obtaining the index variation in the molded lens under specific process conditions, the modified mold inserts can be designed and fabricated by combining the surface and thickness measurement results and index distribution. The residual stresses and surface scattering will also be optimized under the same process condition. With the modified mold (generally a freeform shape), the molded lens will have improved optical performance. The advanced iteration compensation procedure is shown in Figure 1.3. 11 Set optimal process condition Freeform Mold design and fabrication Lens molding process Lens OPD (optical path difference) test Lens optical performance test (birefringence and optical scattering) Acceptable? Yes Quality lens collection No Geometry measurement Index variation measurement Figure 1.3: Advanced compensation procedure for quality lens injection molding The specific objectives of this dissertation research can be summarized as: • Investigate the feasibility of using injection molding process to manufacture high precision polymer lenses by performing experiments (both axisymmetrical and freeform lenses) and evaluating surface geometry and optical performance. 12 • Explore the effects of process variables and material property to perform process optimization for specific objective function (surface shape deviation, birefringence, optical retardation, optical scattering). • Improve current measurement method to obtain real freeform surface shape, part thickness and optical performance. • Develop a methodology to design and fabricate modified mold inserts to compensate geometry error and optical aberration for the molded optics. • Design and fabricate multiple freeform mold inserts and obtain functional injection molded freeform optics including compensated lens, Alvarez lens, micro Alvarez lens arrays and diffractive lenses. 13 CHAPTER 2 PRECISION MOLD DESIGN AND FABRICATION Injection molding polymer optical components are used for its high volume and lightweight capability over traditional glass optics. Injection molding is an inherent freeform process thus complex geometry (including aspherical and freeform) can be readily manufactured. However several difficult issues associated with the injection molded optics have hindered the implementation of injection molding process in wider applications. These issues include geometry deviation and inhomogeneous index distribution due to thermal shrinkage; birefringence incurred during the molding process also limited the adoption of polymer optics in certain polarization sensitive optical systems; thermal instability of molded polymer lenses can also render the optics less effective in application where temperature changes become large and frequent (such as optics designed for out door use or high temperature applications). In this research, our goal is to establish a high precision polymer lens manufacturing protocol based on the state-of-the-art ultraprecision machining technologies. Specifically, two focused research subjects were studied: injection molding of macro (imaging optics) and micro optics (including microlens array and diffractive 14 optics). In a departure from previous approaches where modifications of process conditions or material properties were the first choice, our aim was to utilize the newly acquired freeform optical fabrication capability using ultraprecision machining process to compensate for optical performance degradation due to injection molding process variability. By precisely measuring the optical retardation and surface deviation resulted from molding process variations, accurate surface geometry of a freeform mold can be constructed. To obtain an injection molded lens for optical applications, three steps need to be completed in sequence. 2.1 Lens Design In this part of the proposed research, two types of optical lenses will be studied. The first type includes precision imaging optics and ophthalmic lenses. The second type is micro optics, specifically issues related to design and fabrication of microlens array and diffractive optics will be studied. For regular lenses, commercial optical design software such as Zemax® (www.zemax.com) and Code V® (www.opticalres.com) are often used to obtain the surface profile and other dimension information. In this research dissertation, a plano lens is chosen for its simple characteristic since plano lens will simplify the shape measurement, surface diffraction, residual stress and birefringence measurement and 15 index measurement. The methodology developed based on the plano lens can be then implemented in other applications without loss of generality. In addition to the plano lenses, lenses with a non axisymmetrical surface profile will also be molded using modified molds in this research. Since traditional fabrication method for freeform elements is difficult or costly, or time consuming, freeform lens manufacturing process has not been used for high volume and low cost production. For this dissertation research, advanced fabrication methods will be developed and precision freeform optics will be fabricated. 2.2 Mold Inserts Fabrication Mold inserts for polymer optics must have optical quality. The inserts used in this research were fabricated on the Moore Nanotech 350FG machine, a state-of-the-art 5-axis ultraprecision diamond machine. The machine is shown in Figure 2.1. Typical applications for this machine include axisymmetric machining of aspheric and toroidal surfaces, raster flycutting of freeform, linear diffractive, and micro-prismatic optical structures, as well as slow tool servo (www.nanotechsys.com). 16 machining of freeform surface Figure 2.1: Nanotech 350FG ultra precision machine The 350FG (Freeform Generation) ultraprecision machine used in this study was built by Moore Nanotechnology, Inc. It has three linear axes that are equipped with linear laser-scales capable of resolving 8.6 nm at a maximum speed of 1800 mm/min. The straightness on all slides is less than 250 nm over the entire travel up to 350 mm. The work spindle is capable of reaching 6,000 rpm while maintaining axial and radial error motion of less than 25 nm. The work spindle can also maintain angular position to less than 0.5 arc sec in a modulated mode. The main specifications of the ultraprecision machine were detailed elsewhere [Tomhe, 2003]. The C axis was fixed during freeform broaching process while during slow tool servo machining process, the C axis rotated with accurate control. The diamond tool was located on Z axis. Figure 2.2 illustrates the machine operation and the details of the freeform machining process. Arrows in Figure 2.2 (a) indicate positive directions of the linear axes. 17 Y Diamond tool Z(X,Y) Freeform optic X (a) (b) Figure 2.2: Schematic drawing of the ultraprecision machine and diamond machining process (a) Ultraprecision machine (b) Close up view of diamond machining process With this machine, the inserts can be fabricated with very low surface roughness (Normally Ra is in several nanometers), therefore no post machining polishing is needed. For plano lens mold inserts, the initial inserts can be fabricated by traditional SPDT (single point diamond turning) process. The following modified mold inserts are fabricated by slow tool servo process to create the nonsymmetrical surface profile. The slow tool servo process makes the freeform inserts with accurate geometry and optical finish in one single operation. After the mold inserts are diamond machined, non contact measurement is preferred to measure the surface geometry to protect the optical surface finish. Apart from imaging optical lenses, although individual optical elements in a microlens array or diffractive components may have an axisymmetric curve, multiple 18 micro lenses arranged in a matrix format can be treated as a freeform surface and therefore fabrication method used to produce freeform surfaces can be employed to generate the array. The method is different from traditional fabrications processes in the sense that the micro lenses were simultaneously machined using slow tool servo process. A rapid optical manufacturing process from mold making to completed polymer optics based on STS (slow tool servo) will be developed. 2.3 Injection Molding Experiments In the injection molding experiments, PMMA (Polymethyl methacrylate), code named Plexiglas® V825, is selected. The specification of this polymer material is shown in Appendix A. Injection molding process is very complicated since more than two hundred variables are involved in the whole process [Greis, 1983]. However, under the conditions that are crucial to our experiments, only several parameters are important to the part quality therefore will be the focus in our study. These parameters include mold temperature, polymer melt temperature, packing pressure, packing time and cooling time. These parameters will be set to different levels to complete a full fractional factorial experiment to optimize the process condition. To evaluate the part quality under each process condition, the collected parts need to be consistent in the concerned specification. For our experiments, the initial ten trial parts will be made and discarded then five or ten parts will be collected for measurement. The room temperature and humidity are also important for the part quality, so any selected experiments will be conducted in one single day to keep the environmental condition consistent. All the experiments in this 19 research dissertation were conducted on Sumitomo SH50M injection molding machine shown in Figure 2.3. The specification of SH50M is listed in Appendix B. Figure 2.3: Sumitomo SH50M injection molding machine 20 CHAPTER 3 GEOMOETERY MEASUREMENT AND COMPENSATION Although optics fabricated by injection molding are increasingly used in industry, requirements for image quality in many applications are not necessarily demanding. However, for precision optical components, optical functionality is the most important factor for producers and consumers. The geometry deviation resulted from volume shrinkage and warpage is one of the drawbacks for injection molded optics. This is the main reason that prevents injection molded optics from being used in high precision applications. Therefore, investigation in injection molding process for high precision polymer lenses is critical to solving the technical issues associated with surface conformance to design and ultimately providing an affordable high precision manufacturing process for satisfactory optical performance. 3.1 Basic Measurement The quality of the injection molded components is strongly dependent on process conditions. For this research, the optimal process conditions were obtained with the aid 21 of DOE (Design of Experiments) and DEA (Data Envelopment Analysis) methods according to basic measurement results. The mold inserts were made of copper nickel C715 (www.farmerscopper.com) and the design was a plano lens with diameter of 50 millimeters and thickness of 3 millimeters. After initial tuning of the process, five parameters in different levels were set up for a full factorial design of experiments. Seventy-two experiment conditions were listed in Appendix C. For the plano lens, both the diameter and the thickness of the injection molded part were measured. A micrometer was opted for diameter measurement and a precision indicator was used for thickness measurement on specific position. A precision scale was used for part weight measurement. Every part was measured and the average and standard deviations were calculated for each group under the same process condition. The measurement data (total weight and its standard deviation) were processed using ANOVA (analysis of variance) built in MINITAB and DEA to obtain the effects of the process variables and the optimal conditions (Refer to Appendix D and Appendix E). From ANOVA results, melt temperature, mold temperature, packing pressure were found to be the most important variables and cooling time, packing time were less important. The conclusion from ANOVA results just narrowed down the critical process parameters for the following study. From DEA results, four process conditions (Condition 12, 27, 32 and 36) were obtained which means they were better choices for designated objective functions. As optimal process condition, Condition 12 (melt temperature 210 °C (450 °F), 22 mold temperature 65 °C (150 °F), cooling time 40 sec, packing pressure 76.3 MPa (35%) and packing time 7.5 sec) was chosen for the following study. The result for total weight vs. standard deviation by DEA is shown below and four optimal conditions are marked on Figure 3.1. Total Weight vs Standard Deviation 0.0400 Standard Deviation 0.0350 0.0300 0.0250 0.0200 0.0150 0.0100 0.0050 0.0000 20.1 20.2 20.3 20.4 20.5 20.6 20.7 20.8 20.9 21 Total Weight (grams) Figure 3.1: DEA method for total weight vs. standard deviation These basic measurement results provide qualitative analysis and show the process consistency and comparison of the rough dimension of the molded lens to the design. However, they cannot be used to assess the part optical performance due to the rough measurement and different merit functions. The main benefit from these results is 23 to narrow down the critical process parameters and choose one optimal condition for following studies. 3.2 Surface Geometry and Part Thickness The surface geometry accuracy on a lens is critical to its optical performance. The deviation of the molded surface with the design surface will introduce unwanted aberrations in an optical assembly. Each single surface geometry and part thickness need to be measured accurately and the aberration from the geometry can be estimated for the following compensation scheme. The surface geometry and part thickness can be measured by two LVDTs (linear variable difference transformers) mounted on the 350 FG machine (Figure 3.2(b) as viewed in the Z direction). The axial movement accuracy of the 350 FG machine is only several nanometers, much higher than the molded surface geometry deviation. The two LVDTs are coaxially mounted and the molded part surface is perpendicular to the direction between two LVDT tips. accuracy for thickness measurement as shown in Figure 3.2. 24 This setup provides the (a) 350 Machine Frame (b) LVDT setup Figure 3.2: Thickness and surface measurement setup The molded lens is held on the machine main spindle and the LVDT setup is installed on the Z slide (as shown in Figure 3.2 (b)). Since the valid measurement range of LVDT is only ±100 µm, the spindle and Z slide moving position for each measurement point should be preset on the estimated spot to prevent probe from over-traveling. The geometry of each surface can be obtained from single surface LVDT measurement data on the same side after removing the tilt error. The thickness can be obtained from both surface LVDT measurement data for the corresponding pair of points. By modifying the part holder and keeping a constant environment condition (temperature, noise etc), the measurement repeatability were maintained to less than 0.4 µm. Only selected non-ferrous materials can be machined by diamond turning process to optical quality without polishing, so in this dissertation research aluminum and copper 25 nickel alloy were chosen to fabricate mold inserts. The thermal properties of the mold insert materials are listed in Table 3.1. CTE*, linear 250 °C Specific Heat Capacity Thermal Conductivity Copper Nickel C715 16.2 µm/m-°C 0.380 J/g-°C 29.0 W/m-K Aluminum 6061 T6 25.2 µm/m-°C 0.896 J/g-°C 167 W/m-K * Coefficient of Thermal Expansion Table 3.1: Thermal properties of mold insert materials Due to the different material thermal properties, even under same process condition, the molded parts by using different mold insert materials also will be different in final shape such as part thickness P-V (peak to valley) value. The thickness of the molded plano lenses from nickel inserts and aluminum inserts but under same process condition was measured in the locations listed in Table 3.2. The center of the molded lens was set as origin of the coordinate system and Y axis and Z axis were in the same direction as the machine coordinate system. The measurement area for surface geometry and thickness was limited by the dimensions of the lens holder and LVDT probes, so the area that is close to the edge of the molded lenses could not be measured by current measurement setup. For this study, the radius of the measurement area was 12 mm to avoid the interference between the lens holder and the probes. 26 Location 1 2 3 4 5 6 7 8 9 10 11 12 13 Y (mm) 0 -6 0 6 -12 -6 0 6 12 -6 0 6 0 Z (mm) -12 -6 -6 -6 0 0 0 0 0 6 6 6 12 Table 3.2: Thickness measurement locations The measurement results from nickel inserts and aluminum inserts are shown in Figure 3.3. The thickness P-V value of the molded plano lenses with copper nickel C715 inserts was about 20% less than that with aluminum 6061 inserts. Since aluminum is easier to machine, aluminum was again chosen as main mold insert material for the following experiments in this dissertation research. The measurement results from different mold materials also show the same tendency for the thickness distribution on the molded lens, therefore, the conclusions from the following experiments which were based on aluminum inserts can be applied for the molded lenses with copper nickel inserts. 27 Figure 3.3: Thickness measurement comparison between the molded lenses from nickel inserts and aluminum inserts With the aluminum flat mold inserts, the P-V value of the thickness deviation of the molded plano lens is about 7 µm from the first experiment round under condition 12 (melt temperature 210 °C (450°F), mold temperature 65 °C (150 °F), cooling time 40 sec, packing pressure 76.3 MPa (35%) and packing time 7.5 sec) on all measurement locations. Figure 3.4 shows the thickness measurement results. From the figure, it can be seen that the square area was measured due to the constraints for measurement point selection. The lens compensation scheme that would be implemented was based on this measurement result. 28 Figure3.4: Thickness distribution on the molded lens 3.3 Mold Compensation When lens geometry and thickness measurement are performed, the amount of mold compensation can be determined under the same process condition. First, the difference between the measured molded lens surfaces and design surface profile can be obtained. Second, the surface geometry can be fitted by Zernike polynomials (details will be explained later), which is a convenient tool for wavefront description. The compensated mold surface will be a complex freeform surface. Finally, slow tool servo machining will be used to fabricate the compensation mold with optical surface quality. With this mold insert, the molded lens should have better geometry and optical 29 performance that can be quantified using the techniques described in this dissertation research. The first round compensation is based on the molded lens thickness measurement results from aluminum flat mold inserts. The modified mold insert surface is shown in Figure 3.5. The analytical expression for the fitted surface is second order Zernike polynomials. The P-V value for the modified mold surface with 40 mm in diameter is about 11 µm to compensate the uneven thickness of the molded lens with flat mold insert. The first round compensated mold insert surface is also fabricated with Aluminum 6061. Figure 3.5: First round compensated mold insert surface The lens thickness measurement results are shown in Figure 3.6. The blue line is the molded lens thickness measurement result from original flat mold insert. The red and 30 black lines are two molded lenses from the first round compensated mold insert. The measurement locations can be referred in Table 3.2. 2.938 Thickness (mm) 2.936 flat mold 2.934 modified mold modified mold 2.932 2.93 2.928 2.926 0 2 4 6 8 10 12 14 Location Figure 3.6: Lens thickness measurement result From the measurement shown in Figure 3.6, it can be seen there is more than 50% improvement on the thickness variation for the molded lens after compensation comparing with the original lens. The compensation method for lens quality improvement has been proven to be effective. The further work will be focused on improvement in compensation results. 3.4 Freeform Measurement Benefiting from continuing research and development, freeform optical surface are now becoming a practical solution to many optomechanical designs. However, because of the asymmetrical geometry of the freeform optics, it is difficult to obtain 31 accurate surface curvature information of the freeform components. In this dissertation research, a methodology for freeform measurement and data analysis was introduced. The optical lens used in this research has a 3D tailored free-form surface. Three dimensional tailoring is a constructive method for the design of freeform illumination optics [Ries, 2002]. Light from a point source is transmitted by the freeform lens and redirected to cast a prescribed illumination distribution on an image surface. The exact shape of the lens surface is calculated by solving a set of differential equations that describe a piecewise smooth surface, the desired trimming, and the redirection of radiation defined by the slope and the curvature of the surface. The second surface of the glass lens is flat. Figure 3.7 shows the 3D tailored free-form lens that refracts the light rays from a point light source to form the Fraunhofer Institute for Production Technology (IPT) logo as bright lines on a flat screen (the image plane). The finished lens has a diameter of 20 mm, and the image has a size of 20 mm×20 mm. Projection Molded freeform lens 20 mm (Point) Light source 20 mm Figure 3.7: Schematic of illumination principle 32 Due to the complexity of the current freeform surface design, an FTS (fast tool servo) designed with aerostatic ways was chosen to machine the free-form lens mold in this research. The fast tool servo unit was developed at Fraunhofer IPT [Weck, 1999]. In Figure 3.8, a finished nickel alloy electrolytically plated on the stainless steel substrate freeform mold is shown. Figure 3.8: Finished nickel mold The low Tg freeform lens was fabricated by a Toshiba precision glass molding press series 211V. After molding, the finished lenses were cleaned and thermally saturated in the metrology room where temperature is controlled at 20 ± 0.05 °C for at least 24 hours before curve and surface roughness measurements were performed. 3.4.1 Surface Measurement Molded lenses were measured using the MicroGlider profilometer (Fries Research and Technology GmbH, Friedrich-Ebert-Strasse, D-51429 Bergisch Gladbach, Germany, 33 shown in Figure 3.9). The lateral accuracy (both x and y) is 2 μm, and the vertical accuracy is ± 0.1 μm. The vertical axis resolution is 2 nm. Figure 3.9: MicroGlider profilometer To generate the error map, the design values of the freeform optical surface need to be compared to the corresponding measured molded lens surface. However, since there are no fiducial marks on the functional freeform lens surface, during the measurement, the molded lens cannot be positioned with the same orientation and leverage. To obtain the actual error between the design and molded lens, the measured surface need be manipulated in all three linear translations and three angular rotations shown in Figure 3.10 until the minimal error was reached [Li, 2004]. 34 Z Z’ X X’ Y Y’ Design Coordinate System Measurement Coordinate System Figure 3.10: Measurement coordinate system manipulation The rotation transformations can be expressed as the following matrices: 0 ⎡1 ⎢0 cos θ R x (θ ) = ⎢ ⎢0 sin θ ⎢ 0 ⎣0 ⎡cos θ ⎢ sin θ R z (θ ) = ⎢ ⎢ 0 ⎢ ⎣ 0 ⎡1 ⎢0 T (r ) = ⎢ ⎢0 ⎢ ⎣0 [ v = vx vy 0 1 0 0 0 − sin θ cos θ 0 − sin θ cos θ 0 0 0 0 1 0 0⎤ 0⎥⎥ 0⎥ ⎥ 1⎦ ⎡ cos θ ⎢ 0 R y (θ ) = ⎢ ⎢− sin θ ⎢ ⎣ 0 , 0 sin θ 1 0 0 cos θ 0 0 0⎤ 0⎥⎥ 0⎥ ⎥ 1⎦ and 0⎤ 0⎥⎥ . The translation transformation can be expressed as 0⎥ ⎥ 1⎦ 0 rx ⎤ 0 ry ⎥⎥ . The 3D position vector v was replaced with its 4D version 1 rz ⎥ ⎥ 0 1⎦ ] v z 1 . The homogeneous transformation matrix is obtained by combining a sequence of rotation and translation transformations ( M = R x ⋅ R y ⋅ R z ⋅ T ) and the new 35 position vectors can be obtained by left multiplying M with the original 4D position vector. The objective function is the difference between the corresponding points on the design surface and molded lens surface. The minimal error was obtained by optimizing the objective function with optimal axial rotation angles and translations using NelderMead simplex (direct search) method built in Matlab fminsearch function. Figure 3.11 shows the 3D plots of the lens surface design, molded lens surface and error between these two surfaces after data manipulation described above. After optimizing the three direction translations and three axis rotations, the error between the design and the molded lens surface is around ± 3.5 μm. Since the maximum vertical measurement was limited to 300 μm on the model that was used, stitching was utilized to create the measurements over the entire optical surface (which corresponded to the vertical deviation of approximately 1.28 mm). The stitching created slight bumps on the measurement as seen in Figure 3.11 (c). (a) Targeted design surface 36 (b) Molded lens surface (c) Error between design and molded lens surface Figure 3.11: Measurement result of the freeform molded lens 37 This section described the steps for freeform surface measurement and data analysis which can be applied in freeform component fabrication industry as a methodology and quantify the geometry accuracy. 3.4.2 Image Reconstruction The freeform lens surface was re-measured on a Sheffield Cordax coordinate measuring machine (CMM). The measurement results can be used to reconstruct the image using ray trace method based on Snell’s law shown in Figure 3.12. A N θ1 n n’ sin θ1 n' = sin θ 2 n θ2 A’ Figure 3.12: Snell’s Law Snell’s law gives the relationship between angles of incidence and refraction for a wave impinging on an interface between two media with different indices of refractions. According to reference [Yin, 1996], Snell’s law can be expressed as vector format: 38 nA × N = n' A'× N and in this formula A, N, A’ are unit vectors. The refractive vector can be obtained as: A' = n [A − N ( A ⋅ N )] + N 1 − ( n ) 2 + ( n ) 2 ( A ⋅ N ) 2 . So for refractive ray n' n' n' calculation, incident ray vector, normal vector and refractive index are needed. However, due to the irregularity of the freeform surface, the normal vector on the object point need be calculated by multi-cross product method [Lin, 2003] with its four nearest points. The coordinates of the objects point and its four nearest points are shown in Figure 3.13. P2(xi,yi+1,z2) P3(xi-1,yi,z3) P1(xi+1,yi,z1) P(xi,yi,z) P4(xi,yi-1,z4) Figure 3.13: Needed points for refractive ray calculation The normal on the object point can be calculated as the following steps: (1) Calculate the four tangential vectors as: V1=P1-P, V2=P2-P, V3=P3-P, V4=P4-P and find out the four normal vectors of the point P as: N1=V1×V2, N2=V2×V3, N3=V3×V4, 39 N4=V4×V1; (2) Obtain the unit vectors of the four normal vectors as: eN1, eN2, eN3, eN4 and the average normal vector of the compensated point P as Nm= eN1+eN2+eN3+eN4; (3) Calculate the angle θi between vector Nm and Ni by the dot product of the two vectors: Ni ⋅ Nm , i=1, 2, 3, 4; (4) The normal vector of the compensated point P is Ni ⋅ Nm cos θ i = 4 N ww = ∑ e Ni (cos θ i ) 2 . i =1 With the aid of Snell’s law and the multi-cross product method, the reconstructed image was obtained shown in Figure 3.14. Interestingly, very light circular patterns on the image plane can be observed which was not presented in the direct measurements shown in Figure 3.11. This might have been the result of the circular motion by the fast tool servo path, since the CMM probe that mapped the lens surface followed a meandering trajectory. The edges were not fully reconstructed because of the probing tip radius that prevents the measurements from being taken too close to the edge as the lens was secured in a lens holder. This information is a demonstration that the molded lenses retained the design geometry. 40 Figure 3.14: Image reconstruction using the CMM measurement The optical performance of the molded lens was studied using a molded lens in a similar setup as shown in Figure 3.7. As illustrated in Figure 3.15, when illuminated by a point light source (at 30 mm above the lens but outside of the figure), the clear image of the IPT logo is projected to a screen placed 30 mm below the freeform lens. Figure 3.15: Image formed by the molded freeform optics 41 The results in this section proved that the ray trace method and multi-cross product method for normal vector determination are effective and accurate for freeform optics image reconstruction; also the method can be used for contact iterative measurement with less error from the variable surface slopes and probe radius. 42 CHAPTER 4 OPTICAL MEASUREMENT The optical performance of the injection molded optical components is influenced by the change of the process parameters. To obtain high precision and low cost injection molding optical elements, it is very important to systematically investigate the relationship between the process conditions and the optical performance of the molded optics. Typical optical performance indicators include birefringence, refractive index, and surface scattering. 4.1 Birefringence (Residual Stress) Measurement When the injection molded parts are ejected from the mold cavity, residual stresses due to the molding process will remain in the molded parts and additional stresses will occur during cooling. The residual stresses are mainly from three sources: flow induced stress due to filling, thermally induced stress due to cooling, and frozen-in stress due to packing pressure. The thermal induced stresses are much higher than the flow induced stresses so the latter can be omitted sometime. It is well known that the molded-in residual stresses result in birefringence in an injection molded optical lens and 43 thus affect its optical quality (refractive index variation, unwanted light path deviation as well as intensity change that can all result in image quality deterioration). Therefore the residual stresses and birefringence measurement are very important for optical system quality assessment. Figure 4.1: Principle sketch of plane polariscope The birefringence is usually measured by polarimeter. The principles of a plane polarimeter are schematically illustrated in Figure 4.1. A typical plane polarimeter includes three major components, an illuminator or light source, a polarizer, and an analyzer. The polarizer and analyzer are two identical plane polarizers. The light intensity (which can be displayed on a screen or viewed directly) behind the analyzer can be described using the following equation [Aben, 1993]: I = I 0 sin 2 2ϕ sin 2 44 Δ 2 (4-1) where φ is the inclination angle between the principal stress and axis of polarization for the analyzer. The phase difference Δ is related to the wavelength λ of the light wave by: Δ= 2π 2π δ 2π = (n2 − n3 )d = C (σ 2 − σ 3 )d λ λ λ (4-2) where C is a material property called the stress-optic constant, ni are the refractive indices along the principal axis and σi are the principal stresses. The birefringence is measured by PS-100-SF plane polarimeter (Strainoptics Inc, www.strainoptics.com). On the PS-100-SF polarimeter, the analyzer can be rotated around the central axis to adjust the fringe color of the point of interest. To measure the residual stresses, the molded lens was first placed in the optical system and rotated around its central axis until the point of interest was in the brightest region. The analyzer was then rotated to a position when the neighboring fringe appeared at the point of interest on the sample. The neighboring fringe appeared when the analyzer introduced an equal amount of retardation at the point of interest on the sample. The reading off the marks on the analyzer then provides quantitative information of the optical retardation of that point. Most of the injection molded lens area has a relatively low level of residual stresses. Thus it is difficult to quantitatively read the neighboring fringe that passed the point of interest. To obtain more accurate measurement results, five lenses under the same process condition with the same orientation are packing together during the 45 measurement. The value of the residual stress for the interested point is then only onefifth of the measurement value. The measurement results are shown below. The unit of vertical axis is nanometer which stands for the optical retardation from the molded lens and the unit of horizontal axis is millimeter, representing the distance between the measured point and the lens center. The flow direction is the inverse direction of +X. In Figure 4.2, packing pressure was adjusted at eight levels as 5% (10.9 MPa), 15% (32.7 MPa), 25% (54.5 MPa), 27% (58.9 MPa), 29% (63.2 MPa), 31% (67.6 MPa), 33% (71.9 MPa) and 35% (76.3 MPa) of the maximal machine injection pressure (218 MPa) while all the other process parameters were remained unchanged. From the figure, it can be concluded that the higher the packing pressure, the higher the birefringence value in the part. However, with increasing distance from the gate, the dependence of retardation on packing pressure became weak. Also the nearer to the gate location, the larger the retardation value is because flow-induced residual stress is more concentrated around the gate area. Moreover, the retardation value is almost the same for the parts with packing pressure less than 25%. If the uniform retardation for the optical lens is needed, the lower packing pressure is a better option. 46 Figure 4.2: Retardation comparison with different packing pressure In Figure 4.3, mold temperature was adjusted at three levels as 150 °F (65.5 °C), 170 °F (76.6 °C) and 190 °F (87.7 °C) while all other process parameters were kept the same. With increasing of mold temperature, the thickness of solidified layer is decreasing as well as the associated stresses. In the figure, it can be seen that the higher the mold temperature, the lower the birefringence in the part. 47 Figure 4.3: Retardation comparison with different mold temperature In Figure 4.4, different polymer melt temperature was tested at two levels as 450 °F (232.2 °C) and 470 °F (243.3 °C) while all the other process parameters were the same to each other. More flow induced stresses and frozen-in stresses will occur under lower melt temperature. As a result, in the same figure, higher melt temperature would result in lower birefringence in most of the part. 48 Figure 4.4: Retardation comparison with different melt temperature Moldflow Plastic Insight 6.1 (www.moldflow.com) can simulate optical birefringence. 3D model of the molded part includes two symmetric lens cavity, gates, runner and sprue for accurate simulation. The 3D model and simulation result under different packing pressure were shown in Figure 4.5 and Figure 4.6 which show the same tendency as the result from the polarimeter for points at the center part of the molded lens. With the increasing of the distance from the gate, the retardation is decreased and with the increasing the packing pressure, the retardation increases in the molded lenses. However, since the material used in this dissertation research (PMMA Plexiglas® V825) is not included in the birefringence material database of MPI 6.1 and the substitute in the simulation is PMMA Sumipex HT55X from Sumitomo Chemical Company which may be different from the experiment material in optical, mechanical and thermal properties. In addition, simulation on the lens edge is not accurate (even in MPI 6.1’s birefringence 49 analysis examples, the retardation value on the edge is as high as tens of microns), the simulation results are as high as times of the measurement results. Figure 4.5: 3D model and birefringence simulation result from Moldflow 50 Figure 4.6: Retardation simulation result comparison with different packing pressure From the MPI 6.1 simulation and measurement results, it is clear that lower packing pressure, higher mold and melt temperature will result in smaller birefringence (residual stresses). The process conditions can be optimized for lower birefringence, however this may lead to more geometry deviation at the same time without proper compensation scheme (such as a freeform lens mold). Base on the measurement results, the magnitude of the maximal residual stress in the 30 mm diameter range is less than 100 nm. It is believed that such a low level birefringence can be neglected when comparing with the geometry error (minimal level about 3 to 10 µm). However the birefringence may play a bigger role after the lens geometry has been compensated (i.e., the geometry error has been reduced). 51 4.2 Refractive Index Measurement In scientific terms, a wavefront may be defined as “the surface over which an optical disturbance has constant phase” or “the surface which joins individual points on rays which have the same optical path length”. The optical path length is simply the distance a ray travels, multiplied by the refractive index of the material travels in. For an ideal plano lens, the exiting wavefront surface should be a plane which means the exiting wavefront error should be zero. However, injection molding process can introduce inhomogeneous index distribution across the part. If the part geometry is perfectly flat on both side and two sides are parallel to each other, the index change in the lens can be obtained from the measurement of wavefront change. In reality, lenses with perfect geometry are hard to come by for index measurement thus we need to remove the effect of geometry error. One solution for the surface geometry compensation is to submerge the molded lenses into an index matching fluid, a special fluid with nominal refractive index that matches that of PMMA. The index variation can be measured by a wavefront measuring system, such as a Shack Hartmann sensor (SHS). SHS has been widely used in both precision optical and vision science research with object to sample various points on the emerging wave and derive the shape of the wavefront. In essence, a Shack-Hartmann plate is a series of microlenses arranged in a linear fashion. Each lenslet focuses a view of the point source through various points of the entrance pupil. As such, the SHS determines the shape of the wavefront on the exiting pupil. The slope of the wavefront is calculated with the 52 displacement and the focal length of the lenslet as shown in Figure 4.7 [Trusit, 2004]. After examining the slope at each micro lenslet in the x and y meridian, the entire wavefront can be plotted in 3D format. The wavefront error which describes the optical path difference between the measured wavefront and the reference wavefront is derived mathematically from the reconstructed wavefront. CCD device Single micro lenslet Position of laser spot for calibrated plane wavefront θ Optical axis of lenslet θ ∆y Measured wavefront Position of laser spot for measured wavefront Plane wavefront Focal length of micro lenslet Figure 4.7: Calculation of the slope of the wavefront at individual lenslet A typical SHS based measurement setup is shown in Figure 4.8. The filter in the optical path is used to adjust the intensity of the laser to avoid saturation on the sensor. The aperture of the Hartmann sensor is 6.4 mm × 4.8 mm of a rectangular shape. If large size samples are measured, beam reducer is needed in the measurement setup. 53 Because of different slope, each section of the wavefront will be imaged at different position on the CCD (Coupled Charge Device) in the SHS system. The system error will be nullified prior to taking each measurement. With the aid of the matching fluid, index variations can be mapped for the entire molded lens. The different index variation for the lenses molded under different process conditions can be transferred into geometry changes in the optical system. This information is useful for mold compensation. He-Ne Laser Filter Matching Fluid Beam Reducer Hartmann Sensor Test lens Microlens CCD Array camera Figure 4.8: Index measurement setup The measurement results are shown as follows. The unit for the color bar is micron. The dimension of the molded lens is in millimeter. 54 In Figure 4.9 (a), the mold temperature was 150 °F while in Figure 4.9 (b), it was 190 °F. In this experiment, only mold temperature was adjusted, all other process parameters were kept unchanged. The flow direction is from left to right. From the measurement results, it can be seen that higher mold temperature will bring smaller index deviation distribution. (a) Lower mold temperature (b) Higher mold temperature Figure 4.9: Wavefront error of the molded lens under different mold temperature in fluid In Figure 4.10 (a), the packing pressure was 35 % and 27 % in Figure 4.10 (b). In this experiment, only the packing pressure was adjusted, all other process parameters were kept the same. From the measurement results, it can be seen that lower packing pressure will also introduce smaller index variation in the lens. 55 (a) Higher packing pressure (b) Lower packing pressure Figure 4.10: Wavefront error of the molded lens under different packing pressure in fluid With the aid of the optical matching fluid, we can determine the average index distribution in the part. While for the real optical system, the optical elements cannot be immersed into the matching fluid. When the lens is used in the air or other media, the wavefront aberration from the part is not only caused by inhomogeneous index but also by geometry error. Sometimes the geometry error may compensate for some index change in the part, so the RMS (root mean square) value for the wavefront may actually be smaller than that in the matching fluid. The same lenses as in Figure 4.10 (a) and (b) were also measured in the air. The measurement results are shown in Figure 4.11. In Figure 4.11, the measurement was obtained using the same setup in Figure 4.8 except the lens sample was in the air. From the surface measurements, we discovered that the surface geometry accuracy of the lens molded using 35% packing pressure is 56 much better than that of the lens molded using 27% packing pressure, so the measurement result in the air does make sense. In this case, the surface geometry of the lens in the lower packing pressure brings more aberration to the wavefront error. (a) Higher packing pressure (b) Lower packing pressure Figure 4.11: Wavefront error of the molded lens under different packing pressure in air The index deviation measurements can be used for mold compensation. Combining the surface and thickness measurement results and index distribution, the modified mold inserts can be designed and fabricated. With the modified freeform mold, the molded lens will bring improved optical performance. 4.3 Optical Effects of Surface Finish Ultraprecision single point diamond turning process has been used extensively for direct optical mold fabrication in injection molding. With this process, optical surfaces can be fabricated without post machining polishing. Although ultraprecision diamond 57 machining process can create optics with surface roughness down to tens of nanometers or even lower, the diamond machined surfaces still have characteristic periodic tool marks and defects [Ikawa, 1991; Hocheng, 2004; Cheung, 2000; Khanfir, 2006]. In optical applications, these defects result in reduced optical performance, such as scattering and distortion, which can negatively affect efficiency and imaging quality of the optical surface. Due to the transcribility of the injection molding process, the molded optical elements will be affected by the mold quality. Injection molding process can reduce the optical effects from the tool marks comparing to the mold insert surface. In addition to mold surface quality, process conditions also influence the surface finish and optical behavior of transparent plastics [Gunes, 2006; Gunes, 2007] in injection molded plastic lenses. To improve optical performance of the injection molded lenses, in this dissertation research, the following studies were performed: 1) Study the characteristics of the diamond machined mold surface and molded lens surface; interpret the surface profile based on their optical effects. 2) Analytically correlate surface characteristics to optical effects such as high order diffractions and background scattering; quantify the surface effects on the optical performance, specifically the effects due to tool marks both on the mold and lens surface. 3) Experimentally identify the relationship between process conditions (including packing pressure, mold temperature and melt temperature) and the surface characteristics (optical performance). Develop a methodology to determine the optimal conditions for an injection molded lens. 58 4.3.1 Theoretical Analysis 4.3.1.1 Surface Characteristics of a Diamond Machined Surface Generally speaking, ultraprecision diamond machined surfaces have these characteristics: 1) Periodic tool marks along the feed direction. 2) Low frequency spatial variation. 3) High frequency and other random vibration. The periodic tool marks, low frequency surface variation and high frequency vibration can appear on a diamond machined surface. The causes of these surface characteristics are complicated. It may include machine tool vibration, material induced vibration, servo control, temperature variation, tool wear, and chips scratches. Figure 4.12 shows a typical two-dimensional (2D) diamond machined surface profile. Figure 4.12: Profile of a typical diamond machined surface 59 A diamond machined surface can be considered as the combination of these three components. In terms of optical performance, these components pose different effects as shown in Figure 4.13. For example, the periodic tool marks introduce high order diffraction in addition to the specular reflection. The position of the high order diffraction is decided by the amount of tool mark spacing. The diffraction intensity, on the other hand, is related to the tool mark depth. The periodic tool marks induced high order diffraction will affect surface reflectivity and imaging quality. For lower frequency variation, one potential effect is the sideband diffraction peak alongside the high order diffraction peaks as in Figure 4.13. The background scattering is related to random surface roughness component. 1.0E+07 Sensor C urrent (am p) 1.0E+06 1.0E+05 Specular Reflection High order diffraction 1.0E+04 1.0E+03 Sideband diffraction peak 1.0E+02 1.0E+01 Background scattering 1.0E+00 1.0E-01 1.0E-02 0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 85 90 95 Angle (Degree) Figure 4.13: Specular reflection, high order diffraction and scattering from the diamond machined surface in Figure 4.12 60 The injection molding process can duplicate the mold surface to molded lens surface so the characteristics on the molded lens surface will be similar to the diamond machined mold surface. In the following section, the scattering from the diamond machined mold surface and molded lens surface will be analyzed using scalar method [Stover, 1995]. The specular reflectivity and imaging quality of the mold and molded surfaces will also be analyzed. 4.3.1.2 Scalar Method for Diffraction and Scattering Calculation The distribution of light diffracted off a diamond-machined surface can be calculated using two-dimensional Discrete Fourier Transform (2D DFT), which is based on the scalar diffraction theory. In Figure 4.14, the electrical field E1(x1, y1,z1 ) at point B(x1, y1,z1 ) on the observation plane X1 − Y1 is the result of light diffracting from object plane X 0 − Y0 and can be expressed as [Collins, 2002]: E1 (x1, y1, z1 ) = jk ∞ ∞ e− jkr dx0dy0 ∫ ∫ E0 (x0 , y0 , z0 ) cosθ 2π −∞ −∞ r (3-3) where r is the length of line AB, E 0 ( x 0 , y 0 , z 0 ) is the output electrical field from plane X 0 − Y0 at point A(x 0 , y 0 ,z 0 ) , θ is the included angle between line AB and Z axis. 61 A( x 0 , y 0 , z 0 ) X0 Y0 b a r Y1 X1 θ B ( x1 , y1 , z1 ) Z Ei Figure 4.14: Diffraction from a diamond machined surface Under the far field diffraction condition, the electrical field on the observation plane can be written as: 1 1 jk z1 ab − jkr1 E1 (u1 , v1 , z1 ) = e E0 ( x0 , y 0 , z 0 )e j 2π ( u0u1 +v0v1 ) du 0 dv0 2 ∫ ∫ 2π r1 0 0 where u 0 = (3-4) x0 y x a y b , v0 = 0 , u1 = 1 , v1 = 1 , and r1 = x12 + y12 + z12 , a, b are the a b λ r1 λ r1 dimensions of the sample in X and Y direction. Assume that the incident light is a plane wave, then Ei = Ee − j ( x0κ ix + y0κ iy + z0κ iz ) , where κ ix , κ iy ,κ iz are the unit vectors of the incident light. The surface profile of the sample is known as d = d(x 0 , y 0 ) . For the diamond machined sample that has surface roughness much less than wavelength, surface profile variation will introduce a phase delay to the 62 incident light. E0 ( x0 , y 0 , z 0 ) = Ee At Z0 = 0 the − j ( x0κ ix + y0κ iy + 2 dκ iz ) plane, the reflected wave is . Substitute E0 into Eq. (3-4) and write it in discrete form: E1 ( n2 , m2 , z1 ) = N −1 M −1 j 2π ( jk z1ab − jkr1 − jκ z 2 d ( n0 , m0 ) e E e 00 ∑ ∑ e 2 2π r1 MN 0 0 where n0 = u 0 N , m0 = v0 M , n2 = N ( n0 n2 m0 m2 + ) N M (3-5) κy 1 κy x1 κ x y 1 κ − ) /( − x ), m2 = M ( 1 − ) /( − ) r1λ 2π λ 2π r1λ 2π λ 2π Eq. (3-5) has the form of 2D DFT. By Eq. (3-5), the field and intensity of the diffraction light can be calculated if the surface roughness data are known. 4.3.2 Experiment and Measurement The mold inserts were fabricated on the Nanotech 350 FG Freeform Generator with Al 6061. Mold inserts used in this research were diamond turned with a normal size diamond tool (tool nose radius is 3.048 mm, rake angle is 0o and clearance angle is 8o). The spindle speed was kept constant (1,000 rpm) while the feed rate was at 20 mm/min. As a result, the tool mark spacing was 20 μm. The nominal depth of cut was 3 μm. Based on the conclusion from basic measurement and ANOVA results, only a few process parameters are crucial to our experiments including mold temperature, polymer melt temperature and packing pressure. These parameters were set at different levels for the experiments. To evaluate the part quality under each process condition, the collected 63 parts need to be consistent in the specifications of interest. For each process condition in our experiments, ten trial parts were made and discarded then five parts were collected for measurement. Room temperature and humidity were also important for the part quality, so all selected experiments were conducted in one single day to keep the environmental conditions consistent. Both surface profile and surface scattering measurements were taken on the mold and molded lens surfaces. The surface profiles of these samples were also measured on the Veeco NT 3300 Profilometer. The Veeco profilometer is built on phase shift interferometry and its schematic is shown in Figure 4.15 (recreated from James C. Wyant’s class notes [Wyant, 2000]). TEST SAMPLE PZT DRIVING MIRROR LASER BS IMAGING LENS DETECTOR ARRAY DIGITIZER PZT CONTROLLER COMPUTER Figure 4.15: Schematic of phase shift interferometry 64 The scattering from the sample surface was measured by a home built device shown in Figure 4.16. A silicon photo diode detector (Edmund, 53-371) was connected to an Aerotech ADRT-200 rotary stage that rotates around the sample and measures the intensity of the scattering light from the mold or molded lens surface. The sample to be measured was mounted on the Aerotech stage that is capable of 4-DOF (degree of freedom) adjustment, thus can align the sample surface right above the rotational center of the rotary stage. The incident angle of the laser beam on the sample was fixed but the reception angle on the photodiode was adjusted on the rotary stage. In this research, the incident angle was 5 degree from normal and the reception angle on the photo diode was varied from 2 degree to 90 degree at 0.2 degree increment. The measurement system was fully computerized and capable of high precision automatic scanning and measuring (Figure 4.17). Sample Aerotech Rotary Stage Incident Angle Adjust Stage He-Ne Laser Detector Figure 4.16: Setup of the scattering measurement device 65 Incident light Sample Reception angle θ Detector To Rotary Stage Amplifier Drive Computer Figure 4.17: Scattering measurement system 4.3.3 Results 4.3.3.1 Comparison of Surface Profile Measurement and Direct Scattering Measurement Several methods can be employed to measure surface roughness. In this research, both Veeco surface profilometer measurement and direct scattering measurement were used to evaluate the surface quality. Figure 4.18 (a) and 4.18 (b) are 3D surface profiles of mold insert and molded lens surface off this insert measured by Veeco. The magnification used was 10 × 2, which had a 0.402768 μm × 0.469896 μm resolution and 296.0345 μm × 225.0802 μm measurement scope in X and Y direction respectively. By using 2D FFT method, Figure 4.18 (c) and 4.18 (d) are the calculated average onedimensional spectrum along Y direction of the samples, which are shown in Figure 4.18 66 (a) and 4.18 (b). Figure 4.18 (e) and 4.18 (f) are the measured one-dimensional surface scattering along Y direction of the samples from the same mold and molded lens surface in Figure 4.18 (a) and 4.18 (b) respectively. In the scattering measurement, a He-Ne laser (wavelength 632.8 nm) was used. From the comparison between Figure 4.18 (c) and Figure 4.18 (e), both methods clearly were capable of revealing the existence of the periodic tool marks. On Figure 4.18 (e) and 4.18 (f), for clear demonstration, the diffraction orders were not completely marked. The direct scattering measurement has a better measurement bandwidth and it is more sensitive than Veeco surface profilometer measurement so direct scattering measurement can provide more information for surface quality evaluation. (a) 3D surface profile of a 20 μm tool mark spacing mold insert, measured by Veeco white light profilometer 67 (b) 3D surface profile of the molded lens, measured by Veeco white light profilometer (c) Calculated average 1D spectrum of the same mold surface 68 (d) Calculated average 1D spectrum of the same molded lens surface (e) Directly measured surface scattering of the same mold surface 69 (f) Directly measured surface scattering of the same molded lens surface Figure 4.18: Comparison of the mold insert and molded lens From the Veeco profilometer measurement result in Figure 4.18 (a), it shows that diamond machined surface has characteristic periodic tool marks. These defects can result in reduced optical performance, such as scattering and distortion. The molded lens surface however is smoother than the mold insert surface which showed molding process can average the roughness and improve the surface quality to some extent by comparison of Figure 4.18 (a) and 4.18 (b). One dimension surface spectrum in Figure 4.18 (c) and 4.18 (d) shows the periodic tool marks are deeper and sharper on the mold surface than the molded lens surface. The injection molding process can reduce the optical effect when was compared to the mold insert surface, which are clearly shown in Figure 4.18 (e) and 4.18 (f). The high order diffraction peaks can be clearly identified on the mold and molded lens scattering results. Obviously the high order diffraction from the molded lens 70 surface is largely reduced comparing to the mold insert. The measurement results show that it is possible to obtain optical quality injection molded elements with direct diamond machined mold even the mold surface itself has tool marks and can generate higher intensity high order diffraction just shown in Figure 4.18 (c) and 4.18 (e), which can greatly reduce the production cost for mold fabrication and lens molding. 4.3.3.2 Relationship of Molded Surface Quality and Injection Molding Process Conditions For the injection molded optical lens in this research, it was designed to be used as a refractive device. However, since the refraction scattering measurement will be influenced by both surfaces of the lens, it is difficult to establish the relationship of the molded surface quality and injection molding process conditions. Therefore, for the injection molded lens, reflection scattering measurement was also used to evaluate the molded lens surface optical quality. Since the first order diffraction has the highest intensity among all diffraction orders and was the closest to specular reflection, therefore first order diffraction was used to measure the surface diffraction effects. The surface roughness and tool mark depth were used to evaluate the molded surface quality. To investigate the relationship of the optical effects and the packing pressure, in the molding experiments, the packing pressure was set at seven levels, 5% (10.9MPa), 10% (21.8MPa), 15% (32.7MPa), 20% (43.6MPa), 25% (54.5MPa), 30% (65.4MPa) and 35% (76.3MPa) of the maximal machine injection pressure (218MPa). Packing pressure higher than 40% of the full capacity was considered over packing for this case study. In 71 addition to packing pressure, all other process parameters remained unchanged. Higher packing pressure results in smaller shrinkage as well as surface quality. Figure 4.19 (a) shows the relationship between first order diffraction intensity from the molded lens surface reflection and the packing pressure. The first order diffraction intensity decreased as the packing pressure increased with approximate linear relationship. In optical industry, the common method used to evaluate the surface quality is the root means square value of the surface roughness (Ra). Figure 4.19 (b) shows the measured surface roughness Ra of the molded lens surface under different packing pressure. Figure 4.19 (c) shows the measured tool mark depth of the molded lens surface. The surface roughness and tool mark depth also decreased when packing pressure increased with similar trend as the first order diffraction intensity. Based on the experiment results, to obtain optical performance molded lenses especially for imaging purpose, higher packing pressure should be selected to reduce the high order diffraction losses and ghost image. (a) First order diffraction intensity 72 b) Surface roughness measured by Veeco (c) Measured tool mark depth Figure 4.19: Experimental results of the lens molded under different packing pressure 73 To investigate the relationship of the optical effects and the mold temperature, in the molding experiments, the mold temperature was set at five levels, 110°F (43.3°C), 130°F (54.4°C), 150°F (65.5°C), 170°F (76.6°C) and 190°F (87.7°C). The mold heating system controls and adjusts the mold temperature by controlling the temperature of the circulating water system, so the temperature higher than water boiling point can not be done for this case study. In addition to the mold temperature, all other process parameters remained unchanged. Figure 4.20 (a) shows the relationship between the first order diffraction intensity from the molded lens surface reflection and the mold temperature. The first order diffraction intensity increased as the mold temperature increased. Figure 4.20 (b) and 4.20 (c) show the measured surface roughness Ra and the tool mark depth of the molded lens surface under different mold temperature. The tool mark depth also increased when mold temperature increased with similar trend as the first order diffraction intensity. The surface roughness under different mold temperature was close and had no obvious tendency as the mold temperature was changed. From the experiment results, lower mold temperature was better for reducing the effect of high order diffraction for the molded lens. 74 (a) First order diffraction intensity (b) Surface roughness measured by Veeco 75 (c) Measured tool mark depth Figure 4.20: Experimental results of the lens molded under different mold temperature To investigate the relationship of the optical effects and the melt temperature, in the molding experiments, the melt temperature was set at four levels, 430°F (221.1°C), 450°F (232.2°C), 470°F (243.3°C) and 490°F (254.4°C). The melt temperature from the processing information provided by material vendor is 430°F. If the melt temperature was raised to more than 500°F it will cause degradation in the material. In this part of the study, all other process parameters remained unchanged. Figure 4.21 (a) shows the relationship between first order diffraction intensity from the molded lens surface reflection and the melt temperature. The first order diffraction intensity decreased as the melt temperature was increased. Figure 4.21 (b) and 4.21 (c) show the measured surface roughness Ra and the tool mark depth of the molded lens surface under different melt temperature. The tool mark depth also decreased when melt temperature was increased 76 with similar trend as the first order diffraction intensity. The surface roughness has different tendency with the first order diffraction intensity as the melt temperature changes which means sometimes the optical surface quality cannot be evaluated by surface roughness alone. From the experiment results, higher melt temperature was better for reducing the effect of high order diffraction for the molded lenses. (a) First order diffraction intensity 77 (b) Surface roughness measured by Veeco (c) Measured tool mark depth Figure 4.21: Experimental results of the lens molded under different melt temperature 78 The surface roughness Ra of the mold insert is 26.76 nm and the measured tool mark depth of the mold insert is about 99 nm. Comparing with molded lenses, it can be seen that injection molding process will reduce the surface roughness and smooth the sharp tool marks duplicated from the mold insert surface which can enhance the optical performance of the molded lens. In this section, the optical effects of the diamond turned mold insert surface and molded lens surface were studied. The optical scattering and lens surface profiles were related by scalar analysis of the light reflected off the optical surfaces. The direct scattering measurement is more sensitive than surface profile measurement. Diamond machined surfaces have characteristic periodic tool marks which can cause degradation in efficiency and imaging quality of the optical surface. Injection molding process has smoothing effect that can reduce optical effects caused by tool marks on the molded lens surface comparing to the mold insert surface itself. By conducting selected experiments under different molding conditions, optical effects of the process conditions for molded lens surface were investigated in this study for further optimization of the surface finish. Specifically, three parameters, packing pressure, mold temperature and melt temperature, are varied in numerous levels. For each setting, the characteristics of mold and molded part surface and scattering were both analytically and experimentally studied. The results showed that the appropriate process conditions will enhance the optical performance of the molded lens, such as higher packing pressure, higher melt temperature and lower mold temperature. 79 CHAPTER 5 ALVAREZ LENS MANUFACTURING 5.1 Alvarez Lens 5.1.1 Alvarez Lens Design Alvarez lens is a unique optical device. An Alvarez lens pair [Alvarez, 1967] consists of a pair of bicubic phase profile optics, one is the inverse shape of the other. When these plates are placed in registration, the resulting phase profile is a null, owing to the cancellation of the two phase profiles. However, if one of the plates is translated in the plane of the phase profile, there is no longer perfect cancellation of the two phase profiles. The residual phase variation is the differential of the cubic profiles, resulting in a quadratic phase variation. This quadratic phase variation is equivalent to a lens of a certain focal length, as determined by the steepness of the individual cubic phase profiles and the translation distance. Variable spherical or astigmatic power can be produced by varying the relative translation in the x and y directions for wavefront correction. For ophthalmic use, Alvarez lens makes possible simple, inexpensive, thin and attractive variable-power spectacles that can be focused quickly and easily for near and 80 distant vision, and yet provides a sharp, substantially undistorted view throughout the field of vision at each setting. The lens is also useful in cameras and other optical devices. The versatility of the Alvarez lens allows for dynamic correction of arbitrary astigmatic aberrations. In order to precisely define the lens parameters, a rectangular coordinate system is used. The optical axis of the lens system is taken to be z axis and the lens thickness t is measured parallel to the optical axis. If x axis is the lens moving direction then y axis is perpendicular to x axis and z axis. Figure 5.1 is a schematic drawing of Alvarez lens pair which is recreated from [Alvarez, 1967]. Figure 5.1: Schematic drawing of Alvarez lens pair For the designed elements, the lower lens (element 1) thickness equation can be expressed as: 81 1 t1 = A( xy 2 + x 3 ) + Dx + E 3 (5-1) 1 where A( xy 2 + x 3 ) is the characterizing terms, A is a constant, which determines the 3 rate at which the power of the lens varies with movement of the lens elements relative to each other along the x axis. D may be selected to minimize the lens thickness. The upper lens (element 2) thickness equation can be expressed as: 1 t 2 = − A( xy 2 + x 3 ) − Dx + E 3 (5-2) which is the same as the lens equation of element 1, except for a reversal of the algebraic sign of all terms of the lens equation except the constant term E. In the neutral or zero-power position of the lens element shown in Figure 5.1, the curved surface of element 2 exactly fits the curved top surface of element 1, so that the two elements could perfectly fit together with no space between them. However, in practice, a small space is left between the two lens elements to permit the movement of one element relative to the other for adjusting the power of the lens. The space should be as small as convenient practice to keep the validity of the thin-lens approximations. The optical thickness tc of the composite lens at any point is equal to the sum of the optical thicknesses of element 1 and 2 at that point. In the neutral position, the 82 composite optical thickness is obtained as t c = t1 + t 2 = 2 E . So for this neutral position, the composite lens is optically equivalent to a flat plate of glass. Points in the plane of the lens system may now be identified by a system of coordinates X, Y that remain stationary while the lens elements move in opposite directions along the X axis or Y axis. The optical axis passes through the point X=0, Y=0. If both elements are moved by equal amounts (represented by d) in opposite directions along X axis, the thickness equations for the two lens elements may be written: t1 = A( X − d )Y 2 + 1 A( X − d ) 3 + D( X − d ) + E 3 t 2 = − A( X + d )Y 2 − 1 A( X + d ) 3 − D( X + d ) + E 3 (5-3) (5-4) The composite-lens optical thickness tc is obtained by adding t1 and t2, with the following result: t c = t1 + t 2 = −2 Ad ( X 2 + Y 2 ) − 2 Ad 3 − 2 Dd + 2 E 3 (5-5) The term − 2 Ad ( X 2 + Y 2 ) describes a convex or converging spherical lens having a power (the reciprocal of focal length) proportional to Ad. All of the other terms are independent of X and Y, and therefore represent a uniform thickness over the whole area of the lens. Thus the composite lens is, in thin lens approximation, a theoretically perfect spherical lens of variable power, the power being linearly proportional to the 83 distance d that the lens elements are displaced from their neutral positions. The range of power variation for a given displacement d is determined by the value of the coefficient A, which is designed by purpose. If both elements are moved by equal amounts (represented by d) in opposite directions along Y axis, the thickness equations for the two lens elements may be written: t1 = AX (Y − d ) 2 + 1 AX 3 + DX + E 3 t 2 = − AX (Y + d ) 2 − 1 AX 3 − DX + E 3 (5-6) (5-7) The composite-lens optical thickness tc is obtained by adding t1 and t2, with the following result: t c = t1 + t 2 = −2 AdXY + 2 E (5-8) The term -2AdXY represents a variable prism along the Y axis of the lens which can be used to compensate for parallax. 5.1.2 Alvarez Lens Fabrication Although the Alvarez lens has a surface profile that can be described precisely using an analytical formula, it has been largely an impractical task to create such an optical surface because the cubic surfaces were difficult to fabricate using conventional machining processes such as grinding and polishing. There have been a few fabrication 84 methods mentioned in reported recently [Wilhemsen, 1999] which are small tool polishing and photolithography. Both methods are expensive and time-consuming. Injection molding is a good choice for Alvarez lens fabrication for its high volume and low cost with high precision. With the accurate mold insert and precision molding condition control, Alvarez lens or lens array can be fabricated in very good quality and reasonable cost. With the aid of the high precision machine and the innovative STS process, Alvarez lens mold inserts were fabricated first on the 350 FG machine and then the Alvarez lenses were injection molded. The Alvarez lens mold insert and some samples of molded lens are shown in Figure 5.2. The diameter of the mold insert is 39.88 mm and the width of the Alvarez lens is 20 mm. (a) Alvarez lens mold (b) Molded freeform lenses Figure 5.2: Alvarez lens mold insert and molded lens 85 5.1.3 Alvarez Lens Measurement 5.1.3.1 Zernike Polynomials Optical system aberration is expressed as a weighted sum of power series terms that are functions of the pupil coordinates. Each term is associated with a particular aberration or mode, for example, spherical aberration, coma, astigmatism, field curvature, distortion, and other higher order modes [Malacara, 1978]. Zernike polynomials form a complete set of functions or modes that are orthogonal over a circle of unit radius and are convenient for serving as a set of basis functions. This makes them suitable for accurately describing wavefront aberrations as well as for data fitting. Zernike polynomials are usually expressed in polar coordinates, and are readily convertible to Cartesian coordinates. These polynomials are mutually orthogonal, and are therefore mathematically independent, making the variance of the sum of modes equal to the sum of the variances of each individual mode. They can be scaled so that non-zero order modes have zero mean and unit variance. This places all modes in a common reference frame that enables meaningful relative comparison among them. The wavefront may be described as [Trusit, 2004]: W ( ρ , θ ) = C1−1 Z 1−1 + C11 Z 11 + C 2−2 Z 2−2 + C 20 Z 20 + C 22 Z 22 + C 3−3 Z 3−3 + C 3−1 Z 3−1 + C 31 Z 31 + ⋅ ⋅ ⋅ (5-9) Each polynomial has three components: the normalization factor, a radially dependent polynomial, and an azimuthally dependent sinusoid. A double indexing scheme is used where: n is the highest power or order of the radial polynomial and m is 86 the azimuthal or angular frequency of the sinusoidal component. An accompanying single indexing scheme is also employed where the index j is used to represent the mode number. Normalization of each mode means that observation of the coefficients immediately gives an indication of the level of influence that each type of aberration has on the total wavefront error. The Zernike polynomials are defined as [Thibos, 2002]: Z nm ( ρ ,θ ) = N nm Rn ( ρ ) cos(mθ ) m Z nm ( ρ ,θ ) = − N nm Rn ( ρ ) sin(mθ ) m for m ≥ 0,0 ≤ ρ ≤ 1,0 ≤ θ ≤ 2π for m < 0,0 ≤ ρ ≤ 1,0 ≤ θ ≤ 2π (5-10) (5-11) For a given n, m can only take on values of -n, -n+2, -n+4, …, n N nm is the normalization factor N nm = 2(n + 1) 1 + δ m0 δ m 0 = 1 for m = 0, δ m 0 = 0 for m ≠ 0 (5-12) Rn ( ρ ) is the radial polynomial m R (ρ ) = m n ( n− m ) / 2 ∑ s =0 (−1) s (n − s )! ρ n−2 s s! ⎣0.5(n + m ) − s ⎦! ⎣0.5(n − m ) − s ⎦! 87 (5-13) Table 5-1 contains a list of Zernike polynomials up to order 4 and their meanings relative to the traditional Seidel or Primary aberrations [Mahajan, 1998]. The wavefront aberration can be fitted as Zernike polynomials. mode j order n Frequency m 0 1 0 1 0 -1 Z nm ( ρ , θ ) 1 2 ρ sin(θ ) 2 1 1 2 ρ cos(θ ) 3 2 -2 6 ρ 2 sin(2θ ) 4 2 0 3 (2 ρ 2 − 1) 5 2 2 6 ρ 2 cos(2θ ) 6 3 -3 8 ρ 3 sin(3θ ) 7 3 -1 8 (3ρ 3 − 2 ρ ) sin(θ ) Coma along y-axis 8 3 1 8 (3ρ 3 − 2 ρ ) cos(θ ) Coma along x-axis 9 3 3 8 ρ 3 cos(3θ ) 10 4 -4 10 ρ 4 sin(4θ ) 11 4 -2 10 (4 ρ 4 − 3ρ 2 ) sin(2θ ) Secondary Astigmatism 12 4 0 5 (4 ρ 4 − 6 ρ 2 + 1) 13 4 2 10 (4 ρ 4 − 3ρ 2 ) cos(2θ ) Spherical Aberration, Defocus Secondary Astigmatism 14 4 4 10 ρ 4 cos(4θ ) Meaning Constant term, or Piston Tilt in y-direction, Distortion Tilt in x-direction, Distortion Astigmatism with axis at ± 45o Focus shift Astigmatism with axis at 0 o or 90 o Table 5.1: Zernike Polynomials (up to 4th order) The first order term, prism, is not relevant to the wavefront as they represent tilt and are corrected using prism. The second order terms represent low order aberrations, 88 namely, defocus and astigmatism. Defocus represents the spherical component of the wavefront. The astigmatic terms conversely describe the cylinder. Using these three terms, any sphero-cylindrical lens can be described. Every mode after second order is a high order aberration. In order to summarize the wavefront error, numerical index were tried to describe the wavefront error. At present, the mostly widely used means is the root mean square (RMS) error. This term describes the weighted mean of the individual Zernike modes. The RMS value describes the overall aberration. The RMS error can be calculated as: RMS = (C 2−2 ) 2 + (C 20 ) 2 + (C 22 ) 2 + (C 3−3 ) 2 + (C 3−1 ) 2 + ⋅ ⋅ ⋅ (5-14) 5.1.3.2 Wavefront Aberration Measurement According to the design principle, a pair of molded Alvarez lenses can be measured together. The measurement system is shown in Figure 5.3. The wavefront information can be obtained by the Shack-Hartmann sensor while the Alvarez lens pair move to opposite direction either along the x-axis or the y-axis. In order to analyze the wavefront quantitatively, the wavefront error needs to be expressed as Zernike polynomials to fit the data in three dimensions. 89 Shack-Hartmann Sensor Light Source Alvarez Lens Pair Figure 5.3: Measurement Setup for Alvarez Lens As explained for Alvarez lens design in Section 5.1.1, when the relative displacement of the Alvarez lens pair is in opposite direction along x-axis, the Alvarez lens pair can be treated as a convex or converging spherical lens having a power proportional to the relative displacement, so the spherical coefficient of the Alvarez lens pair has linear relationship with the relative displacement. According to the design principle in thickness expression Equation (5-5), the astigmatic coefficients should be zero which conforms to the measurement results that the astigmatic coefficients are almost zero. Basic measurement results are shown below: The change in sphere power looks fairly linear, and the astigmatism and higher order terms (up through 10th order) stay fairly low. In Figure 5.4, the black line stands for the spherical coefficient (focus shift) and the red line stands for the astigmatic coefficient with axis at 0° or 90° and green line stands for the astigmatic coefficient with axis at ±45°. 90 Figure 5.4: Low order Zernike coefficients of the molded Alvarez lens pair while the relative x-axis translation In Figure 5.5, the blue line is the RMS value without spherical aberration and the red line stands for the higher order terms only. The maximum RMS value is about 0.08 μm in the measurement range. 91 Figure 5.5: RMS value of the molded Alvarez lens pair while the relative x-axis translation Clinically, high order aberrations were found to have a mean RMS of 0.305±0.095 μm in 532 eyes across a 6 mm pupil [Trusit, 2004]. Comparing to the measurement results, currently the molded Alvarez lens can fulfill the requirement of the vision test. The molded Alvarez lens quality will be affected by injection molding process parameters. The molding experiments were conducted with different packing pressure and different mold temperature. From the measurements of the pairs, the lens pair with the lower RMS value is with a higher packing pressure and lower mold temperature. The measurement results are shown in Figure 5.6 and Figure 5.7. 92 Figure 5.6: RMS value of the molded Alvarez lens pair while the relative x-axis translation under different packing pressure Figure 5.7: RMS value of the molded Alvarez lens pair while the relative x-axis translation under different mold temperature 93 The residual stresses in the molded Alvarez lens also were measured by polarimeter. The measurement result was shown in Figure 5.8. Figure 5.8: Retardation of the molded Alvarez lens under different process parameters Although the lower residual stresses (optical retardation) are obtained under lower packing pressure, since the retardation of the molded Alvarez lens under higher packing pressure (about 30%) is also in the acceptable range comparing to the common human eyes aberration value, packing pressure 30% is a better choice to obtain functional Alvarez lens. 5.1.3.3 Surface Measurement Alvarez lens is difficult to fabricate because of its non axisymmetrical surface with large deviation (or sag). For the same reason, it is also very difficult to measure the 94 molded Alvarez lens surface geometry. Malacara and Cornejo used the method of Newton’s fringes to determine the aspheric profile of a surface that deviates markedly from a spherical surface [Malacara, 1970]. This method is useful if the aspheric deviates from the nearest spherical by a few wavelength of light (10 to 20 λ). The principle of this method can be used to measure the Alvarez lenses. The schematic of the metrology system is shown in Figure 5.9. CCD camera Observing fringes Partly reflecting glass sheet Laser head Lens Tiny gap Mold insert Figure 5.9: Alvarez lens geometry measurement To do the measurement, the molded Alvarez lens and the null component (either mold insert or machined plastic lens) are placed very close together until the interferometric fringes appear. Fringes occur because the amplitude of each single light 95 ray from the source is divided by the lens surface and mold surface, one part of light is reflected from the lens surface and the remaining light transmits the lens surface and then reflected from the mold surface. The lights travel in different optical path. When the light beams recombine, the interference may take place. When mathematically interpreting the interferograms, the deviation between the molded lens surface and mold insert will be obtained. Using this method, freefrom optical elements such as a lens or a mirror can be measured if a master (the null) is available. With the success of the Alvarez lens fabrication, more and more lenses with nonsymmetrical freeform surface profiles can be fabricated with high optical quality, high volume and at a low cost. 5.2 Micro Alvarez Lens Array Microlenses are important optical components that image, detect and couple light. With the growing demands of industrial applications, including imaging, telecommunication and detection systems, there are more requirements for microlens arrays with higher geometry accuracy, more complicated surface profile and integrated functions. However, for most microlens arrays, it is impossible to adjust their focal length due to their fixed geometry. Alvarez lenses allow the focal length to be adjusted by simply translating the lens pair along the normal direction to the light propagation. Moreover, due to the asymmetrical surface profile, it is difficult to fabricate micro Alvarez lens array by using conventional fabrication technology [Fritze, 1998; Keyworth, 1997; Mihailov, 1993; Popovic, 1988; Yu, 2003]. In this dissertation research, a freeform 96 surface with individual freeform lenslets was fabricated by ultraprecision machining using slow tool servo and injection molding process to produce freeform microlenses with high optical quality at a low cost. The methodology developed in this dissertation research can be used for many other applications as well. 5.2.1 Mold Design and Fabrication The micro Alvarez lens array design used in this dissertation research consists of 5×5 lens cavities as shown in Fig. 5.10. As mentioned, each micro Alvarez lenslet is a bi-cubic phase profile optic. The dimension of each lenslet cavity is 1 mm × 0.5 mm and the sagittal height (or sag) is 10 μm. The edge to edge interval distance of the optical cavity is 0.4 mm and 0.2 mm, which is for lateral and vertical translation of the functional Alvarez lens pair. A 5×5 lens array was machined on aluminum 6061 substrate to demonstrate the machine capability although other patterns on non-ferrous materials can be also easily obtained using this method. This approach has been adapted to making almost any shapes for other optical applications, such as diffractive optical elements [Li, 2006]. 97 Figure 5.10: Schematic drawing of Alvarez lens array The mold inserts were fabricated by broaching process with C axis fixed on FG350 ultraprecision CNC machine. The CNC tool path is nearly identical to the profile of the Alvarez lens surface shape, differing only in diamond tool radius compensation. In this setup, the Alvarez lens array mold was held on the vacuum chuck in C-axis mode, i.e., the main work spindle was fixed without rotating during machining process. The workpiece was first moved in X direction at a fixed step distance. It was then continuously moved vertically while the diamond tool was fed in Z direction based on the analytical expression of the Alvarez lens surface. This process continued until the entire expected surface was completely machined. Figure 5.11 shows the perspective three dimensional (3D) view of the tool path generated for this 5×5 Alvarez lens array mold. In the figure, the number of steps in X direction was reduced to show the tool path. For each point on the calculated tool path, the Cartesian coordinates were decided by the step 98 size, the point position on its lens cavity, slope of the surface profile curvature on the contact point between the diamond tool and the machined surface, and the cutter radius. Figure 5.11: Broaching CNC tool path The Alvarez lens surface equation for this study is t = a( xy 2 + 1 / 3x 3 ) + bx + c where the parameters a, b and c are 0.32, -0.026 and 0 respectively. To reduce sag of the entire surface, 10 µm limit was set for the range in Z direction. Z coordinates on the lens surface were calculated from the surface equation or were set as either 0 or -10 µm when the z value was out of range. For the points between the lens cavities, Z coordinates were also set to zero. To machine the Alvarez lens array mold insert surface, the workpiece was mounted on the main spindle (C axis) with its angular position fixed. The movements of 99 three linear axes (X, Y and Z axis) were simultaneously controlled to preset positions in sequence based on the surface equation. The diamond tool feed rate was 100 mm/min. The depth of cut was 3 μm. The feed step size in X direction was 10 μm for rough cut and 0.5 μm for finishing cut; in Y direction it was 10 μm for rough cut and 2 μm for finishing cut. Tool nose radius of the diamond cutter is 250 μm in this study. After the finishing cut, the optical surface finish was confirmed first by visual inspection and later by using the Veeco optical profilometer. 5.2.2 Measurement Alvarez lenses work in pairs. Broaching can provide prototype but is not suitable for mass production due to its expensive and time-consuming nature. Injection molding is an inherent freeform process, which is another reason for freeform optics fabrication where complex geometries can be readily manufactured. After the optical molds were constructed using single point diamond broaching process, micro Alvarez lens arrays were injection molded. 5.2.2.1 Microlens Array The mold inserts were fabricated using 6061 aluminum alloy as shown in Figure 5.12. There were no visible tool marks or other surface defects on the broached mold surfaces. After molding, no visible cosmetic difference among the 25 lenslets was observed. The diameter of the mold insert was 39.88 mm. For research purpose, on the same mold insert another 4×4 Alvarez lens array (2 mm × 1 mm for each Alvarez lens 100 cavity, as shown in the upper part of the mold surface in the same figure) was machined by the same broaching process. Figure 5.12: Machined micro Alvarez lens array mold insert 5.2.2.2 Geometry Measurement Since contact method is not suitable for surface and geometry measurement of optical components, machined surfaces and injection molded lens surfaces were measured using Veeco NT 3300 white light profilometer. Alvarez lens surface is asymmetrical, so 2D profile comparison is not enough to verify the fabrication quality. Due to the limitations of the measurement range on the Veeco NT3300 profilometer, the entire micro Alvarez lens array can not be measured in a single scan so each Alvarez lens cavity had to be measured separately. Moreover, the steep edge on the lens surface can not be resolved from Veeco profilometer measurements either. After removing tilt, translation and rotation in the valid measurement region, 3D measurement results of a 101 single lenslet can be obtained. Figure 5.13 shows the design and measurement results. A single lenslet design is shown in Figure 5.13 (a); measurement result of the lenslet in the middle of the molded microlens array is shown in Figure 5.13 (b); the difference between the lenslet in the middle of the microlens array and design is shown in Figure 5.13 (c) where the maximal deviation was around 0.2 μm, indicating that the fabrication accuracy. In addition, the difference between the molded lenslet in the middle and at the edge is shown in Figure 5.13 (d) where the maximal deviation was again around 0.2 μm. After removing noise, the average deviation was less than 100 nm, indicating that all lenslets in the microlens array met high quality optical requirements, a demonstration of repeatability by this process. (a) (b) 102 (c) (d) Figure 5.13: Design and 3D measurement results (a) Design (b) Measurement result of lenslet in the middle of the array (c) Difference between the lenslet in the middle of the array and design (d) Difference between the lenslet in the middle and at the edge on the molded microlens array 5.2.2.3 Surface Roughness The mold and molded lens surface roughness were also measured on the Veeco profilometer. After removing tilt and curve from the surface measurement results, the surface roughness can be obtained. For the broached mold surface, the Ra value is 37.25 nm and for molded lens surface, Ra value is 24.48 nm at the same area. The Ra values 103 met the requirements for optical applications and the fact that surface roughness of the molded lens was improved over the mold surface indicating that injection molding process has a smoothing effect. For the optical molds fabricated in this research, no post polishing was needed. It is concluded from this research that broaching and injection molding process provide a practical solution to producing freeform optical elements. 5.2.2.4 Adjustable Focal Length Measurement When moving the lenses in a micro Alvarez lens array pair in opposite directions, the focal lengths of the lens array pair will be changed. To measure the adjustable focal lengths of the micro Alvarez lens array pair, a measurement setup was employed in Figure 5.14. The Alvarez lens array was enlarged for clarity. The detailed measurement method and procedure were described earlier in a separate publication [Firestone, 2005]. The positive lenses used in the systems have focal lengths of 8 mm (lens 1), 50 mm (lens 2), 50 mm (lens 3) and 100 mm (lens 4). In the test setup, a He-Ne laser and a Hitachi KP-D20BU CCD camera were used. First, the micro Alvarez lens array pair was manually moved along the optical axis (perpendicular to the lens surface) to a position so that the focus was on the lens surface (top image of the embedded photos). Then the Alvarez lens array pair was moved away from the CCD camera until sharp focused spots (lower image of the embedded photos) were imaged on the CCD camera. The focal lengths can be measured as the displacements from the lenslet surface to the positions of the focused spots. 104 1 2 3 4 He-Ne Laser (λ=633 nm) CCD Camera 25 μm Pinhole Monitor Alvarez Lens Array Pair Figure 5.14: Test setup for measuring the focal length of a molded microlens array pair When the microlens array pair was placed in registration, the composite lens is optically equivalent to a flat plate and the measured focal length was at infinity. When the lens pair was laterally translated, the focal length was changed simultaneously. The equivalent spherical lens has a power (the reciprocal of focal length) proportional to the translation distance that the lens elements are displaced from their neutral positions and coefficient a in surface equation. Based on theoretical calculation, in this study, the focal length from 6.4 mm to infinity can be obtained by translating this 5×5 Alvarez lens array pair within 0.25 mm translation. The measurement result and design values are shown in Figure 5.15. The error between the measurement and design was less than 10% and the average error on the measurement positions was 5.2%. 105 Figure 5.15: Focal length measurement result Through design, fabrication and measurement of a micro Alvarez lens array, the capability for functional precision freeform microlens array manufacturing by combining ultraprecision diamond turning machining using slow tool servo with injection molding process was demonstrated. Unlike conventional processes, this research provides a direct broaching process, which allows the entire Alvarez lens array to be machined accurately in one single operation. The machined mold inserts and injection molded lens arrays were measured to ensure that surface geometry and roughness with optical quality were obtained. No post machining and polishing are required which is important for complex optical surface fabrication since current polishing process may compromise the shape accuracy. The adjustable focal lengths were obtained by laterally translating the position of an Alvarez lens array pair. This research shows the possibility of fabricating many complex 106 (arbitrary) shape elements using the same methodology with optical quality with minimal tooling and setup requirements. Such a strategy would not have been practical or possible if traditional fabrication processes were used. 107 CHAPTER 6 DIFFRACTIVE LENS MANUFACTURING As special micro optical elements, diffractive lenses are selected for this dissertation research. Two types of diffractive lens are described and the design and fabrication processes involved are explained as follows. 6.1 Diffractive Lens 6.1.1 Lens Design The basic concept of the DOEs (diffractive optical elements) relies on constructive and destructive interference of spherical sources to produce the desired illumination geometry. For example, in the simplest design, two parallel slits illuminated by a collimated beam (planar wave front) such as a laser exhibit constructive and destructive interference. As the light propagates from the slits, both slits act as independent light sources, and the light from each propagates in a spherical shape, as shown in Figure 6.1. At some distance, the two spherical waves interact with each other. In some regions, the interaction is constructive, producing “bright” regions, while at half wavelengths from each of these regions, areas of destructive interference occur, 108 producing “dark” regions. If a screen is placed at some distance from the slits, alternating lines of dark and bright areas are produced. Figure 6.1: General concept of a DOE’s function (amplitude type) In order to produce two-dimensional (2D) patterns, the line pattern is replaced by a 2D pattern, which appears to be very complicated. To design this pattern, an inverse Fast Fourier Transform (iFFT) of complex arrays is performed [O’Shea, 2004] based on the desired bitmap image. Because of limitations of lithography fabrication techniques, the complex values of the iFFT are truncated to 2nd levels, depending on the number of levels that will be fabricated in the final lens. The efficiency of the final lens is proportional to the number of levels. The design of 256 levels DOE to produce a circle is shown in Figure 6.2. 109 Figure 6.2: Design of 256 level DOE The pattern is a complex, non rotational layout. The size of each block is equal and can be arbitrarily selected to achieve different divergence of the image. The center to center distance of each block is 20 μm in these test. The smallest vertical step is approximately 10 nm, same as the resolution of the ultraprecision machine. 6.1.2 DOEs Fabrication In optical industry, lithography has been used for fabrication of diffractive optics [Lee, 2003; Suleski, 1995; Ogura, 2001]. However, this process is expensive especially for multilevel mask fabrication. In this dissertation research, STS process on 350 FG machine was used to machine the diffractive DOEs simultaneously. Due to the limitation of the tiny features on DOEs, a special diamond tool was selected which is shown in 110 Figure 6.3. The diamond tool tip was reduced to a half-radius tool with radius of 2.5μm and one side of the cutting edge completely removed in the tool preparation stage. The rake angle is 0 deg, and the clearance angle is 7 deg. This design allowed very straight side walls to be machined while maintaining the smooth machined surface by the use of the radius cutting edge. Figure 6.3: SEM picture of the half-radius diamond tool In this research, two different but similar approaches to micromachining of DOEs were studied. Each of the two approaches can be effective depending on the optical design. In this study, broaching produced slightly better results because the lens design has a rectangular shape. 111 6.1.2.1 Polar Coordinate – Spiral Tool Path The CNC tool path is nearly identical to the design surface shape, differing only due to the tool radius compensation. In polar coordinates, the Y position for the tool was fixed while the workpiece was rotating. Figure 6.4 shows the perspective three dimensional view of the tool path generated for the experiment, but the number of steps was reduced for clarity. For each point on the tool path, the polar radius ρ and angle θ were determined by the step size and arc length, and the tool height Z was determined from the diffractive lens design for the corresponding the X and Y coordinates. The tool nose radius can be compensated for either off-line method or using the onboard tool compensation function. The angular position of the workpiece was controlled in real time simultaneously with the three linear axes, resulting in a spiral cutting pattern as the Z axis is modulated. 112 Figure 6.4: Spiral CNC tool path for DOE fabrication 6.1.2.2. Cartesian Coordinate – Broaching The second method that was used in the fabrication process was broaching. In this setup, the diffractive lens was held on a vacuum chuck. During cutting, the workpiece was first moved in the X direction at a fixed step distance (lateral, to the right in Figure 6.5, the step size depends on the diamond tool size). Then it was continuously moved vertically while the diamond tool was fed in the Z direction based on the diffraction pattern. This process continued until the entire surface was completely machined. Figure 6.5 depicts the machine tool path for broaching where the number of steps was reduced to show the straight tool travel paths and the return travel passes were also removed for clarity. 113 Figure 6.5: Broaching CNC tool path for DOE fabrication 6.1.3 Profile Measurement In reality, a 2 level or 4 level diffractive lens can be fabricated using lithography with relative ease, although it still remains a lengthy process. However, a 256 level diffractive lens is difficult and costly to fabricate using lithography technique due to the multiple-exposures required for a multi-level diffractive design and the potential for accumulated errors following each exposure and etching. This work demonstrated that micromachining process using ultraprecision machine and a specially designed diamond 114 tool permits machining of multi-level micro features in a single operation without the repetitive re-alignments. For similar machining speed, the broaching approach produced smoother surface especially on the edge of the features. This is due to the fact that the lens design was a square pattern. If a circular pattern design was selected, it is expected that the spiral machining process would produce better results. Figure 6.6 shows an SEM photo of the 256 level DOE. The broaching diamond machining process was selected to fabricate the device. Prior to machining of the lens, diamond turning process was used to machine the sample flat on both sides. In the SEM photo in Figure 6.6, the lens was tilted slightly to show the depth of the different levels for only a portion of the machined surface. The SEM scan shows only a small section for the machined DOE surface. 115 Figure 6.6: Sectional SEM scan of a 256-level DOE AFM was used to study the topography of the DOEs. Figure 6.7 shows a sectional AFM scan of the 256 level DOE surface. To view the depth information, a line scan was executed using the AFM (Atomic Force Microscopy) and the results are shown in Fig. 6.8. As can be seen the draft angle in this case was 8.8 degree which is similar to the results obtained by lithography technology and the surface finish of the scan area was approximately 9.4 nm Ra (arithmetic average). The step features of the diffractive lens have largely been replicated during the fabrication process. 116 Figure 6.7: Sectional AFM scan of the 256-level DOE design 117 Figure 6.8: Sectional AFM line scan of the 256-level DOE design Surface measurement indicates that the direct machined DOEs surface meets the requirements for precision optical applications. The investigated strategy for DOE fabrication has several inherited advantages over existing technologies. First, DOEs can be machined directly on the substrate in a single turning operation with minimal tooling and setup requirement and without the need for realignment. Second, the DOEs have optical quality and finish that does not require postmachining polishing. STS process is a powerful complementary tool for clean-room technology, where mask-making and the lithography process can be very costly and time consuming. In this 118 dissertation research, the design from pattern calculation (using a self-written Matlab program) to finished DOE can be completed in less than a day. This is ideal for prototype fabrication, providing an easy and quick means to evaluate an optical design before major investment is made for mass production. Another important feature of the STS process is that multiple-level micro-/nano-scale features can be simultaneously machined without the need of repeated alignment operations, as in a lithography method. 6.2 Fresnel Lens 6.2.1 Lens Design The design of the Fresnel lens for this research is described as follows. The center of the molding lens is a 50-zone Fresnel lens with focal length (f) of 100 mm. For this design, wavelength λ is equal to 632.8 nm and refractive index of the plastic material (Plexiglas® V825) n is equal to 1.49. The feature heights are equal to λ /(n − 1) which is approximately 1.3 μm. The transition location for each zone occurs at rp2 = 2 pλf (where p = 0, 1, 2, …, 50). The design for the center part of the Fresnel lens is shown in Figure 6.9 with only 5 zones shown for clear demonstration. 119 Figure 6.9: Fresnel lens design 6.2.2 Mold Fabrication Since the Fresnel lens has an axisymmetrical design, the mold insert can be made by traditional single point diamond turning process. The tool radius used for this Fresnel lens mold insert fabrication is 2.5 µm. Since the tool radius can not be made infinitely small (zero), the mold profile will be slightly different from the design which were usually designed based on zero radius, this finite radius will be one of the sources of errors affecting optical performance of a molded lens. A Fresnel lens mold insert and a molded lens are shown in Figure 6.10. The mold insert is 6061 aluminum alloy and the lenses were molded with Plexiglas® V825, same polymer as the other molded optical components involved in this dissertation research. In addition to the diffractive lens 120 patterns in the center, selected groove designs were also fabricated on the insert for testing the replication of micro features. Figure 6.10: Fresnel lens mold insert and molded lens 6.2.3 Profile Measurement For the tiny feature of a Fresnel lens as shown in an SEM (scanning electron microscope) photo in Figure 6.11, it is difficult to measure the surface profile with contact method. The non-contact optical profilometer Veeco NT 3300 was chosen to perform the surface profile measurement. 121 Figure 6.11: Measurement result from SEM In Figure 6.12, according to the Veeco profilometer measurement results, the profiles of the mold insert and the lenses molded under different mold temperatures are compared to each other. The mold temperature was set at five levels, 110°F (43.3°C), 130°F (54.4°C), 150°F (65.5°C), 170°F (76.6°C) and 190°F (87.7°C). In addition to the different mold temperature, all the other process parameters remained unchanged. 122 Figure 6.12: Feature comparison with different mold temperature Although the precision machine and machining process can be used to fabricate the lens mold with high accuracy, due to the error from cutter path, tool geometry and from machining process parameters such as feed rate and spindle speed, fabrication errors between the mold insert profile and design exist. Moreover, because of shrinkage from injection molding process, larger errors can occur between the molded lens profile and design. In Figure 6.13, the profiles of the mold insert and lenses molded under different packing pressure are compared to each other. The packing pressure was set at six levels, 10% (21.8 MPa), 15% (32.7 MPa), 20% (43.6 MPa), 25% (54.5 MPa), 30% (65.4 MPa) and 35% (76.3 MPa) of the maximal machine injection pressure (218 MPa). Except different setting for packing pressure, all the other process parameters remained unchanged. 123 Figure 6.13: Feature comparison with different packing pressure In Figure 6.14, the profiles of the mold insert and lenses molded under different melt temperature are compared to each other. In this experiment, the melt temperature was set at three levels, 430°F (221.1°C), 450°F (232.2°C) and 470°F (243.3°C). In this experiment, only the melt temperature was varied, all the other process parameters remained unchanged. 124 Figure 6.14: Feature comparison with different melt temperature The measurement results showed that more accurate lens profile will be obtained under higher mold temperature, higher packing pressure and higher melt temperature. The mold temperature makes obvious contribution to the lens geometry accuracy. 6.2.4 Optical Performance Simulation The effect of the lens profile error is crucial to the optical performance for Fresnel lenses. The analytical method described in Section 4.3.1 will be used to obtain the diffractive pattern from the Veeco measurement results. Normally the diffraction integral is used to derive simplified solutions. The conventional approaches for approximation are near field approximation and far field approximation. The criterion for near field approximation (Fresnel approximation) is 125 ( z1 − z 0 ) nf ≥ (2.5a 4 / λ )1/ 3 where ( x 02 + y02 ) max = a 2 . The criterion for far field approximation (Fraunhofer approximation) is ( z1 − z 0 ) ff ≥ 10a 2 / λ . Unfortunately for our design, neither far-field nor near-field approximation could be applied in this case so we had to use the principle formula Equation (3-3) to calculate the diffraction distribution of the design and the molded lens. Figure 6.15, 6.16 and 6.17 are the simulation results for optical performance based on design profile and Veeco profile measurements. For the molded lens, the intensity of the first-order diffraction is much lower than the design value and the spread of the central spot is larger than the desired value. Also the lenses molded under different process variables will have different performance that can be simulated from the measured lens profiles using Veeco profilometer. The difference between lens 1 and lens 2 is the packing pressure during the injection molding process. The packing pressure for lens 1 is 35% (76.3 MPa) and for lens 2 is 10% (21.8 MPa). 126 Figure 6.15: Designed lens diffractive pattern distribution Figure 6.16: Lens 1 which is under higher packing pressure diffractive pattern distribution 127 Figure 6.17: Lens 2 which is under lower packing pressure diffractive pattern distribution From the simulation results above, it can be concluded the same conclusion as directly from the profile measurement results of the molded Fresnel lenses that higher packing pressure is suitable for more accurate feature replication. 128 CHAPTER 7 CONCLUSION The motivation of this dissertation research was to investigate and develop a methodology on precision polymer optics fabrication by injection molding that can be used for high volume and low cost lens manufacturing. Injection molding polymer optical components have long been used for its high volume, low cost and lightweight capability over traditional glass optics. Injection molding is an inherent freeform process thus complex geometry (including aspherical and freeform design) may be readily manufactured. However, the process has not been readily accepted in precision optical fabrication industry because several difficult issues related to the injection molded optics have hindered the implementation of injection molding process in high precision applications. These issues include geometry deviation and inhomogeneous index distribution due to thermal shrinkage; birefringence incurred during the molding process also limited the adoption of polymer optics in certain polarization sensitive optical systems; thermal instability of molded polymer lenses can also render the optics less effective in application where temperature changes become large and frequent (such as optics designed for out door use or high temperature applications). Currently, most of the 129 research involved in polymer injection molding was focused on the determination of process parameters in order to optimize part quality but did not address the issues concerning mold compensation for high precision polymer lenses. Also the optical effects from process conditions of lens injection molding such as index distribution, residual stress/birefringence and optical scattering were not studied systematically. Furthermore, with the high precision requirement of the optical system, freeform optics including microlens array and diffractive optics can provide a practical solution for some design and manufacturing problems. The success of the process relies on the fabrication of the mold inserts and measurement technology. Fewer articles discussed the advanced mold fabrication and measurement issues. It is necessary for current researchers to make efforts to improve the injection molding process on precision optical component production. This dissertation research involved fundamental and systematic study of precision polymer optics fabrication by injection molding. The study included both experimental approach and numerical modeling in order to identify the proper polymer lens manufacturing processes. The scope of this research includes investigation in optical design, mold and lens fabrication, as well as optical metrology issues related to polymer lens manufacturing to obtain precision macro and micro polymer freeform optics with accurate geometry and proper optical performance by state-of-the-art mold fabrication and molding technology. 130 In Chapter 3, with the aid of DOE and DEA methods, the critical process parameters including packing pressure, mold temperature and melt temperature were narrowed down for other process and performance studies and the optimal condition was found for compensation study both by the plano lens molding experiment and measurement results. The mold compensation methodology was developed based on advanced freeform measurement and data analysis technology and STS freeform mold insert fabrication. In Chapter 4, the effects of the process parameters to optical performance such as birefringence, index distribution and surface scattering were carefully studied by theoretical and empirical analysis. Lower packing pressure, higher mold temperature and melt temperature were better setup for lens molding with lower birefringence. Lower packing pressure and higher mold temperature were proven to be better for lens molding with smaller index deviation. Higher packing pressure, lower mold temperature and higher melt temperature were better for lens molding with lower optical scattering. Due to the complexity of the injection molding process, single process condition cannot fulfill all the requirements for lens quality requirements so process parameters need to be selected as a compromise for desired specification. In Chapter 5, macro Alvarez lens and micro Alvarez lens array were fabricated. The mold inserts were successfully machined using slow tool servo and broaching process. The injection molded Alvarez lens can fulfill the requirement of vision test and these lenses can be used for ophthalmic application. In addition, deviation between the 131 molded micro Alvarez lens array and design was around 0.2 μm with the P-V value of the design at 10 μm. The average error of the adjustable focal length was only 5.2%. In Chapter 6, diffractive lenses and Fresnel lenses were fabricated. The fabrication of the multilevel DOEs with STS has proven that STS can provide an easy and quick solution without expensive and time-consuming mask making and lithography in cleanroom. The measurement results of the Fresnel lens showed that more accurate lens profile can be obtained under higher mold temperature, higher packing pressure and higher melt temperature. The mold temperature is also critical to the lens geometry accuracy. The same conclusion was drawn from optical performance simulation. In addition, simulation using Moldflow was implemented to verify the experiment results, for example, plano lens warpage and birefringence. The tendency of the simulation results was similar as the experiment results. However, accurate predictions can not be easily obtained using commercial software in all cases. This dissertation research was an attempt to create a methodology for injection molding process for high precision polymer lens manufacturing. Experimental study and process modeling were conducted to develop a fundamental understanding of the process. The feasibility of lens compensation using freeform mold were fully tested. Other functional freeform optical elements were fabricated and numerical simulation was utilized to predict the optical performance of the molded elements. The contributions of this research are as follows: 132 • Performed experiments (both axisymmetric lenses and freeform lenses) and evaluated surface geometry and optical performance to investigate the feasibility of using injection molding process to manufacture high precision polymer lenses. • Explored the effects of process variables and material property for specific objective function (surface shape deviation, birefringence, optical retardation, optical scattering) for lens performance optimization. • Utilized current measurement methods and developed freeform data analysis method for real surface shape, part thickness and optical performance measurement. • Designed and fabricated multiple freeform mold inserts and obtain functional injection molded freeform optics including compensated lens, Alvarez lens, micro Alvarez lens arrays and diffractive lenses. 133 CHAPTER 8 FUTURE WORK Current research focused on empirical study on the effects of process parameters to the lens performance and the compensation practice relied on a trial and error approach, in which initial molding was performed and the deviation on the lens was compensated for on the mold inserts to obtain improved lens. This is a time consuming, labor intensive and therefore expensive method. Currently, in computer simulation, geometry deviation, structures in both macro and micro size can not be readily and properly modeled using commercial software such as Moldflow Plastic Insight® 6.1. Some important information for optical performance such as residual stresses of the molded lens is not available in the software simulation results. Therefore, in the future, with the development of new and reliable multi-scale approach and more powerful computational capability for injection molding process simulation, the performance of the molded lens can be predicted and the modified mold inserts and the optimal process conditions can be obtained by numerical analysis for various mold materials, polymer materials and optical components without performing the actual experimental work.. 134 Future work will also be focused on analyses that may include study of errors in mold fabrication, molding process and measurement. The CNC tool path for mold fabrication is calculated based on an ideal tool geometry and accurate linear and radial movement of the machine. However, due to wear and measurement error of the machining tools, the tool geometry data require modifications for proper tool path compensation. In addition, the environmental factors including temperature, humidity and vibration will also have an impact on machine accuracy. Long STS machining time for steep freeform mold fabrication may also increase fabrication error. In the future, the mold fabrication process can be improved with newer equipment. For example, using an FTS (fast tool servo) to increase freeform mold fabrication rate can make this process more robust and suitable for industrial applications. Finally, due to the uncertainties and random factors involved in the lens and mold measurement procedure and measurement equipment, analysis of mold fabrication error, molding process error and measurement error will all be important for predicting the molded components performance. 135 APPENDIX A SPECIFICATION OF MOLDING MATERIAL 136 Figure A.1: Product data sheet for Plexiglas® V825 137 Figure A.2: Product data sheet for Plexiglas® V825 (Figure A.1 continued) 138 APPENDIX B SH50M MAIN SPECIFICATION 139 Clamping system Clamping force Opening force Distance between tie-bars (H×V) Overall size of platen Mold space Opening stroke Daylight Ejector type fully hydraulic 50tf 3.2tf 325×325mm 470×467mm Min.160mm 440mm 600mm hydraulic and across multipoint ejection (5 points) 70mm 2.2tf C160s (plasticizing unit) 28mm 2230kg/cm2 (approximately 218.54Mpa) 70cm3 67g (2.4oz) (screw 37kg/h (400rpm) Ejector stroke Ejector force Injection unit Screw diameter Injection pressure Injection capacity Injection weight (GPPS) Plasticizing capacity (GPPS) rotation speed) Injection rate Screw stroke Max.injection speed Screw driving system Screw torque Torque selector Screw ratoation speed No. of temperature control zone Heater capacity (for open nozzle only) Nozzle contact force Injection unit displacement stroke Hopper capacity Electric and hydraulic: Drive motor capacity Pressure in hydraulic circuit Oil reservoir capacity Others: Machine dimensions (L×W×H) Machine weight 99cm3/s 114mm 160mm/s hydraulic motor 36kgf⋅m 1 400rpm 4 4.6kw 4670kgf 245mm 15 l 11kw 155kgf/ cm2 110 l 3703×936×1635MM 2.2ton Table B.1: Main specification of SH50M injection molding machine 140 APPENDIX C PROCESS CONDITIONS FOR FULL FRACTIONAL FACTORIAL EXPERIMENTS 141 RUNS 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 Tmelt 210°C (450°F) 210°C (450°F) 210°C (450°F) 210°C (450°F) 210°C (450°F) 210°C (450°F) 210°C (450°F) 210°C (450°F) 210°C (450°F) 210°C (450°F) 210°C (450°F) 210°C (450°F) 210°C (450°F) 210°C (450°F) 210°C (450°F) 210°C (450°F) 210°C (450°F) 210°C (450°F) 210°C (450°F) 210°C (450°F) 210°C (450°F) 210°C (450°F) 210°C (450°F) 210°C (450°F) 243°C (470°F) 243°C (470°F) 243°C (470°F) 243°C (470°F) 243°C (470°F) 243°C (470°F) 243°C (470°F) 243°C (470°F) 243°C (470°F) 243°C (470°F) 243°C (470°F) Tmold 65°C (150°F) 65°C (150°F) 65°C (150°F) 65°C (150°F) 65°C (150°F) 65°C (150°F) 65°C (150°F) 65°C (150°F) 65°C (150°F) 65°C (150°F) 65°C (150°F) 65°C (150°F) 88°C (190°F) 88°C (190°F) 88°C (190°F) 88°C (190°F) 88°C (190°F) 88°C (190°F) 88°C (190°F) 88°C (190°F) 88°C (190°F) 88°C (190°F) 88°C (190°F) 88°C (190°F) 65°C (150°F) 65°C (150°F) 65°C (150°F) 65°C (150°F) 65°C (150°F) 65°C (150°F) 65°C (150°F) 65°C (150°F) 65°C (150°F) 65°C (150°F) 65°C (150°F) tcool 30sec 30sec 30sec 30sec 30sec 30sec 40sec 40sec 40sec 40sec 40sec 40sec 30sec 30sec 30sec 30sec 30sec 30sec 40sec 40sec 40sec 40sec 40sec 40sec 30sec 30sec 30sec 30sec 30sec 30sec 40sec 40sec 40sec 40sec 40sec Ppacking 65.4MPa (30%) 65.4MPa (30%) 65.4MPa (30%) 76.3MPa (35%) 76.3MPa (35%) 76.3MPa (35%) 65.4MPa (30%) 65.4MPa (30%) 65.4MPa (30%) 76.3MPa (35%) 76.3MPa (35%) 76.3MPa (35%) 65.4MPa (30%) 65.4MPa (30%) 65.4MPa (30%) 76.3MPa (35%) 76.3MPa (35%) 76.3MPa (35%) 65.4MPa (30%) 65.4MPa (30%) 65.4MPa (30%) 76.3MPa (35%) 76.3MPa (35%) 76.3MPa (35%) 65.4MPa (30%) 65.4MPa (30%) 65.4MPa (30%) 76.3MPa (35%) 76.3MPa (35%) 76.3MPa (35%) 65.4MPa (30%) 65.4MPa (30%) 65.4MPa (30%) 76.3MPa (35%) 76.3MPa (35%) tpacking 6.5sec 7.0sec 7.5sec 6.5sec 7.0sec 7.5sec 6.5sec 7.0sec 7.5sec 6.5sec 7.0sec 7.5sec 6.5sec 7.0sec 7.5sec 6.5sec 7.0sec 7.5sec 6.5sec 7.0sec 7.5sec 6.5sec 7.0sec 7.5sec 6.5sec 7.0sec 7.5sec 6.5sec 7.0sec 7.5sec 6.5sec 7.0sec 7.5sec 6.5sec 7.0sec Continued Table C.1: Process conditions for full fractional factorial experiments 142 Table C.1 continued 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 243°C (470°F) 243°C (470°F) 243°C (470°F) 243°C (470°F) 243°C (470°F) 243°C (470°F) 243°C (470°F) 243°C (470°F) 243°C (470°F) 243°C (470°F) 243°C (470°F) 243°C (470°F) 243°C (470°F) 254°C (490°F) 254°C (490°F) 254°C (490°F) 254°C (490°F) 254°C (490°F) 254°C (490°F) 254°C (490°F) 254°C (490°F) 254°C (490°F) 254°C (490°F) 254°C (490°F) 254°C (490°F) 254°C (490°F) 254°C (490°F) 254°C (490°F) 254°C (490°F) 254°C (490°F) 254°C (490°F) 254°C (490°F) 254°C (490°F) 254°C (490°F) 254°C (490°F) 254°C (490°F) 254°C (490°F) 65°C (150°F) 88°C (190°F) 88°C (190°F) 88°C (190°F) 88°C (190°F) 88°C (190°F) 88°C (190°F) 88°C (190°F) 88°C (190°F) 88°C (190°F) 88°C (190°F) 88°C (190°F) 88°C (190°F) 65°C (150°F) 65°C (150°F) 65°C (150°F) 65°C (150°F) 65°C (150°F) 65°C (150°F) 65°C (150°F) 65°C (150°F) 65°C (150°F) 65°C (150°F) 65°C (150°F) 65°C (150°F) 88°C (190°F) 88°C (190°F) 88°C (190°F) 88°C (190°F) 88°C (190°F) 88°C (190°F) 88°C (190°F) 88°C (190°F) 88°C (190°F) 88°C (190°F) 88°C (190°F) 88°C (190°F) 40sec 30sec 30sec 30sec 30sec 30sec 30sec 40sec 40sec 40sec 40sec 40sec 40sec 30sec 30sec 30sec 30sec 30sec 30sec 40sec 40sec 40sec 40sec 40sec 40sec 30sec 30sec 30sec 30sec 30sec 30sec 40sec 40sec 40sec 40sec 40sec 40sec 143 76.3MPa (35%) 65.4MPa (30%) 65.4MPa (30%) 65.4MPa (30%) 76.3MPa (35%) 76.3MPa (35%) 76.3MPa (35%) 65.4MPa (30%) 65.4MPa (30%) 65.4MPa (30%) 76.3MPa (35%) 76.3MPa (35%) 76.3MPa (35%) 65.4MPa (30%) 65.4MPa (30%) 65.4MPa (30%) 76.3MPa (35%) 76.3MPa (35%) 76.3MPa (35%) 65.4MPa (30%) 65.4MPa (30%) 65.4MPa (30%) 76.3MPa (35%) 76.3MPa (35%) 76.3MPa (35%) 65.4MPa (30%) 65.4MPa (30%) 65.4MPa (30%) 76.3MPa (35%) 76.3MPa (35%) 76.3MPa (35%) 65.4MPa (30%) 65.4MPa (30%) 65.4MPa (30%) 76.3MPa (35%) 76.3MPa (35%) 76.3MPa (35%) 7.5sec 6.5sec 7.0sec 7.5sec 6.5sec 7.0sec 7.5sec 6.5sec 7.0sec 7.5sec 6.5sec 7.0sec 7.5sec 6.5sec 7.0sec 7.5sec 6.5sec 7.0sec 7.5sec 6.5sec 7.0sec 7.5sec 6.5sec 7.0sec 7.5sec 6.5sec 7.0sec 7.5sec 6.5sec 7.0sec 7.5sec 6.5sec 7.0sec 7.5sec 6.5sec 7.0sec 7.5sec APPENDIX D ANOVA RESULTS FOR FULL FRACTIONAL FACTORIAL EXPERIMENTS 144 Constant Tmelt Tmold tcool Ppack tpack Tmelt*Tmelt tpack*tpack Tmelt*Tmold Tmelt*tcool Tmelt*Ppack Tmelt*tpack Tmold*tcool Tmold*Ppack Tmold*tpack tcool*Ppack Tcool*tpack Ppack*tpack S R-SQ R-SQ adj P 0.870 0.000 0.000 0.244 0.007 0.476 0.000 0.205 0.000 0.264 0.001 0.001 0.108 0.000 0.087 0.787 0.953 0.001 All Factors less than 0.05 are significant 0.7050 0.0000 0.0000 ELIMINATED IT 0.0050 0.4660 0.0000 0.2010 0.0000 ELIMINATED IT 0.0010 0.0010 ELIMINATED IT 0.0000 0.0850 ElIMINATED IT ELIMINATED IT 0.0010 0.022 98.50% 98.10% 0.02197 98.40% 98.10% Table D.1: ANOVA results for full fractional factorial experiments 145 APPENDIX E DEA RESULTS FOR FULL FRACTIONAL FACTORIAL EXPERIMENTS 146 RUNS 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 Total Weight 20.6421 20.6997 20.7308 20.745 20.8202 20.871 20.6583 20.7024 20.7306 20.7486 20.8192 20.882 20.4877 20.5488 20.6022 20.5595 20.6379 20.7057 20.4979 20.5551 20.6046 20.5522 20.6378 20.7021 20.5527 20.6169 20.6854 20.63655556 20.7312 20.8221 20.5549 20.6342 20.6922 20.6345 20.7442 Standard Deviation 0.0112 0.0088 0.0146 0.0106 0.0139 0.0102 0.0068 0.0091 0.0343 0.0050 0.0140 0.0066 0.0153 0.0148 0.0159 0.0100 0.0049 0.0060 0.0081 0.0106 0.0045 0.0092 0.0062 0.0143 0.0044 0.0075 0.0033 0.0053 0.0064 0.0111 0.0091 0.0025 0.0082 0.0040 0.0092 Input 0.7885 0.8604 0.7579 0.8399 0.8058 0.9034 0.8908 0.8543 0.5236 0.9798 0.8032 1.0000 0.7126 0.7217 0.7034 0.8104 0.9331 0.9331 0.8510 0.7974 0.9408 0.8259 0.8979 0.7535 0.9451 0.8635 1.0000 0.9196 0.9338 0.8629 0.8281 1.0000 0.8703 0.9565 0.8704 Output 0.7243 0.7791 0.8004 0.8173 0.8973 0.9686 0.7483 0.7807 0.8002 0.9488 0.8961 1.0000 0.6188 0.6562 0.6929 0.6672 0.8447 0.8344 0.6325 0.6629 0.8364 0.6640 0.7577 0.7736 0.8025 0.7137 1.0000 0.8124 0.8291 0.9015 0.6661 1.0000 0.7738 0.8991 0.8205 Continued Table E.1: DEA results for full fractional factorial experiments 147 Table E.1 continued 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 20.8961 20.4192 20.4653 20.539 20.432 20.5301 20.6181 20.3905 20.4583 20.5256 20.4217 20.5141 20.6007 20.4157 20.5097 20.5943 20.4723 20.5892 20.7047 20.4193 20.5071 20.5883 20.4644 20.5842 20.6966 20.2598 20.3166 20.4041 20.268 20.3527 20.4379 20.2331 20.3018 20.3768 20.2509 20.4317 20.3411 0.0117 0.0179 0.0133 0.0130 0.0146 0.0100 0.0155 0.0097 0.0136 0.0112 0.0106 0.0088 0.0113 0.0075 0.0068 0.0078 0.0059 0.0081 0.0105 0.0043 0.0053 0.0067 0.0042 0.0060 0.0082 0.0221 0.0208 0.0195 0.0142 0.0111 0.0066 0.0140 0.0058 0.0060 0.0073 0.0101 0.0086 148 1.0000 0.6736 0.7468 0.7525 0.7247 0.8099 0.7107 0.8151 0.7416 0.7854 0.7981 0.8345 0.7829 0.8640 0.8827 0.8582 0.9043 0.8499 0.8268 0.9466 0.9192 0.8851 0.9487 0.9016 0.8729 0.6182 0.6344 0.6519 0.7307 0.7873 0.8854 0.7348 0.9059 0.9011 0.8684 0.8077 0.8399 1.0000 0.5816 0.6061 0.6499 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