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Simultaneous Power and Thermal Integrity Driven Via Stapling in 3D ICs Hao Yu, Joanna Ho and Lei He Electrical Engineering Dept. UCLA Partially supported by NSF and UC-MICRO fund from Intel New Solution for High-performance Integration 2D SoC has limited device density and interconnect performance (delay) Potential solution: 3D Integration Fabrication Technologies: Chip-level Wafer Bonding or Die-level Silicon Epitaxial Growth Extra challenges: thermal integrity and power integrity 2 Thermal Challenge in 3D ICs Inter-layer dielectrics are poor thermal conductors the temperature of each die increases along third dimension, where the heat sink is on the top 40c 70c 100c 130c 160c High temperature affects interconnect and device reliability and brings variations to timing Vertical vias are good thermal conductors They can be used as thermal vias to remove the heat from each die 3 Power Delivery Challenge in 3D ICs The voltage bounce is significant in P/G planes at the bottom due to resonance Large voltage bounce affects the performance of I/Os Vertical vias can minimize the returned current path and hence loop inductance They can be used as power vias to reduce the voltage bounce for each P/G plane 4 Via Planning Problem in 3D IC Motivation Staple vias from the top heat-sink to the bottom P/G planes remove heat in silicon die and reduce voltage bounce in package plane Too many? -> signal routing congestion Too few? -> reliability by current density Previous work (thermal via planning) Iterative via planning during placement [Goplen-Sapatnekar:ISPD’05] Alternating-direction via planning during routing [Zhang-Cong:ICCAD’05] Both use steady-state thermal analysis and ignore variant thermal power Both ignore that the vertical via can be also designed to remove the voltage bounce in power supply Primary contributions of our work Formulate a levelized via stapling to simultaneously minimize both temperature hotspot and voltage bounce Develop an efficient sensitivity-driven optimization with use of structured and parameterized macromodel 5 Outline Modeling and Problem Formulation Integrity Analysis and Sensitivity based Optimization Experimental Results Conclusions 6 Electric and Thermal Duality Temperature Voltage state variables (x(t)) Thermal-Power Input Current sources (u(t)) Thermal conductance Electrical conductance (G) Thermal capacitance Electrical capacitance (C) Both electric and thermal systems can be described in MNA (modified nodal analysis) time domain: frequency domain: dx(t ) Gx(t ) C Bu (t ) (G sC ) x( s) Bu ( s) dt y (t ) LT x(t ) y( s) LT x( s) B and L are multi-input/output port matrices y is the selected output response 7 Two Distributed Networks for 3D IC All device/dielectric layers and power planes are discretized into tiles A distributed electrical RLC model for power/ground plane A distributed thermal RC model for device/dielectric layer Each via is modeled by a RC pair 8 Thermal Model and Analysis Steady-state thermal model and analysis Tiles connected by thermal resistance Heat sources modeled as time-invariant current sources Steady-state temperature can be obtained by directly solving a time-invariant linear equation Transient thermal model and analysis Tiles connected by thermal resistance and capacitance Heat sources modeled as time-variant current sources Transient temperature can be obtained by directly solving a timevariant linear equation 9 Need of Transient Thermal Modeling Cycle-accurate power Time-variant workload and dynamic power management introduce temporal and spatial thermal power variation Thermal power is the runtime average of cycle-accurate power over thermal time-constant Thermal power decides temperature Maximum thermal-power s ms ns Power Transient thermal-power CPU Cycles Steady-state analysis needs to assume a maximum thermal power simultaneously for all regions But it rarely happens and hence can result in an over-design Direct transient analysis is accurate but time-consuming 10 It calls for more accurate yet efficient transient thermal modeling during the design automation Need of Simultaneous Thermal/Power Co-Design Temperature hotspots usually distribute differently from voltage bounce A thermal integrity map tends to result in a uniform via stapling pattern A power integrity map tends to result in a biased via stapling pattern in center Considering thermal and power integrity separately may also lead to over-design 11 Problem Formulation 12 Via Stapling A levelized via stapling is used • Each level has a different via density Di Minimize via number under thermal/power integrity constraint D0 Di ni Vmax Tmax Dmax Dmin D1 D2 levelized via density via number at different level power integrity constraint thermal integrity constraint congestion from signal via current density constraints It can be efficiently solved by a sensitivity based optmization The sensitivity is calculated from a structured and parameterized macromodel Outline Modeling and Problem Formulation Integrity Analysis and Sensitivity based Optimization Experimental Results Conclusions 13 Parameterized System Equation 14 The levelized stapling pattern is described by adjacent matrix X 1 3 1 4 5 7 6 6 7 5 6 7 8 -1 0 0 4 8 X(2,6)= 4 5 1 3 2 3 0 2 1 2 0 -1 1 0 0 8 Via conductance gi and capacitance ci are both proportional to the area Di or density (Di/a) (a is unit via area) Both Di and Xi are parametrically added into the nominal MNA equation K [G0 sC 0 Di ( g i sc i )x(D, s) Bu ( s) i 1 y (D, s) LT x(D, s) where g i g 0 X i and ci c0 X i Separation of Nominal and Sensitivity Expand state variables x(D1,…DK,s) by Taylor expansion x(D, s) i w.r.t. to Di [Li-Pileggi:ICCAD’05] ( i1 ...iK ) i1 iK x ( s )( D ) ( D ) 1,...,K 1 K i1 1 Construct a new state variables by (0) (1) (1) (1) (2) x [ x , x ,..., x , x ,..., x ap 0 1 K 1,1 K ,K ] nominal values and sensitivities Expanded system is reorganized into a lower-triangular-block system (Gap sCap ) xap Bap u (t ), Cap has similar structure 15 yap G0 Dg 1 1 D g Gap K K 0 LTap xap 0 0 0 G0 0 0 0 0 0 0 0 D1 g1 D2 g 2 G0 0 G0 0 0 0 G0 DK g K 0 0 0 D1 g1 Since system size is enlarged, we can reduce it by model reduction 0 0 0 0 0 G0 Macromodel by Model Reduction … … large size project Small but dense small size Model reduction can reduce model size and preserve accuracy by matching moments of inputs [Odabasioglu-Celik-Pileggi:TCAD’98] The projection above is non-structured, and will mess the nominal values and their sensitivities again This can be solved by a structure-preserving reduction [YuTan-He:BMAS’05, Yu-Shi-He:DAC’06] 16 Structured Projection (I) Block-diagonally partition the flat projection matrix according to the size of nominal state-variable and sensitivity V0 V0 V V1 1 VK VK 1 V 2 K 17 VK 2 VK VK 1 Structured projection can result in a reduced system with preserved structure ~ Nominal values and sensitivities are still separated after reduction There is only one LU-factorization of the reduced G0 in diagonal ~ (0) 1 ~ (1) 1 ~ (1) K ~ (1) 1,1 xap [ x , x ,..., x , x ,..., x ~ ~ (2) K ,K ~ Cap has similar structure as Gap ] ~ G0 ~ A1 g1 A g~ ~ Gap K K 0 0 0 0 0 0 0 G0 0 0 0 0 G0 0 0 ~ ~ ~ A1 g1 ~ A2 g 2 ~ 0 G0 ~ A1 g1 0 ~ 0 G0 ~ 0 AK g K 0 0 0 0 0 0 ~ G0 Time-domain Analysis 18 Nominal response and sensitivity can be solved separately and efficiently with BE in time-domain ~ ~ 1 ~ ~ 1 ~ ~ (Gap Cap ) xap (t ) Cap xap (t h) Bap uap (t ) h h ~ ~ T ap ~ y ap (t ) L xap (t ) Direct sensitivity calculation first-order: ~ Si y f x k dt LTk dt LTk xi(1) dt , Ai k 1 ts Ai Ai k 1 ts k 1 ts K te K te K te Generated sensitivities can be used in any gradient based optimization We call this method as SP-MACRO Sensitivity based Optimization Via optimization flow Calculate T/V nominal+sensitivity Update Density Vector Structured and parameterized reduction provides an efficient calculation of both nominal value and sensitivity The via density vector D can be efficiently updated during each iteration iter 1 iter D Check Integrity Constraints D S Normalized sensitivity according to both temperature and voltage (T/V) sensitivities Further speedup: adjoint Lagrangian method similar to [Visweswariah-Conn-Haring:TCAD’00] 19 Outline Modeling and Problem Formulation Integrity Analysis and Sensitivity based Optimization Experimental Results Conclusions 20 Experiment Settings 21 A modest 3D stacking layer size material number mesh heat-sink 2cm x2cmx1mm copper 1 RC device-layer 1cmx1cmx4um silicon 2 RC inter-layer 1cmx1cmx1um dielectric 2 RC P/G plane 2cmx2cm x10um copper 2 RLC Sigma Epsilon Mu Kapa_r Silicon NA NA NA 100W/mK Copper 59.6x 10^6S/m NA NA 400W/mK Dielectric NA 3.3 1.0 50W/mK Kapa_c 1.75x10^6J/m^3K 3.55x10^6J/m^3K NA Accuracy of Reduced Macromodel 22 Transient voltage responses of exact and MACRO models at ports 1 and 5 in one P/G plane with step-response input The responses of macromodels are visually identical to those exact models but with >100 speedup Temperature/Voltage Reduction during OPT The T/V are both decreased iteratively The allocated via results in a design meeting the targeted temperature 52C and the voltage bounce 0.2V 23 Steady-state vs. Transient Total tile# Level Steady-state 24 Tran by SP-MACRO vector Solve Total Redu Solve Total Saving via 176877 187422 235484 239379 Ckt(s) 0.01 0.13 1.22 5.12 BE(s) 0.12 0.17 0.86 1.07 via 156154 166971 206482 21184 ratio 11% 11% 12% 12% NA 15.87 3.65 216732 NA 620 2140 7900 27740 0,1 0,1,2 0,1,2,3 0,1,2,3,4 dc (s) 4.06 26.37 167.9 1243.7 55680 0,1,2,3,4,5 NA Transient thermal analysis reduces via by 11.5% on average compared to using steady thermal analysis Our SP-Macro results in an efficient transient analysis that reduces runtime by 155X compared to the direct steady-state analysis Sequential vs. Simultaneous Simultaneous optimization reduces via by 34% on average compared to the sequential optimization Total tile# 620 2140 7900 27740 55680 Seq. 176877 187422 235484 239379 NA Sim. 118020 127651 140433 143718 144998 -32% -32% -36% -37% NA Comparisons of via distribution at different levels for ckt (27740) Optmethod P/G-only Thermalonly Sim. Level 0 76832 / 1 3410 1157 2 1901 43567 3 876 4007 4 / 79432 67058 811 2500 2808 70541 25 Conclusions Vertical vias play a critical role in 3D IC design A simultaneous thermal and power integrity driven via planning 26 It saves via number by 34% on average compared to a sequential design A structured and parameterized macromodel can be efficiently employed during the design optimization This method can be further extended 3D signal and P/G routing Performance driven 3D design