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CSCE 613: Fundamentals of VLSI Chip Design Instructor: Jason D. Bakos MOSFET Theory p-type body: majority carriers are holes accumulation mode Vt depends on doping and tox channel is no longer at the same voltage as body (channel becomes decoupled from body) Fund. of VLSI Chip Design 2 Regions of Operation Gate to channel: Vds = Vgs - Vgd Vgs near source Vgd near drain Switching delay is determined by: • time required to charge/discharge gate drain • time for current to travel across channel Fund. of VLSI Chip Design 3 Ideal I-V Characteristics I ds Qchannel carrier time Q CV Linear region Vgc Vgs C g ox WL tox Qchannel C g Vgc Vt V Qchannel C g Vgs sd Vt 2 Cox ox C g CoxWL (charge) Vsd 2 ox 3.9 0 0 8.85 10 14 F / cm tox V Qchannel CoxWLVgs sd Vt 2 v E V E ds L (carrier velocity, is mobility) (electric field) L v L2 carrier time Vds carrier time V v ds L I ds Qchannel carrier time V W Vgs Vt ds Vds L 2 V I ds Vgs Vt ds Vds 2 V W I ds k ' Vgs Vt ds Vds L 2 I ds Cox Fund. of VLSI Chip Design 4 Ideal I-V Characteristics Saturation region: Vds Vgs Vt Cox into equation… 0, Vgs Vt V I ds Vgs Vt ds Vds , Vds Vdsat 2 2 V V , Vds Vdsat gs t 2 Holes have less mobility than electrons, so pmos’s provide less current (and are slower) than nmos’s of the same size W L nmos cutoff linear saturation n 2 3 p pmos Which parameters do we change to make MOSFETs faster? Fund. of VLSI Chip Design 5 Fabrication • Switching speed depends on Cg, Cs, and Cd • Shrink minimum feature size… – – – – Given fixed W, L is reduced, therefore less gate area However, tox is also reduced Cgper stays constant However, smaller channel length decreases carrier time • Yields more current for per unit of W – Therefore, W may also be reduced for given current – Cg, Cs, and Cd are reduced – Transistor switches faster Fund. of VLSI Chip Design 6 Nonideal I-V Effects • Velocity saturation and mobility degradation – Lower Ids than expected • At high lateral field strength (Vds/L), carrier velocity stops increasing linearly with field strength • At high vertical field strength (Vgs / tox) the carriers scatter more often • Channel length modulation – Saturation current increases with higher Vds • Subthreshold conduction – Current drops exponentially when Vgs drops below Vt (not zero) • Body effect – Vt affected by source voltage relative to body voltage • Junction leakage – S/D leaks current into substrate/well • Tunneling – Gate current due to thin gate oxides • Temperature dependence – Mobility and threshold voltage decrease with rising temperature Fund. of VLSI Chip Design 7 C-V Characteristics • Capacitors are bad – Slow down circuit (need to use more power), creates crosstalk (noise) • Gate is a good capacitor – Gate is one plate, channel is the other – Needed for operation: attracts charge to invert channel • Source/drain are also capacitors to body (p-n junction) – Parasitic capacitance – “Diffusion capacitance” – Depends on diffusion area, perimeter, depth, doping levels, and voltage • Make as small as possible (also reduces resistance) Fund. of VLSI Chip Design 8 Gate Capacitance • Gate’s capacitance – – – – – – Relative to source terminal Cgs=COXWL Assuming minimum length… Cgs=CperW Cper = COXL = (OX/tOX)L Fab processes reduce length and oxide thickness simultaneously • Keeps Cper relatively constant • 1.5 – 2 fF / um of width Fund. of VLSI Chip Design 9 Gate Capacitance Five components: Intrinsic: Cgb, Cgs, Cgd Overlap: Cgs(overlap), Cgd(overlap) C0 = WLCox Parameter Cutoff Linear Saturation Cgb C0 0 0 Cgs 0 C0/2 2/3 C0 Cgd 0 C0/2 0 Sum C0 C0 2/3 C0 Cgsol=Cgdol=0.20.4 fF / um of width Fund. of VLSI Chip Design 10 Parasitic Capacitance • Source and drain capacitance – From reverse-biased PN junction (diffusion to body) – Csb, Cdb – Depends of area and perimeter of diffusion, depth, doping level, voltage – Diffusion has high capacitance and resistance • Made small as possible in layout – Approximately same as gate capacitance (1.5 – 2 fF / um of gate width) Isolated, shared, and merged diffusion regions for transistors in series Fund. of VLSI Chip Design 11 Switch-Level RC Delay Models Delay can be estimated as R * 6C FET passing weak value has twice the resistance Fund. of VLSI Chip Design 12