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Katedra Experimentálnej Fyziky Bipolar technology - the size of bipolar transistors must be reduced to meet the high-density requirement Figure illustrates the reduction in the size of the bipolar transistor in recent years. - each transistor must be electrically isolated to prevent interactions between devices - to 1970, both the lateral and vertical isolations were provided by p-n junctions - In 1971, thermal oxide was used for lateral isolation, resulting in a reduction device size - Reduction of the horizontal and vertical dimensions of a bipolar transistor, (a) Junction isolation (b) Oxide isolation. (c and d) Scaled oxide isolation. - at the present time, all the lateral and vertical dimensions have been scaled down and emitter stripe widths have dimensions in the submicron region Katedra Experimentálnej Fyziky NPN type - the majority of bipolar transistor are n-p-n type because the higher mobility of minority carriers (electrons) in the base region results in higher-speed performance than can be obtained with p-n-p types - figure shows a perspective view of an n-p-n type bipolar transistor, in which lateral isolation is provided by oxide walls (also reduce capacitance) - vertical isolation is provided by the n+ -p junction - - let’s look the major process steps that are used to fabricate the device shown in figure - Cross-sectional view Katedra Experimentálnej Fyziky - the starting material is a p-type lightly doped (~1015 cm-3) - form a buried layer (minimize the series resistance of the collector) - deposit an n-type epitaxial layer oxide is removed and the wafer is placed in an epitaxial reactot - form the lateral oxide isolation region, a thin-oxide pad (~50nm) is thermally grown on the epitaxial layer, followed by a silicon-nitride deposition (~100nm) - next, the nitride-oxide layers and about half of the epitaxial layer are etched using a photoresist as mask - boron ions are then implanted into the exposed silicon areas Cross-sectional view Katedra Experimentálnej Fyziky - the photoresist is removed and the wafer is placed in an oxidation furnace - next step is to form the base region, photoresist is used as a mask to protect the right half of the device; then boron ions are implanted to form the base regions another lithographic process removes all the thin-pad oxide except a small area near the center of the base region - form the emitter region; the base contact area is protected by a photoresist mask, then a low energy high arsenic dose (~1016cm-2) is removed; and a final metallization step forms the contacts to the base (emitter and collector)