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Process Monitoring
Embeddable Tool and
Process Remote Sensing
Novx remote voltage sensor (RVS)
The Novx Remote Voltage Sensor (RVS) is a high-speed electrometer designed to directly measure
changes in free space potential. Applications for this range from measuring surface potential on products
at widely varying distances and very fast process speeds, to wide-area and general process monitoring
for electrostatic fields. The sensor’s very small footprint allows for easy integration into embedded
applications. When linked with the full monitoring capability of the Novx Series 7000 and PEMS systems,
statistical process control can be extended to a variety of applications.
Features and Benefits
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Small Footprint
Extreme Sensitivity
Latest Generation Components
Programmable Gain
Ultra Low Noise
Controlled DC Drift
Flat Frequency Response
Powered by Novx Series 7000
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Tool and Process Embeddable
Remote Sensing
Multi-sensor Arrays
High Speed Acquisition
Flexible Applications
Specifications
Novx Series 7000
LED Display Scale
Audible Alarms
Special Features
This sensor uses novel stabilization and feedback circuitry to remove
DC drift issues caused by input bias current. Due to the ultra low noise
of the circuit, the sensor is on the order of 1000 times more sensitive
than the traditional electric field mill. In addition, the extremely fast
response time of the sensor allows it to monitor high speed processes,
preventing under sampling. Wide-area monitoring applications can
be implemented via the programmable gain feature.
Novx Series 3370
Novx Com
Critical Alert Notifications
Digital Display
Power Supply
Dimensions
Weight
Enclosure
Warranty
Remote Voltage Sensor
1 - 5000V
Off, High, Low
RS-485, Modbus, Ethernet, Wireless
Ethernet (802.11a/b/g), USB
Cellular, Pager, Email
4-Digit
100-240 VAC, 50/60 Hz
2.7”W x 7”H x 5.5”D in.
2.5 lb
Stainless Steel
Two year limited warranty
4-Digit
100-240V, 50/60 Hz
1.75W x 6.5D x 6H in.
1.8 lb (.82 kg)
Stainless Steel
Two year limited warranty
Sensor Dimensions
18 dia x 5H mm
Cable Length
3m (special cables available)
Bias Current
75 uA
Transfer Function
0.04 @ 1 Hz and above
Corner Frequency
200 mHz
Noise
20 uVrms/rtHz @ 1 Hz; 4 uVrms/rtHz @ 10 Hz (typ)
DC Off-set
<3 mV
Warranty
Two year limited warranty
Target Applications
• Front-end semiconductor wafer handling
• Reticle and flat-panel processing
• Wafer charge monitoring in process tools
• Semiconductor device charge measurement
• Disk drive voltage detection
Calibration
Instruments are shipped already calibrated and certified. Calibration
must be validated annually to meet ISO certification compliance
requirements.
Customer Support
Technical telephone support, custom training and optional extended
Service Agreements are all available. Contact your sales representative
for details.
Specifications are subject to change without notice
Ordering Information
9960-7000-0000
Series 7000 Process Monitor (1 antenna required)
9960-7000-0025
Remote Voltage Sensor Interface Board (RVS antenna required)
9960-3370-0041
RS-485 RVS System (up to 3 antennas required)
9960-3370-0051
Ethernet RVS System (up to 3 antennas required)
9960-3370-0071
USB RVS System (up to 3 antennas required)
33-4500
RVS Antenna kit (up to 3)
14-21210
Domestic & Int’l Power Supply (100-240 VAC @ 50-60 Hz Input, ±12V & +5V, 25W
Output), RoHS (1 input cord/pigtail required)
25-20660
Power Supply Input Cord/Pigtail (N. America, Central America, Japan, Philippines,
parts of S. Am.)
25-20735
IEC Power Cable (German Schuko Plug), 8.2 ft (2.5 m)
25-20710
Power Supply Input Cord/Pigtail (UK, Ireland, Hong Kong, parts of Asia, Africa, S. Am.)
25-20740
Power Supply Input Cord/Pigtail (India)
25-20755
Power Supply Input Cord/Pigtail (Continental Europe, Singapore, China, New Zealand,
Australia, Thailand, parts of Asia, Africa, S. Am.)
Simco-Ion
Technology Group
1750 North Loop Rd., Ste 100
Alameda, CA 94502
Tel: 800.367.2452 (in USA)
Tel: 510.217.0600
DS-7000-02_V3 - 11/11
© 2011 Simco-Ion
All rights reserved.
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[email protected]
www.simco-ion.com
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