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www . s i mc o - IO N . c o m Process Monitoring Embeddable Tool and Process Remote Sensing Novx remote voltage sensor (RVS) The Novx Remote Voltage Sensor (RVS) is a high-speed electrometer designed to directly measure changes in free space potential. Applications for this range from measuring surface potential on products at widely varying distances and very fast process speeds, to wide-area and general process monitoring for electrostatic fields. The sensor’s very small footprint allows for easy integration into embedded applications. When linked with the full monitoring capability of the Novx Series 7000 and PEMS systems, statistical process control can be extended to a variety of applications. Features and Benefits • • • • • • • • Small Footprint Extreme Sensitivity Latest Generation Components Programmable Gain Ultra Low Noise Controlled DC Drift Flat Frequency Response Powered by Novx Series 7000 • • • • • Tool and Process Embeddable Remote Sensing Multi-sensor Arrays High Speed Acquisition Flexible Applications Specifications Novx Series 7000 LED Display Scale Audible Alarms Special Features This sensor uses novel stabilization and feedback circuitry to remove DC drift issues caused by input bias current. Due to the ultra low noise of the circuit, the sensor is on the order of 1000 times more sensitive than the traditional electric field mill. In addition, the extremely fast response time of the sensor allows it to monitor high speed processes, preventing under sampling. Wide-area monitoring applications can be implemented via the programmable gain feature. Novx Series 3370 Novx Com Critical Alert Notifications Digital Display Power Supply Dimensions Weight Enclosure Warranty Remote Voltage Sensor 1 - 5000V Off, High, Low RS-485, Modbus, Ethernet, Wireless Ethernet (802.11a/b/g), USB Cellular, Pager, Email 4-Digit 100-240 VAC, 50/60 Hz 2.7”W x 7”H x 5.5”D in. 2.5 lb Stainless Steel Two year limited warranty 4-Digit 100-240V, 50/60 Hz 1.75W x 6.5D x 6H in. 1.8 lb (.82 kg) Stainless Steel Two year limited warranty Sensor Dimensions 18 dia x 5H mm Cable Length 3m (special cables available) Bias Current 75 uA Transfer Function 0.04 @ 1 Hz and above Corner Frequency 200 mHz Noise 20 uVrms/rtHz @ 1 Hz; 4 uVrms/rtHz @ 10 Hz (typ) DC Off-set <3 mV Warranty Two year limited warranty Target Applications • Front-end semiconductor wafer handling • Reticle and flat-panel processing • Wafer charge monitoring in process tools • Semiconductor device charge measurement • Disk drive voltage detection Calibration Instruments are shipped already calibrated and certified. Calibration must be validated annually to meet ISO certification compliance requirements. Customer Support Technical telephone support, custom training and optional extended Service Agreements are all available. Contact your sales representative for details. Specifications are subject to change without notice Ordering Information 9960-7000-0000 Series 7000 Process Monitor (1 antenna required) 9960-7000-0025 Remote Voltage Sensor Interface Board (RVS antenna required) 9960-3370-0041 RS-485 RVS System (up to 3 antennas required) 9960-3370-0051 Ethernet RVS System (up to 3 antennas required) 9960-3370-0071 USB RVS System (up to 3 antennas required) 33-4500 RVS Antenna kit (up to 3) 14-21210 Domestic & Int’l Power Supply (100-240 VAC @ 50-60 Hz Input, ±12V & +5V, 25W Output), RoHS (1 input cord/pigtail required) 25-20660 Power Supply Input Cord/Pigtail (N. America, Central America, Japan, Philippines, parts of S. Am.) 25-20735 IEC Power Cable (German Schuko Plug), 8.2 ft (2.5 m) 25-20710 Power Supply Input Cord/Pigtail (UK, Ireland, Hong Kong, parts of Asia, Africa, S. Am.) 25-20740 Power Supply Input Cord/Pigtail (India) 25-20755 Power Supply Input Cord/Pigtail (Continental Europe, Singapore, China, New Zealand, Australia, Thailand, parts of Asia, Africa, S. Am.) Simco-Ion Technology Group 1750 North Loop Rd., Ste 100 Alameda, CA 94502 Tel: 800.367.2452 (in USA) Tel: 510.217.0600 DS-7000-02_V3 - 11/11 © 2011 Simco-Ion All rights reserved. w o r l d w i d e l e a d e r s i n s [email protected] www.simco-ion.com t a t i c c o n t r o l