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Transcript
MSD P10345
Automated Transistor Noise Characterization Platform
Detailed Design Review
Project overview
The purpose of the Automated Transistor Noise Characterization Platform, nicknamed Viking, is
to provide researchers a fast and easy way of characterizing the noise in on-wafer devices by providing
an electrically quiet environment and automation of connection switching, instrument control, and data
acquisition.
Major competing products retail for over one million dollars and are marketed to large
corporations with an interest in characterizing thousands of devices of widely varying types for use in
R&D or production testing. Small research budgets do not allow for purchase of these expensive
systems, nor do they require the extensive functionality provided. The Viking Platform aims to address
the needs of small research groups on a low budget, interested in retrofitting an existing, low-cost wafer
probe station with a low-noise measurement environment.
The major design components of the Viking Platform include:
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A shielded container to reduce the effects of environmental RF and EMI noise
A low noise amplifier to provide gain to very low level signals inside the shielded environment
A low noise current source to provide bias currents to devices under test without contributing
additional noise
User-controllable bias points, including a high-resolution mode for the current source
A software interface that controls all measurement instruments and the low-noise biasing
circuits and automates the measurement process.
Review Objectives
The most important objective of this review is to examine critical design areas (mechanical,
digital, analog, and interfaces) to find any errors, so they can be corrected before the first PCB
is ordered.
The objectives of this design review are to:
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Introduce the proposed system and how it meets customer needs.
Explain the mechanical design of the system
o Get input on mechanical design from attendees.
Explain the computer interface board (nicknamed Odin)
o Get input from attendees
Explain low-noise analog circuit design
o Bias voltage generation
o Low noise amplifier
o Low noise current source
 Get input on each design from attendees
 Address specific design issues (see below)
 Defend circuit topology, show noise analysis performed to demonstrate system
feasibility
The design review is aimed as a sanity check on the difficult parts of the design. The circuit
topology will be completed over exam week, incorporating elements learned at the design review. Thus,
the PCB layout is scheduled to be completed over break week and assembly and testing and revision will
begin after assembly.
Description of Key Circuits & Components
This is a brief overview of important circuits designed for the TFT Noise Characterization Platform.
Snapshots from the complete schematic are shown with a short description of how each circuit
operates. Several terms to note when reading the descriptions are listed below.




Viking: Name given to the overall TFT Noise Characterization Platform.
Valhalla: Name given to the RF shielding box which fits over the existing probe station.
Odin: Name given to the PCB board and which contains the digital circuitry and communications
with the lab PC.
Thor: Name given to the PCB containing the analog circuitry responsible for the DUT biasing and
noise amplification.
Gate & Low Noise Amplifier (LNA) Offset Bias (VBIAS) Circuitry
Both the DUT gate bias voltage and LNA offset correction use duplicate circuitry to generate the voltages
needed at each node. The only difference between the two is the existence of Relay C on the gate bias
circuit. This relay is first set to connect the DUT gate to the B1500 Semi-conductor Analyzer to generate
an I-V plot for the DUT. After the I-V curve is generated Relay C is toggled to connect the gate of DUT to
the biasing circuit.
Once the user selects a bias point from the gathered I-V curves the gate bias/ LNA offset information is
sent from the computer to the Odin board via connections into Valhalla. The CPLD on Odin then
determines the proper input word for the AD7547 DAC in order to produce the correct voltage on
output. The current output of the DAC is converted to a voltage between 0V and 10V by the first AD712
op-amp. The second AD712 then allows for up to a ±10V DC voltage on the gate of the DUT depending
on whether it is an NMOS or PMOS device.
Up until the output of the second AD712 op-amp the voltage bias circuit was adapted from the data
sheet of the AD7547; in order to make the bias voltage meet the required noise specification it would
have to be filtered before touching the DUT gate node. Reducing the bias voltage noise to meet spec
required a low-pass filter with a large RC time constant. To bypass lengthy charge times on the 1000µF
filter capacitor a small pre-charge resistor is connected in parallel to the 1MΩ filtering resistor to speed
up charging the filter capacitor. Relay B is toggled via a signal from Odin in order to connect the small
pre-charge resistor. Finally the output of the low-pass RC filter is directly connected to the appropriate
node.
Low Noise Amplifier Circuit
To DSA &
Spectrum
Analyzer
Offset VBIAS
Drain DUT
The output of the LNA bias voltage circuit is fed into the positive terminal of the first AD549 amplifier.
The op-amp will then force VBIAS to appear at its negative terminal and at the drain of the DUT. To
ensure VBIAS will appear correctly at the drain of the DUT the resistor on the negative terminal of the opamp was made small to provide negligible voltage drop between the two nodes. Relays F through H
allow for the correct amount of gain to be selected so that once the low voltage noise signal is amplified
it is able to be accurately measured without clipping. It is also important to note that this first amplifier
will be located as close to the DUT as possible to reduce the chance of noise coupling into the signal and
corrupting measurements.
The second AD549 is needed to interface with the equipment taking the 1/f noise measurements. Relay
I will connect the 100Ω resistor to the output in order to match the input impedance of the Spectrum
analyzer. Similarly when the Dynamic Signal Analyzer is measuring the DUT Relay I will toggle the 1MΩ
resistor into place.
Low Noise Current Source
The low noise current source is designed to be an adjustable current source with very low
output current noise.
A control voltage is received from the DAC to set the output current. This voltage is related to
the output current by Iout = V/Rc, where Rc is either 10k or 243k, depending on whether the
unit is in high or low-current mode. The AD797 operational amplifier tries to mirror the control
voltage signal to the negative terminal. The JFET in the feedback loop will therefore be required
to sink an amount of current into Rc such that the voltage across Rc will be equal to the control
voltage from the DAC. A low pass filter is used on the gate of the JFET to cancel any noise
contributions from the AD797 and preceding circuitry, and a large bypass capacitor is used
across Rc to filter out noise at that node. Because the filter capacitors are so large (0.33 F), a
buffer (HA9P5002) is included to slew the capacitors.
Due to limited voltage rails and the desire to keep both the JFET and the DUT far into
saturation, the maximum voltage allowable across R is 1V. Thus, the voltage input from the DAC
will be between -13V and -12V with 12 bit resolution in that range. This enables a minimum
current of approximately 1nA in low current mode, and a maximum of 100uA in high current
mode. Careful attention was paid to the voltage referencing of these circuits to ensure proper
operation (Vref, VDD, and VSS of all circuits were calculated to ensure the described operation).
Design Concerns
Some design concerns:






Is the buffer, as shown above, a good solution for slewing the large capacitors?
Concerns with noise analysis - if this analysis is incorrect, this large resistance could add a large
amount of noise to the DUT drain node.
Is the bias voltage on the second amplifier stage of the LNA correct? (gnd or Vbias?)
Theoretically, a JFET will operate to source 1nA in the linear region if the VDS is kept high
enough. Are there any risks with operating a JFET far below its rated current, assuming the VDS
is forced high enough?
Is the proposed solution of voltage referencing on bias-current DAC to achieve the desired
output levels on the current-reference resistor appropriate?
It has been noted that we are currently using parallel-input current DACs to produce a voltage
output. These are a remnant of a previous design, and several suitable voltage-output DACs
have been found that will help reduce pin count and circuit complexity.
Digital Circuitry on Odin
The main component of the Odin board is a Xilinx CoolRunner II XC2C64A CPLD. This part was chosen
because it was available in a VQ44 package, which helps minimize board space without the complexity
of a BGA device, and providing a sufficient 33 I/O pins. Ignoring BGA devices, competing products from
Altera are only available in 100 TQFP packages.
To isolate the ground used by the controller PC, inputs to the CPLD are isolated using Fairchild
Semiconductor FOD8001-ND optoisolators. These devices take a digital input and produce an isolated
digital output. Since the NI USB 6501 uses a 5V Vcc and the CPLD requires a 3.3V Vccio, these devices
also perform the necessary level shifting.
The CPLD’s digital outputs are connected to the Thor board through a 30 pin connector. This provides 30
I/Os for control of the DACs and relays used on the Thor device. A 3.3V I/O voltage (Vccio) was chosen
for compatibility with the parts selected for the Thor board. The CPLD is able to configure its I/O pins for
LVTTL or LVCMOS operation.
In addition to the 3.3V Vccio supply, the CPLD requires a 1.8V supply for its logic core. (Vcc) To provide
these rails, National Semiconductor LP2989 series low-dropout linear regulators were chosen. These
devices use a standard SOIC-8 package (without large thermal dissipation/grounding paddle), are able
to provide enough current to CPLD under worst case conditions, (500 mA max, Xilinx quotes Icc of 175
mA maximum) and the regulators also provide an active-low error flag, which is used to drive an LED to
indicate a low-battery condition.
The final element required to use the CPLD is the JTAG test/programming interface. To facilitate easy
programming using a Xilinx Parallel Cable IV or Xilinx USB Platform Cable II, a 14 pin Molex 87833-1420
connector is used, so the 14 pin ribbon cable included with those two programming cables can be used
without modification. Dr. Lukowiak in the Computer Engineering department has access to a Xilinx USB
Platform Cable II, and mentioned that it would be possible to borrow it when needed.
Computer Interface to Odin
The controller PC running the Labview software will connect to the Odin board using an NI USB 6501
device. This device provides 24 digital I/O lines at 5V TTL logic levels. While only 3 I/Os are necessary for
the current design, this is the least expensive USB interface provided by National Instruments.
This device allows easy control with the Labview software, with no driver programming required.
CPLD Design
The CPLD will use a three wire half-duplex SPI interface to receive configuration information from the
PC. To allow for easy control, the data input is broken into an instruction (4 bits) and data. (20 bits) The
following image shows the operation of the bus:
While not in use, the clock, data, and strobe bits are held at Vcc.
The instruction input is processed by a state machine, which then enables the appropriate register or
state machine inside the CPLD to process the data. The internal structure of the CPLD is shown below:
Viking Control Software
To control the developed circuitry and test equipment, a Labview-based control application, Viking, will
be developed. The software has to control an HP3562A dynamic signal analyzer, Agilent B1500
semiconductor parameter analyzer, an Agilent N9010A Spectrum Analyzer, and the USB 6051 board
used to communicate with Odin board. Labview drivers for all of these devices are available from
National Instruments, so the majority of effort will be Viking specific. The following algorithm will be
implemented to take a noise measurement:
After implementing this process, a GUI application will be created to allow easy use of the application.
Description of Key Mechanical Design Areas and
Requirements:
The main goal of the mechanical component of the TFT noise characterization is to provide a
continuous ground plane around a noise measurement system that uses Cascade Microtech’s M150
Measurement Platform. This ground plane acts as a shield to block the discernible influence of RF and
EMI interference from sources external to the system. This shield, hereafter referred to as “Valhalla”
[Mechanical Figures 7 and 8], was required to attach to the M150 Measurement platform without the
modification of the platform, allow a card created by Sigma Probe to make contact with silicon or glass
wafers on the M150 wafer chuck, contain the electronic circuitry needed for noise characterization,
provide a way to view the probes and landing zones, as well as the on-wafer transistors, through the
M150’s microscope, and allows for the measurement of all transistors, at any position, on the wafer.
[Table 1] All of these design requirements, along with the primary requirement of providing an
electrically continuous shield, can all be met using Valhalla’s current geometry.
Requirement
Provide RF and EMI shield
Attach to M150 Measurement Platform
Allow Sigma Probe card to measure transistors
Contain electrical system components
Important Design Restrictions
Must provide a continuous ground plane
encompassing the transistor wafer, the Sigma Probe
card, and the system’s electronic components.
Wafer chuck diameter: 6”
Distance between the bottom of the Sigma Probe
card and the M150 bench top: 1.375”
Thickness of bench top: .875”
Minimum distance between bench top and
microscope: .875”
Distance between the M150’s support rails: 24”
Distance between the wafer chuck and corner
brackets: .0625”
Thickness: .0625”
Width: 4.5”(Max)
3.875(Min)
Length: 7.375”
Needle Height: .03125”
Needle Holder Height: .0625”
Distance from end of card to needle window: 2.25”
Contact Circle Diameter: 2.5”
Power: 5 9V batteries
Analog PCB Width: 4”
Analog PCB Length: 6”
Digital PCB Width: 2.5”
Digital PCB Length: 3.8”
Table 1: System Requirements and Design Restrictions
The restrictions presented by the system requirements and the unique design of the M150
demanded a very careful approach to the design of Valhalla. Because the design was not allowed to
damage or alter the M150 probe station and because the station was not designed to contain an RF/EMI
shield, the design was geometrically constrained in many regards. These restrictions posed the
interesting design challenge of fully containing the measurement system in a continuous ground plane,
while retaining the full functionality of the probe station.
Mechanical Design Description
The large rectangular plates found affixed to both the collar and the holder (Mechanical Figures
1 and 2) are designed to interface through a thin layer of compressible conductive foam to provide a
continuous electrical contact while still allowing the wafer chuck to move. The card-holder’s odd
geometry was created so that it would slide onto the probe stations standard card holder, provide a well
that the card can sit in, connect to the large rectangular interface, and still allow the card to be within
0.09375” of the wafer. The well is then sealed by the window’s complementary insert. A plate with
notched rails, connected to the top of the insert, extends horizontally to the same width as the lower
rails so the entire assembly can be clamped together by the probe station’s standard card holder. The
height of the viewing window and its supporting metal structure from the probe card was dimensioned
so that it does not come too near the microscope and so that the conductive glass does not touch the
card. The width and length of this viewport were designed to show the entire probe card contact circle.
A corridor that runs from the viewport to near the back edge of the structure is kept at least .25” away
from the card to allow for the connection of wires to the probe card. The board box then fits onto the
complementary slot in the window. This slotted connection was designed to have an insert and an
additional plate that overlaps the rear wall of the window for mechanical stability, while still providing a
channel through which wires can run. Additional supports, in the form of horizontal brackets that bolt to
the probe stations standard card holder, have been added on the wings of the board box to assist in
supporting it. The box was sized to contain 2 PCBs as well as five 9V batteries.
Mechanical Figures:
*Detailed CAD Drawings will be provided on Friday, February 12, 2010. These are not necessary for the
preread package.
Figure
1
Object Name
Collar
2
Holder
3
Window
4
Board Box
Purpose Description
The collar is structure designed to fit onto the wafer chuck on
the M150 probe station, as well as provide a large electrical
contact surface.
An object that fits around the M150 probe card holder, provides
a large electrical contact area, holds the probe card, fits under
the probe station’s bench top and allows the probe card tips to
make contact with a wafer held on the probe station’s chuck
The window fits into the holder to contain the probe card,
allows the operator to view the probe card tips without
disrupting the shield, provides support for the board box, and
does not touch the probe station’s microscope.
The board box attaches to both the window, bolts to the M150
5
6
Lid
Insert
7
Valhalla
8
Valhalla
probe card holder, and contains the circuitry and power for the
systems electronic components.
The lid seals the board box.
The insert attaches to, and completes the perimeter ground for,
the holder.
Valhalla is a containment unit that houses a system for
characterizing noise performance using the M150 probe station
that provides Rf and emi protection.
See above
Figure 1
Figure 2
Figure 3
Figure 4
Figure 5
Figure 6
Figure 7
Figure 8