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RF3934D RF3934D 120W GaN on SiC Power Amplifier Die 120W GaN ON SIC POWER AMPLIFIER DIE Package: Die RF OUT VD Features Broadband Operation DC-4GHz Advanced GaN HEMT Technology RF IN VG Packaged Small Signal Gain=13dB at 2GHz 48V Typical Packaged Performance Output Power 140W at P3dB Drain Efficiency 60% at P3dB Large Signal Models Available Chip Dimensions: 0.96mmx4.57mmx0.10mm Functional Block Diagram Active Area Periphery: 22.2mm Product Description Applications GND Commercial Wireless Infrastructure Cellular and WiMAX Infrastructure Civilian and Military Radar General Purpose Broadband Amplifiers Public Mobile Radios Industrial, Scientific, and Medical The RF3934D is a 48V, 120W, GaN on SiC high power discrete amplifier die designed for commercial wireless infrastructure, cellular and WiMAX infrastructure, industrial/scientific/medical and general purpose broadband amplifier applications. Using an advanced high power density Gallium Nitride (GaN) semiconductor process, the RF3934D is able to achieve high efficiency and flat gain over a broad frequency range in a single amplifier design with proper packaging and assembly. The RF3934D is an unmatched 0.5ìm gate, GaN transistor die suitable for many applications with >51dBm saturated power, >60% saturated drain efficiency, and >13dB small signal gain at 2GHz. Ordering Information RF3934D 120W GaN on SiC Power Amplifier Die Optimum Technology Matching® Applied GaAs HBT GaAs MESFET InGaP HBT SiGe BiCMOS Si BiCMOS SiGe HBT GaAs pHEMT Si CMOS Si BJT GaN HEMT BiFET HBT LDMOS RF MICRO DEVICES®, RFMD®, Optimum Technology Matching®, Enabling Wireless Connectivity™, PowerStar®, POLARIS™ TOTAL RADIO™ and UltimateBlue™ are trademarks of RFMD, LLC. BLUETOOTH is a trademark owned by Bluetooth SIG, Inc., U.S.A. and licensed for use by RFMD. All other trade names, trademarks and registered trademarks are the property of their respective owners. ©2006, RF Micro Devices, Inc. DS110520 7628 Thorndike Road, Greensboro, NC 27409-9421 · For sales or technical support, contact RFMD at (+1) 336-678-5570 or [email protected]. www.BDTIC.com/RFMD 1 of 9 RF3934D Absolute Maximum Ratings Parameter Rating Unit Drain Voltage (VD) 150 V Gate Voltage (VG) -8 to +2 V Gate Current (IG) 78 mA Operational Voltage 50 V -55 to +125 °C 200 °C Storage Temperature Range Operating Junction Temperature (TJ) Human Body Model (based on packaged device) Class 1A MTTF (TJ< 200 °C, 95% Confidence Limits)* 3E + 06 Hours 1.6 °C/W Thermal Resistance, RTH (junction to case)**measured at TC =85 °C, DC bias only Caution! ESD sensitive device. Exceeding any one or a combination of the Absolute Maximum Rating conditions may cause permanent damage to the device. Extended application of Absolute Maximum Rating conditions to the device may reduce device reliability. Specified typical performance or functional operation of the device under Absolute Maximum Rating conditions is not implied. The information in this publication is believed to be accurate and reliable. However, no responsibility is assumed by RF Micro Devices, Inc. ("RFMD") for its use, nor for any infringement of patents, or other rights of third parties, resulting from its use. No license is granted by implication or otherwise under any patent or patent rights of RFMD. RFMD reserves the right to change component circuitry, recommended application circuitry and specifications at any time without prior notice. RoHS (Restriction of Hazardous Substances): Compliant per EU Directive 2002/95/EC. Operation of this device beyond any one of these limits may cause permanent damage. For reliable continuous operation, the device voltage and current must not exceed the maximum operating values. * MTTF - median time to failure for wear-out failure mode (30% IDSS degradation) which is determined by the technology process reliability. Refer to product qualification report for FIT (random) failure rate. ** Thermal resistance assumes AuSn die attach on1.5mm thick CPC carrier similar to Kyocera A1933. User will need to define this specification in the final application and ensure bias conditions satisfy the following expression:PDISS T<(TJ -TC)/RTH J-C and TC =TCASE to maintain maximum operating junction temperature and MTTF. Parameter Min. Specification Typ. Max. 48 V -3.7 -2.5 V 4000 MHz Unit Condition Recommended Operating Conditions Drain Voltage (VDSQ) 24 Gate Voltage (VGSQ) -4.5 Drain Bias Current 440 Frequency of Operation DC mA Die Capacitance from packaged capacitance measurements (package capacitance removed during calibration) Crss 9 pF Ciss 40 pF Coss 27.5 pF VG =-8V, VD =0V DC Functional Test IG (on) – Forward Bias Diode Gate Current 10 mA VG =1.1V, VD =0V VG =-8V, VD =0V IG (off) – Gate Leakage 0.2 mA ID (off) – DrainLeakage 0.2 mA ID (off) – 48V DrainLeakage 6.0 mA VG =-8V, VD =48V ID (off) – 150V DrainLeakage 10.0 mA VG =-8V, VD =150V VGS (th) – Threshold Voltage VDS (on) – Drain Voltage at high current 2 of 9 -4.8 -3.4 0.25 -2.5 V VD =48V, ID =20mA V VG =0V, ID =1.0A 7628 Thorndike Road, Greensboro, NC 27409-9421 · For sales or technical support, contact RFMD at (+1) 336-678-5570 or [email protected]. www.BDTIC.com/RFMD DS110520 RF3934D Parameter Min. Specification Typ. Max. Unit RF Typical Performance of packaged die Condition [1] VGS (q) -3.4 V Small Signal Gain 21 dB VD =48V, ID =440mA CW, F=900MHz Small Signal Gain 13 dB CW, F=2140MHz Output Power at P3dB 51.6 dBm CW, F=900MHz Output Power at P3dB 51.46 dBm CW, F=2140MHz Drain Efficiency at P3dB 75 % CW, F=900MHz Drain Efficiency at P3dB 60 % CW, F=2140MHz [1] Test Conditions: CW Operation, VDSQ =48V, IDQ =440mA, T=25 °C, in standard tuned test circuit. DS110520 7628 Thorndike Road, Greensboro, NC 27409-9421 · For sales or technical support, contact RFMD at (+1) 336-678-5570 or [email protected]. www.BDTIC.com/RFMD 3 of 9 RF3934D Typical Performance of (non-internally matched) packaged die in tuned circuit (T=25°C, unless noted) Gain versus Output Power (F = 2140MHz) Efficiency versus Output Power (F = 2140MHz) (Pulsed 10% duty cycle, 10S, VD = 48V, IDQ = 440mA) (Pulsed 10% duty cycle, 10S, VD = 48V, IDQ = 440mA) 16 70 60 Eff 85C 14 Eff 25C Eff -40C Drain Efficiency (%) Gain (dB) 50 12 40 30 10 Gain 85C Gain 25C 20 Gain -40C 8 10 36 39 42 45 48 51 36 39 42 Output Power (dBm) 45 48 Input Return Loss versus Output Power (F = 2140MHz) Small Signal Performance versus Frequency, POUT = 30dBm (Pulsed 10% duty cycle, 10S, VD = 48V, IDQ = 440mA) (VD = 48V, IDQ = 440mA) 15 -6 IRL 85C -8 IRL 25C 14 -10 51 Output Power (dBm) IRL -40C -6 Fixed tuned test circuit -7 13 -8 -16 -18 -20 12 -9 11 -10 10 9 -22 -11 Gain IRL -12 8 -13 7 -14 -28 6 -15 -30 5 Input Return Loss (dB) -14 Gain (dB) IRL, Input Return Loss (dB) -12 -24 -26 36 39 42 45 48 2110 51 -16 2120 2130 Output Power (dBm) Gain/IRL versus Frequency, POUT = 50.8dBm 2150 2160 2170 Drain Efficiency versus Frequency, POUT = 50.8dBm (CW, VD = 48V, IDQ = 440mA) (CW, VD = 48V, IDQ = 440mA) 15 14 2140 Frequency (MHz) -6 Fixed tuned test circuit 62 Fixed tuned test circuit -7 13 -8 12 -9 11 -10 10 -11 9 -12 8 -13 61 Drain Efficiency (%) Input Return Loss (dB) Gain (dB) 60 59 58 57 56 7 Gain -14 IRL 6 -15 5 2110 -16 2120 2130 2140 Frequency (MHz) 4 of 9 2150 2160 2170 Eff 55 54 2110 2120 2130 2140 2150 2160 2170 Frequency (MHz) 7628 Thorndike Road, Greensboro, NC 27409-9421 · For sales or technical support, contact RFMD at (+1) 336-678-5570 or [email protected]. www.BDTIC.com/RFMD DS110520 RF3934D Gain/ Efficiency versus POUT, F = 2140MHz Gain/ Efficiency versus POUT, F = 2140MHz (CW, VD = 48V, IDQ = 440mA) (Pulsed 10% duty cycle, 10S, VD = 48V, IDQ = 440mA) 70 14 60 14 50 40 8 30 6 40 8 30 6 20 Gain 10 2 40 45 Gain 50 10 0 55 0 40 42 44 Pout, Output Power (dBm) 46 48 50 52 Pout, Output Power (dBm) IMD3 versus POUT Gain versus POUT (2-Tone 1MHz Separation, VD = 48V, IDQ varied, FC = 2140MHz) (2-Tone 1MHz Separation, VD = 48V, IDQ varied, FC = 2140MHz) -10 16 -15 15 -20 14 -25 Gain (dB) IMD3, Intermodulation Distortion (dBc) Drain Eff 2 0 35 20 4 Drain Eff 4 30 50 10 Gain (dB) 10 60 12 Drain Efficiency (%) Gain (dB) 12 70 16 Drain Efficiency (%) 16 -30 13 220mA 220mA 330mA -35 12 330mA 440mA 440mA 550mA 550mA 11 -40 660mA 660mA -45 10 1 10 100 1000 1 10 100 1000 POUT, Output Power (W-PEP) POUT, Output Power (W-PEP) IMD versus Output Power (VD = 48V, IDQ = 440mA, F1 = 2139.5MHz, F2 = 2140.5MHz) -10 -IMD3 IMD3 -IMD5 IMD5 -IMD7 IMD7 Intermodulation Distortion (IMD - dBc) -15 -20 -25 -30 -35 -40 -45 -50 1 10 100 POUT, Output Power (W- PEP) DS110520 7628 Thorndike Road, Greensboro, NC 27409-9421 · For sales or technical support, contact RFMD at (+1) 336-678-5570 or [email protected]. www.BDTIC.com/RFMD 5 of 9 RF3934D Typical Performance in standard 900MHz fixed tuned test fixture (T=25°C) Small Signal Performance versus Frequency, POUT = 30dBm Gain/IRL versus Frequency, POUT = 50.8dBm (CW, VD = 48V, IDQ = 440mA) (VD = 48V, IDQ = 440mA) -3 Fixed tuned test circuit -5 22 -6 21 -7 20 -8 19 -9 18 -10 Gain 17 IRL -11 16 -12 15 -13 880 890 900 910 Gain (dB) 23 -5 24 -4 Input Return Loss (dB) Gain (dB) 24 25 -6 Fixed tuned test circuit 23 -7 22 -8 21 -9 20 -10 19 -11 18 -12 17 -13 16 -14 15 -15 -16 14 13 Gain -17 IRL 12 -18 11 -19 -20 10 920 Input Return Loss (dB) 25 880 885 890 Frequency (MHz) 895 900 905 910 915 920 Frequency (MHz) Gain/ Efficiency versus POUT, F = 900MHz Drain Efficiency versus Frequency, POUT = 50.8dBm (CW, VD = 48V, IDQ = 440mA) (CW, VD = 48V, IDQ = 440mA) 74 26 80 24 70 22 60 20 50 18 40 16 30 73 71 Gain (dB) Drain Efficiency (%) 72 70 69 Gain 67 880 885 890 895 900 Frequency (MHz) 6 of 9 20 14 Eff 68 905 910 915 920 Drain Efficiency (%) Fixed tuned test circuit Drain Eff 12 10 10 0 30 35 40 45 50 55 Pout, Output Power (dBm) 7628 Thorndike Road, Greensboro, NC 27409-9421 · For sales or technical support, contact RFMD at (+1) 336-678-5570 or [email protected]. www.BDTIC.com/RFMD DS110520 RF3934D Die Drawing GND D 0.300 G S S D 0.300 G S S D 0.300 G S S D 0.300 G S S D 0.300 G S S D 0.300 G S S D 0.300 G D D G S 0.102 0.074 0.00 0.032 0.300 0.332 S 0.226 0.199 0.268 D G S 0.102 0.074 0.00 0.788 G S S 0.641 0.300 0.268 0.032 0.00 0.103 0.641 D 0.788 G S S 0.332 S 0.183 0.300 0.226 0.199 0.183 0.300 0.103 D 0.00 4.570±0.010 S S G S S 0.300 Detail of Unit Cell S S 0.785±0.010 0.085±0.010 0.952±0.010 Dimensions in mm External dim. tolerance due to dicing process development. Bond Pad Key G = Gate S = Source D = Drain Die thickness = 0.101mm Die backside metal = Au Bias Instruction for RF3934D Die ESD Sensitive Material. Please use proper ESD precautions when handling devices die. Die must be mounted with minimal die attach voids for proper thermal dissipation. This device is a depletion mode HEMT and must have gate voltage applied for pinched off prior to applying drain voltage. 1. Mount device on carrier or package with minimal die attach voiding and applying proper heat removal techniques. 2. Connect ground to the ground supply terminal, and ensure that both the VG and VD grounds are also connected to this ground terminal. 3. Apply -8V to VG. 4. Apply 48V to VD. 5. Increase VG until drain current reaches desired bias point. 6. Apply RF input. DS110520 7628 Thorndike Road, Greensboro, NC 27409-9421 · For sales or technical support, contact RFMD at (+1) 336-678-5570 or [email protected]. www.BDTIC.com/RFMD 7 of 9 RF3934D Assembly Notes Die Storage • Individual bare die should be held in appropriately sized ESD waffle trays or ESD GEL packs. • Die should be stored in CDA/N2 cabinets and in a controlled temperature and humidity environment. Die Handling • Die should only be picked using an auto or semi-automated pick system and an appropriate pick tool. • Pick parameters will need to be carefully defined so not to cause damage to either the top or bottom die surface. • GaN HEMT devices are ESD sensitive materials. Please use proper ESD precautions when handling devices or evaluation boards. • RFMD does not recommend operating this device with typical drain voltage applied and the gate pinched off in a high humidity, high temperature environment. Caution: The use of inappropriate or worn-out ejector needle and improper ejection parameter settings can cause die backside tool marks or micro-cracks that can eventually lead to die cracking. Die Attach There are two commonly applied die attach processes: adhesive die attach and eutectic die attach. Both processes use special equipment and tooling to mount the die. EUTECTIC ATTACH • • • • • • • • • 80/20 AuSn preform, 0.5 - 1mil thickness, made from virgin melt gold. Pulsed heat or die scrub attach process using auto / semi-automatic equipment. Attach process carried out in an inert atmosphere. Custom die pick collets are required that match the outline of the die and the specific process employed using either pulsed, fixed heat, or scrub. Maximum temperature during die attach should be no greater than 320 C and for less than 30 seconds. Key parameters that need to be considered include: die placement force, die scrub profile and heat profile. Minimal amount of voiding is desired to ensure maximum heat transfer to the carrier and no voids should be present under the active area of the die. Voiding can be measured using X-ray or Acoustic microscopy. The acceptable level of voiding should be determined using thermal modeling analysis. ADHESIVE ATTACH • High thermal silver filled epoxy is dispensed in a controlled manner and die is placed using an appropriate collet. Assembled parts are cured at temperatures between 150C and 180C. • Always refer to epoxy manufacturer's data sheet. • Industry recognized standards for epoxy die attach are clearly defined within MIL-883. Early Life Screen Conditions RFMD recommends an Early Life Screen test that subjects this die to TJ =250C (junction temperature) for at least 6 hours prior to field deployment. Mounting and Thermal Considerations The thermal resistance provided as RTH (junction to case) represents only the packaged device thermal characteristics. This is measured using IR microscopy capturing the device under test temperature at the hottest spot of the die. At the same time, the package temperature is measured using a thermocouple touching the backside of the die embedded in the device heatsink but sized to prevent the measurement system from impacting the results. Knowing the dissipated power at the time of the measurement, the thermal resistance is calculated. 8 of 9 7628 Thorndike Road, Greensboro, NC 27409-9421 · For sales or technical support, contact RFMD at (+1) 336-678-5570 or [email protected]. www.BDTIC.com/RFMD DS110520 RF3934D Mounting and Thermal Considerations (continued) In order to achieve the advertised MTTF, proper heat removal must be considered to maintain the junction at or below the maximum of 200C. Proper thermal design includes consideration of ambient temperature and the thermal resistance from ambient to the back of the package including heatsinking systems and air flow mechanisms. Incorporating the dissipated DC power, it is possible to calculate the junction temperature of the device. DC Bias The GaN HEMT device is a depletion mode high electron mobility transistor (HEMT). At zero volts VGS the drain of the device is saturated and uncontrolled drain current will destroy the transistor. The gate voltage must be taken to a potential lower than the source voltage to pinch off the device prior to applying the drain voltage, taking care not to exceed the gate voltage maximum limits. RFMD recommends applying VGS =-5V before applying any VDS. RF Power transistor performance capabilities are determined by the applied quiescent drain current. This drain current can be adjusted to trade off power, linearity, and efficiency characteristics of the device. The recommended quiescent drain current (IDQ) shown in the RF typical performance table is chosen to best represent the operational characteristics for this device, considering manufacturing variations and expected performance. The user may choose alternate conditions for biasing this device based on performance trade-offs. GaN HEMT Capacitances The physical structure of the GaN HEMT results in three terminal capacitors similar to other FET technologies. These capacitances exist across all three terminals of the device. The physical manufactured characteristics of the device determine the value of the CDS (drain to source), CGS (gate to source) and CGD (gate to drain). These capacitances change value as the terminal voltages are varied. RFMD presents the three terminal capacitances measured with the gate pinched off (VGS =-8V) and zero volts applied to the drain. During the measurement process, the parasitic capacitances of the package that holds the amplifier is removed through a calibration step. Any internal matching is included in the terminal capacitance measurements. The capacitance values presented in the typical characteristics table of the device represent the measured input (CISS), output (COSS), and reverse (CRSS) capacitance at the stated bias voltages. The relationship to three terminal capacitances is as follows: CISS =CGD +CGS COSS = CGD + CDS CRSS = CGD DS110520 7628 Thorndike Road, Greensboro, NC 27409-9421 · For sales or technical support, contact RFMD at (+1) 336-678-5570 or [email protected]. www.BDTIC.com/RFMD 9 of 9