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CSCE 613: Fundamentals of VLSI Chip Design Instructor: Jason D. Bakos Topics for this Lecture • • • • • • • Semiconductor theory in a nutshell MOSFET devices as switches Transistor-level logic Logic gates IC fabrication SCMOS design rules Cell libraries Fund. of VLSI Chip Design 2 Elements Fund. of VLSI Chip Design 3 Semiconductors • Silicon is a group IV element (4 valence electrons, shells: 2, 8, 18, …) – Forms covalent bonds with four neighbor atoms (3D cubic crystal lattice) – Si is a poor conductor, but conduction characteristics may be altered – Add impurities/dopants (replaces silicon atom in lattice): • • Makes a better conductor Group V element (phosphorus/arsenic) => 5 valence electrons – • Leaves an electron free => n-type semiconductor (electrons, negative carriers) Group III element (boron) => 3 valence electrons – Borrows an electron from neighbor => p-type semiconductor (holes, positive carriers) +P-N junction + + ++ + + --- --- + + ++ + + --- --- +forward bias reverse bias Fund. of VLSI Chip Design 4 MOSFETs • Diodes not very useful for building logic • Metal-oxide-semiconductor structures built onto substrate – Diffusion: Inject dopants into substrate – Oxidation: Form layer of SiO2 (glass) – Deposition and etching: Add aluminum/copper wires negative voltage (rel. to body) (GND) positive voltage (Vdd) NMOS/NFET current body/bulk GROUND +++ channel shorter length, faster transistor (dist. for electrons) PMOS/PFET --- +++ --- current body/bulk (S/D to body is reverse-biased) HIGH Fund. of VLSI Chip Design 5 FETs as Switches • NFETs and PFETs can act as switches CMOS logic bulk node not shown “and structure” “or structure” pull-up OFF pull-up ON pull-down OFF Z (floating) 1 pull-down ON 0 smokin’! CMOS: assuming PU and PN network are perfect switches and switch simultanously, no current flow and no power consumption! Fund. of VLSI Chip Design 6 Logic Gates • • • • • CMOS: complimentary in form and function NMOS devices (positive logic) form pull-down network PMOS devices (negative logic) form pull-up network Implication: CMOS transistor-level logic gates implement functions where may the inputs are inverted (inverting gates) Add inverter at inputs/outputs to create noninverting gate NAND2 Y A B Y A B inv YA NOR2 NAND3 Y A B Y A B DeMorgan’s Law A B A B Fund. of VLSI Chip Design 7 Compound Gates • Combine parallel and series structures to form compound gates Y A B C D Example: – Use DeMorgan’s law to determine complement (pulldown network): Y A B C D C A Y A B C D Y A B C D Y A B C D – B D Y A C B D Fund. of VLSI Chip Design 8 Pass Transistors/Transmission Gates • NMOS passes strong 0 (pull-down) • PMOS passes strong 1 (pull-up) Pass transistor: Transmission gate: Fund. of VLSI Chip Design 9 Tristates Fund. of VLSI Chip Design 10 Multiplexer Transmission gate multiplexer Inverting multiplexer Fund. of VLSI Chip Design 11 Multiplexer 4-input multiplexer Fund. of VLSI Chip Design 12 Latches Positive level-sensitive latch Fund. of VLSI Chip Design 13 Latches Positive edge-sensitive latch Fund. of VLSI Chip Design 14 IC Fabrication • Inverter cross-section field oxide Fund. of VLSI Chip Design 15 IC Fabrication • Inverter cross-section with well and substrate contacts (ohmic contact) Fund. of VLSI Chip Design 16 IC Fabrication • Chips are fabricated using set of masks – Photolithography • Inverter uses 6 layers: – n-well, poly, n+ diffusion, p+ diffusion, contact, metal • Basic steps – – – – – oxidize apply photoresist remove photoresist with mask HF acid eats oxide but not photoresist pirana acid eats photoresist – ion implantation (diffusion, wells) – vapor deposition (poly) – plasma etching (metal) Fund. of VLSI Chip Design 17 IC Fabrication Furnace used to oxidize (900-1200 C) Mask exposes photoresist to light, allowing removal HF acid etch piranha acid etch diffusion (gas) or ion implantation (electric field) HF acid etch Fund. of VLSI Chip Design 18 IC Fabrication Heavy doped poly is grown with gas in furnace (chemical vapor deposition) Masked used to pattern poly Poly is not affected by ion implantation Fund. of VLSI Chip Design 19 IC Fabrication Metal is sputtered (with vapor) and plasma etched from mask Fund. of VLSI Chip Design 20 Layout Design Rules • Design rules define ranges for features – Examples: • • • min. wire widths to avoid breaks min. spacings to avoid shorts minimum overlaps to ensure complete overlaps – Measured in microns – Required for resolution/tolerances of masks • Fabrication processes defined by minimum channel width – Also minimum width of poly traces – Defines “how fast” a fabrication process is • Lambda-based (scalable CMOS) design rules define scalable rules based on l (which is half of the minimum channel length) – classes of MOSIS SCMOS rules: SUBMICRON, DEEP SUBMICRON Fund. of VLSI Chip Design 21 Layout Design Rules Fund. of VLSI Chip Design 22 Layout Design Rules • Transistor dimensions are in W/L ratio – NFETs are usually twice the width – PFETs are usually twice the width of NFETs • Holes move more slowly than electrons (must be wider to deliver same current) Fund. of VLSI Chip Design 23 Layout 3-input NAND Fund. of VLSI Chip Design 24 Design Flow • Design flow is a sequence of steps for design and verification • In this course: – – – – – – Describe behaviors with VHDL/Verilog code Simulate behavioral designs Synthesize behaviors into cell-level netlists Simulate netlists with cell-delay models Place-and-route netlists into a physical design Simulate netlists with cell-delay models and wire-delay models • Need to define a cell library: – Function – Electrical characteristics of each cell – Layout Fund. of VLSI Chip Design 25 Cell Library (Snap Together) Layout Fund. of VLSI Chip Design 26