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Heterogeneous Technology Alliance Template HTA General Assembly November 12 – 13, 2013 Project Idea: RF MEMS SWITCH TECHNOLOGY FOR SPACE APPLICATION EU call: ESA The Heterogeneous Technology Alliance HTA Contact: [email protected] Project Idea short description HTA common proposal for ESA call aiming at selecting best RF MEMS switch process in Europe Short Description: → benchmark RF MEMS suppliers with a common standardized procedure → select the optimum RF MEMS switch process for further reliability testing → prepare it for further space qualification Potential Applications: Space, defense, telecom Potential Consortium/Competences needed: RF MEMS switch process Hermetic packaging Reliability testing, Space qualification Project Idea: RFID Acoustic Sensors EU call: H2020 Contact: [email protected] The Heterogeneous Technology Alliance HTA Project Idea short description Wireless battery free sensor system for harsh environment Short Description: → Lamb wave sensors enabling measurements of pressure, temperature, viscosity, or humidity → Operation in harsh environment (T°>600°C) and eventually in liquids → Develop packaged RFID sensor modules and their interrogation system Potential Applications: automotive, medical, industry, space, aeronautic … Potential Consortium/Competences needed: Acoustic technology (Lamb wave, SAW, BAW) Process bricks for harsh environment (electrodes, packaging…) RFID System deployment (reader, antenna) (monitoring software, tag identification) Project Idea: Flexible self-powered RFID sensor tag EU call: H2020 The Heterogeneous Technology Alliance HTA Contact: [email protected] Project Idea short description Flexible sensor tag with integrated energy harvester Short Description: → shape memory alloys (SMA) can detect and harvest from temperature variation → Magnetostrictive materials detect and harvest from a movement (moving magnet) → Idea is to build flexible sensor tag which can detect an event and harvest energy to send the information or write in an embedded memory Potential Applications: traceability in medical, food, industry… Potential Consortium/Competences needed: Materials for harvester/sensor (SMA, magnetostricitve) Flexible technology (encapsulation, memory) RFID System deployment (reader, antenna) (monitoring software, tag identification) Project Idea: OPEN3D EU call: Other initiatives The Heterogeneous Technology Alliance HTA Contact: [email protected] Idea short description: Provide an European complete 3D & packaging integration platform Short Description: Open 3D™ is a CEA LETI 3D technology offer, targeting industrial (SMEs) & academic customers: 3D mature technologies, no NRE, short cycle time, 200 mm & 300 mm, Global offer from 3D design to component final packaging. Possibility to make proof-of-concept, prototyping & small volume production Potential Applications: niche market for 3D: Space, defense, telecom, fundamental physics (CERN…) Competences needed: Wafer-level TSV-last and RDL process Balling, stacking & packaging Testing Reliability Project Idea: 3DIC thermal management EU call: H2020 The Heterogeneous Technology Alliance HTA Contact: [email protected] Project Idea short description Thermal Management with microfluidic / High performance computing (HPC) Short Description: Ambitious µ-fluidic project for HPC. Investigation innovative new fluidic compound thermal evacuation in micro-cooling channels in silicon interposers. New nanofluids synthesis and modelling, interposer fabrications, Test & validation 10-100µm channels in silicon – LETI examples Potential Applications: HPC, servers, micro-servers, particle physics detection Potential Consortium/Competences needed: - New fluid synthesis and fabrications / simulation modeling - µ-channels fabrication, Si interposer, Si-si bonding at CEA LETI - strong expertise on fluidic connectors (e.g: CSEM) Project Idea: 4-side buttable 3D detectors EU call: H2020 The Heterogeneous Technology Alliance HTA Contact: [email protected] Project Idea short description 3D integration for particles physics & medical imaging Short Description: realize a generic 3d technology for 4-side buttable ultra fine pitch detectors for particle physics and/or X-rays - Start with 130-nm existing ROIC Prepare the 65nm shift with ultra fine pitch TSV Large surface bow/warp management of thin modules Compliant and high yield 2nd level interco for flip chio Strategy for high yield assembly and pre-industrialization Dead zone free detection Potential Applications: Large area particle detection, / X-rays detection HEP, medical, X-rays cristallography, synchrotron Improvement of sensitivity / reduction Idark Courtesy from Advacam Potential Consortium/Competences needed: TSV fabrication (last/middle), thin module hanlding, fine pitch interco, bumping and report capabilities Project Idea: 3D Silicon and smart system on foil for medical EU call: H2020 The Heterogeneous Technology Alliance HTA Contact: [email protected] Project Idea short description Heterogeneous smart system on flexible foils Short Description: Merge 3D silicon electronics for high speed/freq. with electronics on foils, development of integrated interconnects and packaging/encapsulation solutions in order to ensure enhanced durability of these heterogeneous smart systems. First levels of intelligence with passives components and organic thin film transistors, and biocompatible coating. On foil and si to foil intercos Foil-on-foil to multifoils interco Medium to high 3D interco + multiple sensors User frinedly durable and flexible packaging Potential Applications: Medical applications, health patch, telemonitoring, wireless communications, biosensors (glucose, spO2, T°C…) Potential Consortium/Competences needed: Foil manufacturers, compliant and stretchable intercos, ultra thi si interposers, passives en foils, thermomechanical modeling, reliability and test LETI, LITEN, VTT. Project Idea: Glass hermetic biocompatible packaging Contact: for medical implants [email protected] EU call: H2020 The Heterogeneous Technology Alliance HTA Project Idea short description Highly integrated medical implantable sensors Short Description: realize a full transparent biocompatible and hermetic glass packaging for SystemAdd-on: Integrated humidity sensor in-Package for medical implants - Antenna Glass process investigation (etching, thining) Heterogeneous assembly Hermetic sealing In vitro testing Potential Applications: Medical implants: cardiac probes, neural probes, Ultra-thin package < 750µm - Cavity in glass Glass cap IC Chip ME MS Glass interposer Ex: hermetic sealing SiO2/SiO2, Au/Au, Au/Si, Au/Sn… 3D vertical electrical connection. Through Glas Via (TGV). Biocompatible electrical pads: 3D printing or ECD <2mm Potential Consortium/Competences needed: Sensors development, glass interposer development, hybridation rdie report, Through-glass-Vias, glass thinning and handling Biocompatibility evaluation Project Idea: ultra large interposer for HPC/data The Heterogeneous Technology Alliance HTA servers EU call: H2020 - LEIT Contact: [email protected] Project Idea short description: « ultra large and fine pitch Si interposer : from simulations to fabrication » Short Description: Stress monitored ultra large ( >5cm) Si interposer realization with possibility of fine pitch interconnect (<10 µm). Simulation: -stress and layer compensation. - DRM for direct copper bonding on TSV fine pitch. -Thermal dissipation simulation. Demonstrator realization. Smart interposer? ( open to consortium proposals) Potential Applications: 3D interposer fine pitch for HPC , Leds, power devices, 3D devices. Potential Consortium/Competences needed: LETI (CNRS SIMAP , IMP Bordeaux) : interposer process, top die post process, simulation Partners for : demonstrator design and characterization, design/fabrication or supply of top dies thermo-mechanical material behavior expertise, characterization,., other proposals? Project Idea: advanced non destructive failure analysis Contact: EUHeterogeneous call: H2020 (“STREP”-preferred) The Technology Alliance HTA [email protected] Project Idea short description: Development of a « TOBIC » 3D failure analysis tool Short Description: Problem to be solved: submicronic failure detection in buried layers (TOBIC offers additional informations compared to existing techniques, and allows a better resolution) → Principle: Two-Photon Optical Beam Induced Current (TOBIC) → Electrical analysis of signal produced by carriers optically injected in the layers → Objective of the project: design and fabrication of a “demonstrator” equipment adapted to various market segments Potential Applications: -Detection of crystalline defects, doping modifications, interco failures, 3D-imaging of defects… -3D reliability, package in package, WLP, MEMS… Potential Consortium/Competences needed: -Industrial partners: TEEM Photonics (Equipment Manufacturer, coordinator, F), SERMA (Characterization Service provider, F), equipment end-user (Foundry? tbd), image reconstruction (tbd), low current detection instrumentation (tbd) -Academic partners: Grenoble Univ. IMEP-LAHC (F), understanding of materials-laser interaction (tbd) -HTA partners :CEA-LETI, image reconstruction (FhG?), Cross X-Ray analysis (CSEM?)…(?) Project Idea: Metamaterials for mmW SiP packages Contact: EUHeterogeneous call: H2020 LEIT [email protected] The Technology Alliance HTA Project Idea short description: Development smart interposer with metamaterials for millimeter wave mmW applications Short Description: High Impedance Surface Metamaterials Integration and packaging of heterogeneous SiP for mmW applications. - Integration of the mmw antenna directly on an interposer (Si or organic) Antenna - Replacement of the reflector by 3D metamaterials - Subwavelength cavity reduction, (~l/50 ), Ultra directive antenna Goals: improve diminution of package footprint Costs, and antenna performances PCB Potential Applications: - Wireless 60 GHz high data rate applications - Automotive radar 77GHz - Imaging 100-120 GHz Potential Consortium/Competences needed: - Mmw heterogeneous electromagnetic simulations - Si/organic interposer fabrications, 3D integration: TSV, intercos - Reliably assembly and wafer level packaging - RF/mmw anechoic testing, 100 GHz