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6332 VLSI Project Proposal The Study of Strained Silicon Transistors for High-Performance Low-Power Logical Circuits Applications Jinrong Yuan Huihui Wang 10.14.2010 1. Introduction PMOS/NMOS transistor structure which features a strained silicon epitaxy-layer grown on relaxed SiGe film can greatly improve charge carrier mobility and is utilized to achieve high speed channel and dramatic performance enhancement. To maintain high speed with low power near threshold operation critically challenged the state of the art circuit design methodologies pertain to ITRS (International Technology Roadmap for Semiconductors) requirements [1]. The strained silicon to improve mobility instead of the conventional Si has been recognized as an important technology for meeting the ITRS criterion [2-5]. Compared to traditional unstrained devices, the strained silicon transistors have higher IDS with lower VT, so it’s a better current drive source. However, the high leakage current (low performance) of the s-Si due to its inherent property (like lower VT), is a trade-off of the high speed circuits. Hence, the logical circuit designs such as optimizing strained and unstrained transistors as well as the stack ones distributed in the logic circuits will be an interesting technology, considering the high performance and low power. In this project work, we will try to look into 1) The performance of separate strained NMOS/PMOS devices, properties like IDS vs VGS, with different strain parameters; 2) Delay comparison of the inverters with conventional Si and s-Si transistors; 3) Delay comparisons of the no-stack and stacked inverters with s-Si; 4) Supply voltage effects on the delay comparison of both conventional Si and s-Si inverters; 5) Leakage current of both stacked and no-stack inverters; 6) Optimizations of the supply voltage, the strained silicon and stacked Si for a register considering the delay and leakage current. 2. Initial Simulation Results At the beginning of the work, we finished first two tasks mentioned above. We started with studying the strained silicon effects on the electrical properties such as current (Id) and voltage (Vgs). Then we simulated the transistors with the strained silicon effects on the gate delay of the inverters which is the basic circuit for further work. The following results are based on the BPTM [6] and simulated in Ocean. The Fig. 2.1 and Fig.2.2 show that the threshold voltage decreases with the increasing strain for both PMOS and NMOS due to the increasing charge carrier mobility. Fig 2.3-2.5 show that the gate delay is reduced with the increasing strain in PMOS, NMOS only and both PMOS and NMOS for C=50pF. In addition, some interesting phenomenon is found during the simulation. For example, the delay of PMOS (tpLH) will increase if we just increase the strain of the NMOS. Right now we have no legitimate answer to this. Meanwhile, the output voltage will decrease with increase strain in NMOS. The possible reason is the increasing leakage current causes larger voltage change from VDD via PMOS. 3. Future work Based on the results we have so far, it’s worth looking into those possible designs to optimize a certain circuit with strained silicon devices. A 6T SRAM or a register might be the next step goal to see thoroughly how the strained devices contribute to the leakage current and what is the best way to optimize the circuit with the combination of strained and unstrained transistors, such as using stack design to reduce leakage in proper positions. It might also be interesting to see how the different strain affects the speed and the leakage current at the same time thus to adjust different transistors to achieve the best performance and the highest speed of the circuit. Fig. 2.1 PMOS with different strain1-5 low to high Fig. 2.2 NMOS with different strain1-5 low to high Fig 2.3 Changing strain in PMOS only effect on the gate delay Fig 2.4 Changing strain in NMOS only effect on the gate delay Fig. 2.5 Strain changing in both PMOS and NMOS effects on the gate delay 4. Work distribution and Time Table Task People 1 10.14 2 10.14 3 11.4 4 11.4 5 11.4 6 11.30 NMOS (Jinrong) PMOS (Huihui) Delay of inverter with s-Si in NMOS only (Jinrong) Delay of inverter with s-Si in NMOS and PMOS (Huihui) Delay of s-Si inverter with stack (Jinrong) Delay of s-Si inverter without stack (Huihui) Leakage current of stacked s-Si inverters (Huihui) Leakage current of no-stack s-Si inverters (Jinrong) Supply voltage effects on the delay of conventional Si inverters (Jinrong) Supply voltage effects on the delay of s-Si inverters (Huihui) Huihui (Delay) Jinrong (Power) 5. References [1] International Technology Roadmap for Semiconductors, http://www.itrs.net/. [2] H. Ramakrishnan, S. Shedabale, G. Russell, and A. Yakovlev, ‘Stacked Strained Silicon Transistors for Low-power High-performance Circuit Applications’, 2008 Electronic Components and Technology Conference. [3] C.-H. Jan, P. Bai, J. Choi, G. Curello, S. Jacobs, J. Jeong, K. Johnson, D. Jones, S. Klopcic, J. Lin, N. Lindert, A. Lio, ‘A 65nm Ultra Low Power Logic Platform Technology using Uni-axial Strained Silicon Transistors’, 2005 IEEE. [4] S.G. Badcock, A.G. O’Neill, E.G. Chester, ‘Device and circuit performance of SiGe/Si MOSFETs’, Solid-State Electronics 46 (2002) 1925–1932. [5] Mark Bohr, ‘The Invention of Uniaxial Strained Silicon Transistors at Intel’, Intel Corporation. [6] Berkeley Predictive Technology Model (BPTM) “45nm BSIM 3 model cards”.