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Industrial Electrical Engineering and Automation
Actuators
Linear movement and vibration
Industrial Electrical Engineering and Automation
Linear movement
• In some (many) industries the most common movement.
• Realised from rotating via tooth belts or screws.
Translation (linear) motor
Industrial Electrical Engineering and Automation
”Stationary”
Airgap
”Moving (Rotor)”
Industrial Electrical Engineering and Automation
Hydraulics
• Positive
High force and power density
Established technic
• Negative
Pump
Oil storage
(fire risk)
Filter
Maintenance
Industrial Electrical Engineering and Automation
Pressure air
• Positive
No storage
Established technic
• Negative
Compressor
Filter
Maintenance
Industrial Electrical Engineering and Automation
Piezoelectric
• Lead Zirconate Titanate
• d33 is on the order of 450 to
650 x 10-12 m/V, d31 is on
the order of -200 to -300 x
10-12 m/V.
Properties
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Industrial Electrical Engineering and Automation
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Unlimited Resolution
A piezoelectric actuator (PZT) can produce extremely fine position changes down to the subnanometer
range. The smallest changes in operating voltage are converted into smooth movements. Motion is not
influenced by stiction/friction or threshold voltages.
Large Force Generation
PZTs can generate a force of several 10,000 N. PI offers units that can bear loads up to several tons and
position within a range of more than 100 µm with subnanometer resolution (see "PZT Actuators" section).
Fast Expansion
Piezo actuators offer the fastest response time available (microsecond time constants). Acceleration
rates of more than 10,000 g's can be obtained.
No Magnetic Fields
The piezo effect is related to electrical fields. PZT actuators don't produce magnetic fields nor are they
affected by magnetic fields. They are specially well suited for applications where magnetic fields cannot
be tolerated.
Low Power Consumption
The piezo effect directly converts electrical energy into motion only absorbing electrical energy during
movement. Static operation, even holding heavy loads, does not consume power.
No Wear and Tear
A piezo actuator has neither gears nor rotating shafts. Its displacement is based on solid state dynamics
and shows no wear and tear. PI has conducted endurance tests on PZTs in which no change in
performance was observed after several billion cycles.
Vacuum and Clean Room Compatible
Piezo actuators are ceramic elements that do not need any lubricants and show no wear and abrasion.
This makes them clean room compatible and ideally suited for Ultra High Vacuum applications.
Operation at Cryogenic Temperatures
The piezo effect is based on electric fields and functions down to almost zero Kelvin (with reduced
specifications).
Industrial Electrical Engineering and Automation
Laminar design
DL  d31*L * U/d
D31 = - 250e-12 m/V
d=thickness
Dd  d33 * U
D33 = + 500e-12 m/V
Industrial Electrical Engineering and Automation
Tube design
DL  d31*L * U/d
d31 = - 250e-12 m/V
Industrial Electrical Engineering and Automation
Stack design
DL  d33 * U
d33 = + 500e-12 m/V
Industrial Electrical Engineering and Automation
Actuators
Applications
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Industrial Electrical Engineering and Automation
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Optics, Photonics and Measuring
Technology
Image stabilization
Scanning microscopy
Auto focus systems
Interferometry
Fiber optic alignment & switching
Fast mirror scanners
Adaptive and active optics
Laser tuning
Mirror positioning
Holography
Stimulation of vibrations
Disk Drive
MR head testing
Pole tip recession
Disk spin stands
Vibration cancellation
Microelectronics
Nano-metrology
Wafer and mask positioning
Critical Dimensions measurement
Microlithography
Inspection systems
Vibration cancellation
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Precision Mechanics and Mechanical
Engineering
Vibration cancellation
Structural deformation
Out-of-roundness grinding, drilling, turning
Tool adjustment
Wear correction
Needle valve actuation
Micro pumps
Linear drives
Piezo hammers
Knife edge control in extrusion tools
Micro engraving systems
Shock wave generation
Life Science, Medicine, Biology
Patch-clamp drives
Gene technology
Micro manipulation
Cell penetration
Micro dispensing devices
Audiophysiological stimulation
Shock wave generation
Industrial Electrical Engineering and Automation
TERFENOL-D ACTUATOR
ADVANTAGES
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HIGHEST DISPLACEMENT OF ANY SOLID STATE ACTUATOR
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HIGH FORCE
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RELATIVELY FLAT FREQUENCY RESPONSE
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MICROSECOND RESPONSE
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PRECISE CONTROL
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OPERATES OVER A WIDE RANGE OF TEMPERATURES
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LOW VOLTAGE OPERATION
Industrial Electrical Engineering and Automation
Applications
• MACHINE TOOLS POSITIONING AND CONTROL
INTERNAL COMBUSTION ENGINES FUEL INJECTORS
HYDRAULICS PUMPS AND VALVES
AEROSPACE PRECISE POSITIONING
Industrial Electrical Engineering and Automation
Link
• http://www.physikinstrumente.com/tutorial/index.
html