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Microwave Interference Effects on Device, Integrated Circuits and PC-Board System A Presentation on Recent Progress N. Goldsman, Y. Bai, A. Akturk, T. Chitnis, B. Jacob, J. Baker, A. Iliadis, J. Melngailis 10/10/01 Effects on PC-Board and System Level Effects on Integrated Circuit Level Effects on Device Level Standard Planar Technology Implementation: IC Chips on PC Board Chip-to-Chip Connection on PC Board: PC Board Bond Pad Die (Integrated Circuits) Input Output Pins Bond Wire Transmission Line Chip-to-Chip Connection Bond Wire Bond Pad Pins Input Output ICs ICs Transmission Line IC Chip with Bond Pads Bond Pad Die (Integrated Circuits) Electro-Static Discharge (ESD) Close Shot of Bond Pad Bonding Wire Bond Pad Metal Insulator Oxide Si Substrate Bond Wire Classification of Bond Pads Analog Reference Pad Bi-Directional Pad with Buffer Ground Pad Input Pad with Buffer I/O Pad Padless Corner Pad Padless Spacer Pad Pad No Connect Pad Output Pad with Buffer Power Pad ESD Pad --- Eliminate Harmful Static Charge Example I/O ESD Pad: Bond Pad ESD Transistor PMOS Pad Logic ESD Transistor NMOS Layout Schematic Bond Pad Parasitics - Capacitance Metal Insulator Oxide Pad Parasitic Capacitance vs. Process Plate Capacitor Metal Layer Substrate C pad Pad Capacitance (pF) Si Substrate (Ref: MOSIS) 160 140 120 100 80 60 40 20 0 1.5u 0.5u 0.35u Process 0.25u Effects of Bond Pad Parasitics on Circuit Performance --- Matching IC Package Bond Pad Bond Wire Pin Package Parasitics Die Bond Wire & Pin (Several nanoHenry) Bond Pad Bond Wire Pin Bond Pad (Several Hundred femto-Farad) Effects of Bond Pad Parasitics on Circuit Performance --- Matching Chip-to-Chip Connection on PC Board Bond Pad Bond Wire Transmission Line Pins Effects of Bond Pad Parasitics on Circuit Performance --- Matching Input IC 1 Output IC 2 IC 1 IC 2 Input Output Transmission Line Effects of Bond Pad Parasitics on Circuit Performance --- Matching Why to Match? • Maximize Power Transformation • Eliminate Reflection Match impedance on board with bond pads, bond wire and pins: IC 1 IC 2 Input Output Transmission Line Tune to Z0 Tune to Z0 If Impedances are not matched, signals will get reflected. Tune to Z0 Z0 CMOS Low Noise Amplifier IC1 Input Circuit • Inductor L1 and capacitors C1 and C2 are on – chip components for input matching. • Inductor L2 is the downbond inductor and is also used in input matching. • In addition to the shown components the pad capacitance and package model were taken into consideration. Matching • Looking into the MOSFET M1, input impedance Z in sL 2 g 1 m L2 sC gs Cgs Real part • The real part is made to be 50 Ohms. • Inductors L1 and C1 give additional degrees of freedom to have the input resonate at 2.4 GHz • Values are tuned to include effects of pad and package parasitics • Models provided by the foundry were used for on-chip inductors and capacitors. Transistor sizing • Sizing is an important factor in the Power consumed vs. Noise Figure trade off. The expression below is derived by constraining the power consumed and then optimizing the Noise Figure. Wopt 1 3LCox Rs = Operating frequency L = Device Length Rs = Source Resistance • Substituting appropriate values gives a transistor size of W = 200 microns. CMOS LNA Layout Input_C1 Input_L1 MOSFETs Output_C2 Simulation Results •Simulation results –Operating at 2.4 GHz –Power gain = 21 dB –Noise Figure = 2.7 dB –Supply voltage = 2.5V –Idc = 7.5 mA This is a test chip. Results are obtained for an output termination of 50 Ohms Effects of Bond Pad Parasitics on Circuit Performance --- Matching Example Circuit: RF Power Amplifier Bond Pad, Bond Wire, and Pin PA without bond pads or package parasitics Bond Pad, Bond Wire, and Pin PA with bond pads and package parasitics Bond pad, bond wire, and pin add together which shift the resonant frequency, decrease the power gain, and narrow the bandwidth of the amplifier. Device Switching Details Performance Improves by the reduction of the capacitive load the utilization of the halo implants General Device Hierarchy => => => Governing Equations <= Device Equations are solved for each mesh point / <= Supplementary device equations \ => => Supplementary Lumped circuit equation Example Solutions of the Previous Equations Potential Distribution: The applied voltage at the gate is shared between the oxide and the surface after the built-in voltages are deducted. More electrons are attracted to the channel as VGS gets higher. This also drags the surface potential to a higher level As the gate voltage increases, the surface potential does not increase linearly, causing the vertical electrical field to take higher values. This might eventually lead to a breakdown, around 3MV/cm Carrier Distribution: To turn the device on, the minority carriers are attracted to the oxide interface, ultimately they invert the surface and form a conductive channel, by the application of a positive VGS for electrons and negative for holes When the device is turned on, the accumulation of the carriers at the interface forms the conductive path Potential Distribution for VGS=1V and VGS=5V VDS=1.5V and VSB=0V VGS=1V EOX_MAX=3MV/cm VGS=5V EOX_MAX=15MV/cm Electron Concentration of NMOS throughout the substrate, specifically around the interface, when the channel is on and off Off On The bump shows the attracted carriers Hole Concentration of PMOS throughout the substrate, specifically around the interface, when the channel is on and off On The bump shows the attracted carriers Off