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2443-2 Winter College on Optics: Trends in Laser Development and Multidisciplinary Applications to Science and Industry 4 - 15 February 2013 Edge emitting semiconductor lasers I. Montrosset Politecnico di Torino Italy Edge emitting semiconductor lasers Ivo Montrosset Department of Electronics and Telecommunication POLITECNICO DI TORINO • Suggested book • L.A.Coldren, et al., Diode Lasers and Photonic Integrated Circuits, J.Wiley, 1995 • Or the new edition OUTLINE • • • • • • Introduction Semiconductor Laser ingredients Rate equation analysis DBR tunable lasers and DFB Laser dynamic modeling with FDTW Examples of mode locked lasers Laser diodes structures Edge emitting laser diode Red: the active material The optical waveguide Vertical cavity surface emitting laser (VCSEL) The optical cavity Laser characteristics Output power mW Typical output power/ current curve for a semiconductor laser Power spectrum Fabry Perot laser Power spectrum for a multimode and single mode laser Dynamic characteristics: small signal modulation & eye diagram The electronic oscillator Reference section Amplifier Noise s + A s + rE Signal out tE E rE rE Feedback Ring laser Condition for stationary solutions A ( s + rE ) = E E = H s 1 − G , Oscillation condition: G = 1 G = rA = Loop gain Numerator: noise term Denominator: loop gain characteristics Edge emitting or VCSEL laser cavity E+ FL FR EReference section rL rR Field reflectivities Field equations: E − = rR E + + FR Field equation E E + = rL E − + + FL = rL F R + F 1 − rL rR L Numerator: noise term Denominator: active cavity characteristics Oscillation condition: rL rR = 1 = G rL,R can be >/< 1 depending on the structure Power spectrum Power spectrum: S E ( ∝ E( ) 2 = | Hs |2 1 − G( ) 2 1 G (ω ) ∠ S 1 G (ω ) E 2· (integer) (ω ) The peaks are the Modes of the cavity Laser ingredients • The longitudinal optical cavity • The semiconductor optical waveguide to confine the field in the transversal direction (avoid diffraction) and to confine the carriers • Active semiconductor material: photon amplification and noise by e-h recombination process The semiconductor materials The semiconductor laser structure is realized by epitaxial growth of material typically with the same lattice constant and with different energy gap Direct energy gap AlGa As/GaAs InGaAsP/InP Coldren,Corzine&Masanovic Radiative transitions in direct Eg semiconductors E2 E1 Absorption - photodiode E2 E1 Spontaneous emission - LED E2 E1 Photon energy: ω = E 2 − E 1 Gain -> stimulated emission > absorption Stimulated emission - amplifier - laser Direct Energy gap material Band structure for GaAs and InP Carrier distributions under injection E E E fc(E) Ec0 Ev0 electrons Efc Charge neutrality N=P Efv holes 1-fv(E) Density of states Fermi functions Density of cb-electrons: N(Ef ) = Density of vb-holes: ∞ Ec0 P(E f ) = E v0 −∞ Carrier distribut. c (E)f(E, Ef )dE v (E)(1 − f(E, Ef ))dE Optical gain in semiconductors Optical gain requires stimulated emission > stimulated absorption Can be fulfilled for quasi-thermal equilibrium 2 5 2 0 1 5 Efc quasi-Fermi level for electrons Efv quasi-Fermi level for holes 1 0 5 0 -4 -3 -2 -1 0 We have gain when 1 2 3 Efc – Efv > Eg 4 Bernard-Duraffour inversion condition Gain T = 0 K T>0K Photon energy Eg Efc- Efv Bulk gain function g ∝ r (f 2 − f1 ) Measured gain FP41AB07 200 G/gamma=g-alfa/gamma (cm-1) 0 -200 -400 -600 -800 -1000 -1200 1.52 1.54 1.56 1.58 1.6 Wavelength (m) Same considerations applies for the others semiconductor materials 1.62 1.64 1.66 -6 x 10 Density of States semiconductor materials 3D bulk semiconductor Eg 2D E quantum well E 1D WHY LOWER DENSITY OF STATE ARE BETTER ? quantum wire E 0D quantum dot E Carriers filling – bulk vs. QW Bulk – 3D: c 0 Ec0 QW – 2D: Carrier distribution at T=0 K E Ef Ec0 Fixed E f : N 2D Diff. gain : ∂g ∂g > ∂N 2D ∂N 3D f ) dE E Ef ∂Ef < N 3D ∂N ρ (E ) f (E; E Let compare 3D and 2D material at the same Ef c 0 N = 2D ∂Ef > ∂N Easier to invert population Less current 3D Higher gain sensitivity to carrier variation -> higher modulation bandwidth with QW! Calculated gain spectra ColdrenCorzine , p.165 The semiconductor waveguide: 1D • Should be able to maximize the interaction by carriers (e&h) and photons by confining them in the same as small as possible region • This is obtained by the realization of a double heterostructure diode Carriers well confined in the low Eg region Refractive index increases if Eg decreases Potential well Optical waveguide Photons and carriers confined in the same region Total reflection Semiconductor waveguides : 2D confinement of current, carriers and photons Important to realize in the lateral direction structures able to control not only the carrier and photon confinement but also the current flow. Gain guided I Current spreading: no control Lateral carrier diffusion in the active layer Lateral guiding only due to carriers -> gain non uniformity Index guided I Current laterally localized by multi-junctions No lateral carrier diffusion in the active layer: higher carrier density N Lateral guiding due to refractive index change: higher photon density Examples of advanced semiconductor waveguides (UGlasgow) The heterostructure Ridge waveguide Field computed with FEM MQW waveguide with vertical field optimized for optical waveguide coupling (UGlasgow) Band structure eln holes Active region Dummy waveguide Semiconductor waveguide analysis • The semiconductor waveguide can be analyzed as lossless dielectric waveguide with a perturbation due to the presence of losses (scattering, doping,..) and of the carriers in the active region • The electromagnetic waveguide modes of the lossless structure are computed than the other effects are added perturbatively assuming that the field distribution remain unchanged and the perturbations only affect the modes propagation constant • The two steps of the analysis consist in: – evaluate the modal fields and their propagation constants – estimate the contribution of the perturbation (losses, gain, etc.) to the propagation constant variation Lossless Wave guides: approximate analysis Wave equation: ∇ ~ E + k 2 2 0 ~ ε ( x, y )E = 0 For weakly guiding optical waveguides ~ E ≈ e Quasi-TE modes: -TM modes H U (x, y ) Z (z) y ≈ h y U (x, y ) Z (z) Applying the separation of variables Transverse mode equation: ∇ 2 t U(x, ≡ β y) + k 2 = k 2 0 2 0 n ε ( x , y ) U(x, y) = β 2 U(x, y) where is the mode propagation constant and n is the mode effective index 2 Longitudinal mode equation: ∂ 2 Z (z) + β ∂z 2 Z ( z ) ∝ exp[ j( z)] 2 Z (z) = 0 Propagation constant perturbation correction ~ 2 = k From perturbation theory ~ ~ = + ≅ k 0n + k 0 xy = and i = active where n2 W -. Lossless waveguide ~ = n 2 + ~ w For ε of the form (α 2 0 Δ n~ xy ~ | U | 2 dxdy (gain) | U | 2 dxdy | U | 2 dxdy ( x, y ) U(x, ) U(x, y) y) 2 − j 1 2 i is the waveguide confinement factor when assuming χ ( gain ) constant in the active region region | U | 2 dxdy dxdy 2 dxdy are the internal losses Propagation constant, group velocity and LEF is usually expressed as: β ≅ k0 n + j 12 (Γxy g −αi ) Expanding the propagation constant around a reference point (r, Nr) we obtain: ∂β ∂β β ≈ β (ω r , N r ) + (ω − ω r ) + (N − Nr ) . ∂ω ∂N where ∂ β ∂ω and where ≅ ∂β ∂N α 1 v g ≅ k 0Γ ≡ − ∂ ∂N xy ∂ Re ∂N n~ Δ n~ ( gain ∂ Im ∂N n~ ) = j 1 2 = − 2 k (1 + 0 jα )Γ xy ∂g . ∂N ∂n ∂N ∂g ∂N Where is the active material linewidth enhancement factor -> LEF -> H The optical cavities Fabry-Perot 3S-DBR A P P A Distributed reflector DFB A VCSEL Transmission matrix General complex cavity P A P The Fabry Perot cavity Oscillation condition =m FP– Field power spectrum below threshold FP41AB07 -35 measured -40 β ≅ k0 n+ j 12 [Γ(1+ jαH ) g −αi ] The difference in the peaks is due only to difference in the gain function Measured optical power (dBm) -45 -50 -55 -60 Ith -65 0.5Ith -70 0.3Ith -75 -80 -85 1.45 0.1Ith 1.5 1.55 1.6 1.65 1.7 -6 x 10 Wavelength (m) Injection -> carrier density increase -> gain increase-> peaks increase Peaks shift -> LEF 0 -> refractive index decrease Peaks separation-> Free Spectral Range = vg 2L The DBR cavity |rR| Effective grating length Bragg grating reflectivity Oscillation condition Coldren&Corzine DBR resonance condition and gain margin Coldren&Corzine In FP &DBR cavities g is the same In FP cavity =0 (constant mirror loss) Weak mode selectivity In DBR cavity >> g strong mode selectivity -> Stronger peaks difference SLM-> Single Longitudinal Mode How to correlate previous results with the current injection: the rate equations (RE) • The variables are: – The average photon density in the active region: NP – The average carrier density in the active region: N – The injected current: I • The RE can be written: – In each sections of the cavity after its longitudinal discretization – Averaging the variables in all the cavity • The first case is more accurate (DFB) and the other more simple numerically and reasonably accurate • We consider now the second case Carrier balance in the active region Rate of stimulated emission: Rst Total number of generated photons v g (N pout − N pin ) A = vggNp V g depends on (N, ); the value to be used is that at the of operation of the laser -> g(N, op): Semiconductor gain approximations For bulk material g ≈ g peak ≈ a ( N − N tr ) For QW material g(N, N p ) = N + Ns g0 ln 1 + N p N tr + N s N g0 g(N, N p ) ≅ ln 1 + N p N tr Gain saturation The Rate Equation for the carriers density is: dN I = i − R(N) − v g gN p dt qV Rate equation for the lasing mode average photon density in the active region The effects to be considered are: -The stimulated emission -The spontaneous emission coupled into the lasing mode -The losses in the cavity: intrinsic and mirrors For what concern the Stimulated emission we can write the relation between the total rate of stimulated emission (RstV), the variation of the total number of carriers (NV) and the variation of the total number of photons NPtot d ( NV ) d ( N Ptotal ) RstV = − = dt dt NP N Ptotal = VP Been relevant for the carrier rate equation the Photon density NP we can define: where VP is the “volume” occupied by the photons V d (N P ) V = Rst = v g g N P = v g (g )N P dt VP VP g is the cavity average modal gain Losses and Spontaneous emission Average Cavity Losses: characterized by photon decay rate (p=1/(vg T)) where (T) are the cavity modal losses: intrinsic (i) and mirror (m=-ln(|r1 r2|)/L) Average Spontaneous Emission density coupled to the cavity mode. Can be obtained from the total spontaneous emission ( Rsp V) normalized respect to the volume occupied by the photon (Vp) and taking into account that only the small part (sp) is coupled into the spectral interval of the lasing mode: sp Rsp V/ Vp = R’sp The rate equation for the average photon density in the active region is: 1 = v g g − N p + R 'sp dt p dN p RE summary: Rate Equations for the total number of carriers and photons dN dt = T i I − R(N)V q − v 1 = v g g − N pT dt p Static solution (see Coldren Corzine) dN pT m i + m P0 ≅ h F N p Vp or p g gN ' sp + R N pT = p V 1 sp − v p Multimode Rate Equations dN dt I − (R i qV = Γ m v gm g = η dN pm dt N pm = pm n .r ) − v g gm m N m − v 1 − m 1 + R sp τ R sp g g pm N pm + Γ pm ) spm m (N, N m R R ' spm pm sp g g(N) FP lasers P-I & Spontaneous emission factor effect sp=10-4 CS=sp sp=3 10-4 SMSR Measurement of modulation response I (t) = I 0 + | I 1 | cos( t) Network analyzer | P1 | PD 2 / | I1 | 2 i pd (t ) ∝ P1 (t ) LD ω P ( t ) = P 0 + P1 ( t ) P 1 ( t ) = Re[ jω t P1 ( ω ) e ] = | P 1 ( ω ) | cos( ω t + θ p ) Usually is measured the so called electrical modulation response H H (ω (ω ) = 0 2 ) dB = 20 Log P1 ( ω ) P1 ( ω = 0 ) Small-signal modulation response From the RE linearization (see Coldren & Corzine) and assuming a small harmonic current excitation over the bias, the system of differential equation can be solved analytically and the impulse response function is obtained: P1 ( ω ) ω R2 2R H ( ) = = = 2 P1 ( ω = 0 ) Δ R − 2 + j γ whose parameters are: Relaxation oscillation frequency 2 R ≡ γ NP γ PN Damping rate ≡ γ and f3dBmax= 2 2 / K K + γ NN = 4 π γ NN + γ 2 τ p PP PP v ≈. aN . Kf = Γ a 1 + a g p 2 R , p + 0 p , Experimental results small signal modulation Coldren &Corzine = Kf 2 R + 0 The DBR laser: tunability |rR| 3S DBR Oscillation condition Bragg grating reflectivity Tuning of a DBR laser Wavelength of mode m: m λ m ≈ 2 ( n a L a + n p L p + n DBR L eff ) Relative change m due to changes in refractive index na, np, nDBR Δλm λm = Δ n a L a + Δ n p L p + Δ n DBR L eff n a L a + n p L p + n DBR L eff Coldren&Corzine Index change due to current injection: For active section the carrier density is clamped Δ n a ≈ 0 For passive sections ηi I j qV = R(N j ) , j = p , DBR j ∂n Δn j = N (I j ) , ∂N j = p , DBR Tuning of the DBR grating Relative change of the Bragg wavelength: Δ λ Bragg λ Bragg λBragg = 2 nDBR Λ Δ n DBR 1 ∂ n DBR = = Δ N ( I DBR ) n DBR n DBR ∂ N Δ λ 7-10 nm Grating IBRAGG current Discontinuous line for grating current injection only Continuous line with proper grating and phase section currents injection: synchronous shift of modes and Bragg wavelength DBR with wide tunability:SG DBR (UCSB) Change in the aligned peaks Coldren & Corzine DBR with wide tunability:GCSR KTH Selection of the peak by current injection in the coupler Respect to SG-DBR Similar tunability More output power Reduced spectral characteristics The DFB laser I A1=0 B2=0 The periodic structure (grating of period ) produce a distributed coupling between the forward (A) and backward (B) propagating waves represented by ~ dA(ω , z ) = − j − β 0 A(ω , z ) − jkB(ω , z ) β dz dB(ω , z ) = + j β~ * − β B(ω , z ) + jkA(ω , z ) 0 dz ( ( ) ) k the coupling coefficient and 0=2/ For lasing: A1=B2=0 0 = T11 A2 B1 = T21 A2 Lasing condition T11=0 The DFB laser - II Similarly for more complex cavities cascading the transmission matrix of each element R1 R2 0 = T11 A0 Bm = T21 A0 DFB above threshold The non uniform field distribution along the cavity significantly changes the parameter of the propagation equation that depends on the local power density QWS-DFB ~ dA(z ) = − j (N, N p ) − β 0 A(z ) − jkB( z ) dz dB ( z ) = + j ~ * (N, N p ) − β 0 B(z ) + jkA(z ) dz ( ( ) ) A longitudinal segmentation of the cavity is needed both for the static and dynamic analysis. For the dynamic analysis the previous equation can be transformed in a time domain equation using a Fourier transform technique and linearizing the frequency dependence of the propagation constant . ~ β (ω , N ) = dβ (ω , N ) ω0 ~ neff (ω 0 , N ) + (ω − ω0 ) c dω ω =ω 0 DFB dynamic propagation equations after Fourier transform ∂ + ∂z ∂ ∂z − 0 1 ∂ g (N ) − ( ) [n eff (N ) − n eff,0 ]a(z, t ) − jkb(z, t ) a z, t = − j v g ∂z 2 c 1 ∂ g (N ) − + j 0 [n eff (N ) − n eff,0 ]b (z, t ) + jka(z, t ) b (z, t ) = v g ∂z 2 c ω Γg(ω0, N) −α n~eff (ω0, N) = 0 neff (N) + j c 2 Boundary conditions a(0, t ) = R 0 b(0, t ) b(L, t ) = R L a(L, t ) Carrier rate equation d I (t ) N (z, t ) = − AN (z, t ) + BN dt eV [ 2 2 S(z, t ) = a(z, t ) + b(z, t ) 2 (z, t ) + CN 3 (z, t )]− v g g (N )S (z, t ) 1 + S How to include the physical effects The gain: The dependence with can be included in the time domain using a numerical filter ~ ~ f z,t = (1− A) f z,t + Af z,t −Δt rz ,t + A~ rz,t −Δt rz,t = (1− A)~ The refractive index variation with the carriers neff ( z, t ) = neff , 0 − Δn[N ( z , t ) − N 0 ] The spontaneous emission in each section 2 Esp = β sp BN ( z , t ) Δt with a random phase Δn = α LEF λ0 ∂g (N ( z, t ), t ) 2π ∂N (z, t ) The dynamic propagation equations The previous equations are very general and can be used to study the characteristics not only of a DFB but also of a quite general guided wave optoelectronic component when assuming: - the parameters describing the propagation may change in the longitudinal direction considering both active, passive, with and without grating sections - different terminal boundary conditions (with reflection or not) - static or dynamic excitation. In practice all the structures discussed before and many others as: - Lasers for pulse generation: Q-and gain switched, mode locked, .. - SOA : semiconductor optical amplifiers - SLED: super luminescent LED based on waveguide configuration - etc… Integrated semiconductor mode locked (ML) lasers for short pulse generation A short pulse is generated when the longitudinal modes of a laser are locked in phase . From Fourier analysis the pulse duration depends on the number of locked modes and the repetition rate from the mode frequency separation. Ex. if In the time domain: where the repetition period is How mode locking take place The carrier pulsation at a frequency close to the cavity modes FSR helps the power transfer and the phase locking between the cavity modes. How Mode Locking can be obtained: - by current modulation at the FSR frequency: ACTIVE ML - by a self induced modulation in a 2 sections lasers: PASSIVE ML - by a combination of active and passive ML: HYBRID ML - by self mode locking due to carrier modulation induced by mode beating Active ML G: gain section R1 P: passive section R: reflector f m ≈ FSR The active section allow the lasing The passive section can be used to set the FSR and to modify it by current tuning The reflector if is a grating it allows to define and tune the pulse wavelength by current injection The repetition rate is precisely defined by the modulation frequency when around the FSR Passive ML R1 The active (G) section allow the cavity to lase and contributes with its saturation to the ML pulse formation The saturable absorber (A) reverse biased contribute to the pulse formation with its fast recovery The passive section (P) to set the FSR and to modify it by current tuning The reflector (R) if a grating allow to define and tune the pulse wavelength The repetition rate is reasonably stable around the cavity FSR Mode locking take place if the cavity operates in the condition: dg dN A dg > dN G Simulation results for passive ML Hybrid ML Has the advantage of: - it requires a smaller modulation current 4.5 Pulse width [ps] -repetition rate stability and accuracy of active ML when it operates around the cavity FSR. 4 3.5 3 2.5 2 1.5 21.85 21.9 21.95 f [GHz] 22 22.05 22.1 59 Ex.1 of Active ML simulation results Potenza in uscita • Modulazion at 22.03GHz • Pulse width FWHM 1.74ps 180 160 140 Potenza [mW] 120 100 80 60 4 40 3.5 20 Larghezza degli impulsi [ps] 4.5 3 0 2.865 2.87 2.875 2.88 t [s] 2.5 2 2.89 2.895 −8 x 10 Spettro di potenza (faccetta dx) 1 21.9 21.95 22 22.05 Frequenza di modulazione [GHz] 10 22.1 0 10 -1 10 -2 Spettro [mW] 1.5 21.85 2.885 10 -3 10 -4 10 -5 10 -6 10 -7 10 -6 -5 -4 -3 -2 -1 f [Hz] 0 1 2 3 4 11 x 10 60 Ex.2 of Active ML simulation results Potenza in uscita a destra 90 • Modulazion at 21.9 GHz • Multiple peaks 80 70 Potenza [mW] 60 50 40 30 4.5 Larghezza degli impulsi [ps] 20 4 10 3.5 2.1 2.102 2.104 2.106 2.108 2.11 t [s] 2.112 2.114 2.116 2.118 2.12 −8 x 10 3 Potenza nel tempo 2.5 150 2 1.5 21.85 21.9 21.95 22 22.05 Frequenza di modulazione [GHz] 22.1 • Modulazion at 22.1GHz • Narrow peaks with strong modulation Potenza [mW] 100 50 0 2.42 2.43 2.44 2.45 2.46 2.47 t [s] 2.48 2.49 2.5 2.51 2.52 −8 x 10 61 Example of a realized device • Hybrid ML laser with a saturable absorber modulated at 40GHz • H. Hertz Institute Berlin 62 Examples of self ML Easy to be found in long cavity or external cavity lasers with high LEF -> 4-6 SP= self pulsation ML=mode locking