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Ver. 1.031 Ironless vacuum linear motor series QUALITY AND SERVICE DELIVERED WORLDWIDE [ TECNOTION ] Tecnotion is the global authority on direct drive motor technology. We are the world’s only unbundled manufacturer of linear and torque motors. A former part of Philips, we specialize solely in the development and production of linear and torque motors. Because of this, our expertise, customer service and product quality are unmatched. We have a global presence, with production plants in The Netherlands and China and local representation around the world. This ensures short delivery times and high quality support, wherever you are located. When you do business with Tecnotion, you have a team of highly skilled sales and application engineers at your disposal. They help you from your initial prototype all the way to the application of our products and beyond. Ver. 1.031 Whatever your needs, you can rely on Tecnotion as a solid, reliable partner. Ironless vacuum motor series 1 Vacuum Technology 3 1 T L 06 S U MV 12 N 2 4 T = Iron Core U = Ironless 2 3 4 Series type/vacuum Number of coils Winding type Vacuum technology A growing amount of high tech applications require vacuum solutions to minimize the chance of unwanted chemical reactions or pollution of the process or surrounding equipment. Vacuum applications may be: Positioning stages & gantries, inspection, scribing, encapsulation , lithography, deposition processes, sputtering & E-beam. Motion is one of the main challenges within a vacuum environment. Serviceability, reliability, versatility and outgassing are critical factors in a vacuum application and failure of one of them could mean long downtimes. Total cost of ownership should be considered over the initial investment. Maintenance costs of motion systems in vacuum are potentially high. Linear vacuum rated motors have no moving parts and are frictionless making the motors maintenance free. Additionally Tecnotion’s linear motors can be placed into vacuum as a whole and therefore do not require a feed trough saving costs. High outgassing of the motion system can influence the production process. Tecnotion´s vacuum rated ironless linear motor is a dedicated and specially designed coil unit and magnet yoke for use in high vacuum, down to 10-8 , and the lowest achievable outgassing for a series product. UXXV Series Fp 4020N Fc 666N The UXXV coil is the most powerful and efficient coil in the vacuum rated linear motor series. The UXXV series is ideal for heavy duty applications that demand ultra precision and maximum force output. It’s efficiency and high motor constant allow for a low heat output while generating a high force. ©2016 Tecnotion BV - All rights reserved - The contents of this document are subject to change without prior notice. ULV Series Fp 720N Fc 150N The ULV coils are the high end coils in the vacuum rated linear motor series. The ULV series is commonly used for applications demanding peak force or low heat output. In longer strokes ULV coils can be combined to save magnet material but still achieve high performance. UMV Series Fp 400N Fc 80N The UMV coils are the smallest coils in the vacuum rated linear motor series. This serie is ideal for postioning, e.g. in gantries, or high dynamic, light weight applications which require extreme accuracy. Ver. 1.031 Tecnotion is the specialist for vacuum linear motors. Many years of experience is used in designing and building vacuum coils and magnets. Tecnotion can supply a vacuum linear motor that can match even the strictest vacuum requirements but can also provide vacuum products for smaller budgets. Ironless vacuum motor series Features Capabilities Coil unit and yoke are completely vacuum compatible Minimum pressure down to 10-8 mBar Typical total outgassing of 10-5 mBar*l/s Typical CxHx outgassing of 10-8 mBar*l/s Connection and sensors The coil units are equipped with a temperature measurement and cut-off sensor to enable monitoring and overheat protection of the coil unit at all times. The sensors and three phases of the coil unit are connected through vacuum compatible cables. These are the only necessary connection to the outside world. Design The ironless vacuum rated motors have a unique metal housing that is sealed to prevent outgassing into the vacuum and make the coil high-vacuum resistant. Despite this housing the coil is still light weight which allows for high dynamics. Ver. 1.031 Cleanliness All of Tecnotion’s vacuum products are produced inside our own cleanroom in The Netherlands. Before shipping the products are treated and cleaned to reduce initial outgassing after which they are cleanroom packed to prevent any contamination during shipping and installation at the same time. Thermal Thermal management is one of the main challenges in vacuum. Therefore the coil units have been designed to achieve a low thermal resistance (Rth) to enable the coil unit to quickly conduct heat away from the coil. Equal to the standard linear motors, the vacuum linear motors have a high efficiency. This means a lower coil temperature and therefore a higher continuous force. MOUNTING / APPLICATION EXAMPLES WHY CHOOSE FOR IRONLESS VACUUM RATED? ■■ Defined low outgassing ■■ No particulation Moving coil application Stationary coil application The moving coil application is ideal for dynamic applications or low masses. Multiple coils can be placed on one magnet track to move individually or work together A stationary coil application can be used in less dynamic applications. The stationary coil, mounted on a solid coil mount enhances passive cooling through conduction significantly. ■■ Low thermal resistance ■■ High cleanliness ■■ No large cable feed-through required ■■ Can be positioned anywhere in the vacuum chamber VACUUM vacuum chamber wall Slide vacuum chamber wall APPLICATIONS VACUUM Positioning stage & gantry Inspection Scriber Lithography Slide Encapsulation Deposition processes E-beam ©2016 Tecnotion BV - All rights reserved - The contents of this document are subject to change without prior notice. Ver. 1.031 Sputtering Vacuum Ironless Series Remarks Symbol Unit Winding type UMV12 N ULV9 S Peak Force @ 20°C/s Electrical 3-phase synchronous Ironless, 300Vdc Fp N 400 720 4020 Continuous Force passive cooled* coils @ 110°C Fc N 20 45 168 Continuous Force active cooled** coils @ 110°C Fc @ 300 V vmax m/s 10 16 5 12 2.7 Motor Force Constant coils @ 20°C K N/Arms 36.3 19.9 68 27.5 117.5 Motor Constant coils @ 25°C S N2/W magnet @ 25°C Ip Arms 11.0 20.0 10.6 26 34.2 Max. Cont. Current passive cooled* coils @ 110°C Ic Arms 0.55 1.0 0.66 1.63 1.4 Max.Cont. Current active cooled** coils @ 110°C Ic Arms 2.2 4.0 2.2 5.5 5.7 Bemf Vdc / m/s 30 16 55.5 25.5 96 Rf Ω 4.6 1.4 5.3 0.85 2.6 1.5 0.4 4.2 0.7 3.6 Maximum Speed*** Back EMF Phase-Phase Resistance per Phase Induction per Phase coils @ 25°C ex. cable 80 150 95 666 290 1742 I < 0.6 Ip Lf mH coils @ 25°C τe ms 0.3 0.8 1.4 all coils Pc W 91 105 341 Thermal Resistance coils to mount. sfc. Rth °C/W 0.6 1.0 0.24 Thermal Time Constant* to max. coil temp. τ th s 48 180 216 Electrical Time Constant Maximum Continuous Power Loss Thermal N magnet @ 25°C Peak Current Mechanical UXXV18 S Temperature Cut-off / Sensor UMV12 in 150mm magnet yoke shown PTC 1kΩ / NTC Coil Unit Weight ex. cables W kg 0.330 0.720 3.3 Coil Unit Length ex. cables L mm 260 272 701 Fa N 0 0 0 Motor Attraction Force Magnet Pitch NN τ mm 30 42 57 Cable Mass m kg/m 0.060 0.060 0.09 Cable Type (Power) length 1 m d mm (AWG) 3x 1.6mm (20) 5.5 (18) Cable Type (Sensor) length 1 m d mm (AWG) 4x 0.8mm (26) 5.5 (18) * Depends on environmental conditions in the application. Continuous force noted has been determined with a thermal resistance of 9 K/W for the UMV12 and 10 K/W for ULV9 with a temperature difference between coil and vac. chamber wall of 60°C ** Depends on environmental conditions in the application. Continuous force noted has been determined with a thermal resistance of 0.05 K/W and a mounting surface of 20°C when the motor is driven at max. continuous current ***Actual values depend on bus voltage. Outgassing Information and specifications concerning outgassing of the UXXV, UMV and ULV series are available on request. Since these values depend on materials and environmental conditions, please contact us directly so we can advise you about your specific vacuum application. The knowledge and experience we have gained from designing and implementing custom vacuum motors for large OEMs enable us to provide a fitting solution for any application. ©2016 Tecnotion BV - All rights reserved - The contents of this document are subject to change without prior notice. Suited for pressures down to 10-8 mbar, due to: ■■ ■■ ■■ ■■ Custom stainless steel coil unit housing Special high vacuum cables Low outgassing yoke design Cleanroom manufacturing process Ver. 1.031 Performance Motortype, max voltage ph-ph N All specifications ±10% Parameter Tecnotion | www.tecnotion.com | [email protected] 23.6 40 40 40 40 40 40 40 40 34.95 22.45 4030 105 7.5 30 30 22.45 30 30 80 40 106 4.4 80 106 2680 13 40 34.95 40 259.9 O 5.5 (for M5 DIN 912) 40 40 40 O 9.2 (6 deep) COIL UNIT 5.5 (for M5 DIN 912) O 34.95 34.95 56 56 COIL UNIT COIL UNIT MAGNET YOKE 56 56 56 26 13 O 5.5 (for M5 56 56 56 15 17 56 3.96 118 56 42 272 15 O 9.2 (6 deep MAGNET YOKE For Dowelpin DIN7 O3h8 COIL UNIT (Optional use) 15 max 126 MAGNET YOKE 42 max 126 118 MAGNET YOKE 30 22.45 30 max 150 105 30 UMV Magnet yoke dimensions 272Le (mm) 272 max30150 30 22.45 30 105 30 MAGNET YOKE 7.5 max 126 30 22.45 5MAGNET YOKE 30 Mass (kg/m) max 126 17 MAGNET YOKE 30 150 M4 bolts 7.5 42 30 3.96 42 22.45 30 30 105 30 30 22.45 30 30 118 ©2016 Tecnotion BV - All rights reserved - The contents of this document are subject to change without prior notice. 42 3.96 17 3.96 42 42 118 118 17 17 42 max 42 Magnet yokes can be butted together. 105 30 105 17 3.96 6.7 7.5 30 56 Hole O3 (2x) Hole O3 (2x) For Dowelpin DIN7 O3h8 (Optional use) 42 3.96 7.5 30 7.5 56 17 259.9 Ver. 1.031 O3 (2x) COIL UNIT Hole For Dowelpin DIN7 O3h8 (Optional use) max 150 259.9 O 5.5 (for M5 DIN O 9.2 (6 deep) 272 Hole O3 (2x) For 272 Dowelpin DIN7 O3h8 (Optional use)56 max56126 O 5.5 (for M5 DIN 912) 34.95 42 max 150 15 O 4.5 40O 9.2 (6 40 max 126 deep) MAGNET YOKE 15 31 COIL UNIT MAGNET YOKE max 259.9 150 MAGNET YOKE 56 O 9.2 (6 deep) 105 MAGNET YOKE MAGNET YOKE 80 71 52 40 Magnet yoke Hole O3 (2x) For Dowelpin DIN7 O3h8 (Optional use) 3040259.930 40 30 40 O 7.5 (4 deep) 7.5 COIL40UNIT 40 56 56 O 3.5 Hole O3 (2x) O 3h8 For Dowelpin DIN7 31 (Optional use) O 4.8 (for M4 DIN912) 4.4 4.4 19 11 19 11 For Dowelpin DIN7 O3h8 COIL (Optional UNIT use) Magnet yoke max 150 40 (2x) 56 O 4.5Hole O356 56 For Dowelpin DIN7 O3h8 (Optional use) 56 O 4.5 Hole O3 (2x) Hole O3 (2x) 3h8 yoke For Dowelpin DIN7 O Magnet (Optional use) O 7.5 (4 deep) max 150 Magnet yoke MAGNET YOKE 19 11 259.9 O 7.5 (4 deep) 259.9 40 56 Magnet yoke O 3.5 O 4.8 (for M4 DIN912) O 7.5 (4 deep) COIL UNIT O 7.5 (4 deep) O 4.8 (for M4 DIN912) O 3.5 COIL UNIT MAGNET O 4.8 (for M4YOKE DIN912) Coil unit O 4.8 (for M4 DIN912) 34.95 Coil unit Coil unit 31 Hole O3 (2x) For Dowelpin DIN7 O (Optional use) 26 13 40 23.6 12.35 Power cables 3x O 1.6 Sensor cables 4x O 0.8 4.4 40 12.35 Power cables 3x O O 5.5 (for1.6M5 DIN 912) Sensor cables 4x O 0.8 O 9.2 (6 deep) COIL UNIT 26 13 40 ULV 6.3 6.3 12.35 O 3.5 O 9.2 (6 deep) 23.6 26 13 40 34.95 52 19 11 71 52 40 40 71 COIL UNIT 9.55 Power Cables 3x O 1.6 ULVSensor 12.35 Cables 4x O 0.8 O 5.5 (for M5 DIN 912) 4.4 19 11 O 4.8 (for M4 DIN912) 9.55 O 4.5 12.35 Power cables 3x O 1.6 Sensor cables 4x O 0.8 52 4.4 Magnet yoke 9.55 Power23.6 Cables 3x O 1.6 Sensor Cables 4x O 0.8 Hole O3 (2x) ForCoil Dowelpin DIN7 O3h8 unit 40 use) 40 40 Magnet yoke 40 (Optional O 3.5 9.55 Power Cables 3x O 1.69.55 Sensor Cables 4x O 0.8 O 7.5 (4 deep) COIL UNIT 4.5 4.5 23.6 9.55 Coil unit ULV Hole O3 (2x) For Dowelpin DIN7 O3h8 (Optional use) 4.4 O 7.5 (4 deep) 4.5 71 O 4.8 (for M4 DIN912) 12.35 O 4.5 71 UMV 9.55 Power Cables 3x O 1.6 Sensor Cables 4x O 0.8 52 UMV 31 26 13 4.5 31 6.3 ULV 26 13 19 11 UMV 9.55 Power Cables 3x O 1.6 Sensor Cables 4x O 0.8 9.55 O 3.5 O 3.5 9.55 COIL UNIT 4.5 Coil unit Coil unit 19 11 Mounting instructions and flatness or parallelism requirements can be found in the Ironless installation manual. 3D CAD files can be downloaded from our website. 52 71 23.6 UMV 23.6 ULV 106 UMV 106 Sensor Cables 4x O 0.8 3.96 42 118 UMV ULV UXXV 11 ULV UMV 106 106 80 71 106 31 15 O 4.5 80 106 31 31 O 4.5 40 40 34.95 40 O 5.5 (for M5 DIN 912) 56 COIL UNIT max 56 150 259.9 56 56 17 42 3.96 3.96 56 17 MAGNET YOKE30 30 22.45 30 26 13 40 40 40 34.95 56 56 56 272 max 126 272 max 126 max 126 MAGNET YOKE 30 ULV Magnet yoke dimensions 17 max 126 22.45 30 56 15 MAGNET YOKE 30 56 272 MAGNET YOKE 30 Hole O3 (2x) 56 For Dowelpin56DIN7 O3h8 (Optional use) max 150 30 Hole O3 (2x) For Dowelpin DIN7 O (Optional use) O 9.2 (6 deep) 15 272 15 15 118 30 56 COIL UNIT 56 MAGNET YOKE MAGNET YOKE max 22.45126 O 9.2 (6 deep) COIL UNIT 259.9 56 56 O 5.5 (for M5 DIN 912) 7.5 30 56 118 272 MAGNET YOKE COIL UNIT 42 105 7.5 56 Hole O3 (2x) For Dowelpin DIN7 O3h8 (Optional use) 56Hole O3 (2x) 56 For Dowelpin DIN7 O3h8 42 (Optional use)42 max 150 7.5 Hole O3 (2x) For Dowelpin DIN7 O3h8 (Optional use) 272 40 126O 5.540(for M5 DIN40912) 34.95 max O 9.2 (6 deep) 40 259.9 O 9.2 (6 deep) COIL UNIT MAGNET YOKE Hole O3 (2x) 272For Dowelpin DIN7 O3h8 (Optional use)max 40 126 40 Hole O3 (2x) For Dowelpin DIN7 O3h8 (Optional use) O 5.5 (for M5 DIN 912) O 9.2 (6 deep) Magnet yoke COIL UNIT MAGNET YOKE COIL UNIT MAGNET YOKE 4.4 O 7.5 (4 deep) Magnet yoke Hole O3 (2x) For Dowelpin DIN7 O3h8 Optional use) O 5.5 (for M5 DIN 912) O 4.5 4.4 Magnet yoke O M4 DIN912) 40 40 4.8 (for 40 O 7.5 (4 deep) O 4.5 15 31 Hole O3 (2x) For Dowelpin DIN7 O3h8 (Optional use) O 4.8 (for M4 DIN912) O 7.5 (4 deep) 34.95 56 80 O 4.8 (for M4 DIN912) 56 O 3.5 4.4 19 11 106 COIL UNIT 56 26 13 71 52 O 4.5 80 52 71 26 13 52 4.4 Coil unit 56 4.4 COIL UNIT 56 Coil unitHole56O3 (2x) 56 For Dowelpin DIN7 O3h8 (Optional use) O 3.5 56 COIL UNIT 12.35 Power cables 3x O 1.6 Sensor cables 4x O 0.8 12.35 31 Hole O3 (2x) For Dowelpin DIN7 O3h8 (Optional use) 23.6 O 3.512.35 O 5.512.35 (for M5 DIN 912)Power cables 3x O 1.6 Sensor cables 4x O 0.8 O 9.2 (6 deep) 23.6 19 11 34.95 12.35 Power cables 3x O 1.6 Sensor cables 4x O 0.8 O 9.2 (6 deep) 6.3 Coil unit ULV 11 40 9.55 6.3 Power Cables 3x O 1.6 Sensor Cables 4x O 0.8 O 5.5 (for M5 DIN 12.35912) 12.35 Power cables 3x O 1.6 Sensor cables 4x O 0.8 12.35 6.3 ULV 9.55 Power Cables 3x O 1.6 Sensor Cables 4x O 0.8 4.5 ULV 23.6 26 13 5 Hole O3 (2x) For Dowelpin DIN7 O3h8 (Optional use) 4.5 O 4.5 9.55 9.55 26 13 9 Mounting instructions and flatness or parallelism requirements can be found in the Ironless installation manual. 3D CAD files can be downloaded from our 19website. 4.4 es 3x O 1.6 les 4x O 0.8 O3h8 40 UMV 6.3 ULV 80 26 13 9.55 Power Cables 3x O 1.6 Sensor Cables 4x O 0.8 9.55 Magnet yoke UMV31 4.5 O 3.5 12.35 Power cables 3x O 1.6 Sensor cables 4x O 0.8 12.35 O 4.5 26 13 nit 30 105 42 3.96 42 17 118 Le (mm) 126 M5 bolts 3 42 42 Mass (kg/m) 30 3.96 17 105 42 3.96 42 12.3 118 Magnet yokes can be butted together. 118 17 42 3.96 42 118 Ver. 1.031 17 42 42 ©2016 Tecnotion BV - All rights reserved - The contents of this document are subject to change without prior notice. 3.96 118 UMV ULV UXXV 15 Mounting instructions and flatness or parallelism requirements can be found in the Ironless installation manual. 3D CAD files can be downloaded from our website. UXXV 18 Power cable 8.9 19.95 Sensor cable O 5.5 8.5 105 133.5 19 14 6 19.95 O 6.5 (for M6) 48.8 O 11 (10 deep) Hole O3 For Dowelpin O3h8 (Optional use) COIL UNIT MAGNET YOKE max 456 76 76 76 76 76 76 76 76 40 O 5.5 (2x) 53 23.5 57 57 57 57 57 57 57 701 4.96 446 UXXV 18 Magnet yoke dimensions Le (mm) 456 M6 bolts 8 Mass (kg/m) 26 Ver. 1.031 Magnet yokes can be butted together. ©2016 Tecnotion BV - All rights reserved - The contents of this document are subject to change without prior notice. UMV ULV UXXV Additional products To download our linear motor simulation tool, 3D CAD files, installation manuals, product specifications and more, visit our website at: www.tecnotion.com Torque Tp 1.9..58.3Nm Product Series Tc 1.4..36.3Nm Due to the extensive motor design knowledge within Tecnotion, we have developed a torque motor series that is characterized, among others, by an superior force density, low thermal resistance, low cogging and housed design. The torque series consists of three different outer diameters ranging from 100 via 130 to 160mm for the largest motor and five building Ver. 1.031 heights ranging from 17 mm up to 89 mm. Simulation Tool Custom Linear Motors Iron Core & Ironless Motor Series Analyze your application Motor solutions Tecnotions linear motor series rely on 25 years of linear motor development experience. All motors excel in their force density ratings. They offer continuous force in a range of 36 Newton to 3000 Newton in a surprisingly small package. Save precious time by using our FREE linear Besides the standard catalogue items we offer custom linear motor solutions. Some examples: custom windings, cable confection. Tecnotion can provide linear solutions for most applications which require a strong iron core linear motor or a highly dynamic ironless type linear motor. The tool will provide you with diagrams for ©2016 Tecnotion BV - All rights reserved - The contents of this document are subject to change without prior notice. motor simulation tool. Our specialized software helps you find the best motor for the application and generate reports within seconds, without having to make time consuming calculations by hand. position, velocity, acceleration, jerk, force, power, voltage, current, temperature, force vs. velocity and more. Besides this Tecnotion offers moving magnet motors and linear actuators, completely designed toward needs. For more information please contact Tecnotion. T his b ro chure is of fe re d to yo u by : Tecnotion Headquarters Twentepoort West 15 7609 RD Almelo The Netherlands Tecnotion GmbH Elsenheimerstraße 59 80687 München Deutschland Tecnotion Poland Ul. Ryżowa 49 02-495 Warszawa Poland Tecnotion Rep. of Korea 811 Ace Pyeong Chon Tower 883 Gwanyang 2-Dong Dongan-gu Anyang-si Gyeonggi-do South Korea Tecnotion USA 228 East 45th Street New York USA Tel. +31 (0)546 536 300 Fax +31 (0)546 536 380 [email protected] Tel. +49 89 381537-400 Fax +49 89 381537-409 [email protected] Tel. +48 606 544 046 [email protected] Tel. +82 (0)2 830 1832 [email protected] Tel.+01 (631) 983-2833 [email protected]