Download Ironless vacuum linear motor series

Ver. 1.031
Ironless vacuum linear motor series
QUALITY AND
SERVICE
DELIVERED WORLDWIDE
[ TECNOTION ]
Tecnotion is the global authority on direct drive motor technology. We are the world’s only unbundled
manufacturer of linear and torque motors. A former part of Philips, we specialize solely in the development
and production of linear and torque motors. Because of this, our expertise, customer service and product
quality are unmatched.
We have a global presence, with production plants in The Netherlands and China and local representation
around the world. This ensures short delivery times and high quality support, wherever you are located.
When you do business with Tecnotion, you have a team of highly skilled sales and application engineers at
your disposal. They help you from your initial prototype all the way to the application of our products and
beyond.
Ver. 1.031
Whatever your needs, you can rely on Tecnotion as a solid, reliable partner.
Ironless vacuum motor series
1
Vacuum Technology
3
1
T L 06 S
U MV 12 N
2
4
T = Iron Core
U = Ironless
2
3
4
Series type/vacuum
Number of coils
Winding type
Vacuum technology
A growing amount of high tech
applications require vacuum solutions
to minimize the chance of unwanted
chemical reactions or pollution of the
process or surrounding equipment.
Vacuum applications may be: Positioning stages & gantries, inspection,
scribing, encapsulation , lithography, deposition processes, sputtering & E-beam.
Motion is one of the main challenges
within a vacuum environment.
Serviceability, reliability, versatility
and outgassing are critical factors in a
vacuum application and failure of one
of them could mean long downtimes.
Total cost of ownership should be
considered over the initial investment.
Maintenance costs of motion systems
in vacuum are potentially high. Linear
vacuum rated motors have no moving
parts and are frictionless making the
motors maintenance free. Additionally
Tecnotion’s linear motors can be
placed into vacuum as a whole and
therefore do not require a feed trough
saving costs.
High outgassing of the motion
system can influence the production
process. Tecnotion´s vacuum rated
ironless linear motor is a dedicated
and specially designed coil unit
and magnet yoke for use in high
vacuum, down to 10-8 , and the lowest
achievable outgassing for a series
product.
UXXV Series
Fp 4020N
Fc 666N
The UXXV coil is the most
powerful and efficient coil in the
vacuum rated linear motor series.
The UXXV series is ideal for heavy
duty applications that demand
ultra precision and maximum
force output. It’s efficiency and
high motor constant allow
for a low heat output while
generating a high force.
©2016 Tecnotion BV - All rights reserved - The contents of this document are subject to change without prior notice.
ULV Series
Fp 720N
Fc 150N
The ULV coils are the high end
coils in the vacuum rated linear
motor series. The ULV series is
commonly used for applications
demanding peak force or low
heat output. In longer strokes
ULV coils can be combined to
save magnet material but still
achieve high performance.
UMV Series
Fp 400N
Fc 80N
The UMV coils are the smallest
coils in the vacuum rated linear
motor series.
This serie is ideal for postioning,
e.g. in gantries, or high dynamic,
light weight applications which
require extreme accuracy.
Ver. 1.031
Tecnotion is the specialist for vacuum
linear motors. Many years of experience is used in designing and
building vacuum coils and magnets.
Tecnotion can supply a vacuum linear
motor that can match even the strictest
vacuum requirements but can also
provide vacuum products for smaller
budgets.
Ironless vacuum motor series
Features
Capabilities
Coil unit and yoke are completely
vacuum compatible
Minimum pressure down to 10-8 mBar
Typical total outgassing of 10-5 mBar*l/s
Typical CxHx outgassing of 10-8 mBar*l/s
Connection and sensors
The coil units are equipped with a temperature
measurement and cut-off sensor to enable
monitoring and overheat protection of the
coil unit at all times. The sensors and three
phases of the coil unit are connected through
vacuum compatible cables. These are the only
necessary connection to the outside world.
Design
The ironless vacuum rated motors have
a unique metal housing that is sealed
to prevent outgassing into the vacuum
and make the coil high-vacuum resistant.
Despite this housing the coil is still light
weight which allows for high dynamics.
Ver. 1.031
Cleanliness
All of Tecnotion’s vacuum products are
produced inside our own cleanroom in The
Netherlands. Before shipping the products
are treated and cleaned to reduce initial
outgassing after which they are cleanroom
packed to prevent any contamination
during shipping and installation at the same
time.
Thermal
Thermal management is one of the main challenges in vacuum.
Therefore the coil units have been designed to achieve a low
thermal resistance (Rth) to enable the coil unit to quickly conduct
heat away from the coil.
Equal to the standard linear motors, the vacuum linear motors
have a high efficiency. This means a lower coil temperature and
therefore a higher continuous force.
MOUNTING / APPLICATION EXAMPLES
WHY CHOOSE FOR IRONLESS
VACUUM RATED?
■■ Defined low outgassing
■■ No particulation
Moving coil application
Stationary coil application
The moving coil application is ideal for dynamic
applications or low masses. Multiple coils can be
placed on one magnet track to move individually
or work together
A stationary coil application can be used in less
dynamic applications.
The stationary coil, mounted on a solid coil mount
enhances passive cooling through conduction
significantly.
■■ Low thermal resistance
■■ High cleanliness
■■ No large cable feed-through required
■■ Can be positioned anywhere in the
vacuum chamber
VACUUM
vacuum chamber wall
Slide
vacuum chamber wall
APPLICATIONS
VACUUM
Positioning stage & gantry
Inspection
Scriber
Lithography
Slide
Encapsulation
Deposition processes
E-beam
©2016 Tecnotion BV - All rights reserved - The contents of this document are subject to change without prior notice.
Ver. 1.031
Sputtering
Vacuum Ironless Series
Remarks
Symbol
Unit
Winding type
UMV12
N
ULV9
S
Peak Force @ 20°C/s
Electrical
3-phase synchronous Ironless, 300Vdc
Fp
N
400
720
4020
Continuous Force passive cooled*
coils @ 110°C
Fc
N
20
45
168
Continuous Force active cooled**
coils @ 110°C
Fc
@ 300 V
vmax
m/s
10
16
5
12
2.7
Motor Force Constant
coils @ 20°C
K
N/Arms
36.3
19.9
68
27.5
117.5
Motor Constant
coils @ 25°C
S
N2/W
magnet @ 25°C
Ip
Arms
11.0
20.0
10.6
26
34.2
Max. Cont. Current passive cooled*
coils @ 110°C
Ic
Arms
0.55
1.0
0.66
1.63
1.4
Max.Cont. Current active cooled**
coils @ 110°C
Ic
Arms
2.2
4.0
2.2
5.5
5.7
Bemf
Vdc / m/s
30
16
55.5
25.5
96
Rf
Ω
4.6
1.4
5.3
0.85
2.6
1.5
0.4
4.2
0.7
3.6
Maximum Speed***
Back EMF Phase-Phase
Resistance per Phase
Induction per Phase
coils @ 25°C ex. cable
80
150
95
666
290
1742
I < 0.6 Ip
Lf
mH
coils @ 25°C
τe
ms
0.3
0.8
1.4
all coils
Pc
W
91
105
341
Thermal Resistance
coils to mount. sfc.
Rth
°C/W
0.6
1.0
0.24
Thermal Time Constant*
to max. coil temp.
τ th
s
48
180
216
Electrical Time Constant
Maximum Continuous Power Loss
Thermal
N
magnet @ 25°C
Peak Current
Mechanical
UXXV18
S
Temperature Cut-off / Sensor
UMV12 in 150mm magnet yoke shown
PTC 1kΩ / NTC
Coil Unit Weight
ex. cables
W
kg
0.330
0.720
3.3
Coil Unit Length
ex. cables
L
mm
260
272
701
Fa
N
0
0
0
Motor Attraction Force
Magnet Pitch NN
τ
mm
30
42
57
Cable Mass
m
kg/m
0.060
0.060
0.09
Cable Type (Power)
length 1 m
d
mm (AWG)
3x 1.6mm (20)
5.5 (18)
Cable Type (Sensor)
length 1 m
d
mm (AWG)
4x 0.8mm (26)
5.5 (18)
* Depends on environmental conditions in the application. Continuous force noted has been determined with a thermal resistance of 9 K/W for the UMV12 and 10 K/W for ULV9 with a temperature difference between coil and vac. chamber wall of 60°C
** Depends on environmental conditions in the application. Continuous force noted has been determined with a thermal resistance of 0.05 K/W and a mounting surface of 20°C when the motor is driven at max. continuous current
***Actual values depend on bus voltage.
Outgassing
Information and specifications concerning outgassing of the UXXV, UMV and ULV series are available on request. Since these values depend on materials and environmental
conditions, please contact us directly so we can advise you about your specific vacuum application. The knowledge and experience we have gained from designing and
implementing custom vacuum motors for large OEMs enable us to provide a fitting solution for any application.
©2016 Tecnotion BV - All rights reserved - The contents of this document are subject to change without prior notice.
Suited for pressures down to 10-8 mbar, due to:
■■
■■
■■
■■
Custom stainless steel coil unit housing
Special high vacuum cables
Low outgassing yoke design
Cleanroom manufacturing process
Ver. 1.031
Performance
Motortype, max voltage ph-ph
N
All specifications ±10%
Parameter
Tecnotion | www.tecnotion.com | [email protected]
23.6
40
40
40
40
40
40
40
40
34.95
22.45
4030
105
7.5
30
30
22.45
30
30
80
40
106
4.4
80
106
2680
13
40
34.95
40
259.9
O 5.5 (for M5 DIN 912)
40
40
40
O 9.2 (6 deep)
COIL UNIT
5.5 (for M5 DIN 912)
O 34.95
34.95
56
56
COIL UNIT
COIL UNIT
MAGNET YOKE
56
56
56
26
13
O 5.5 (for M5
56
56
56
15
17
56
3.96
118
56
42
272
15
O 9.2 (6 deep
MAGNET YOKE
For Dowelpin DIN7 O3h8
COIL
UNIT
(Optional
use)
15
max 126
MAGNET YOKE
42
max 126
118
MAGNET YOKE
30
22.45
30
max 150
105
30
UMV Magnet yoke dimensions
272Le (mm)
272
max30150
30
22.45
30
105
30
MAGNET YOKE
7.5
max 126
30
22.45
5MAGNET YOKE
30
Mass (kg/m)
max 126
17
MAGNET YOKE
30
150
M4 bolts
7.5
42
30
3.96
42
22.45
30
30
105
30
30
22.45
30
30
118
©2016 Tecnotion BV - All rights reserved - The contents of this document are subject to change without prior notice.
42
3.96
17
3.96
42
42
118
118
17
17
42
max
42
Magnet yokes can be butted together.
105
30
105
17
3.96
6.7
7.5
30
56
Hole O3 (2x)
Hole O3 (2x)
For Dowelpin DIN7 O3h8
(Optional use)
42
3.96
7.5
30
7.5
56
17
259.9
Ver. 1.031
O3 (2x)
COIL UNIT Hole
For Dowelpin DIN7 O3h8
(Optional use)
max 150
259.9
O 5.5 (for M5 DIN
O 9.2 (6 deep)
272
Hole O3 (2x)
For 272
Dowelpin DIN7 O3h8
(Optional use)56
max56126
O 5.5 (for M5 DIN 912)
34.95
42
max 150
15
O 4.5
40O 9.2 (6 40
max 126
deep)
MAGNET YOKE
15
31
COIL UNIT
MAGNET YOKE
max 259.9
150
MAGNET YOKE
56
O 9.2 (6 deep)
105
MAGNET YOKE
MAGNET YOKE
80
71
52
40
Magnet yoke
Hole O3 (2x)
For Dowelpin DIN7 O3h8
(Optional use)
3040259.930 40 30
40
O 7.5 (4 deep)
7.5
COIL40UNIT 40
56
56
O 3.5
Hole O3 (2x)
O
3h8
For
Dowelpin
DIN7
31
(Optional use)
O 4.8 (for M4 DIN912)
4.4
4.4
19
11
19
11
For Dowelpin DIN7 O3h8
COIL
(Optional UNIT
use)
Magnet yoke
max 150
40
(2x)
56 O 4.5Hole O356
56
For Dowelpin DIN7 O3h8
(Optional use)
56
O 4.5
Hole O3 (2x)
Hole O3 (2x)
3h8 yoke
For Dowelpin DIN7 O
Magnet
(Optional use)
O 7.5 (4 deep)
max 150
Magnet yoke
MAGNET YOKE
19
11
259.9
O 7.5 (4 deep)
259.9
40
56
Magnet yoke
O 3.5
O 4.8 (for M4 DIN912)
O 7.5 (4 deep)
COIL UNIT
O 7.5 (4 deep)
O 4.8 (for
M4 DIN912)
O 3.5
COIL UNIT
MAGNET
O 4.8 (for M4YOKE
DIN912)
Coil unit
O 4.8 (for M4 DIN912)
34.95
Coil unit
Coil unit
31
Hole O3 (2x)
For Dowelpin DIN7 O
(Optional use)
26
13
40
23.6
12.35
Power cables 3x O 1.6
Sensor cables 4x O 0.8
4.4
40
12.35
Power cables
3x O
O 5.5
(for1.6M5 DIN 912)
Sensor cables 4x O 0.8
O 9.2 (6 deep)
COIL UNIT
26
13
40
ULV
6.3
6.3
12.35
O 3.5
O 9.2 (6 deep)
23.6
26
13
40
34.95
52
19
11
71
52
40
40
71
COIL UNIT
9.55
Power Cables 3x O 1.6
ULVSensor
12.35
Cables 4x O 0.8
O 5.5 (for M5 DIN 912)
4.4
19
11
O 4.8 (for M4 DIN912)
9.55
O 4.5
12.35
Power cables 3x O 1.6
Sensor cables 4x O 0.8
52
4.4
Magnet yoke
9.55
Power23.6
Cables 3x O 1.6
Sensor Cables 4x O 0.8
Hole O3 (2x)
ForCoil
Dowelpin
DIN7 O3h8
unit
40 use)
40
40
Magnet yoke 40 (Optional
O 3.5
9.55
Power Cables 3x O 1.69.55
Sensor Cables 4x O 0.8
O 7.5 (4 deep)
COIL UNIT
4.5
4.5
23.6
9.55
Coil unit
ULV
Hole O3 (2x)
For Dowelpin DIN7 O3h8
(Optional use)
4.4
O 7.5 (4 deep)
4.5
71
O 4.8 (for M4 DIN912)
12.35
O 4.5
71
UMV
9.55
Power Cables 3x O 1.6
Sensor Cables 4x O 0.8
52
UMV
31
26
13
4.5
31
6.3
ULV
26
13
19
11
UMV
9.55
Power Cables 3x O 1.6
Sensor Cables 4x O 0.8
9.55
O 3.5
O 3.5 9.55
COIL UNIT
4.5
Coil unit
Coil unit
19
11
Mounting instructions and flatness or parallelism requirements
can be found in the Ironless installation manual. 3D CAD files
can be downloaded from our website.
52
71
23.6
UMV 23.6
ULV
106
UMV
106
Sensor Cables 4x O 0.8
3.96
42
118
UMV
ULV
UXXV
11
ULV
UMV
106
106
80
71
106
31
15
O 4.5
80
106
31
31
O 4.5
40
40
34.95
40
O 5.5 (for M5 DIN 912)
56
COIL UNIT
max
56 150
259.9
56
56 17
42
3.96
3.96
56
17
MAGNET YOKE30
30
22.45
30
26
13
40
40
40
34.95
56
56
56
272
max 126
272
max 126
max 126
MAGNET YOKE
30
ULV Magnet yoke dimensions
17
max 126
22.45
30
56
15
MAGNET YOKE
30
56
272
MAGNET YOKE
30
Hole O3 (2x)
56 For Dowelpin56DIN7 O3h8
(Optional use)
max 150
30
Hole O3 (2x)
For Dowelpin DIN7 O
(Optional use)
O 9.2 (6 deep)
15
272
15
15
118
30
56
COIL UNIT
56
MAGNET YOKE
MAGNET YOKE
max
22.45126
O 9.2 (6 deep)
COIL UNIT
259.9
56
56
O 5.5 (for M5 DIN 912)
7.5
30
56
118
272
MAGNET YOKE
COIL UNIT
42
105
7.5
56
Hole O3 (2x)
For Dowelpin DIN7 O3h8
(Optional use)
56Hole O3 (2x) 56
For Dowelpin DIN7 O3h8
42
(Optional
use)42
max 150
7.5
Hole O3 (2x)
For Dowelpin DIN7 O3h8
(Optional use)
272
40 126O 5.540(for M5 DIN40912) 34.95
max
O 9.2 (6 deep)
40
259.9
O 9.2 (6 deep)
COIL UNIT
MAGNET
YOKE
Hole O3 (2x)
272For Dowelpin DIN7 O3h8
(Optional use)max
40 126
40
Hole O3 (2x)
For Dowelpin DIN7 O3h8
(Optional use)
O 5.5 (for M5 DIN 912)
O 9.2 (6 deep)
Magnet yoke
COIL UNIT
MAGNET
YOKE
COIL UNIT MAGNET YOKE
4.4
O 7.5 (4 deep)
Magnet yoke
Hole O3 (2x)
For Dowelpin DIN7 O3h8
Optional use)
O 5.5 (for M5 DIN 912)
O 4.5
4.4
Magnet yoke
O
M4 DIN912) 40
40 4.8 (for 40
O 7.5 (4 deep)
O 4.5
15
31
Hole O3 (2x)
For Dowelpin DIN7 O3h8
(Optional use) O 4.8 (for M4 DIN912)
O 7.5 (4 deep)
34.95
56
80
O 4.8 (for M4 DIN912)
56
O 3.5
4.4
19
11
106
COIL UNIT
56
26
13
71
52
O 4.5
80
52
71
26
13
52
4.4
Coil unit
56
4.4
COIL UNIT
56 Coil unitHole56O3 (2x)
56
For Dowelpin DIN7 O3h8
(Optional use) O 3.5
56
COIL UNIT
12.35
Power cables 3x O 1.6
Sensor cables 4x O 0.8
12.35
31
Hole O3 (2x)
For Dowelpin DIN7 O3h8
(Optional use)
23.6
O 3.512.35
O 5.512.35
(for M5 DIN 912)Power cables 3x O 1.6
Sensor cables 4x O 0.8
O 9.2 (6 deep)
23.6
19
11
34.95
12.35
Power cables 3x O 1.6
Sensor cables 4x O 0.8
O 9.2 (6 deep)
6.3
Coil unit
ULV
11
40
9.55
6.3
Power Cables 3x O 1.6
Sensor Cables 4x O 0.8
O 5.5 (for M5 DIN
12.35912)
12.35
Power cables 3x O 1.6
Sensor cables 4x O 0.8
12.35
6.3
ULV
9.55
Power Cables 3x O 1.6
Sensor Cables 4x O 0.8
4.5
ULV
23.6
26
13
5
Hole O3 (2x)
For Dowelpin DIN7 O3h8
(Optional use)
4.5
O 4.5
9.55
9.55
26
13
9
Mounting instructions and flatness or parallelism requirements
can be found in the Ironless installation manual. 3D CAD files
can be downloaded from our 19website.
4.4
es 3x O 1.6
les
4x O 0.8
O3h8
40
UMV
6.3
ULV
80
26
13
9.55
Power Cables 3x O 1.6
Sensor Cables 4x O 0.8
9.55
Magnet yoke
UMV31
4.5
O 3.5
12.35
Power cables 3x O 1.6
Sensor cables 4x O 0.8
12.35
O 4.5
26
13
nit
30
105
42
3.96
42
17
118
Le (mm)
126
M5 bolts
3
42
42
Mass (kg/m)
30
3.96
17
105
42
3.96
42
12.3
118
Magnet yokes can be butted together.
118
17
42
3.96
42
118
Ver. 1.031
17
42
42
©2016 Tecnotion BV - All rights reserved - The contents of this document are subject to change without prior notice.
3.96
118
UMV
ULV
UXXV
15
Mounting instructions and flatness or parallelism requirements
can be found in the Ironless installation manual. 3D CAD files
can be downloaded from our website.
UXXV 18
Power cable
8.9
19.95
Sensor cable
O 5.5
8.5
105
133.5
19
14
6
19.95
O 6.5 (for M6)
48.8
O 11 (10 deep)
Hole O3
For Dowelpin O3h8
(Optional use)
COIL UNIT
MAGNET YOKE
max 456
76
76
76
76
76
76
76
76
40
O 5.5 (2x)
53
23.5
57
57
57
57
57
57
57
701
4.96
446
UXXV 18 Magnet yoke dimensions
Le (mm)
456
M6 bolts
8
Mass (kg/m)
26
Ver. 1.031
Magnet yokes can be butted together.
©2016 Tecnotion BV - All rights reserved - The contents of this document are subject to change without prior notice.
UMV
ULV
UXXV
Additional products
To download our linear motor simulation tool, 3D CAD
files, installation manuals, product specifications and
more, visit our website at:
www.tecnotion.com
Torque
Tp 1.9..58.3Nm
Product Series
Tc 1.4..36.3Nm
Due to the extensive motor design knowledge
within Tecnotion, we have developed a torque
motor series that is characterized, among
others, by an superior force density, low thermal
resistance, low cogging and housed design.
The torque series consists of three different
outer diameters ranging from 100 via 130 to
160mm for the largest motor and five building
Ver. 1.031
heights ranging from 17 mm up to 89 mm.
Simulation Tool
Custom Linear Motors
Iron Core & Ironless Motor Series
Analyze your application
Motor solutions
Tecnotions linear motor series rely on 25 years
of linear motor development experience. All
motors excel in their force density ratings.
They offer continuous force in a range of
36 Newton to 3000 Newton in a surprisingly
small package.
Save precious time by using our FREE linear
Besides the standard catalogue items we offer
custom linear motor solutions. Some examples:
custom windings, cable confection.
Tecnotion can provide linear solutions for most
applications which require a strong iron core
linear motor or a highly dynamic ironless type
linear motor.
The tool will provide you with diagrams for
©2016 Tecnotion BV - All rights reserved - The contents of this document are subject to change without prior notice.
motor simulation tool. Our specialized
software helps you find the best motor for
the application and generate reports within
seconds, without having to make time
consuming calculations by hand.
position, velocity, acceleration, jerk, force,
power, voltage, current, temperature, force vs.
velocity and more.
Besides this Tecnotion offers moving magnet
motors and linear actuators, completely
designed toward needs. For more information
please contact Tecnotion.
T his b ro chure is of fe re d to yo u by :
Tecnotion Headquarters
Twentepoort West 15
7609 RD Almelo
The Netherlands
Tecnotion GmbH
Elsenheimerstraße 59
80687 München
Deutschland
Tecnotion Poland
Ul. Ryżowa 49
02-495 Warszawa
Poland
Tecnotion Rep. of Korea
811 Ace Pyeong Chon Tower
883 Gwanyang 2-Dong
Dongan-gu Anyang-si
Gyeonggi-do South Korea
Tecnotion USA
228 East 45th Street
New York
USA
Tel. +31 (0)546 536 300
Fax +31 (0)546 536 380
[email protected]
Tel. +49 89 381537-400
Fax +49 89 381537-409
[email protected]
Tel. +48 606 544 046
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Tel. +82 (0)2 830 1832
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Tel.+01 (631) 983-2833
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