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Design and Implementation of VLSI Systems
(EN1600)
Lecture08
Prof. Sherief Reda
Division of Engineering, Brown University
Spring 2008
[sources: Weste/Addison Wesley – Rabaey/Pearson]
Summary of Shockley model
polysilicon
gate
W
tox
n+
L
n+
SiO2 gate oxide
(good insulator, ox = 3.9)
p-type body


0


V
I ds    Vgs  Vt  ds
2
 
2


V

V
 gs t 

2
for nMOS
Vgs  Vt
cutoff
V V  V
 ds
ds
dsat

Vds  Vdsat
linear
saturation
for pMOS
Ideal vs. non-ideal
ideal
Non-ideal
 Saturation current does not increase quadratically with Vgs
 Saturation current lightly increases with increase in Vds
Ideal vs. non-ideal
 There is leakage current when the transistor is in cut off
 Ids depends on the temperature
At high electric field, drift velocity rolls
of due to carrier scattering
u n (m /s )
Velocity saturation
usat= 105
Constant velocity
Constant mobility (slope = µ)
xc = 1.5
Empirically:
x
(V/µm)
Alpha model
 0

V

I ds   I dsat ds
Vdsat


 I dsat
Vgs  Vt
cutoff
Vds  Vdsat
linear
Vds  Vdsat
saturation
I dsat  Pc

V

2
gs
 Vt 

Vdsat  Pv Vgs  Vt 
 /2
Pc, Pv and alpha are found by fitting the model to the empirical
modeling results
Channel length modulation
GND
Source
• The reverse-bias p-n junction between drain
and body forms a depletion region with a width
Ld that increases with Vdb
• Increasing Vds
 increases depletion width
 decreases effective channel length
 increases current
Channel length
modulation factor
(empirical factor)
VDD
Gate
VDD
Drain
Depletion Region
Width: Ld
n+
L
Leff
n+
p GND
bulk Si
Leakage current: subthreshold
Tunnel current
polysilicon
gate
W
t ox
L
n+
n+
p-type body
Subthreshold conduction
Junction leakage
 Subthreshold leakage is
the biggest source in
modern transistors
Vgs Vt
I ds  I ds 0e
nvT
I ds 0   vT2 e1.8
Vds

v
 1  e T

n = 1.4-15



180nm process
Leakage current: junction leakage and
tunneling
Junction leakage: reverse-biased p-n junctions have
 VvD

T
some leakage.
I D  I S  e  1


Is depends on doping levels and area and perimeter


of diffusion regions
p+
n+
n+
p+
p+
n+
n w ell
p substrate
10 9
10 6
0.6 nm
0.8 nm
2
JG (A/cm )
Tunneling leakage:
 Carriers may tunnel thorough very thin gate oxides
 Negligible for older processes
(and future processes with high-k dielectrics!)
tox
VDD trend
10 3
1.0 nm
1.2 nm
10 0
1.5 nm
1.9 nm
10 -3
10 -6
10 -9
0
0.3
0.6
0.9
VDD
1.2
1.5
1.8
Impact of temperature
• Increases in temperature increases leakage current
• Increases in temperature decreases leakage current
Body effect
 Vt is sensitive to Vsb -> body effect
Vt  Vt 0  
s  2vT ln

tox
 ox

s  Vsb  s

NA
ni
2q si N A 
2q si N A
Cox
• What is the impact on Vt if we increase/decrease the body bias?
Process variations
Both MOSFETs have 30nm channel with 130
dopant atoms in the channel depletion region
threshold voltage 0.97V
threshold voltage 0.57V
Process variations impact gate length, threshold
voltage, and oxide thickness
Summary




Ideal transistor characteristics
Non-ideal transistor characteristics
Inverter DC transfer characteristics
Simulation with SPICE and integration with L-Edit