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Design and Implementation of VLSI Systems (EN1600) Lecture08 Prof. Sherief Reda Division of Engineering, Brown University Spring 2008 [sources: Weste/Addison Wesley – Rabaey/Pearson] Summary of Shockley model polysilicon gate W tox n+ L n+ SiO2 gate oxide (good insulator, ox = 3.9) p-type body 0 V I ds Vgs Vt ds 2 2 V V gs t 2 for nMOS Vgs Vt cutoff V V V ds ds dsat Vds Vdsat linear saturation for pMOS Ideal vs. non-ideal ideal Non-ideal Saturation current does not increase quadratically with Vgs Saturation current lightly increases with increase in Vds Ideal vs. non-ideal There is leakage current when the transistor is in cut off Ids depends on the temperature At high electric field, drift velocity rolls of due to carrier scattering u n (m /s ) Velocity saturation usat= 105 Constant velocity Constant mobility (slope = µ) xc = 1.5 Empirically: x (V/µm) Alpha model 0 V I ds I dsat ds Vdsat I dsat Vgs Vt cutoff Vds Vdsat linear Vds Vdsat saturation I dsat Pc V 2 gs Vt Vdsat Pv Vgs Vt /2 Pc, Pv and alpha are found by fitting the model to the empirical modeling results Channel length modulation GND Source • The reverse-bias p-n junction between drain and body forms a depletion region with a width Ld that increases with Vdb • Increasing Vds increases depletion width decreases effective channel length increases current Channel length modulation factor (empirical factor) VDD Gate VDD Drain Depletion Region Width: Ld n+ L Leff n+ p GND bulk Si Leakage current: subthreshold Tunnel current polysilicon gate W t ox L n+ n+ p-type body Subthreshold conduction Junction leakage Subthreshold leakage is the biggest source in modern transistors Vgs Vt I ds I ds 0e nvT I ds 0 vT2 e1.8 Vds v 1 e T n = 1.4-15 180nm process Leakage current: junction leakage and tunneling Junction leakage: reverse-biased p-n junctions have VvD T some leakage. I D I S e 1 Is depends on doping levels and area and perimeter of diffusion regions p+ n+ n+ p+ p+ n+ n w ell p substrate 10 9 10 6 0.6 nm 0.8 nm 2 JG (A/cm ) Tunneling leakage: Carriers may tunnel thorough very thin gate oxides Negligible for older processes (and future processes with high-k dielectrics!) tox VDD trend 10 3 1.0 nm 1.2 nm 10 0 1.5 nm 1.9 nm 10 -3 10 -6 10 -9 0 0.3 0.6 0.9 VDD 1.2 1.5 1.8 Impact of temperature • Increases in temperature increases leakage current • Increases in temperature decreases leakage current Body effect Vt is sensitive to Vsb -> body effect Vt Vt 0 s 2vT ln tox ox s Vsb s NA ni 2q si N A 2q si N A Cox • What is the impact on Vt if we increase/decrease the body bias? Process variations Both MOSFETs have 30nm channel with 130 dopant atoms in the channel depletion region threshold voltage 0.97V threshold voltage 0.57V Process variations impact gate length, threshold voltage, and oxide thickness Summary Ideal transistor characteristics Non-ideal transistor characteristics Inverter DC transfer characteristics Simulation with SPICE and integration with L-Edit