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Proposal Title
Selected MEMS reliability issues supported by optical measurement methods
Proposals Acronym
MRIOM
Thematic Priority: nanosciences_nanotechnologies_materials_and_new_production_technologies
Sub-thematic Priority: materials
Proposal Abstract
MEMS technology is evolving rapidly with the introduction of new processes, materials, and structural
geometries. Because the field of commercial MEMS is still in its infancy, reliability is an important
issue which still requires advanced research. Reliability directly influences the acceptance,
competitivity and reputation of a technology. Reliability is a fundamental argument of cost which
influences warranty policy and quality of product. Many promising MEMS applications are to be found
in safety critical systems and in harsh environments, where the cost of failure might be catastrophic.
The qualification/certification requirements are stringent and expensive to satisfy. For this reason,
there is a great need for testability techniques of MEMS components and products, operating during
their production and their long-term characterisation with respect to material and micromechanical
characteristics. The project aim to the development of measurement and data analysis procedures,
the proposition of novel optical instrumentation in experimental measurement for reliability, the
development of hybrid numerical-experimental methodologies to increase the understanding of
performance, and to support modelling of failure modes.
Proposal Description
As MEMS become more commercially feasible, reliability studies and predictions will become crucial
for its success. In addition, MEMS devices are susceptible to new failure modes and reliability
problems due to their mechanical parts, electrical free surfaces, and environmental contact. The main
thrust in reliability work is identifying failure modes and mechanisms. We strive to determine the cause
of each failure mode and to gain a fundamental understanding of that mechanism. The development
of predictive models follows from this science-based understanding.
Proposal Objectives
The development of optimised, unified measurement and data analysis procedures to assure
improved reliability testing, the development of optical instrumentation to cover the gaps in
experimental measurement capabilities for reliability, the development of hybrid numericalexperimental methodologies for MEMS actuators to increase the understanding of the actual
performance, and to support proper modeling of failure modes.
Proposed Method
Experimental approach by use of active full-field interferometer to measuring displacement field during
long term reliability tests will be connected with development of hybrid experimental-numerical
procedure supporting understanding of MEMS performance at different stages of its reliability tests.
Proposal Added Value
The knowledge about mechanics and materials at the microscopic level is still not efficient. The project
will answer for the need for understanding the physical phenomena and failure of MEMS which are
complicated by several factors, including processing of multiple materials, high stresses, thermal
mismatch, interfaces in the system and the interaction of the system with the local environment.
Proposal Impact
Reliability is a key for a transition from proof-of-concept to commercial viability of MEMS product. The
use of optical methods in reliability study promise development of methodology, testing systems and
will drawn recommendations for commercial activities with specific accent on small and medium sized
enterprises.
Role: partner
Research Group Resources Description
33 employees are working in IMiF: a key staff of 6 professors, a supporting staff of 11 administrative
staff, technicians and laboratory assistants and 16 project bounded scientists. IMiF owns modern, well
equipped laboratories including interferometric and holographic laboratory, optical methods of testing
in experimental mechanics laboratory, MEMS/MOEMS characterisation laboratory, microtribology
laboratory, spectroscopic laboratory, optical sensors laboratory, 3D (x,y,z,R,G,B) and 4D (x,y,z;t)
shape and movement measurement laboratory. Also the clean room and optical workshop specializing
in optical elements and systems prototyping and exotic material processing are avaliable.