Download MCC 924 - NIT Arunachal Pradesh

NATIONAL INSTITUTE OF TECHNOLOGY, ARUNACHAL PRADESH
(Established by Ministry of Human Resources Development, Govt. Of India)
Yupia, District Papum Pare, Arunachal Pradesh – 791112
Fax: 0360 – 2284927, E-mail: [email protected]
Course Plan for B. tech (Electronics & Communication Engineering)
Exercises Proposed for teaching in (Jan – May, 2016 Semester)
1. Name of the Teacher : Santanu Maity
2. Department
: ECE
3. Course Title
: RF & MEMS
4. Course code
: MCC 924
1. Course Hands out (in reference to framed & approved syllabus) (maximum 500
words)
Sl.
No.
1
2
3
4
Contents
Introduction: Micro sensors and MEMS, Evolution of Micro
sensors & MEMS, Micro sensors & MEMS applications, Bulk
Micromachining: wet etch-based, dissolved wafer process, SOI
MEMS, Scream, Hexsil MEMS, sealed cavity deep RIE,
Process Integration: interleaved, MEMS-first, MEMS-last,
bonded integration, wafer-to-wafer transfer, fluidic assembly.
Mechanics of Materials for MEMS: stress, strain, material
properties, measurement & characterization of mechanical
parameter. Microstructural Elements: bending moment and
strain, flexural rigidity, residual stress, boundary conditions,
spring combinations.
Energy Methods I: application to clamped-clamped beam under
axial load. Energy Methods II: resonance frequency
determination, free-free beam, disk, ring, lumped-element
mechanical equivalent circuits
Phase-locked loops, low voltage frequency synthesizers, printed
circuit board design for RF applications. Antennas and signal
propagation, design of an on-chip antenna.RF filters,
oversampling (Sigma Delta) A/D converters, impact of
substrate noise and other mixed-signal IC issues.RF/Analog
integrated circuit design based on high frequency BiCMOS
technology.
2. Books/Literature to be followed:
(a) Books (Min. 2 texts + 3 references)
Hour
10
10
8
12
(i)
Title
MEMS and Microsystems: design and Manufacture
Author
Tai-ran Su
Publisher
Tata McGraw Hill
Edition
3rd
(ii)
Title
Micromachined Transducers Sourcebook
Author
Gregory T. A. Kovacs
Publisher
WGB/McGraw-Hill,2000
Edition
2nd
(iii)
Title
Fundamentals of Microfabrication
Author
M. Madou
Publisher
CRC Press, 2002
Edition
3rd
(iv)
Title
Silicon micromachining
Author
M. Elwenspoek & H. Jansen
Publisher
Cambridge, 1998
Edition
2nd
(v)
Title
Microsystem Design
Author
S. Senturia
Publisher
Kluwer Academic Publishers, 2001
Edition
2nd
(b) Magazines/Journals (Minimum 5)
1. IEEE Magazine for Consumer Electronics
2. I-Micronews
3. Magazine on Solid state Technology
4. MEMS‘ Trends: Magazine on MEMS technology and Markets
5. CMM internationals
(C) JOURNALS:
1. IEEE journal of Micro-electromechanical Systems.
2. Journal of Micro / Nanolithography, MEMS and MOEMS
3. Journal of Microlithography, Microfabrication, and Microsystems
4. Microsystems Technology
5. Microfluidics and Nanofluidics, Springer
6. IEEE International Conference on Solid State Sensors and Actuators Transducers
7. Mode of Teaching: J.C Bose/S. N. Bose (please tick).
8. If the course is of practices, list the experiments to be offered.
Are the manuals ready for the experiments to be conducted?
Yes/No (please tick)
If “No”, the reasons there of and fixing responsibility
__________________________________________
__________________________________________
Remarks/ Endorsement by the HoD
With his /her signature with date
Name of the Teacher: Santanu Maity
Designation: Assistant Professor (ECE)
Signature with Date: