Survey
* Your assessment is very important for improving the workof artificial intelligence, which forms the content of this project
Download What does the EUV and thin film group do?
Document related concepts
Transcript
What does the EUV and thin film group do? 1. Optical properties of matter in the EUV and 2. Soft X-rays Thin film preparation and characterization Allred N265 2-3489 Meeting M 1600- N288 ESC Thin Films for Mirrors Turley N308 2-3095 Meeting F 1600- N308 ESCVUV and EUV Spectrometers L V Knight N373 2-2450 Tues C389 BNSN (Linford) EUV Spectrometer Roentgen discovers x rays http://wave.xray.mpe.mpg.de/roentgen/roentgen-1.gif http://library.tedankara.k12.tr/chemistry/vol1/period/trans43.jpg http://users.zoominternet.net/~matto/M.C.A.S/electromagnetic_spectrum.gif Where do the EUV and Soft X-rays fit? Characteristics – interact strongly with all matter – Human hair is 100 micron. – Characteristic absorption length is 0.01 to 0.1 micron – Refractive index is ~1 How do you make optical elements to focus and direct light? Why Extreme Ultraviolet (EUV) and Soft X-Rays? Thin Film or Multilayer Mirrors EUV Lithography (making really small computer chips) EUV Astronomy Soft X-Ray Microscopes BYU EUV Optics The Earth’s magnetosphere in the EUV Images from www.schott.com/magazine/english/info99/ and www.lbl.gov/Science-Articles/Archive/xray-inside-cells.html. April 19, 2004 Other Applications Astrophysics http://euv.lpl.arizona.edu/euv/ Surface studies. Plasma studies- matter under extreme conditions Microelectronics Soft x-ray microscopy BYU Work Applications Astrophysics: – Image satellite http://euv.lpl.arizona.edu/euv/ – Uranium and Thorium for the EUV. Microelectronics: Stabilizing Mo/Si Also Ru, Soft x-ray microscopy: Sc and others. Surface and Nanofabrication studies. – How to be clean in an unclean world. – Ambient temperature oxidation of materials Group meetings: Monday @1300 N209 – Sub: Wednesday @1300 N308 (Turley) BYU Spectrometer.
