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Semiconductor Industry
Ultrapure Water and Process Analytics
for the Semiconductor Industry
METTLER TOLEDO Competency
METTLER TOLEDO
Commitment to Innovation and Quality
METTLER TOLEDO Group
Our organization specializes in providing precision instrument equipment and related
services to industrial customers. In 2014, METTLER TOLEDO generated revenues of over
US$ 2.5 billion. The company’s stock is publicly traded on the New York Stock Exchange.
Worldwide Presence
We have a worldwide distributor
network and a workforce of more
than 13,100 employees and approximately 6,500 dedicated sales, service and marketing staff. We support
our customers in industry by
providing comprehensive solutions
for each step of their manufacturing
processes – extending from receipt
of materials throughout all manufacturing stages to final packaging
control, logistics and shipping.
METTLER TOLEDO instruments are
used in research and development,
manufacturing process control and
for quality control. The microelectronics, pharmaceutical, biotech,
chemical, food and beverage, and
cosmetic industries are among the
principal users.
Innovation and Quality
Our company enjoys an excellent
reputation as an innovator demonstrated by R&D expenditures above
the average for the industry. We
make every effort to achieve the
highest level of quality, by applying
Total Quality Management at both
product and process level, particu-
Representative (main office)
Representative (branch office)
Manufacturing
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larly as part of the support we provide to our customers to comply
with international guidelines.
Process Analytics Division
Within the METTLER TOLEDO
Group, the Process Analytics
Division concentrates on in-line
analytical system solutions for
industrial manufacturing processes. The Division consists
of two business units, Ingold and
Thornton, both internationally
recognized leaders in their respective markets and technologies.
Market organization (main office)
Market organization (branch office)
Thornton – Leading Pure Water Analytics
Over fifty years ago, Thornton designed and manufactured the original analog resistivity meters for
ultrapure water. Later, we pioneered microprocessor-based resistivity instrumentation with the first
computed high purity temperature compensation for this industry. Over the years, Thornton defined
resistivity limits and is the resistivity measurement standard in the semiconductor industry.
Industry Leadership
Thornton technology leadership is
based on an intimate knowledge
of critical ultrapure water (UPW)
measurement technology and
extensive application expertise.
Our innovative multi-parameter
instruments and sensors are specified to monitor UPW systems in the
majority of semiconductor manufacturing facilities worldwide.
Expansive measurement capabilities, allow our instruments to be
utilized throughout the entire water
cycle: from feed and makeup water
to tooling, wafer processing, waste
water, reclaim and recycle.
As part of the Mettler-Toledo Process
Analytics Group, Thornton has developed world-class technology for silica,
sodium, TOC, pH, ORP, dissolved
oxygen and dissolved ozone measurement. We continue to provide innovative
solutions, with expanded measurement
capabilities, to meet the demanding requirements of the global semiconductor
industry.
Industry Participation
As a technical leader in ultrapure
water measurements, our staff
members lead or participate in the
following semiconductor and microelectronics related organizations and
conferences:
• ASTM D19 Water Committee, Task Group Chairman
• S EMI Ultrapure Water Task Force,
Our extensive global support infrastrucMember
ture provides local sales and service for
• Ultrapure Water Conference,
all Thornton products in most regions of
Participant and featured
the world.
Industry Expert
•P
hotovoltaics technical committee
Member
Polishing
FAB
Make-up
Raw Water
Pre-treatment
Utility/Process
Water
Reclaim
Waste
Water
Recovery
Chemicals
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Intelligent Sensor Management
Innovative Measurement Solutions
For Advanced Process Analytics
Intelligent Sensor Management® (ISM) is an innovative METTLER TOLEDO concept
for process analytical measurement solutions that simplifies sensor handling,
enhances reliability and reduces sensor lifecycle costs through a ground breaking
new maintenance concept. ISM provides improved accuracy for critical applications
with easy Plug and Measure use.
Predictive Diagnostics
• Real-time diagnostic
algorithms in the sensor
provide online diagnostics
• True, dynamic, GPS-like
predictive maintenance
information with the Dynamic
Lifetime Indicator (DLI)
• Real-time sensor “health”
monitoring
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ISM offers unique and comprehensive product solutions ranging
from pH, dissolved oxygen and
conductivity to ozone and TOC.
Digital sensor technology provides
easy handling with pre-calibrated
Plug and Measure sensors, enhanced sensor performance and
built-in diagnostics.
Predictive Maintenance
• Dynamic Lifetime Indicator (DLI), a unique predictive real-time
diagnostic function
•Optimize maintenance schedules
to reduce costs and avoid un-
planned downtime
M800 Multi-parameter
Transmitter
Wide Range UniCond®
Conductivity Sensor
• Up to four channels of measurement
• iMonitor screen provides real-time evaluation
of sensor condition
• Predictive diagnostics to proactively plan sensor maintenance
• Plug and Measure simplicity with highest
factory calibration accuracy
• Wide range, covers entire makeup treatment
system with one model
• Digital signal reliability
Product Highlights
UniCond Resistivity / Conductivity
• Pre-calibrated digital ISM
sensors with unique data stored
in memory
ISM pH Sensor
• Digital accuracy with improved
performance
• ISM provides informational
sensor diagnostics and DLI
ISM Dissolved Ozone Sensor
• Plug and Measure simplicity
M800 Transmitter
• Color touchscreen display
•User-friendly menus
•Predictive iMonitor diagnostics
at your fingertips
•Two or four ISM inputs with multiple user configurable alarms and
outputs
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Pre-treatment & Make-up Waters
Total Water Cycle Management
Superior Control with UniCond® and ISM®
Raw water processing to meet semiconductor ultrapure water (UPW) quality
levels is a step-by-step procedure requiring monitoring at every stage. Control of feed
water or recycled and reclaimed waters prevents possible damage to water system
components. Multi-parameter analytical measurements provide flexibility, lower cost
and reliable analysis at each measurement point.
Broad Application Coverage
Pre-treatment Purification Stages
• Feedwater
• Filtration
• Reverse osmosis
• Degassing
• UV or ozone sanitization
Measurement Parameters
• Resistivity/conductivity
• Total Organic Carbon (TOC)
• Dissolved oxygen
• Dissolved ozone
• pH/ORP
• Temperature
• Silica
• Sodium
• Flow
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Contamination or system disruptions can have significant impact
on product yield, so facilities engineers depend on reliable and intelligent information to make quick
and informed decisions.
Critical measurements can result in
controlled process valve diversions
of water streams to protect components from unexpected contamination or fouling.
METTLER TOLEDO Thornton offers
measurement solutions to monitor
and control incoming water systems
to ensure water quality specifications are met throughout the
system, from pre-filtration through
reverse osmosis to primary mixed
bed deionization.
Plug and Measure Simplicity
Our automatic sensor recognition system is a ground breaking
measurement and maintenance
concept that improves accuracy,
simplifies sensor handling, enhances reliability and reduces sensor life-cycle costs.
Product Highlights
M300 and M800 Transmitters
• Multi-parameter, single, dual
or multiple channel measure-
ment inputs for flexibility and
efficiency
UniCond with ISM for conductivity
• Plug and Measure simplicity • Full measurement range
ISM pH Sensor
• Accurate and robust measurements
• Pre-calibrated with improved
performance and iMonitor
sensor diagnostics
5000TOCi with ISM
• Real-time TOC detection
in seconds
• Continuous measurements
mean you will never miss an
event
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Semiconductor
Precise Measurements
Accurate In-line Solutions
Semiconductor manufacturing requires very large quantities of ultrapure water (UPW)
for production processes. Cleaning, rinsing and etching of wafers and substrates
consumes thousands of cubic meters of UPW per day in a typical fab. Precise process
analytical measurements with ISM are key to optimizing water usage and maximizing
recovery and reuse.
Measurement Parameters
• Resistivity/conductivity
• Total Organic Carbon (TOC)
• Dissolved oxygen
• Dissolved ozone
• Silica
• Sodium
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METTLER TOLEDO Thornton’s resistivity measurement for UPW
analysis is the most accurate in the
world. Decades of technical innovation and demanding application
experiences have helped Thornton
become the technology leader
in the semiconductor industry.
Our superior solutions are recognized by standards setting groups
throughout the world.
Precise Resistivity
Innovative UniCond digital resistivity sensors with ISM technology
are novel additions to METTLER
TOLEDO Thornton product offerings. Advanced measurement circuitry, integrated into the sensor,
provides more reliable measurements over a broader range with
improved accuracy.
Semiconductor
Ultrapure water is the most voracious and aggressive solvent
employed by the semiconductor
industry in the production and
cleaning of wafers. For efficient
operation and to meet the most
stringent requirements, fabs rely on
our process analytical measurement technology to ensure optimal
performance of the UPW system.
Photovoltaics
Photovoltaic cell manufacturing requires an exceptionally clean wafer
surface which must be cleaned and
rinsed extensively with ultrapure
water. Ionic salts or organic contaminants can negatively affect cell
efficiency. Our sensors continuously monitor and alert operators
to any reduction in water quality.
Flat Panel Display
Very strict limits for ionic and organic contamination are essential in
pure and ultrapure water systems.
Thornton accurately measures contaminants in these UPW systems to
enable flat panel manufacturers to
improve product quality and to maximize yields.
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Semiconductor
Maximized Production Yields
Reduced Product Loss in Fabs
Semiconductor requirements for ultrapure water measurement and control of resistivity
and total organic carbon (TOC) are more stringent than corresponding parameters in
any other industry. Substrate damage may be caused by organics or other contaminants
that can negatively affect production yields. Accurate, fast and convenient measurement
and control systems can save millions of dollars in lost product.
Measurement Parameters
• Resistivity/conductivity
• Total Organic Carbon (TOC)
• Dissolved oxygen
• Dissolved ozone
• Silica
• Sodium
• Flow
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Our application expertise and
in-depth knowledge of the critical
measurements needed in semiconductor processing and ultrapure
water production is unsurpassed.
As a result, Thornton instruments
are specified to monitor ultrapure
water systems in the majority of
fabs worldwide.
Precise Wet Etch
Semiconductor manufacturing
relies on water for all wet processes. Monitoring the chemical
mixture for wet etch and UPW rinse
processes is critical to ensure successful high yield production.
The slightest impurity can result
in a loss in productivity, yield
and revenue. Fab operators must
have confidence in their UPW performance and in the measurements
monitoring that system to maximize
yield while maintaining the highest
quality levels. Thornton technical
competence, measurement performance and product quality instill
trust and assurance that manufacturing systems are under control.
Ultrapure water monitoring at ppb
silica levels can ensure the highest
quality water is being delivered.
With the 2800Si, silica breakthrough of polisher anion resin is
detected at very low ppb levels and
contaminated water can be diverted
before it reaches critical areas.
Fully Automatic 2300Na
Sodium Analyzer
Low Maintenance 2800Si
Silica Analyzer
Product Highlights
UniCond with ISM for Resistivity
• Pre-calibrated sensors with unique data stored in memory
• Increased accuracy with digital
sensors
ISM DO Sensor
• Stable measurements
• Drop in place membrane
replacement
5000TOCi with ISM
• Real-time continuous TOC
detection
• Plug and Measure TOC
Silica & Sodium
• Trace level monitoring
• Minimal operator supervision
• Unattended automatic electrode conditioning
and calibration
• Convenient grab sample capability
• Increased measurement accuracy
through full automation
• Adjustable measurement interval for reagent savings
• Unattended automatic span calibration
• Zero calibration with each measurement
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Reclaim/Recycle/Reuse
Exceeding Green Targets
More Efficient Water Use
The fabrication process requires large volumes of UPW and chemicals which generates
considerable quantities of wastewater. This wastewater requires proper treatment plus a
reliable measurement system that will analyze and control recycle/reclaim/reuse waters to
avoid costly chemical incursions or to comply with environmental discharge requirements.
Go Green
Water use reduction is one of the
top technical challenges in semiconductor manufacturing.
Water conservation can be characterized in three different categories:
The primary reason for recycling in
the fab is to reduce overall water
consumption. But, recycled water
must meet UPW feed requirements
to avoid contamination.
• Reclaim and recycle water
used throughout the fabrication process
• Improving the efficiency
of UPW systems
• Future planning to reduce water consumption
Fast Responding Optical
Dissolved Oxygen Sensor
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•Plug and Measure capability with ISM
• Excellent long-term stability
•Low maintenance without membrane,
electrolyte or electrodes
A cost effective, long-term solution to water reuse is continuous
measurement. Proper segregation
and collection of multiple rinse and
waste water streams must be part
of the implementation of a true recycling strategy.
Rapid Organic Detection
The Thornton 5000TOCi helps
to increase recovery of valuable water while reducing water discharge.
Compact pH/ORP Sensors
• Durable pH sensors provide long life under
extreme conditions
• pH and ORP measurement with a single probe
• Measurement electronics in the sensor
results in higher accuracy and enables
predictive diagnostics
This beneficial TOC sensor with
the M800 multi-channel, multiparameter transmitter is now being deployed by semiconductor
facilities for recycle/reclaim/reuse
processes due to its speed of response and continuous measurements, which permits real-time
monitoring.
Calibration Competence—
Setting Global Standards
Our calibration and certification
products and services meet or exceed global standards for verification and validation, to ensure that
your UPW system is within rigorous
specifications. These services are
traceable to appropriate national
standards, industry guidelines and/
or regulatory requirements, such as
NIST and ASTM.
Product Highlights
UniCond with ISM for Conductivity
• Pre-calibrated sensors with unique data stored in memory
• Extremely broad conductivity
and temperature measurement range in one sensor
• Robust titanium sensor body
5000TOCi with ISM
• TOC measurement in seconds
• Continuous, highly accurate
measurements
ISM pH Sensor
• HF resistant electrodes
• ISM provides pre-calibration,
improved performance and
sensor diagnostics
Optical DO
•P
lug and Measure capability
with ISM
• Excellent long-term stability
• L ow maintenance without membrane,
electrolyte or electrodes
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Training & Service
METTLER TOLEDO Service
Global Support to Meet Your Standards
METTLER TOLEDO embraces the complete spectrum of service offerings ranging
from product selection guidance, through installation to service contracts.
A Wide Spectrum of Service
We offer comprehensive services
from product consultation and application support to installation and
after market service contracts. Our
sales consultants and high level of
technical service capabilities have
established METTLER TOLEDO as
a competent partner for our global
customers all around the world.
Many leading manufacturing companies rely on our competence and
long-standing experience to leverage their expertise.
Traceability Lineage
Thornton Meters
Thornton
Calibrators
Thornton
Sensors
Precision
Multi-meter
Thornton Reference
Sensors
Calibration Lab
American Society of
Testing & Materials
(ASTM) Solutions
National Institue
of Standards &
Technology (NIST)
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Global Reach
Based from several global production sites, with more than 40
market organizations and numerous international sales offices,
METTLER TOLEDO maintains a
worldwide distribution and service
network to support our global customer base.
Superior Application Support
Consultative applications support
saves time and money. We offer
detailed technical product documentation together with local support
during specification, installation
and commissioning, contributing to
on schedule project realization.
Superior Services
• Repair at service depot
• Sensor refurbishment
• Installation/commissioning
• Training/seminars/webinars
• Maintenance contracts
• Factory re-calibration
• On-site qualification/verification
• Quality documentation
• Validation support
• Support in compiling SOPs
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Semiconductor Competence Center
The latest news on applications and products
Visit us online to discover white papers, application notes,
product documentation and more.
www.mt.com/pro-semi
www.mt.com/thornton
Visit for more information
Mettler-Toledo Thornton, Inc.
900 Middlesex Turnpike, Bldg. 8
Billerica, MA 01821 USA
Tel +1-781-301-8618
Fax. +1-781-301-8701
Toll Free +1-800-510-PURE(US & Canada Only)
Subject to technical changes
© Mettler-Toledo Thornton
Printed in USA
58 087 047 Rev A 06/2015