Survey
* Your assessment is very important for improving the workof artificial intelligence, which forms the content of this project
* Your assessment is very important for improving the workof artificial intelligence, which forms the content of this project
ALICE Silicon Pixel Detector (SPD) G. Stefanini/CERN-EP General Front-end electronics – pixel bus – ALICE1 ASIC – PILOT ASIC, bias ASIC, optical link package, MCM Silicon sensors Beam test with bump-bonded assemblies Pixel wafer probing Pixel wafer thinning Mechanics and cooling Summary - Planning 16/11/01 GS/ALICE SPD/LHCC Referees 1 SPD (Hybrid Pixels) - Design Parameters Two barrel layers Ri= 39mm, Ro = 76mm Pixel cell dimensions 50mm (r f) x 425mm (z) Front-end electronics CMOS6 0.25mm standard process on 8” wafers, rad-hard design Pixel ASIC thickness (target) ≤ 150mm (wafers thinned after bump deposition) Si sensor ladder thickness ≤ 200mm Flip-chip solder bumps/indium bumps Pixel bus aluminium-polyimide flex Cooling water/C6F14/[C3F8 (evaporative)] Material budget (each layer) ≈ 0.9% X0 (Si ≈ 0.37, cooling ≈ 0.3, bus 0.17, support ≈ 0.1) Total Si surface ≈ 0.24 m2 Occupancy < 2% 16/11/01 GS/ALICE SPD/LHCC Referees 2 SPD Mechanical Configuration (I) 16/11/01 GS/ALICE SPD/LHCC Referees 3 SPD Mechanical Configuration (II) 2 barrel layers z= ± 14.15cm (sensitive) r1 = 3.9 cm, r2 = 7.6 cm 16/11/01 GS/ALICE SPD/LHCC Referees 4 SPD Ladders & Staves 1 sector one carbon-fibre support for layer 1+2 readout of 120 half-staves in parallel 4 staves in outer layer 2 staves in inner layer ladder (1 sensor, 5 chips) half-stave: 2 ladders SPD total 1200 pixel chips, ≈ 107 pixels Image: INFN Padova 16/11/01 GS/ALICE SPD/LHCC Referees 5 Pixel Bus & Ladders (I) ± 193 mm ladder2 ladder1 Power supplies connector Extenders (Copper-capton) Flexible Extender 70.72 mm 70.72 mm MCM 1000mm Pixel bus: multilayer flex Al-polyimide So far, only satisfactory technology source is the EST PCB Workshop A-prototype (Cu) under test for signal integrity with 10 chips on bus B-prototype (Al) layout to start in Jan 02 (workload in EST layout section) Explore feasibility with industrial company M. Morel 16/11/01 GS/ALICE SPD/LHCC Referees 6 Pixel Bus & Ladders (II) 11mm SMD component 7 7 7 6 7 6 5 5 4 235µm PIXEL_BUS 3 2 2 1 Aluminium 1 Polyimide Glue PIXEL DETECTOR <350µm (design target) READOUT CHIP ? CARBON FIBER SUPPORT COOLING TUBE 1 ANALOG_GND 25µ 2 ANALOG_ POWER 25µ 3 HORIZONTAL LINES 10µ 4 VERTICAL LINES 5µ 5 DIGITAL_POWER 25µ 6 DIGITAL_GND 25µ 7 RES + CAPA PADS 15µ M. Morel 16/11/01 GS/ALICE SPD/LHCC Referees 7 End Stave Connections (I) Connections details of pixel_carrier and extenders Bias 2 BIAS 2 (10uA) BIAS 1 (10uA) Bias 1 AGND AGND VTT (1A) Sense (VTT) SENSE GND (VTT) VTTA (0.1A) Sense (VTTA) AGND (VTTA) VDDA MCM_Dig (1A) Sense (MC M_Dig) RESISTOR TO VTT VDD DECOUPLING CAPACITOR GND GND (MCM _DIG) MCM_A (?) SENSE Sense BIAS DECOUPLING CAPACITOR VDD AGND AGND VDDA SIG VDD GND Pixel chip Pixel de tector Pilot MCM Note: the drawing is not to scale 16/11/01 GS/ALICE SPD/LHCC Referees Al pixel carri er Cu extender 1 1 Cu extender 2 Michel Morel EP/ED 09/2001 8 ALICE Pixel ASIC • CMOS6 0.25 µm (8” wafers) • Radiation hard design (enclosed transistors) • ≈ 13.106 transistors • 8192 pixel cells 50 µm x 425 µm • 256 rows, 32 columns • Active area: 12.8mm x 13.6mm • 10 MHz clock • 1.8V power supply • ~100 µW/channel M. Campbell 16/11/01 GS/ALICE SPD/LHCC Referees 9 Pixel Cell M. Campbell 16/11/01 GS/ALICE SPD/LHCC Referees 10 Pixel Chip JTAG Controls All configuration parameters are controlled through JTAG bus Two-fiber optical link, effective clock frequency 5 MHz Global registers – 42 DACs for biasing – strobe delay – global threshold voltage – miscellaneous control (leakage current compensation, delay unit) Local registers (for each pixel cell): – 3 bit threshold adjustment – TEST Enable – Pixel mask 16/11/01 GS/ALICE SPD/LHCC Referees 11 Test Set-Up •DAQ LabView •Analysis ROOT •Database MySQL VME Master JTAG Controller R/O Controller Pixel Chip Pixel Chip Carrier DAQ Adapter P. Chochula 16/11/01 GS/ALICE SPD/LHCC Referees 12 Radiation Test - Single Event Upsets (SEU) Hadrons may interact elastically and inelastically with Si atoms recoils and fragments deposit a large amount of charge in the chip Single Event Effect SEGR (Gate Rupture) breakdown of transistor gate SEL (Latch-up) high power supply current SEU (Upset) switch logical level Mitigation: all critical memory cells are hardened by built-in redundancy Alice1LHCb: 8192 Pixels: 42 DACs: 5 memory cells each (3 threshold adjust, 1 mask, 1 test) 8 memory cells each (8 bit DACs) J. Van Hunen 16/11/01 GS/ALICE SPD/LHCC Referees 13 SEU Cross Section (I) SEU Cross Section (cm 2) Measure SEU cross-section as function of the Linear Energy Transfer (LET) - at Louvain cyclotron (ions and protons) 1.E-06 1.E-07 1.E-08 chip 43 1.E-09 chip 72 1.E-10 Weibull 1.E-11 0 20 40 60 80 100 120 LET (MeV mg-1cm2) The LET is measured first with heavy ions Xe26+, Kr17+, etc., under different angles of incidence to cover the required range. J. Van Hunen 16/11/01 GS/ALICE SPD/LHCC Referees 14 SEU Cross Section (II) The heavy ion results are used to calculate the SEU cross section for exposure to protons (60 MeV) : 9 10-16 cm2 per memory cell Measurement with 60 MeV protons: Fluence (cm-2) # SEUs # irradiated cells Cross Section (cm2) 6.4 1012 84 41,296 3 10-16 For the ALICE pixel detector: 1200 chips, 336 DAC bits 0.1 bit/hour J. Van Hunen 16/11/01 GS/ALICE SPD/LHCC Referees 15 Pixel Chip Testing Four identical test setups have been installed in the CERN lab. • Test of all internal DACs • Threshold and noise scans • Minimum threshold • Current consumption • Tests of the individual stages • Functionality of the JTAG •Used also for SEU measurements 16/11/01 GS/ALICE SPD/LHCC Referees 16 Bare Chip Threshold Scan Pulse each row (e.g. 250 triggers) with test-pulse (e.g. 050 mV). Mean threshold: ~14-15mV RMS ~3mV. No individual threshold adjust. Conversion factor: ~66e-/mV (preliminary!) ~1000 e- mean threshold ~ 200 e- RMS P. Riedler 16/11/01 GS/ALICE SPD/LHCC Referees 17 Bare Chip Threshold Scan (II) Mean threshold vs. global threshold setting 3811 16/11/01 2951 2111 1288 GS/ALICE SPD/LHCC Referees 463 Electrons RMS 18 Bare Chip Noise Scan Determined from S-curve. Mean noise ~1.7-2 mV RMS ~ 0.2 mV Mean noise ~110 e- RMS P. Riedler 16/11/01 GS/ALICE SPD/LHCC Referees 19 Test Pulse Threshold map • measured on chip 52 • scale in mV • pulser located under column 5 P. Riedler 16/11/01 GS/ALICE SPD/LHCC Referees 20 Fast Multiplicity for Trigger Fast Multiplicity: prompt analog output from each chip Half-stave sum ==> multiplicity in left and right part of barrel (Ml, Mr) Ml+Mr ==> total on SPD barrel ==> trigger on centrality Ml-Mr ==> left-right asymmetry ==> trigger on position of primary vertex (s ≈ few mm) Implementation study under way – analog optical signal transmission – contribution to L0 ? ( <1ms latency) Constraints on performance at very low multiplicity 16/11/01 GS/ALICE SPD/LHCC Referees 21 Engineering & Pre-production Wafers All tests so far with 6 engineering run wafers Some imperfections in design, but performance of the chip “as is” meets essential specs. Use of ladder Fast-OR and very low Fast Multiplicity would require partial redesign. Final decision in Q2/02. Exceptional new lot of 48 wafers just delivered – ALICE – NA60 – LHCb, .. ≈ 24 16 ≈ 8 New ALICE lot: optimisation of bump-bonding and wafer thinning – allows some flexibility in deadline for decision on final production 16/11/01 GS/ALICE SPD/LHCC Referees 22 pixel chip 9 Half-Stave Readout Electronics Chain G-link pixel chip 0 pixel pilot pixel chips pixelbus pixel transmit opt. link serializer& optics busy, jtag pixelcontro l receive pilot MCM link receiver pixel converter pixel router opt. links pixelco nt rol transmit L1, L2y, L2n, testpulse, jtag control room A. KLuge 25.1.01 A. Kluge 16/11/01 GS/ALICE SPD/LHCC Referees 23 PILOT ASIC • CMOS6 0.25mm • Rad-hard design • Dimensions 4mm x 6mm • JTAG controls • clock recovery and distribution • half-stave data out • level conversion • multiplexing • interface to Gigabit Optical Link (GOL) • (serialiser/driver ASIC) • currently under test (Nov 01) A. Kluge 16/11/01 GS/ALICE SPD/LHCC Referees 24 Bias ASIC - Optical link package Bias ASIC : generates reference levels for the pixel chip – design (≈ 3 months) to start in Jan 02 (EP-MIC) – submission in MPW – might be on critical path for MCM Optical link package (1 laser diode, 2 PIN diodes, overall thickness < 1.4mm) – development under way – functional prototype ≈ end March 02 – full production will take ≈ 3 months 16/11/01 GS/ALICE SPD/LHCC Referees 25 Silicon Sensors p+ on n with guard rings, each wafer (5”) has 5 ladders + 13 singles Prototypes – 300mm thickness 15 wafers – 200mm thickness 3 wafers available available (+ 2 in order) CERN Market Survey MS-3087/EP/ALICE sent out to firms on 12 Nov 01 Closing date: 21 Dec 01 Examination of replies: Jan 02 (2nd week) Invitation to tender will be issued by INFN (Catania/Roma 1) – Committee already appointed – deadline: within Q1/02 16/11/01 GS/ALICE SPD/LHCC Referees 26 Bump-bonding - Assemblies Detector Chip First delivered ≈ 10 assemblies: Sensors: p+ on n, thickness 300µm Chips: Lot 1 (750µm thick) - unprobed wafers! Assemblies produced by: AMS/Italy Indium bumps stand-off ~ 10µm VTT/Finland Pb-Sn solder bumps stand-off ~15µm P. Riedler 16/11/01 GS/ALICE SPD/LHCC Referees 27 Assemblies - Threshold Scan Threshold measurement: VTT 8 Mean threshold: 21.2 mV RMS: 2.8 mV Similar to measurement on bare chip. P. Riedler 16/11/01 GS/ALICE SPD/LHCC Referees 28 Assemblies - Noise Scan Noise measurement: VTT 8 Mean noise: 1.97 mV RMS: 0.24 mV Similar to noise on bare chip. P. Riedler 16/11/01 GS/ALICE SPD/LHCC Referees 29 Threshold Scan on Assemblies 50mV ≈ 3,200 eP. Riedler 16/11/01 GS/ALICE SPD/LHCC Referees 30 Assemblies - Source Tests Source tests were carried out on all assemblies, using: Source Electrons RMS Sr 90 Cd 109 Fe 55 2.28 MeV electrons ~22+25 keV gammas (electrons shielded) ~6keV gammas ~63 300 ~6100 ~1600 • Bump-bonding quality • Calibration • Threshold adjustment 16/11/01 GS/ALICE SPD/LHCC Referees 31 Assemblies - Sr90 Source Bump-bonding quality Assembly VTT 10 Bias: 80V Sr-source P. Riedler 16/11/01 GS/ALICE SPD/LHCC Referees 32 Assemblies - Fe55 Source No threshold adjust With threshold adjust glue drop P. Riedler 16/11/01 GS/ALICE SPD/LHCC Referees 33 Beam Test with Assemblies 13-25 July (Period 1) and 1-9 September, 2001 (Period 2) H4 beam-line in the NA57 area • 150 GeV/c pions • 105-106 particles/spill • ~10 x 5 mm2 beam-focus • Scintillator trigger selects 2 x 2 mm2 beam-spot Period 1: one plane, 2 assemblies tested Period 2: telescope (3 planes), 5 assemblies tested analysis under way 16/11/01 GS/ALICE SPD/LHCC Referees 34 Beam Test Set-Up (I) C1A Assembly 0 scintillator S3 beam C2 ~10m C1B Assembly 1 Assembly 2 x-y table two small scintillators orthogonal to each other MB card MB card power supply power supply MB card power supply Full telescope (for Period 1 only the centre assembly was mounted) 16/11/01 GS/ALICE SPD/LHCC Referees 35 Beam Test Set-Up (II) 16/11/01 GS/ALICE SPD/LHCC Referees 36 Beam Profile VTT 12 Beam profile in z (425 µm pixels): ~ 7 pixels = 3 mm Beam profile in x ( 50 µm pixels): ~50 pixels = 2.5 mm 16/11/01 GS/ALICE SPD/LHCC Referees 37 Bias Scan Sensor thickness 300mm 100 Online Efficiency [%] 80 60 40 VTT 1 th=215 ~ 1600 electrons RMS th=200 ~ 2900 electrons RMS 20 0 0 20 40 60 80 Bias Voltage [V] Normalization to scintillating counters - preliminary! 16/11/01 GS/ALICE SPD/LHCC Referees 38 Cluster Size Analysis (preliminary, from run with 1 assembly) 16/11/01 GS/ALICE SPD/LHCC Referees 39 First ALICE Pixel Ladder from VTT 16/11/01 GS/ALICE SPD/LHCC Referees 40 Pixel Wafer Probing (I) Each wafer contains 86 ALICE1LHCb chips. Tests carried out on each chip: • Current consumption (analogue/digital) • JTAG functionality • Scan of all DACs • Determination of minimum threshold • Complete threshold scan of pixel matrix 16/11/01 GS/ALICE SPD/LHCC Referees 41 Pixel Wafer Probing (II) Class I Class II Fully functional, but less than 6000 pixels responding to the threshold scan Class III Masking problems, high or asymmetric noise or threshold Class IV Excessive or no current No response from the chip P. Riedler 16/11/01 GS/ALICE SPD/LHCC Referees 42 Pixel wafer thinning Pixel wafers will be thinned after bump deposition (processed side protected) VTT has equipment and expertise in this field Preliminary trials with 4” and 8” blank wafers with SPD bump pattern – wafers thinned down to <100mm – backside free from bump imprint Imminent trial with real probed pixel wafers – check if thinning affects performance – determine practical limit Bump-bonding thinned chips and ladders is next major challenge – development program under way – completion expected in June 02 16/11/01 GS/ALICE SPD/LHCC Referees 43 Mechanics & Cooling Items to be produced: Carbon fiber support structure: 10 sectors (turbo_like disposition) Two halves cylinder-cone support structure working also as thermal screen towards SDD and air flow channelling Tooling for stave assembly, detector assembly etc. TEST already done: Prototypes of CFSS made out of different CF tape thickness and resin (epoxy, cyanate ester). The final geometry is not yet assessed (sector length, cooling system choice, etc.). The main efforts are on integration scenario definition and cooling system design & test. A. Pepato 16/11/01 GS/ALICE SPD/LHCC Referees 44 SPD Sector (II) A. Pepato 16/11/01 GS/ALICE SPD/LHCC Referees 45 Cooling Test Bench A B A 50 mm kapton 25 mm copper 60 mm epoxy resin 125 mm kapton 50 mm cond. grease 40 mm SS cooling B 1 mm FR4 25 mm copper 50 mm cond. grease 40 mm SS cooling A. Pepato 16/11/01 GS/ALICE SPD/LHCC Referees 46 Summary - Planning Pixel ASIC meets essential specs. KGD yield from engineering wafers ≈ 35% Pre-production wafer lot procured Sensors market survey sent out Bump-bonding optimisation and wafer thinning trials in progress FE electronics chain under test Pixel bus prototyping nearly completed Key electronic issues under study: signal integrity on bus, end-stave connections, grounding, power distribution (rad-hard voltage regulators in patch-panels), etc Mechanics & cooling well defined, corrosion study under way ==> choice of coolant Completion of all developments by Q3/02, production to start in Q4/02 Detailed planning reviewed Nov 01 Challenge ahead: detector assembly and integration (ladders, bus, glueing, wire bonding, mounting on sectors, final tests) 16/11/01 GS/ALICE SPD/LHCC Referees 47