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Transcript
4 Operation, mechanisms and
applications
•Ken Gilleo PhD
•ET-Trends LLC
1
Motion (actuators)
• Actuators (“motors”)
POWER  Electrical (input)


Thermal (usually from electrical)
Photonic (for MOEMS, OE)
• Sensors (output); usually electrical signals

Change/output
is caused by
mechanical
motion/force






2
Capacitance
Piezoresistive
Resonant beam
Electron tunneling
Photonic
Chemical
Biological/biochemical
TYPES
Actuator Classes
• Electrostatic/capacitive



Linear comb drive
Rotary comb drive
Horizontal parallel plates
• Electromagnetic




Linear
Rotary
Integrated coils or external field
Permanent or soft magnetic films
• Thermal


Bimorph: dissimilar materials
Shape memory alloys
• Pneumatic/hydraulic
• Mechanical conversions/translations
3
MEMS Engines
* very efficient
• Electrostatic;
• Thermal; easy to implement
• Electromagnetic, smaller
• Pneumatic
• Hydraulic
• Photoelectric (energy through fiber)
4
*Surface area is
relatively high,
mass is very low;
surface effects are
important
Electrostatic (ES)
Charged
Charged
s
h
u
t
t
l
e
ES Unit
Anchor point
5
Thermal Engines (T)
• Expansion

Material, external; inkjet

Bimorph beam - bending
• High force, moderate displacement
• Frequency limited by conductivity
6
Bimorph Beam (Thermal)
off
Resistive
heater
on
7
Electromagnetic
U of Wisconsin
8
CalTech
MEMS Pumps
• Actuation Mechanisms






Electrostatic
Thermal
Magnetic
Pneumatic
Piezoelectric
Ultrasonic
Debiotech STMicroelectronics insulin pump
Thermal Inkjet
• Direct Fluidic Actuation



9
Bellows: Air Pump
Fluidic phase change
Electrohydrodynamic (EOF, electrophoresis, etc)
Direct fluidic actuation mechanisms
Sensors – the #1 Class
• Capacitance
Popular for
Accelerometers, mics, more
• Piezoresistive
• Resonant beam
• Electron tunneling
• Photonic
• Chemical
• Biological/biochemical
10
Many
principles
Inertial Sensors (motion)
• Accelerometers

Capacitor

Resonant

Multiple axis
ADI
• Gyroscopes
JPL
11
ADI
Accelerometer/Gyros
• Automotive



Sensing: crash, torque, vibration (well-being)
Navigation; GPS back-up
Active suspension
• Consumer




Input device; computer, games, phones
Sports training, medical therapeutic
Alarms; burglar, seismic (earthquake)
Stabilization, camera
• Military



Ordnance; guidance, condition, attack warning
Operator input/control
Aiming; gun, camera (stabilization)
• Industrial




12
Sensing: vibration, tilt, direction, rate
Stabilization
Monitoring
Robotics; position, contact, feedback, etc.
ADI
Now owned by ADI
Dual-Axis Gyroscope
INERTIAL
Resonant
Accelerometers
3-Axis Accelerometer
Z-Axis Gyroscope
13
Accelerometer Applications
Automotive
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
14
ABS/Antiskid
Airbag Deployment
Anti-Rollover Detection
Battery Disconnect
Crash Alerting
Dynamic Suspension
Dynamic Ride Control
Dynamic Cruise Control
Electronic Park Brake
Fleet Monitoring
Fuel Shutoff
Headlight Leveling
Inertial Navigation – backup
Misfire Detection
Security/Antitheft
Seatbelt Tensioning
Stability Systems
Tilt Sensing
Tire Motion
Tire Pressure
Transmission
Monitor Vehicle Performance
Consumer
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
Active Subwoofers
Ambulatory Training
Appliances
Binoculars
Blood Pressure Monitor
Camcorders Stabilizer
Digital Pens
Digital Cameras Stabilizer
Disk Drive Monitoring
Game Controllers Handheld GPS
Head Tracking Inertial Navigation
Laptop Anti-Theft
Laptop Drop Detection
Joysticks Mouse - 3D
Out-of-Balance Medical Devices
Sleep Monitor Pedometers
Sports Training – golf
Sports Training – fly cast
Sports Training – batting
Tilt Sensing
Virtual Reality I/O
Wearable Computing I/O
Industrial/Scientific/Military
• Antenna Alignment
• Antenna Switches
• Construction Leveling
• Machine
• Health Equipment
• Tilt Sensing
• Fork Lift Positioning
• Marine Navigation
• Platform Leveling
• Seat Damping
• Seismic
• Gas Shutoff
• Satellite Dish Alignment
• Satellite Gyroscopes
• Ship mechanical monitoring
• Shock Sensing
• UAVs
• UMVs
• Vibration Monitoring
Automotive
Pressure
Sensors
Injector Pressure Sensor
Fuel Pressure Sensor
• Pressure Sensors









15
Fuel
Tire
Manifold
Injector
AC
Mass air
Break
Fuel vapor
Oil
AC Pressure Sensor
Pressure Sensors
Thin
diaphragm
• Transducers



Piezoresistor
Capacitor
Resonant beam
Internal ref.
pressure
Transducer
Vacuum
Resonating beam (F1)
16
Resonating beam is now
under tension; (F2)
Chemical Sensors
Reactive surface
adsorbs gases
Readily detects H2, CO,
Alcohols, Hydrocarbons
i
Heater
Chem-sensor gate; adsorbing metal like Pd
Vs
Adsorption
lowers
threshold
voltage since
a dipole is
induced.
Vd
Chem-FET
17
Mechanical Transfer
• Gears
• Wheels
• Levers
• Rackets
• Shuttles; walking
beams
• Hinge & lock
• Articulated beams
18
Power Device Classes
1. Extractors using ambient energy
2. Converters: energy-1
energy-2
3. Relays for power (not signal)
4. Power controllers (beyond relays)
5. Generators using fuel
1. Uses waste energy, 2. Uses generated energy
19
Power Extractors
Typically utilize machine mechanical vibrations
C1
C2
Changing capacitor
plate spacing
generates power;
reverse damper.
C2 an be replaced
with a magnet.
Machines produce mostly 1 KHz to 5 KHz vibrations
20
Power MEMS
• Chemical fuel to:

Mechanical rotation, reciprocation, etc.

Fluid or gas pumping force

Electrical (fuel cell)

Thrust; rocket

Mechanical
10 to 100 watts
100 K to
1-million RPM
Electrical (turbo-generator)
• Photonic to electrical (really just a converter)
• Mechanical, electrical to chemical (battery)
21
Gas Turbine
22
TI MOEMS: DLP
on
off
Over 8-million parts
on
on
on
on
off
on
Ref. “Digital Light Processing TM for High-Brightness, High-Resolution Applications” Larry J. Hornbeck, Ti.com
23
1,400,000 mirrors in one module
Texas
Instruments
DLPTM
24
animation by kbg
Session Summary
• Most MEMS are directly electrically powered
• Electrostatic is simplest; very popular
• Bimorph is ideal for no/low wear beams
• Many kinds of mechanical transfer
• Sensors will remain largest market
• Reliability issues on some, but not all MEMS
25