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4 Operation, mechanisms and applications •Ken Gilleo PhD •ET-Trends LLC 1 Motion (actuators) • Actuators (“motors”) POWER Electrical (input) Thermal (usually from electrical) Photonic (for MOEMS, OE) • Sensors (output); usually electrical signals Change/output is caused by mechanical motion/force 2 Capacitance Piezoresistive Resonant beam Electron tunneling Photonic Chemical Biological/biochemical TYPES Actuator Classes • Electrostatic/capacitive Linear comb drive Rotary comb drive Horizontal parallel plates • Electromagnetic Linear Rotary Integrated coils or external field Permanent or soft magnetic films • Thermal Bimorph: dissimilar materials Shape memory alloys • Pneumatic/hydraulic • Mechanical conversions/translations 3 MEMS Engines * very efficient • Electrostatic; • Thermal; easy to implement • Electromagnetic, smaller • Pneumatic • Hydraulic • Photoelectric (energy through fiber) 4 *Surface area is relatively high, mass is very low; surface effects are important Electrostatic (ES) Charged Charged s h u t t l e ES Unit Anchor point 5 Thermal Engines (T) • Expansion Material, external; inkjet Bimorph beam - bending • High force, moderate displacement • Frequency limited by conductivity 6 Bimorph Beam (Thermal) off Resistive heater on 7 Electromagnetic U of Wisconsin 8 CalTech MEMS Pumps • Actuation Mechanisms Electrostatic Thermal Magnetic Pneumatic Piezoelectric Ultrasonic Debiotech STMicroelectronics insulin pump Thermal Inkjet • Direct Fluidic Actuation 9 Bellows: Air Pump Fluidic phase change Electrohydrodynamic (EOF, electrophoresis, etc) Direct fluidic actuation mechanisms Sensors – the #1 Class • Capacitance Popular for Accelerometers, mics, more • Piezoresistive • Resonant beam • Electron tunneling • Photonic • Chemical • Biological/biochemical 10 Many principles Inertial Sensors (motion) • Accelerometers Capacitor Resonant Multiple axis ADI • Gyroscopes JPL 11 ADI Accelerometer/Gyros • Automotive Sensing: crash, torque, vibration (well-being) Navigation; GPS back-up Active suspension • Consumer Input device; computer, games, phones Sports training, medical therapeutic Alarms; burglar, seismic (earthquake) Stabilization, camera • Military Ordnance; guidance, condition, attack warning Operator input/control Aiming; gun, camera (stabilization) • Industrial 12 Sensing: vibration, tilt, direction, rate Stabilization Monitoring Robotics; position, contact, feedback, etc. ADI Now owned by ADI Dual-Axis Gyroscope INERTIAL Resonant Accelerometers 3-Axis Accelerometer Z-Axis Gyroscope 13 Accelerometer Applications Automotive • • • • • • • • • • • • • • • • • • • • • • 14 ABS/Antiskid Airbag Deployment Anti-Rollover Detection Battery Disconnect Crash Alerting Dynamic Suspension Dynamic Ride Control Dynamic Cruise Control Electronic Park Brake Fleet Monitoring Fuel Shutoff Headlight Leveling Inertial Navigation – backup Misfire Detection Security/Antitheft Seatbelt Tensioning Stability Systems Tilt Sensing Tire Motion Tire Pressure Transmission Monitor Vehicle Performance Consumer • • • • • • • • • • • • • • • • • • • • • • Active Subwoofers Ambulatory Training Appliances Binoculars Blood Pressure Monitor Camcorders Stabilizer Digital Pens Digital Cameras Stabilizer Disk Drive Monitoring Game Controllers Handheld GPS Head Tracking Inertial Navigation Laptop Anti-Theft Laptop Drop Detection Joysticks Mouse - 3D Out-of-Balance Medical Devices Sleep Monitor Pedometers Sports Training – golf Sports Training – fly cast Sports Training – batting Tilt Sensing Virtual Reality I/O Wearable Computing I/O Industrial/Scientific/Military • Antenna Alignment • Antenna Switches • Construction Leveling • Machine • Health Equipment • Tilt Sensing • Fork Lift Positioning • Marine Navigation • Platform Leveling • Seat Damping • Seismic • Gas Shutoff • Satellite Dish Alignment • Satellite Gyroscopes • Ship mechanical monitoring • Shock Sensing • UAVs • UMVs • Vibration Monitoring Automotive Pressure Sensors Injector Pressure Sensor Fuel Pressure Sensor • Pressure Sensors 15 Fuel Tire Manifold Injector AC Mass air Break Fuel vapor Oil AC Pressure Sensor Pressure Sensors Thin diaphragm • Transducers Piezoresistor Capacitor Resonant beam Internal ref. pressure Transducer Vacuum Resonating beam (F1) 16 Resonating beam is now under tension; (F2) Chemical Sensors Reactive surface adsorbs gases Readily detects H2, CO, Alcohols, Hydrocarbons i Heater Chem-sensor gate; adsorbing metal like Pd Vs Adsorption lowers threshold voltage since a dipole is induced. Vd Chem-FET 17 Mechanical Transfer • Gears • Wheels • Levers • Rackets • Shuttles; walking beams • Hinge & lock • Articulated beams 18 Power Device Classes 1. Extractors using ambient energy 2. Converters: energy-1 energy-2 3. Relays for power (not signal) 4. Power controllers (beyond relays) 5. Generators using fuel 1. Uses waste energy, 2. Uses generated energy 19 Power Extractors Typically utilize machine mechanical vibrations C1 C2 Changing capacitor plate spacing generates power; reverse damper. C2 an be replaced with a magnet. Machines produce mostly 1 KHz to 5 KHz vibrations 20 Power MEMS • Chemical fuel to: Mechanical rotation, reciprocation, etc. Fluid or gas pumping force Electrical (fuel cell) Thrust; rocket Mechanical 10 to 100 watts 100 K to 1-million RPM Electrical (turbo-generator) • Photonic to electrical (really just a converter) • Mechanical, electrical to chemical (battery) 21 Gas Turbine 22 TI MOEMS: DLP on off Over 8-million parts on on on on off on Ref. “Digital Light Processing TM for High-Brightness, High-Resolution Applications” Larry J. Hornbeck, Ti.com 23 1,400,000 mirrors in one module Texas Instruments DLPTM 24 animation by kbg Session Summary • Most MEMS are directly electrically powered • Electrostatic is simplest; very popular • Bimorph is ideal for no/low wear beams • Many kinds of mechanical transfer • Sensors will remain largest market • Reliability issues on some, but not all MEMS 25