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Threshold ionization mass spectroscopy of radicals in RF silane discharge Progress report 11/19/2003 Contributors: Alan Gallagher Peter Horvath Karoly Rozsa : Design of apparatus Damir Kujundzic : Forevacuum assembly and RF Power Supply Wengang Zheng : Design of QMS for threshold ionization Schematics of TIMS apparatus Diagram of the vacuum system Discharge chamber Ionization chamber Mass Spectrometer chamber TP 1 TP 2 TP 3 Turbo Pumps Rough Pumps Current status: • The system is built • Vacuum in the chamber can reach 3x10-7 Torr • Argon and silane lines are built • Pyrolizer is tested at 900 OC with silane flow • Gauges and leak valves are calibrated for 0-10 sccm air, argon and silane flow • Hydrogen line is to be built Pyolizer Schematics of the vacuum chamber assembly Current status: • All parts are manufactured • Discharge chamber is assembled (windows are needed) • Discharge was operated in argon flow • Ionizer and mass spectrometer are to be assembled Flow test for the differential pumping Flow test with argon discharge chamber assembled -5 8x10 5.8 sccm -5 Pressure in other chambers [Torr] 7x10 Flows are obtained by previous calibration of foreline pressures -5 6x10 4.3 sccm -5 5x10 -5 4x10 3.0 sccm The ionizer & mass spec. chambers are not separated yet. -5 3x10 1.7 sccm -5 2x10 Buffer chamber Ionizer chamber Mass spec. chamber -5 1x10 0 0 100 200 300 Pressure in the discharge chamber [mTorr] 400 Electronics Current status: • New RF Power Supply for the discharge is under construction Fully computer controllable (power supply works, minor components are needed) • Data acquisition computer boards are acquired (installation is needed) QMS electronics will be identical to Wengang Zheng’s TIMS apparatus for Hot Wire Silicon Deposition experiment • The commercial Ametek QMS needed to be modified (will be discussed later) • The modified apparatus works satisfactory in the HWSD experiment • An other unit need to be modified for the discharge experiment • Software is written for HWSD experiment (Labview) • Software need to be adapted for discharge experiment Commercial Ametek QMS Rectifier (unknown) RF Amplifier Problems: • No coupling capacitor for rods • Programmable frequency (internally controlled) • RF amplitude is controlled by internal microcomputer • Unable to lock on given mass RF amplitude is tested against 4 values to get the mass peak int. • Cannot be controlled from our own computer (& unit is broken ) Comp Reference Programmable Oscillator Internal microcomputer ± ½ AMU Modified QMS Modifications: • tuning capacitor • fixed frequency oscillator • our own rectifier • our own feedback loop • external DC voltages Tunable capacitor RF Amplifier Crystal Oscillator Rectifier (our) Comp Reference from our own computer TIMS-related modifications: • Own ionizer, variable energy • Our own ion optics • Electron Multiplier Advantages: • Full control over RF and DC voltages • Full control of ionizer energy • High stability quartz oscillator • Amplitude stability by feedback Results of modification Mass scan in HWSD experiment 2.0 Original unit With broken frequency control 1 and without feedback for RF amplitude 2 Amplitude 1.5 1.0 0.5 0.0 5 10 15 20 25 30 35 40 45 Mass 6 Modified unit With stable frequency and own feedback for RF amplitude 5 Amplitude 4 3 2 1 1 0 5 10 15 20 25 Mass 30 35 40 45 by accident, IC cannot be replaced removed to gain control over RF amplitude 2 Priciples of Threshold Ionization Mass Spectrometry Threshold energies (eV) for SiHn ions from neutrals Neutral Parents Si+ SiH+ SiH2+ SiH3+ Si 8.2 SiH 11.2 9.5 SiH2 10.4 13.1 9.7 SiH3 13.1 11.3 12.5 8.4 SiH4 12.5 15.3 11.9 12.3 Operation of TIMS Sample threshold (energy) scan in HWSD experiment -3 1.2x10 W/ radicals (hot filament) -3 1.0x10 -4 Amplitude 8.0x10 -4 6.0x10 -4 4.0x10 In silane w/o radicals (cold filament) -4 2.0x10 0.0 8 9 10 11 12 13 14 Voltage applied on the cathode(-volts) 15 16 To do in the near future… • Assemble and wire the ionizer and mass spectrometer • Finish computer controlled RF Power Supply • Modify commercial QMS unit • Build our own step-up transformer and rectifier for QMS • Build computer control of MS, ionizer and ion optics • Optimize ion optics • Calibrate MS • Measurements…