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Vol. 34, No. 1 Journal of Semiconductors January 2013 Total ionizing dose effects on a radiation-induced BiMOS analog-to-digital converter Wu Xue(吴雪)1; 2; 3 , Lu Wu(陆妩)1; 2; , Wang Yiyuan(王义元)1; 2; 3 , Xu Jialing(胥佳灵)1; 4 , Zhang Leqing(张乐情)1; 2; 3 , Lu Jian(卢健)1; 2; 3 , Yu Xin(于新)1; 2; 3 , Zhang Xingyao(张兴尧)1; 2; 3 , and Hu Tianle(胡天乐)1; 4 1 Xinjiang Technical Institute of Physics & Chemistry, Chinese Academy of Sciences, Urumqi 830011, China Key Laboratory of Electronic Information Materials and Devices, Urumqi 830011, China 3 University of Chinese Academy of Sciences, Beijing 100049, China 4 Xinjiang University, Urumqi 830046, China 2 Xinjiang Abstract: The total dose effect of an AD678 with a BiMOS process is studied. We investigate the performance degradation of the device in different bias states and at several dose rates. The results show that an AD678 can endure 3 krad(Si) at low dose rate and 5 krad(Si) at a high dose rate for static bias. The sensitive parameters to the bias states also differ distinctly. We find that the degradation is more serious on static bias. The underlying mechanisms are discussed in detail. Key words: BiMOS; A/D converter; 60 Co radiation; bias state; dose rate DOI: 10.1088/1674-4926/34/1/015006 EEACC: 2570K; 2550R 2. Device structure and experimental approach 1. Introduction As critical components, analog-to-digital (A/D) converters play an important role in space and military electronic systems. However, the electrical parameters of A/D converters in these systems are affected by various particles in space through ionizing effects, displacement effects, and single-event effects, and even causing functional failureŒ1 6 . According to Refs. [7, 8], ionizing irradiation could result in a shift of threshold voltages and an increase of current leakage in MOSFETs, and also the degradation of gain in bipolar junction transistors (BJTs). Changes in these parameters can cause degradation of a device’s performance. Such degradation could threaten the reliability of spacecraft electrical systems. Consequently, it is important to research total ionizing dose effects and analyze the failure models and mechanisms for A/D converters. Total ionizing dose effects and dose-rate effects of A/D converters have been studied since the 1990sŒ1 6 . There are analog blocks and digital blocks in A/D converters and the electrical characterization testing set-up for them is complex because changes of only a few millivolts are sufficient to cause high accuracy A/D converters to exceed specification limits. So, analyzing the degradation mechanisms is not an easy job. The key point in evaluating the reliability of a device is choosing the right bias state and dose rate. In a spacecraft, not all devices are kept in an operational state and different bias states will result in different radiation responsesŒ1; 2 , so we choose different bias conditions for evaluating a device in a laboratory. In 1991, Enlow and co-workersŒ9 found that bipolar devices show enhanced low dose rate sensitivity (ELDRS). We are not sure whether BiMOS A/D converters combining bipolar and CMOS processes exhibit the ELDRS effect or not. In this paper, we discuss the bias effect and dose rate effect of one BiMOS A/D converter. The AD678 is a complete, multipurpose 12-bit monolithic A/D converter, fabricated in Analog Devices’ BiMOS process, combining a high-precision low-power CMOS logic, low noise bipolar circuits; and laser-trimmed thin-film resistors to provide high accuracy. Bipolar devices are generally used in only a few circuit areas where the low offset voltage and high transconductance of bipolar devices provide major advantages, such as the input stage of the comparator. Hence, the usual approach is to design bipolar devices that can be integrated into a CMOS process with relatively few process steps. The AD678 is designed for an easy board layout, and provides flexibility for design applications, consisting of a sample-hold amplifier (SHA), a microprocessor compatible bus interface, a voltage reference, and clock generation circuitry. A simplified functional block diagram is shown in Fig. 1. In addition to the SHA and control logic, the device utilizes a recursive subranging algorithm which includes error correction and a flash converter to achieve high speed and high resolution. Total dose irradiation experiments were executed with 60 Co -ray sources of 1 1015 Bq and 3.7 1013 Bq at the Xinjiang Technical Institute of Physics and Chemistry, at a dose rate of 25 rad(Si)/s (high dose rate) and 0.02 rad(Si)/s (low dose rate). All the samples were placed in Pb/Al boxes for accurate irradiation and divided into two bias groups: (1) zero, all the pins were grounded; and (2) static, which initialized the devices to a known state, but did not allow it to perform active conversions during the irradiation, as shown in Fig. 2. The outputs were tied to the GND through a 10 k resistor. After all irradiations were complete, the devices which irradiated at a high dose rate were annealed with the same bias condition, and the annealing time equaled the irradiation time at a low dose rate to confirm whether it had time dependent effects (TDE). Corresponding author. Email: [email protected] Received 10 May 2012, revised manuscript received 5 June 2012 015006-1 c 2013 Chinese Institute of Electronics J. Semicond. 2013, 34(1) Wu Xue et al. Fig. 1. AD678 functional block diagram. failed until 100 krad(Si) under zero bias at both dose rates. More details will be discussed below. 3.1. Radiation response between different bias states Fig. 2. Static bias state. All the tests were completed with an off-line-test method regardless of irradiation or annealing on the integrated circuits testing system according to SJ 20961-2006. 3. Experimental results There were big differences in the total dose levels of the converters with different bias conditions and dose rates. Some parameters failed at levels as low as 5 krad(Si) under a static bias condition at an HDR, whereas the power consumption Figure 3(a) describes the relationship between degradation of power consumption and total dose. It can be shown that with the increase of irradiation total dose, with static bias state and HDR, the power consumption sharply increased, whereas under the other conditions, the changes are not so obvious. The nominal power consumption of the samples is about 560 mW. Under static bias, it exceeded the maximum specification limit of 745 mW at about 5 krad(Si) and continuously increased until 10 krad(Si) at HDR, however, it was within its specification limit until reaching the same total dose at LDR. Contrarily, under zero bias, it never exceeded the limit until irradiation was over at both dose rates. So we can be sure that the degradation of power consumption was not the reason for sample failure. Figure 3(b) shows that when the HDR-irradiated converters were annealed at room temperature for nearly three months, there was some recovery for the samples that were under static bias. However for those devices under zero bias, they kept nearly constant. The input–output curve represents whether the converter function is normal or not. For a normal A/D converter, with the increase of the analog input, the output code will increase linearly and also as long as the input step is small enough, no code will be missed. Figures 4 and 5 show the relationships between the input–output curve and the total dose at an LDR. We do not give the curves at an HDR because the sample degradation trend was the same as that at an LDR. From Figs. 4 and 5, we can see that with different bias states the failure modes and failure levels were also distinct. Before irradiation, the input–output curves showed a linear relationship. However, it was found that there were some changes after irradiation. At levels as low as 3 krad(Si), with higher analog input the curve 015006-2 J. Semicond. 2013, 34(1) Wu Xue et al. Fig. 3. Power consumption of the AD678. Fig. 4. The input–output curve of AD678 with LDR. Fig. 5. The input–output curve of AD678 with LDR. became abnormal at static bias. After then, with total dose increasing, more obvious changes appeared in the curve. It is very different with degradation under zero bias. Until 50 krad(Si), we found some small changes in the curve and, also, the mode is different, as is shown in Fig. 4. After 50 krad(Si) irradiation, Code 1 was found in the output until the analog input was at about 37 LSB, and then the curve displayed good linearity. Also Code 4095 did not appear with a VFS input. That means parameters E0 (zero error) and EG (gain error) could not be measured according to their definitions. Although the curves of E0 and EG are not drawn here, we could know their changes according to the input–output curves. The differential non-linearity (DNL) and integral nonlinearity (INL) of one converter, which can be figured out according to the input–output curve, are the most important parameters of A/D converters; changes in the curve can reflect changes of DNL. The radiation responses of DNL under LDR are shown in Figs. 6 and 7. It can be seen that DNL is more sensitive under static bias than zero bias. Figure 6 shows that DNL exceeded its specification (˙1 LSB) at about 3 krad(Si). On the other hand, DNL degraded until to 50 krad(Si) at zero bias, the same as the input–output curve. The DNL characteris- 015006-3 J. Semicond. 2013, 34(1) Wu Xue et al. Fig. 6. Relationship between the DNL of the A/D converter and total dose with static bias at 0.02 rad(Si)/s. Fig. 7. Relationship between the DNL of the A/D converter and total dose with zero bias at 0.02 rad(Si)/s. Fig. 8. Relationship between the misscode of the A/D converter and total dose. tic under HDR showed the same trend as shown in Figs. 6 and 7. With higher analog input, the DNL of AD678 degraded. 3.2. Dose-rate effect Irradiation will produce oxide-trap and interface-trap charges. When the oxide-trapped charge, especially the metastable oxide trapped charge, is dominant to the ICs’ degradation, the device will exhibit TDE; otherwise, it may exhibit ELDRS. Figure 8 shows the degradation of misscode up to 150 krad(Si) for zero bias and up to 10 krad(Si) for state bias at HDR and LDR. The misscode, as shown in Fig. 8 for static bias devices at LDR, exceeded its specification at about 3 krad(Si). As for static bias devices irradiated under HDR, this parameter failed at about 5 krad(Si). Eventually, the samples at static bias were irradiated to 10 krad(Si) for observing the trend. From Fig. 8, when the samples were radiated to 10 krad(Si), the degradation at an LDR was more serious than that at an HDR. For zero bias samples, no obvious difference was found at HDR and LDR. All devices irradiated at an HDR recovered subse- quently to annealing at room temperature. Although they did not recover to their initial values, compared to the degradation value at LDR, they were smaller enough to make sure that the misscode had an ELDRS. 4. Analysis and discussion The AD678 contains different analog blocks and digital blocks, so it needs to be driven by an analog power supply (˙12 V) and a digital power supply (C5 V). We can explain the degradation of power consumption through the changes of power supply. Three operating currents versus total dose under both bias states at HDR and LDR irradiation is shown in Fig. 9. Through comparison of various conditions, we found that at static bias with HDR, the degradation was the most serious. The reasons for this are as follows: (1) for transistors (BJTs or MOSFETs), power on them could induce an electric field in the SiO2 oxide layer, which could scan the electrons produced by radiation out of the oxide layer. (2) It could produce lots of 015006-4 J. Semicond. 2013, 34(1) Wu Xue et al. Fig. 9. The normalized operating current. (a) C12 V operating current. (b) C5 V operating current. (c) dose. 12 V operating current versus total of bipolar devices provide major advantages such as the input stage of the comparator. The architecture of the samples is pipelined, and the samples contain flash A/D converter blocks. Figure 10 shows the structure of a flash A/D converter and we can see that it contains comparator blocks. The performance of a comparator, including its low offset voltage, offset current, and transfer curve is very closely related to the DNL and miscode parametersŒ12 . Studies have shownŒ5; 12 that irradiation will cause offset voltage to increase and output voltage to decrease. According to Fig. 10, they could influence the function of a decoding logic block and then the output codes. This degradation will change the input–output curve of the converter and then correspondingly the DNL value, which can be calculated by using Eq. (1). DNL.i / D fŒS.i C 1/ Fig. 10. The structure of a flash A/D converter. electron-hole pairs very quickly under an HDR and do not have enough time to recombine, so the electrons would be scanned out of the oxide layer by the electric field immediately. The remaining holes are transported to the Si–SiO2 interface, captured by the oxide-trap and interface-trap, and form oxide-trap and interface-trap charges eventually. Comparing the degradation of three operating currents, we concluded that digital current was the most sensitive. After irradiation, the value was about 13 times more than the initial one. However, the analog supply currents degraded unobviously under LDR irradiation. The digital power was supplied mainly the digital blocks, which might be processed largely by CMOS transistors in BiMOS converters. Gamma ray and leakage current effects in the CMOS transistors were more serious than that found in the BJT, including gate oxide leakage, field oxide leakage, and so onŒ8 . It is because of this that the degradation of the digital operating current was more severe than in an analog current. On the other hand, as to BJT, irradiation will also increase the base current and a produce leakage current, which is much smaller between the collector and the emitterŒ7 . So it can explain the changes of Ie . Throughout the irradiation process, no obvious degradation was found in Ic . Bipolar devices are generally used in only a few circuit areas, where the low offset voltage and high transconductance S.i /=LSBg 1; i D 1; 2; : : : ; 2N 2: (1) According to Eq. (1), when DNL(i) D –1, the code i missed. Combining Refs. [3, 10], we almost make sure that the comparators in the flash A/D converter degrade more seriously when irradiated at LDR than at HDR. When bipolar comparators are exposed to ionizing radiation, oxide-trapped charges and interface states accumulate in the screen oxides that lie over the surface of the emitter–base junction. The form of the oxide-trapped charge and interface state are correlated with the radiation-induced defects in the SiO2 , especially those near the SiO2 –Si interface and the electric field induced by irradiation. The space charge modelŒ7;12 14 illustrates radiation under different dose rates. The space field formed by oxide-trapped charge is different and this could influent the form of interface state. During radiation at HDR, lots of oxide trapped charges are produced very quickly, which could form a space field and prevent the holes or HC moving forward to the SiO2 –Si interface. Only a small amount of holes and HC can be transported to the interface and then form an interface state. However, the amount of electron–hole pairs produced by irradiation at LDR at unit time was much less than at HDR, so the space field in the SiO2 oxide layer was a little weak. Consequently, holes had moved to the interface and formed interface states. That is why the degradation was more serious when irradiated at LDR than at HDR. 015006-5 J. Semicond. 2013, 34(1) Wu Xue et al. 5. Conclusion The AD678 is very sensitive to gamma ray irradiation, especially under a static bias state. Many parameters which are very important for A/D converters failed at 10–15 krad. Digital power current is more sensitive than analog current because of the increase of leakage in internal CMOS transistors. Misscode degraded more significantly at LDR and exhibited ELDRS. The failure appears to be due to internal comparators in the converter manufactured by using a bipolar process. For mixed signal ICs such as A/D converters and D/A converters, it is very hard to evaluate and analyze the degradation mechanisms because there are many complicated analog blocks and digital blocks inside. So we need more experiments and sophisticated instruments to figure out which block is the most sensitive and fatal. References [1] Lee C I, Rax B G, Johnston A H. Total ionizing dose effects in 12bit successive-approximation analog-to-digital converters. IEEE Radiation Effects Data Workshop, Snowbird, Utah, 1993: 112 [2] Lee C I, Rax B G, Johnston A H. Total ionizing dose effects on high resolution (12/14-bit) analog-to-digital converters. IEEE Trans Nucl Sci, 1994, 41(6): 2459 [3] Lee C I, Rax B G, Johnston A H. Hardness assurance and testing techniques for high resolution (12 to 16 bit) analog-to-digital converters. IEEE Trans Nucl Sci, 1995, 42(6): 1681 [4] Youk G U. Dose rate effects of a bipolar AD converter. 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