Download Automation Solutions for Semiconductor and Flat Panel

Automation Solutions for Semiconductor and
Flat Panel Display Processing Equipment
An advanced technology partner for designers and manufacturers
Actuators and
Cylinders
Valves and
Valve
Manifolds
End
Effectors
Sensors and
Feedback
Devices
Air Preparation
Motors and
Controllers
Festo
Global partner in automation components,
controls, and engineered sub-systems for
Semiconductor, Compound Semiconductor,
and Flat Panel Display processing equipment.
Festo offers over 80 years of experience in
bringing reliable solutions to the automation
challenges facing major manufacturers around
the world. With more than $1.8 billion in sales,
consistent profitability, over 11,000 employees,
and operations in 56 countries, Festo has the
scale required for preferred supplier profitability,
and will always be here as your global partner
for automation.
Standard and clean room compatible automation
components, controls, and sub-system solutions
are available for applications throughout FrontEnd (wafer-based and flat panel-based) equipment
and Back-End (Test / Assembly / Packaging)
equipment, as well as in End-User Facility
based equipment.
Operator
Interfaces,
Controls and
I/O Devices
Electro
Mechanical
Actuators
Quality Assurance
Festo Products and services are known
internationally for their top quality and
dependable, long-life performance.
Festo was awarded the ISO 9001 Quality
Certificate by Underwriters Laboratories
for its oustanding quality assurance in
development and design, production,
installation and service.
Crystal
Pulling
Crystal
Slicing
Wafer Lapping
and Polishing
Cleaning
Product / Application Matrix
Chemical Vapor
Deposition
Oxidation
Integrated Systems
Process
Application
Integrated Control
Systems Cabinets
and Power Boxes
Air Preparation
Multi-Axis
Positioning and
Transfer Systems
Crystal Pulling
Wafer Substrate Cleaning
Spin / Coat / Develop / Bake Systems
Stand-Alone Tool or Multi-Process / MultiChamber Cluster Tool Variations of ALD, CVD,
PVD, Etch, Strip, Pre-Clean, Post-Clean,
Electroplating and Electroless Deposition
Cluster Tool CWH / EFEM (wafer and flat panel
glass substrates) / SMIF / Pod Loaders
Ion Implantation Tools
Lithography Tools
CMP Tools
Liquid Chemicals / Slurry Mixing and Delivery
Specialty Process Gas Cabinets
Back-End
Test-Assembly-Packaging
Equipment
Oxidation / Diffusion / LPCVD Reactors
Gate and Slit Valves
Front-End Process
Facilities Equipment
Fittings and
Flow Controls
Wafer Lapping and Polishing
Front-End Process
Equipment
Coat
Facility Process Gas Delivery
Process Tool Point-of-Use Exhaust Scrubbers
Wafer / Substrate Probe / Test
Die Attach
Wire Bonding
Encapsulation / Packaging
Final test
Circuit Design
Mask
Making
Physical
Vapor
Deposition
Chemical
Mechanical
Planarization
(CMP)
Wafer
Probe /
Test
Passivation
Integrated Systems
> Our Automation Systems Division provides equipment
designers with value added engineered solutions that
reduce design, assembly and production costs, while
optimizing equipment performance
> UL508A listed - design and manufacturing experience in
power distribution boxes up to 480VAC at 600 amps service
F r o m
c o n c e p t
t o
c o m p l e t i o n
Multi-Axis Systems
Custom Control Cabinets
Assemblies
Most components and sub-systems can be made available compatible to Class 10, 100, and 10,000 clean room standards, upon request.
Align and Expose
ting
Etch and
Strip Resist
Develop
and Bake
Valves
and Valve
Manifolds
Tubing
Air Pressure
Filter Regulators
Pilot Valves and
Valve Manifolds
Ion Implantation
Actuators and
Cylinders
ElectroMechanical
Actuators
Pneumatic
Actuators and
Cylinders
Sensors and
Feedback
Devices
Operator Interfaces,
Controls, and
I/O Devices
Position
Sensors
Multi-Position
Controllers
Air Logic
Arrays
Illustrations supplied and reproduced with permission from SEMI, San Jose, CA.
Die Attach
Encapsulation
and Finishing
Final Test
Dicing
Wire
Bond
Festo North America
United States
Customer Resource Center
502 Earth City Expy., Suite 125
Earth City, MO 63045
Design and Manufacturing Operations
For ordering assistance, or to find
your nearest Festo Distributor,
Call:
1.800.99.FESTO
Fax:
1.800.96.FESTO
Email: [email protected]
For technical support,
Call:
1.866.GO.FESTO
Fax:
1.800.96.FESTO
Email: [email protected]
Headquarters
Festo Corporation
395 Moreland Road
P.O. Box 18023
Hauppauge, NY 11788
www.festo.com/us
East: 395 Moreland Road, Hauppauge, NY 11788
Sales Offices
Appleton
N. 922 Tower View Drive, Suite N
Greenville, WI 54942
Boston
120 Presidential Way, Suite 330
Woburn, MA 01801
Chicago
1441 East Business Center Drive
Mt. Prospect, IL 60056
Central: 1441 East Business Center Drive, Mt. Prospect, IL 60056
Dallas
1825 Lakeway Drive, Suite 600
Lewisville, TX 75057
Detroit - Automotive Engineering Center
2601 Cambridge Court, Suite 320
Auburn Hills, MI 48326
New York
395 Moreland Road
Hauppauge, NY 11788
Silicon Valley
2800 Collier Canyon Road
Livermore, CA 94550
West: 2800 Collier Canyon Road, Livermore, CA 94550
Mexico
Canada
Headquarters
Festo Pneumatic, S.A.
Av. Ceylán 3, Col. Tequesquinahuac
54020 Tlalnepantla, Edo. de México
Call :
011 52 [55] 53 21 66 00
Fax:
011 52 [55] 53 21 66 65
Email:
[email protected]
www.festo.com/mx
Headquarters
Festo Inc.
5300 Explorer Drive
Mississauga, Ontario L4W 5G4
Calll
1.905.624.9000
Fax:
1.905.624.9001
Email:
[email protected]
www.festo.com/ca
Festo Worldwide
Argentina Australia Austria Belarus Belgium Brazil Bulgaria Canada Chile China Colombia Croatia Czech Republic Denmark
Estonia Finland France Germany Great Britain Greece Hong Kong Hungary India Indonesia Iran Ireland Israel Italy Japan
Latvia Lithuania Malaysia Mexico Netherlands New Zealand Norway Peru Philippines Poland Romania Russia Serbia Singapore
Slovakia Slovenia South Africa South Korea Spain Sweden Switzerland Taiwan Thailand Turkey Ukraine United States Venezuela
www.festo.com
Subject to change
Catalog No.: 13046658 6.06