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Table of Contents
TABLE OF CONTENTS .................................................................................................. I
TABLE OF FIGURES....................................................................................................III
A - DISCUSSION...............................................................................................................1
a.1 - C/V Profile ..................................................................................................................3
a.2 - Custom Profile.............................................................................................................4
B - MAIN CONFIGURATION.........................................................................................9
b.1 - Setup Dialog..............................................................................................................10
b.1 - Description ................................................................................................................11
b.3 - Controls.....................................................................................................................13
b.4 - Mux Loop Adjust Dialog ..........................................................................................19
b.5 - Description ................................................................................................................19
b.6 - Controls.....................................................................................................................20
b.7 - Custom File Creation Dialog ....................................................................................21
b.8 - Description ................................................................................................................21
b.9 - Controls.....................................................................................................................22
b.10 - Parameter Adjustment Dialog .................................................................................24
b.11 - Discussion ...............................................................................................................25
b.12 - Controls...................................................................................................................25
C. - QUIKLOOK SETUP................................................................................................30
c.1 - Setup Dialog..............................................................................................................31
c.2 - Description ................................................................................................................32
c.3 - Controls .....................................................................................................................34
c.4 - Custom File Creation Dialog.....................................................................................41
c.5 - Description ................................................................................................................41
c.6 - Controls .....................................................................................................................42
D - QUIKLOOK PLOT SETUP.....................................................................................45
d.1 - Setup Dialog..............................................................................................................45
d.2 - Description ................................................................................................................45
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d.3 - Controls.....................................................................................................................46
d.4 - Plot Filters .................................................................................................................47
E - CUSTOM DRIVE PROFILE FILE FORMAT ......................................................57
F - RESULTS AND DATA PRESENTATION .............................................................61
f.1 - QuikLook Data Representation .................................................................................61
f.2 - Archive Regraph........................................................................................................64
f.3 - Data Exporting...........................................................................................................67
f.4 - Export Setup ..............................................................................................................70
f.5 - Export Samples..........................................................................................................70
G - CHANGE AND VERSION RECORD ...................................................................75
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Table of Figures
Figure a.1 - Measurement Drift Correction. ..................................................................... 2
Figure a.2 - Measurement Profile at at Single Voltage Step. ........................................... 2
Figure a.3 - Tickle Voltage Detail by Voltage Sign. ........................................................ 3
Figure a.1.1 - Standard Bipolar C/V Drive Profile. .......................................................... 4
Figure a.2.1 - C/V Task Custom Drive Profile Input File. The Lines "Preset Volts" and
"Preset Pulse Width (ms)" are Valid for the Advanced C/V Task, but Should be
Eliminated Here. .................................................................................................... 6
Figure a.2.2 - Sample Custom C/V Task Drive Profile. ................................................... 7
Figure a.2.3 – Family of Custom Drive Profile Waveforms from a Single Source File. . 8
Figure b.1.1 - C/V Task Configuration Dialog - Standard Bipolar Profile. ................... 10
Figure b.1.2 - C/V Task Configuration Dialog - Custom File Profile. ........................... 11
Figure b.4.1 - Configure the Adjustment of the Multiplexer Parameters in a Branch
Loop. .................................................................................................................... 19
Figure b.7.1 - Custom Profile Input File Creation Dialog. ............................................. 21
Figure b.7.2 - Standard Windows File Browser Dialog. ................................................ 21
Figure b.10.1 - Branch Loop Parameter Adjustment Configuration Dialog. ................. 24
Figure c.1.1 - QuikLook C/V Task Measurement Configuration Dialog - Standard
Bipolar Profile. ..................................................................................................... 31
Figure c.1.2 - QuikLook C/V Task Measurement Configuration Dialog - Custom File
Profile. .................................................................................................................. 32
Figure c.4.1 - Custom C/V Profile File Creation Dialog. ............................................... 41
Figure c.4.2 - Standard Windows File Browser Dialog. ................................................. 41
Figure d.1.1 - C/V Task QuikLook Plot Configuration Dialog. ..................................... 45
Figure d.4.1 - QuikLook C/V Response - Capacitance (nF) Filter - Linear Sample. ..... 47
Figure d.4.2 - QuikLook C/V Response - Capacitance (nF) Filter - Ferroelectric Sample.
............................................................................................................................... 48
Figure d.4.3 - QuikLook C/V Response - Normalized Capacitance (µF/cm2) Filter Linear Sample. ..................................................................................................... 49
Figure d.4.4 - QuikLook C/V Response - Normalized Capacitance (µF/cm2) Filter Ferroelectric Sample. ........................................................................................... 50
Figure d.4.5 - Numerical Integration. ............................................................................. 51
Figure d.4.6 - Integration Results. .................................................................................. 52
Figure d.4.7 - QuikLook C/V Response - Charge (µC) Filter - Linear Sample. ............ 53
Figure d.4.8 - QuikLook C/V Response - Charge (µC) Filter - Ferroelectric Sample. .. 54
Figure d.4.9 - QuikLook C/V Response - Polarization (µC/cm2) Filter - Linear Sample.
............................................................................................................................... 55
Figure d.4.10 - QuikLook C/V Response - Polarization (µC/cm2) Filter - Ferroelectric
Sample. ................................................................................................................. 56
Figure e.1 - C/V Task Custom Drive Profile Input File. The Lines "Preset Volts" and
"Preset Pulse Width (ms)" are Valid for the Advanced C/V Task, but Should be
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Eliminated Here. .................................................................................................. 58
Figure e.2 - Sample Custom C/V Task Drive Profile. .................................................... 59
Figure e.3 - Two Drive Profiles Created from the same Custom Input File. .................. 60
Figure f.1.1 - C/V QuikLook Measurement Results Dialog - Linear Sample. ............... 61
Figure f.1.2 - Send QuikLook Data to a New or Existing DataSet. ................................ 62
Figure f.1.3 - DataSet Creation Dialog. .......................................................................... 63
Figure f.1.4 - New DataSet Created from C/V QuikLook Execution. ............................ 63
Figure f.2.1 - Access the C/V Data in the DataSet Archive. ........................................... 64
Figure f.2.2 - C/V Configuration Dialog Recalled from the DataSet Archive. .............. 65
Figure f.2.3 - Configure C/V Archive Regraph Plot Titles and Filters. .......................... 66
Figure f.2.4 - C/V Data Recalled from a DataSet Archive. ............................................ 67
Figure f.3.1 - Standard Windows Printer Configuration Dialog. .................................... 68
Figure f.3.2 - Export Configuration Dialog. ................................................................... 69
Figure f.3.3 - Standard Windows File Browser. ............................................................. 70
Figure f.5.1 - C/V Task Text Export File Format - Upper Portion. ................................ 71
Figure f.5.2 - C/V Task Text Export File Format - Lower Portion. ................................ 72
Figure f.5.3 - C/V Task Excel Export Output Format - Upper Portion. ......................... 73
Figure f.5.4 - C/V Task Excel Export Output Format - Lower Portion. ......................... 74
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a - Discussion
The C/V Task has been removed from the Library and QuikLook menu. The Advanced C/V is provided as the only C/V Task. Note that Advanced C/V is identical
to the C/V Task except that it provides a wider variety of standard drive profiles.
C/V is maintained in the Task directory and loaded by Vision as a legacy Task so
that data that have been archived in DataSets may be recalled.
The C/V, or Capacitance Vs Voltage, Task (also known as the Small Signal Capacitance
or SSAC Task in RT66A and RT6000 test systems) is very similar to the Hysteresis Task
in configuration, data representation and the type of data measured. Indeed, in the older
test systems, the SSAC measurement is an option under the Hysteresis measurement.
Normally a standard bipolar triangular Hysteresis-like drive voltage profile is applied to
the sample. At each voltage step along the profile, a small signal capacitance measurement is made and recorded. This differs significantly from the Hysteresis loop. In a Hysteresis measurement, a single measurement is made throughout the loop, with the integrated charge being sampled at each step voltage. For the C/V Task, a distinct capacitance measurement is made at each step voltage.
At each step voltage in the profile a complex series of small signal stimuli are applied to
the sample as shown in Figure a.2. The first period entered is the Step Delay. This is a
fixed 1 ms delay at the step voltage. The Step Delay is followed immediately by the Soak
Time. This is a period of simple delay during which not additional stimulus is provided
and no measurement is made. The purpose of the Soak delay is to allow currents induced
by the application of the step voltage to settle, so that the sample is at a steady state current condition. The duration is under user control. The next period is a sequence of one to
thirty small signal pulses to the tickle pulse voltage and of pulse width duration. No measurement is made during this period. The purpose of the series of pulses is to preset the
sample so that pulses performed during the measurement do not induce any remanent polarization switching. The next segment of the C/V measurement at a single step voltage
applies the pulse tickle voltage continuously for a period equal to the preset and pulse
measurement periods. This is equivalent to between two and sixty times the pulse width.
Once the additional tickle voltage is applied, measurements are made at regular intervals
that agree with the sample period of the actual pulse measurements. This leakage measurement is used to characterize natural drift of the current through the sample with the
application of a continuous DC Step Voltage. This drift will be recorded and subtracted
from the pulse measurements to eliminate drift noise as shown in Figure a.1 below.
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Figure a.1 - Measurement Drift Correction.
Only once all of these signals are applied at the step voltage is the actual measurement
made. The target parameter is the response of the sample to a single pulsed application of
the tickle voltage at the step voltage. However, since the tickle voltage is small, the response is equally small and is subject to noise from a variety of sources. To provide an
accurate sample response, the measurement is made one to thirty times and the accumulated value is averaged to produce the final reported value.
Figure a.2 - Measurement Profile at at Single Voltage Step.
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Figure a.3 shows the tickle voltage superimposed on the step. It shows how the direction
of the tickle voltage, relative to the direction of the step, is controlled by the sign of the
tickle voltage.
Figure a.3 - Tickle Voltage Detail by Voltage Sign.
It should begin to become apparent that the C/V measurement is a lengthy process. The
delay at a single step voltage is given by:
1 ms (Step Delay) + Soak Time + 6 * Pulse Count * Pulse Width
The minimum total delay is this value times the number of specified points. The duration
may be further lengthened by repeated measurements at any step voltage as the amplification level is adjusted throughout the C/V loop.
a.1 - C/V Profile
The discussion above details the measurement profile at a single voltage step. The overall
C/V measurement profile consists of a series of such steps of number specified by the
user. Normally the measurement profile will be an automatically generated Standard Bipolar Triangular waveform familiar to the users of the Hysteresis Task. The waveform
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can be completely specified by providing VMax, the number of points and the Profile Offset. The voltage begins at 0.0, rises to VMax at 1/4 the points, falls to -VMax and then returns
to 0.0. The voltage step between each sample point is uniform. With a negative VMax specified the voltage profile inverts, falling to the negative value first before rising to -VMax.
The number of points will be an integer multiple of four plus one. The user-specified
number of points will be adjusted if necessary to meet this criterion. The profile is normally symmetric in voltage, starting and stopping at zero volts. However a profile offset
may be specified that is a DC Bias value that is added to every point in the profile, shifting it up or down in voltage without distorting the shape, resulting in a profile that is
asymmetric in voltage. The user must ensure that the Profile offset combined with ±VMax
does not exceed the voltage capability of the hardware as it is configured.
Figure a.1.1 - Standard Bipolar C/V Drive Profile.
a.2 - Custom Profile
A second drive profile option exists that allows the user to create an overall stimulus
waveform of any custom shape. This is accomplished by individually and independently
stipulating every voltage in the profile. The profile, along with the other waveform parameters including number of points, soak time, pulse width, pulse voltage and pulses to
average, is entered through a strictly-formatted text input file. The file format is...
Line 1:
Line 2:
Line 3:
Line 4:
Number of points in the custom drive profile. No limit or criterion is placed on this
value. The number of voltage entries in the file must agree with this value.
The soak time in milliseconds. Value ranges from 1e-3 to 30,000.0.
The number of repetitive C/V pulses to perform and average. Value ranges from 1
to 30.
The tickle or pulse voltage to apply during the C/V measurement. This value
should be very small. 0.06 volts is default.
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The pulse width of the measurement pulse in milliseconds. Value ranges from 1e-3
to 30,000.0.
Line 6 to Points + 5: A sequential list of the voltages to be applied in the profile. Voltages are independent. The allowed range is determined by the hardware to be used. There must be as
many lines with valid voltages as there are points specified on line one.
Line 5:
Figure a.2.1 shows a portion of a valid custom input file for the C/V Task. Note that
there are in-line comments. These are permitted provided they follow the value entry in
the line and are separated from the value by at least one space. The file must be text-only.
It may be created by a text editor such as Notepad.exe. If a Word processor is used, the
file must be saved as text only. A word processor formatted file includes binary header
information that cannot be read by Vision. The file may also be created in a spreadsheet
and output as a text-only file.
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Figure a.2.1 - C/V Task Custom Drive Profile Input File. The
Lines "Preset Volts" and "Preset Pulse Width (ms)" are Valid
for the Advanced C/V Task, but Should be Eliminated Here.
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The sample custom drive profile set in the file shown above is plotted below.
Figure a.2.2 - Sample Custom C/V Task Drive Profile.
A custom file profile may be create "Automatically" with the help of a dialog available
from both the QuikLook and Test Definition configuration dialogs. The dialog ensures
file correctness, but is not practical for large profiles (> 100 points). Dialog details are
presented in the configuration discussions.
When the custom file input is selected, most profile configuration parameters are disabled
in the configuration dialogs. However, the VMax parameter and the Profile Offset remain
enabled. This is because a single custom file can be used as a template for a family of
profiles that retains the basic profile shape, but translated and/or scaled. Whenever a custom file is read, the voltage of maximum absolute value is read and becomes VMax in the
configuration dialog. However, VMax may be changed. When the file is actually used to
drive the sample, it is scaled by:
VMax / File voltage of maximum absolute value
Entering the same file into the C/V Task, but adjusting VMax, therefore, allows the pro7
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file to be scaled and reused as a different profile. Entering a VMax of the opposite sign of
the voltage of maximum absolute value will invert the profile.
Likewise, as with the standard bipolar triangular profile, the custom voltages can be
translated up or down by entering a non-zero Profile Offset. Profile Offset is a voltage
value that is added to every point in the custom profile. A negative value will shift the
profile down, while a positive value translates it upwards. The user must take care that at
no point in the profile does the combined scaled file value and offset produce a voltage
that is greater in magnitude than the capability of the hardware being used. The figure
below shows the original profile as well as a profile scaled to -1/3 and shifted upwards by
5.5 Volts. This is accomplished by change VMax to +5.0 and the offset to +5.5.
Figure a.2.3 – Family of Custom Drive Profile Waveforms
from a Single Source File.
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b - Main Configuration
Task Name:
Version:
Last Update:
In QuikLook Menu:
Folder:
Subfolder:
Subsubfolder:
Window Name:
Change Record:
Known Bugs:
User Variables Added:
C/V
3.1.0
03 April 2002
No
None
None
None
C/V QuikLook::C/V QuikLook Setup
Go to Change Record
None
None
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b.1 - Setup Dialog
Figure b.1.1 - C/V Task Configuration Dialog - Standard Bipolar Profile.
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Figure b.1.2 - C/V Task Configuration Dialog - Custom File
Profile.
b.1 - Description
This dialog fully configures the C/V Task for inclusion in a Test Definition, for execution
within a DataSet. All parameters necessary for complete Task specification are present.
The upper left section of the dialog has controls to configure the waveform and the small
signal pulse stimulus that forms the C/V measurement. In addition the Task is named and
the sample parameters Area and Thickness are specified. Area and Thickness are mostly
informational but Area is also used in computing the measured capacitance, so must be
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properly entered. The lower left portion of the dialog provides sample information. These
parameters have no effect on the behavior of the Task or the value of the measured data.
The external sensor is also enabled in this region. The right half of the dialog deals with
the hardware configuration. If external amplifiers and/or multiplexers are to be used, they
are configured here. Internal test elements can be switched into the signal path here as
well. Finally the amplification level can either be selected or set to automatic. Note that
the C/V measurement is a very slow test. Selecting Automatic amplification will dramatically increase the duration of the experiment.
Two nearly identical dialogs appear above. The first dialog shows the configuration of a
Standard Bipolar Triangular drive voltage stimulus waveform. This is the typical applied
stimulus. The waveform is computed from the number of points and the VMax value.
Additional parameters configure the small signal stimulus at each step. The second dialog
shows the Task configured to perform a custom drive profile read from a file. Most standard configuration controls have been disabled. New controls, not evident in the first dialog, appear to browse to the file that holds the custom configuration, or open a dialog that
will allow the creation of a custom profile file. Once the file is created and read, control
parameters are updated based on the file input. The VMax and Profile Offset controls remain active, since they can be used to alter the basic custom waveform as described below.
Three new controls have been added in Version 3.1.0.
y
y
Custom Amplifier - This radio button has been added to the External Amplifier
list. This control allows the user to attach an existing amplifier (not provided by
Radiant Technologies) to the experiment. The user must provide RTI the amplifier specifications such as voltage range, gain factor and maximum rise time. RTI
will then provide the user with an identifying module that will allow the amplifier
to be connected to the HVI.
Sensor Impedance - This is added to the suite of sensor controls. This control specifies an integer output impedance of the instrument attached to the Sensor port.
The sensor output impedance in series with the Precision input impedance (currently about 4 k-Ω) make a voltage divider that distorts the measured voltage by:
Measured = Actual x 4k / (4k + Sensor Impedance).
y
If the sensor output impedance is large with respect to the 4k input impedance, the
distortion will be significant. This control accepts a value that is used to correct
this distortion.
Start at Last Amp Value. When Auto Amplification is checked, the system will
begin to search for the correct amplification level by using the value specified in
the Amp Level control, even though the control is disabled. Checking the new
control will force the search to start at the amplification level that was established
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in the last measurement.
b.3 - Controls
Control
C/V Task Name
Type
Text
Default
C/V-#
Points
Integer
101
VMax
Real
5.0
Soak Delay
Real
1.0
Profile Offset
Real
0.0
Description
30 characters maximum. Provide an identifier for the C/V
Task being configured. The Task will be referred to using this
identifier in the DataSet Archive. The name should be descriptive and unique to this instance of the Task.
1 or greater. This is the number of voltage steps that will form
the drive profile. It is also the number of measured values that
will be reported. For Standard Bipolar profiles, this value
must be an integer multiple of four, plus one. A value of 1
may be entered. In that case a single measurement point will
be made at VMax. The software will automatically set the
number of points to the criterion if the value entered is not an
integer multiple of 4 plus one. If the Drive Profile Type is set
to "From File", the points control becomes read only. It is
adjusted to the number of points read in the file. In the custom
file configuration, no criterion is placed on the number of
points. This value is critical to predicting the duration of the
experiment. When it is altered, the Run Time control will be
updated.
-10,000.0 to 10,000.0. This is the key parameter in building a
standard bipolar drive profile. The drive voltage profile will
step from zero volts to this value, back to zero volts, to -VMax
and back to zero volts. If this value is negative, the first leg of
the profile will be of negative voltage. The VMax control remains enabled if Drive Profile Type is set to "From File".
VMax is updated when the file is read to the voltage of maximum absolute value in the profile. However, the value can
then be changed to scale the custom profile so that it retains
its original shape but achieves different voltage values.
In milliseconds. 1e-3 to 30,000. Once the drive profile has
stepped to a voltage a fixed 1.0 ms delay occurs. Then a usercontrollable second soak delay of this duration occurs before
any small signal stimulus is applied to the sample. The purpose of the delay is to allow any current induced by the voltage step to dampen so that the sample is at a steady state current condition. If the Drive Profile Type is set to "From File",
the points control becomes read only. It is updated by the
value read from the custom input file. This value is critical to
predicting the duration of the experiment. When it is altered,
the Run Time control will be updated.
-10,000.0 to 10,000.0. This is a voltage value that can be added to either the standard bipolar or custom waveform profiles
to translate the profile up or down. This value is not read from
a custom file, but the control remains active if the Drive Profile Type is set to "From File". Care must be taken by the user
that the combination of this value and of the drive profile values, whether custom or standard bipolar, do not exceed the
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Tickle Pulse Volts
Tickle Pulse Width
Pulses to Average
Run Time
Area
Thickness
Drive Profile Type
Adjust Parameters
in a Branch Loop
File Browse (>>)
File Name
capabilities of the amplifier under use.
-10,000 to 10,000. This is the value of the small signal voltage applied during each stimulus period at each step voltage.
The value is normally very small with respect to the step voltage. If the Drive Profile Type is set to "From File", the points
control becomes read only. It is updated by the value read
from the custom input file.
Real
1.0
In milliseconds. 1e-3 to 30,000. This is the duration of a single pulse in the small signal measurement of capacitance. It is
also the duration between pulses when multiple pulses are
used. This value is critical to predicting the duration of the
experiment. When it is altered, the Run Time control will be
updated. If the Drive Profile Type is set to "From File", the
points control becomes read only. It is updated by the value
read from the custom input file.
Integer
25
1-25. This is the number of small signal pulses to be used in
making the capacitance measurement at each step voltage.
Since the signal applied is very small, the measurement is
noise-prone. Increasing this value will reduce the noise in the
data. The drawback is that it also increases the duration of the
Task execution. If the Drive Profile Type is set to "From
File", the points control becomes read only. It is updated by
the value read from the custom input file. This value is critical
to predicting the duration of the experiment. When it is altered, the Run Time control will be updated.
Real
18.1 s In seconds. Read-Only. This control is updated when any of
the controls that affect the experiment duration is updated. It
is a prediction of the duration of the Task execution. As a
result of repeated measurements if Auto Amplification is selected as well as the accumulation of other small software
delays, this estimate will always be low.
Real
1e-4
In cm2. This is the surface area of the sample electrode. This
value is informational, but is also used in computing measured data. A mis-entered value will result in mis-scaled data.
Real
0.3
In µm. This is the thickness of the ferroelectric material in the
sample. The value is strictly informational.
List Box Standard This control switches between an automatically computed
Bipolar Standard Bipolar Triangular drive voltage profile and a custom profile read in from an input file. With "Standard Bipolar" selected, Points, Soak Delay, Tickle Pulse Volts, Tickle
Pulse Width and Pulses to Average are all enabled. File
Browse, File Name and Create File? are all hidden. With
"From File" selected, these conditions are reversed.
Check Box Unchecked Selecting this control opens a sub-dialog that permits various
C/V parameters to be adjusted if the Task is programmed into
a Branch Loop. See the discussion below.
Button Unpressed This button opens the standard Windows file browser so that
the custom input file can be located. This button is hidden
when Drive Profile Type is "Standard Bipolar", but visible
when the type is "From File".
Text
""
Read-only. This control shows the path and file name of the
Real
0.2
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custom input file. It is updated when an input file is browsed
and properly read or when a new file is created. The control is
read-only meaning that it cannot be used to input the file path
and file name. It is informational only. The control is hidden
when Drive Profile Type is "Standard Bipolar", but visible
when the type is "From File".
Create File?
Button Unpressed When Drive Profile Type is "From File" this control opens a
dialog that allows a new custom drive profile file to be created and stored as discussed below. The control is hidden
when Drive Profile Type is "Standard Bipolar".
Sample Name
Text
""
24-characters maximum. An identifier used to describe the
sample being tested.
Lot ID
Text
""
12-characters maximum. An identifier used to describe the lot
from which the sample being tested comes.
Wafer ID
Text
""
12-characters maximum. An identifier used to describe the
wafer on which the sample being tested is located.
Die Row
Integer
0
A value used to indicate the y position on the wafer of the die
on which the sample under test is located.
Die Column
Integer
0
A value used to indicate the x position on the wafer of the die
on which the sample under test is located.
Capacitor Number Integer
0
A value used to indicate the position of the sample on the die.
Sensor Enable Check Box Unchecked An external voltage may be captured simultaneously with the
capacitance measurement during the C/V Task execution. The
voltage might be produced by any instrument that produces a
voltage as a result of some physical property such as temperature, displacement, etc. The voltages are captured, displayed
and stored along with the measured capacitance. This control
enables the capture of the external voltage. Enabling this control also enables Sensor Scale, Sensor Offset, Sensor Label
and Sensor Impedance.
Sensor Scale
Real
1
When an external voltage is read it is normally linearly related to some physical property. That property can be recovered by...
Property = mX + b
where X is the measured voltage and m and b are scale and
offset terms. This control is used to enter the scale term, m.
The control is disabled if Sensor Enable is unchecked.
Sensor Offset
Real
0
When an external voltage is read it is normally linearly related to some physical property. That property can be recovered by...
Property = mX + b
where X is the measured voltage and m and b are scale and
offset terms. This control is used to enter the offset term, b.
The control is disabled if Sensor Enable is unchecked.
Sensor Label
Text
""
12-characters maximum. If the external sensor voltage is read,
its converted value will be displayed along with the measured
capacitance when recalled from the Archive. This label will
be associated with the sensor trace on the plot. This control is
disabled if Sensor Enable is unchecked.
Sensor Impedance Integer
50
Enter the output impedance of the instrument attached to the
sensor port. Provides a correction to the measured value as
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Internal Amplifier
External Amplifier
y ±500 V
y ± 2,000 V
y ±4,000 V
y ±10,000 V
y Custom
Amp
HVI Comm Port
HVI Channel
discussed above. This control is disabled if Sensor Enable is
unchecked.
Radio But- Checked One, and only one, of five possible voltage signal amplifiers
ton
must be selected to indicate the voltage scaling, voltage limits
and the hardware to be used to produce the voltage. The Internal Amplifier button indicates that the voltage is to be generated by the Precision tester without the need to attach an
external accessory High Voltage Interface (HVI) or High Voltage Amplifier. With this option selected, voltages are limited
to ±100.0 Volts. This criterion is not checked until the Task is
executed. With this control checked, HVI Comm Port and
HVI Channel are disabled and forced to values of 0.
Radio But- Unchecked One, and only one, of five possible voltage signal amplifiers
ton
must be selected to indicate the voltage scaling, voltage limits
and the hardware to be used to produce the voltage. These
four radio button each select an external amplifier connected
to the Precision tester through a High Voltage Interface
(HVI). In order for the Task to execute, the selected amplifier
must be connected to the tester through an HVI at the HVI
channel specified in HVI Channel. The HVI must be connected to the tester at the HVI port specified in HVI Port. The
checking for the external accessories and their configuration
occurs at execution time so that the Task may be configured
with the hardware disconnected or turned off. The specified
voltages are constrained to be less than or equal to the maximum voltage of the selected amplifier. This too is checked at
execution time. Care must be taken that the combined specified voltage and Profile Offset value remains within the voltage range. If any of these external amplifiers is selected, HVI
Comm Port and HVI Channel are enabled and set to a new
default value of 1.
Custom Amp was added as of Version 3.1.0. See the discussion above.
Integer
0
0, 1 or 2. If an external amplifier is selected to produce the
drive signals, the amplifier is connected to the Precision tester
through a High Voltage Interface (HVI). The HVI is connected to the tester at one of two DB-25 connectors on the
rear panel of the tester. This control selects the DB-25 connector at which the software is to look for the HVI and the
amplifier. A '0' value indicates that no HVI is to be used.
When Internal Amplifier is selected, this control is disabled
and forced to a '0' value. When any other amplifier is selected
the control is enabled and preset to a default value of '1'. The
control can then be adjusted to a value of '2', but may not be
set to '0' when an external amplifier is selected. An HVI must
be located at the port specified. This is checked at Task execution time so that the Task may be configured with the
hardware absent or turned off.
Integer
0
0, 1 or 2. If an external amplifier is selected to produce the
drive signals, the amplifier is connected to the Precision tester
through a High Voltage Interface (HVI). The HVI has two
channels to which up to two High Voltage Amplifiers may be
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Drive Channel
Integer
0
Drive Port
Integer
0
Return Channel
Integer
0
Return Port
Integer
0
connected. This control selects the channel to which is connected the required amplifier. A '0' value indicates that no
HVA is to be used. When Internal Amplifier is selected, this
control is disabled and forced to a '0' value. When any other
amplifier is selected the control is enabled and preset to a
default value of '1'. The control can then be adjusted to a value of '2', but may not be set to '0' when an external amplifier
is selected. An amplifier of the specified voltage range must
be attached to the HVI at the specified channel. This is
checked at Task execution time so that the Task may be configured with the hardware absent or turned off.
0-48. An accessory 48-channel multiplexer may be connected
to the Precision tester. The multiplexer is normally used to
route drive and return signals to various samples connected to
the multiplexer using a probe card. This control selects the
multiplexer channel through which to route the drive signal.
A '0' indicates that no multiplexer channel is to be used. If a
non-zero value is selected the multiplexer must be attached to
the Precision tester. This is checked at Task execution time so
that the Task may be configured with the hardware absent or
turned off. If a zero value is entered into this control, Drive
Port is disabled.
0, 1 or 2. An accessory 48-channel multiplexer may be connected to the Precision tester. The multiplexer is normally
used to route drive and return signals to various samples connected to the multiplexer using a probe card. The multiplexer
may be connected to the tester at one of two DB-25 connectors on the tester rear panel. This control selects the DB-25
connector to which the multiplexer that is to route the drive
signal is connected. A '0' indicates that no multiplexer channel is to be used. If a non-zero value is selected the multiplexer must be attached to the Precision tester. This is
checked at Task execution time so that the Task may be configured with the hardware absent or turned off. If a zero value
is entered into the Drive Channel control, this control is disabled.An accessory 48-channel multiplexer may be connected
0-48.
to the Precision tester. The multiplexer is normally used to
route drive and return signals to various samples connected to
the multiplexer using a probe card. This control selects the
multiplexer channel through which to route the return signal.
A '0' indicates that no multiplexer channel is to be used. If a
non-zero value is selected the multiplexer must be attached to
the Precision tester. This is checked at Task execution time so
that the Task may be configured with the hardware absent or
turned off. If a zero value is entered into this control, Return
Port is disabled.
0, 1 or 2. An accessory 48-channel multiplexer may be connected to the Precision tester. The multiplexer is normally
used to route drive and return signals to various samples connected to the multiplexer using a probe card. The multiplexer
may be connected to the tester at one of two DB-25 connectors on the tester rear panel. This control selects the DB-25
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Adjust Mux in a
Loop
Check Box Unchecked
Enable Ref. Cap. Check Box Unchecked
Enable Ref. Resis- Check Box Unchecked
tor
Drive Closed
Check Box Checked
Return Closed
Check Box Checked
Amp. Level
List Box
1.0
Start at Last Amp Check Box Unchecked
Level
Auto Amplification Check Box Checked
connector to which the multiplexer that is to route the return
signal is connected. A '0' indicates that no multiplexer channel is to be used. If a non-zero value is selected the multiplexer must be attached to the Precision tester. This is
checked at Task execution time so that the Task may be configured with the hardware absent or turned off. If a zero value
is entered into the Return Channel control, this control is disabled.
Checking this box opens a dialog that can be used to select up
to 15 Drive and Return channel and port combinations. These
combinations will be sequenced through if the Task is located
in a Branch Loop. See the discussion below.
An internal high precision 1.0 nF reference capacitor may be
switched into the drive and return signal path for measurement. The purpose is for hardware and software validation
and calibration. This internal test element will be placed into
the signal path in parallel with the internal reference resistor
(if it is enabled) and with any attached sample.
An internal high precision 25 M-Ohm reference resistor may
be switched into the drive and return signal path for measurement. The purpose is for hardware and software validation
and calibration. This internal test element will be placed into
the signal path in parallel with the internal reference capacitor
(if it is enabled) and with any attached sample.
This control switches the relay that connects the drive signal
to the sample and places the drive voltage into the signal path.
This control would normally never be unchecked. However, it
may be unchecked in order to measure system response with
no drive signal to determine system parasitics.
This control switches the relay that connects the sample return channel to the measurement circuitry, completing the
signal path. This control would normally never be unchecked.
However, it may be unchecked in order to measure system
response with no return signal to determine system parasitics.
The return signal that is captured from the sample as a result
of the drive stimulus is integrated to produce a measured value. Before the signal is integrated it is passed through an amplifier with eight switchable gain levels. This control selects
the signal gain level. The control is disabled if Auto Amplification is enabled. The utility of deselecting Auto Amplification and manually setting the gain is that Auto Amplification
repeatedly applies the signal and adjusts the gain until the
return signal is of acceptable strength. If unrecorded stimulus
to the sample is unacceptable, the amplification level should
be set manually.
Instructs the Hardware Driver to begin looking for the proper
amplification level by setting the amplification level selected
for the previously executed Measurement Task. This control
is disabled if Auto Amplification is disabled.
The return signal that is captured from the sample as a result
of the drive stimulus is integrated to produce a measured val-
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Comments
Text
Help
OK
Button
Button
Cancel/Plot
Button
ue. Before the signal is integrated it is passed through an amplifier with eight switchable gain levels. When this control is
enabled, the amplification level is automatically adjusted.
This is done by repeatedly applying the drive signal, then
adjusting the amplification level until the return signal is of
acceptable strength. This lengthens any experiment and applies signals that are unrecorded before the measurement. If
these conditions are not acceptable, this control should be
disabled. Checking this control disables Amp. Level. but enables Start at Last Amp Level.
""
255-characters maximum. A place for the user to provide a
detailed description of the Task and its use in the experiment.
Unpressed Read this help page.
Unpressed Accept the configured values and add the C/V Task to the
Test Definition or update its configuration in the Test Definition.
Unpressed Close the dialog but to not add or update the C/V Task to the
Test Definition. If the Task is recalled from the DataSet Archive, this button will close the dialog and cause the Archived
data to be displayed.
b.4 - Mux Loop Adjust Dialog
Figure b.4.1 - Configure the Adjustment of the Multiplexer Parameters in a Branch Loop.
b.5 - Description
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Checking the Adjust Mux in a Loop control allows the C/V Task to change the Multiplexer channels provided it is located within a Branch Loop. This, in turn, allows multiple capacitors to be fully measured automatically without reconfiguring the program or
adjusting hardware. When the control is checked, the dialog in the Figure above appears,
Allowing up to fifteen loop cycles to be independently programmed. (Loop cycles exceeding fifteen will repeat the channel sequencing.). In the example samples 1 through 4
have their Drive Signal Connected to a common multiplexer attached to DB-25 port 1.
Sample 5 is connected to a separate mux attached to Port 2. Return signals for samples 1,
2 and 5 are common and connected to the same channel (2) of the mux at port 1. Samples
3 and 4 also have common return signals connected to channel 2 of the second multiplexer at port 2.
b.6 - Controls
Name
Loop Count
Type Default
Integer 0
Drive Channel n
Integer
Drive Port n
Integer
Return Channel n Integer
Return Port n
Integer
Help
Okay
Cancel
Button
Button
Button
Description
0-15. Indicates the number of unique Drive and Return Channel
and Port sequences to be iterated. The value entered here enables or
disables the Drive Channel n, Drive Port n, Return Channel n and
Return Port n controls depending on n and the Loop Count selected.
0
The Drive Channel on the multiplexer to be enabled when the
Branch Loop iteration mod n = 0. This control is disabled unless
Loop Count >= n.
0
The DB-25 connector on the rear of the Precision tester to which
the multiplexer is connected whose channel is to be attached to the
Drive Signal when the Branch Loop iteration mod n = 0. This control is disabled unless Loop Count >= n.
0
The Return Channel on the multiplexer to be enabled when the
Branch Loop iteration mod n = 0. This control is disabled unless
Loop Count >= n.
0
The DB-25 connector on the rear of the Precision tester to which
the multiplexer is connected whose channel is to be attached to the
Return Signal when the Branch Loop iteration mod n = 0. This control is disabled unless Loop Count >= n.
Unpressed Call up a dialog-specific help page.
Unpressed Accept the programmed values and enable the Branch Loop update.
Unpressed Close the dialog and disable the Branch Loop update.
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b.7 - Custom File Creation Dialog
Figure b.7.1 - Custom Profile Input File Creation Dialog.
Figure b.7.2 - Standard Windows File Browser Dialog.
b.8 - Description
The dialog in Figure b.7.1 appears when the Create File? button is clicked. This dialog
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is used to create a custom input file. It utility is that is guarantees a correct file format and
automatically comments its output file. However, the dialog option is tedious when trying
to construct a file of more than a few step voltages. (More than 100 points is impractical.)
Such file might be created using a text editor such as Notepad.exe. They can be created
using a word processor provided the file is saved as Text type and not as a standard word
processor file. A more practical solution may be to create the file in a spreadsheet such as
Excel and exporting it to a text-only file format. The file may then need some additional
editing in a text editor such as Notepad.
The dialog is used to specify the various C/V parameters include number of sample
points, soak time, pulse volts and pulse width. Then each of the sample voltages is independently specified and added to the list until the number of points is reached. Voltages
may be independently selected and removed or the entire list cleared.
Figure b.7.2 is the standard Windows file browser that appears when the browser (>>)
button is clicked. It is used to select a file path and file name for a pre-existing C/V custom input file when the custom profile option is selected.
b.9 - Controls
Control
Number of Points
Type
Integer
Help
Soak Time
Button
Real
Pulse Volts
Real
Pulse Width
Real
Pulses to Average
Integer
Default
101
Description
The total number of voltage steps to be applied during the
custom drive profile. This number must match the number of
voltage entries in the file. The value in this control combines
with the Set Point # value to control the Add button. When
Set Point # exceeds Number of Points, the Add button is disabled and the Save As button enabled. The Add button may
be reenabled by adjust the number of points.
Unpressed Read this help page.
1.0
In milliseconds. 1e-3 to 30,000.0. Once the drive profile has
stepped to a voltage a fixed 1.0 ms delay occurs. Then a user-controllable second soak delay of this duration occurs
before any small signal stimulus is applied to the sample.
The purpose of the delay is to allow any current induced by
the voltage step to dampen so that the sample is at a steady
state current condition.
0.2
-10,000.0 to 10,000.0. This is the value of the small signal
voltage applied during each stimulus period at each step voltage. The value is normally very small with respect to the
step voltage.
1.0
In milliseconds. 1e-3 to 30,000. This is the duration of a
single pulse in the small signal measurement of capacitance.
It is also the duration between pulses when multiple pulses
are used. This value is critical to predicting the duration of
the experiment.
25
1-25. This is the number of small signal pulses to be used in
making the capacitance measurement at each step voltage.
Since the signal applied is very small, the measurement is
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Set Point #
Integer
1
Voltage To
Real
Uninitialized
Add
Button
Unpressed
Delete Line
Button
Unpressed
Delete All
Button
Unpressed
Point #
Integer List
Empty
Voltage
Real List
Empty
noise-prone. Increasing this value will reduce the noise in
the data. The drawback is that it also increases the duration
of the Task execution.
Read-Only. An indicator that shows the next voltage point to
be added to the Voltage list. This value is incremented by the
Add button. It is decremented by the Delete Line button and
reset to a value of '1' by the Delete All button. When the value in this control exceeds Number of Points, the Add button
is disabled. The Save As button is enabled when the control
exceeds Number of Points.
-10,000.0 to 10,000.0. The next voltage to be added to the
list of voltages is entered into this control. When the Add
button is clicked the voltage in this control is highlighted and
the focus is set to the control so that the next voltage can be
added without having reselect the control. When Add is
clicked the voltage in this control is added to the end of the
Voltage list box.
This control adds the voltage in Voltage To to the end of the
list in the Voltage list box. It increments the value in Set
Point #. When Set Point # exceeds Number of Points, Add is
disabled. It may be reenabled by deleting lines from the Voltage list box, clearing the Voltage list box or increasing
Number of Points. When Add is clicked, the focus is set on
Voltage To and the value in that control is highlighted. This
allows the changing of voltages in Voltage To to be accomplished without having to reselect the control.
Any single value in the Voltage list box may be selected.
When Delete Line is clicked that value will be removed from
its position in the Voltage list. The Point # control will be
truncated by one entry. The Set Point # control will be decremented. This action may cause the Add button to be reenabled if it was disabled.
Pressing this button will cause the Voltage and Point # list
controls to be emptied. Set Point # will be reset to a value of
'1'. If the Add button was disabled, it will be reenabled.
Read-only. This is a sequential and serial list of values. It is
positioned adjacent to the Voltage list and simply indicates
the position in the Voltage list of any entry in the list. When
Add is clicked this list has the next serial value appended to
it. That last entry becomes highlighted. When a value is selected in the Voltage list, the adjacent value is selected in the
Point # list. If Delete Line is pressed, the Point # list will be
truncated by one value. The number of entries in this list will
be the value in Set Point # less one.
This is a sequential list of the step voltages that are to form
the C/V measurement profile. When Add is clicked the value
in Voltage To is appended to this list and that value is highlighted. Any other entry in the list may be selected. When
Delete Line is clicked the selected entry will be removed
from its position in the list. Delete All will empty the list.
The number of entries in this list will be the value in Set
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Save As
Button
OK
Button
Cancel
Button
Point # less one.
Unpressed This control opens the standard Windows browser dialog.
This allows the user to identify a path and filename to save
the currently configured profile. If this action is not taken,
the OK control will not allow the user to leave the Create
File? dialog. This control is disabled unless Set Point # exceeds the value in Number of Points. Once a file has been
saved the OK control is enabled.
Unpressed This control exits the dialog. The control will not permit the
user to exit the dialog unless a file has been saved. In order
to exit without saving, use the Cancel control. The control is
disabled until a file has been saved.
Unpressed This control exits the dialog. No file need be saved to use
this control.
b.10 - Parameter Adjustment Dialog
Figure b.10.1 - Branch Loop Parameter Adjustment Configuration Dialog.
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b.11 - Discussion
When Adjust Parameters in a Branch Loop is switched from unchecked to checked, the
subdialog of Figure 6 appears. When the C/V Task is programmed into a Branch Loop,
most of the profile creation parameters can be adjusted from loop iteration-to-iteration.
When this option is enabled for a parameter, the initial loop will use the normally programmed parameter value as a baseline. Subsequent loop iterations will adjust the parameter value by either scaling the previous value by a constant factor or incrementing it
by a constant value. Minimal restrictions are placed on the scale factor or increment.
These will be real-valued unless the parameter being adjusted is an integer, such as the
loop point count. For voltages, negative scale factors are permitted. If the scale factor is
negative, the parameter will alternate between positive and negative as it is iterated. Scale
factors of absolute value less than 1.0 and negative increments are generally permitted so
that a parameter may be reduced from its initial value as the Task is iterated. The user
must take care that the combination of initial value, scale factor or increment and maximum possible number of Branch Loops will not combine to eventually produce a parameter value that is outside the capability of the Precision configuration.
b.12 - Controls
Name
Type
Default
Discussion
Adjust C/V Soak Time in a Check Box Unchecked Enables the adjustment of the pre-measurement delay
Loop
at the step voltage in a Branch Loop. Checking this
box enables Adjust by Scaling and Adjust by Incrementing. Soak Scale Factor and Soak Increment (ms)
are enabled by the combination of checking this box
and checking the appropriate choice of Adjust by
Scaling and Adjust by Incrementing.
Adjust by Scaling
Check Box Checked Checking this box indicates that the C/V Soak Time is
to be adjusted by multiplying the previous time by
Soak Scale Factor. This control is disabled if Adjust
C/V Soak Time in a Loop is unchecked. Enabling this
control enables Soak Scale Factor. Checking this control will cause Adjust by Incrementing to be unchecked and Soak Increment to be disabled. Likewise,
this control is unchecked when Adjust by Incrementing is checked.
Adjust by Incrementing Check Box Unchecked Checking this box indicates that the C/V Soak Time is
to be adjusted by adding Soak Increment (ms) to the
previous time. This control is disabled if Adjust C/V
Soak Time in a Loop is unchecked. Enabling this control enables Soak Increment (ms). Checking this control will cause Adjust by Scaling to be unchecked and
Soak Scale Factor to be disabled. Likewise, this control is unchecked when Adjust by Scaling is checked.
Soak Scale Factor
Real
1.0
Strictly greater than zero. This is the scale factor by
which to multiply the previous soak time to obtain the
current soak time. This control is disabled if either
Adjust C/V Soak Time in a Loop or Adjust by Scaling
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Soak Increment (ms)
Real
0.0
Adjust C/V Max Voltage in Check Box Unchecked
a Loop
Adjust by Scaling
Check Box Checked
Adjust by Incrementing
Check Box Unchecked
VMax Scale Factor
Real
1.0
VMax Increment
Real
0.0
Adjust C/V Pulse Count in Check Box Unchecked
a Loop
Adjust by Scaling
Check Box Checked
is unchecked.
In milliseconds. This is the increment to be added to
the previous soak time to obtain the current soak time.
This control is disabled if either Adjust C/V Soak Time
in a Loop or Adjust by Incrementing is unchecked.
Enables the adjustment of the maximum profile voltage in a Branch Loop. Checking this box enables Adjust by Scaling and Adjust by Incrementing. VMax
Scale Factor and VMax Increment are enabled by the
combination of checking this box and checking the
appropriate choice of Adjust by Scaling and Adjust by
Incrementing.
Checking this box indicates that VMax is to be adjusted by multiplying the previous time by VMax
Scale Factor. This control is disabled if Adjust C/V
Max Voltage in a Loop is unchecked. Enabling this
control enables VMax Scale Factor. Checking this
control will cause Adjust by Incrementing to be unchecked and VMax Increment to be disabled. Likewise, this control is unchecked when Adjust by Incrementing is checked.
Checking this box indicates that VMax is to be adjusted by adding VMax Increment to the previous
time. This control is disabled if Adjust C/V Max Voltage in a Loop is unchecked. Enabling this control
enables VMax Increment. Checking this control will
cause Adjust by Scaling to be unchecked and VMax
Scale Factor to be disabled. Likewise, this control is
unchecked when Adjust by Scaling is checked.
Unrestricted. This is the scale factor by which to multiply the previous maximum voltage to obtain the current maximum voltage. This control is disabled if
either Adjust C/V Max Voltage in a Loop or Adjust by
Scaling is unchecked.
In Volts. This is the increment to be added to the previous maximum voltage to obtain the current maximum voltage. This control is disabled if either Adjust
C/V Max Voltage in a Loop or Adjust by Incrementing
is unchecked.
Enables the adjustment of the number of tickle pulses
at a voltage step in a Branch Loop. Checking this box
enables Adjust by Scaling and Adjust by Incrementing.
Pulse Count Scale Factor and Pulse Count Increment
are enabled by the combination of checking this box
and checking the appropriate choice of Adjust by
Scaling and Adjust by Incrementing.
Checking this box indicates that the tickle pulse count
is to be adjusted by multiplying the previous time by
Pulse Count Scale Factor. This control is disabled if
Adjust C/V Pulse Count in a Loop is unchecked. Enabling this control enables Pulse Count Scale Factor.
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Adjust by Incrementing
Check Box Unchecked
Pulse Count Scale Factor
Integer
1
Pulse Count Increment
Integer
0
Adjust C/V Point Count in Check Box Unchecked
a Loop
Adjust by Scaling
Check Box Checked
Adjust by Incrementing
Check Box Unchecked
Checking this control will cause Adjust by Incrementing to be unchecked and Pulse Count Increment to be
disabled. Likewise, this control is unchecked when
Adjust by Incrementing is checked.
Checking this box indicates that the tickle pulse count
is to be adjusted by adding Pulse Count Increment to
the previous time. This control is disabled if Adjust
C/V Pulse Count in a Loop is unchecked. Enabling
this control enables Pulse Count Increment. Checking
this control will cause Adjust by Scaling to be unchecked and Pulse Count Scale Factor to be disabled.
Likewise, this control is unchecked when Adjust by
Scaling is checked.
This is the scale factor by which to multiply the previous pulse count to obtain the current pulse count.
This control is disabled if either Adjust C/V Pulse
Count in a Loop or Adjust by Scaling is unchecked.
Note that since this value is an integer, fractional scaling is not available. If the pulse count is to be reduced, from iteration-to-iteration, incrementing must
be used.
In pulses. This is the increment to be added to the
previous pulse count to obtain the current pulse count.
This control is disabled if either Adjust C/V Pulse
Count in a Loop or Adjust by Incrementing is unchecked.
Enables the adjustment of the number of voltage steps
in the profile in a Branch Loop. Checking this box
enables Adjust by Scaling and Adjust by Incrementing.
Point Count Scale Factor and Point Count Increment
are enabled by the combination of checking this box
and checking the appropriate choice of Adjust by
Scaling and Adjust by Incrementing.
Checking this box indicates that the voltage step point
count is to be adjusted by multiplying the previous
time by Point Count Scale Factor. This control is
disabled if Adjust C/V Point Count in a Loop is unchecked. Enabling this control enables Point Count
Scale Factor. Checking this control will cause Adjust
by Incrementing to be unchecked and Point Count
Increment to be disabled. Likewise, this control is
unchecked when Adjust by Incrementing is checked.
Checking this box indicates that the voltage step point
count is to be adjusted by adding Point Count Increment to the previous time. This control is disabled if
Adjust C/V Point Count in a Loop is unchecked. Enabling this control enables Point Count Increment.
Checking this control will cause Adjust by Scaling to
be unchecked and Point Count Scale Factor to be
disabled. Likewise, this control is unchecked when
Adjust by Scaling is checked.
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Point Count Scale Factor
Integer
1
Point Count Increment
Integer
0
Adjust C/V Tickle Volts in Check Box Unchecked
a Loop
Adjust by Scaling
Check Box Checked
Adjust by Incrementing
Check Box Unchecked
Volts Scale Factor
Real
1.0
Volts Increment
Real
0.0
Adjust C/V Tickle Pulse
Width in a Loop
Check Box Unchecked
This is the scale factor by which to multiply the previous point count to obtain the current point count.
This control is disabled if either Adjust C/V Point
Count in a Loop or Adjust by Scaling is unchecked.
Note that since this value is an integer, fractional scaling is not available. If the pulse count is to be reduced, from iteration-to-iteration, incrementing must
be used.
In points. This is the increment to be added to the
previous point count to obtain the current point count.
This control is disabled if either Adjust C/V Pulse
Count in a Loop or Adjust by Incrementing is unchecked.
Enables the adjustment of the tickle voltage in a
Branch Loop. Checking this box enables Adjust by
Scaling and Adjust by Incrementing. Volts Scale Factor and Volts Increment are enabled by the combination of checking this box and checking the appropriate
choice of Adjust by Scaling and Adjust by Incrementing.
Checking this box indicates that the tickle voltage is
to be adjusted by multiplying the previous time by
Volts Scale Factor. This control is disabled if Adjust
C/V Tickle Volts in a Loop is unchecked. Enabling
this control enables Volts Scale Factor. Checking this
control will cause Adjust by Incrementing to be unchecked and Volts Increment to be disabled. Likewise,
this control is unchecked when Adjust by Incrementing is checked.
Checking this box indicates that the tickle voltage is
to be adjusted by adding Volts Increment to the previous time. This control is disabled if Adjust C/V Tickle
Volts in a Loop is unchecked. Enabling this control
enables Volts Increment. Checking this control will
cause Adjust by Scaling to be unchecked and Volts
Scale Factor to be disabled. Likewise, this control is
unchecked when Adjust by Scaling is checked.
This is the scale factor by which to multiply the previous tickle voltage to obtain the current voltage. This
control is disabled if either Adjust C/V Tickle Volts in
a Loop or Adjust by Scaling is unchecked.
In volts. This is the increment to be added to the previous tickle voltage to obtain the current voltage. This
control is disabled if either Adjust C/V Tickle Volts in
a Loop or Adjust by Incrementing is unchecked.
Enables the adjustment of the duration of the tickle
voltage in a Branch Loop. Checking this box enables
Adjust by Scaling and Adjust by Incrementing. P/W
Scale Factor and P/W Increment are enabled by the
combination of checking this box and checking the
appropriate choice of Adjust by Scaling and Adjust by
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Adjust by Scaling
Adjust by Incrementing
P/W Scale Factor
P/W Increment (ms)
Help
OK
Cancel
Incrementing.
Check Box Checked Checking this box indicates that the tickle pulse width
is to be adjusted by multiplying the previous time by
P/W Scale Factor. This control is disabled if Adjust
C/V Tickle Pulse Width in a Loop is unchecked. Enabling this control enables P/W Scale Factor. Checking
this control will cause Adjust by Incrementing to be
unchecked and P/W Increment to be disabled. Likewise, this control is unchecked when Adjust by Incrementing is checked.
Check Box Unchecked Checking this box indicates that the tickle pulse width
is to be adjusted by adding P/W Increment to the previous time. This control is disabled if Adjust C/V
Tickle Pulse Width in a Loop is unchecked. Enabling
this control enables P/W Increment. Checking this
control will cause Adjust by Scaling to be unchecked
and P/W Scale Factor to be disabled. Likewise, this
control is unchecked when Adjust by Scaling is
checked.
Real
1.0
This is the scale factor by which to multiply the previous tickle duration to obtain the current pulse width.
This control is disabled if either Adjust C/V Tickle
Pulse Width in a Loop or Adjust by Scaling is unchecked.
Real
0.0
In milliseconds. This is the increment to be added to
the previous tickle duration to obtain the current pulse
width. This control is disabled if either Adjust C/V
Tickle Pulse Width in a Loop or Adjust by Incrementing is unchecked.
Button Unpressed Read these Help pages.
Button Unpressed Accept the configured parameter adjustment terms
and close the dialog
Button Unpressed Close the dialog. Make no changes.
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c. - QuikLook Setup
Task Name:
Version:
Last Update:
In QuikLook Menu:
Folder:
Subfolder:
Subsubfolder:
Window Name:
Change Record:
Known Bugs:
User Variables Added:
C/V
3.1.0
03 April 2002
No
None
None
None
C/V Setup
Go to Change Record
None
None
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c.1 - Setup Dialog
Figure c.1.1 - QuikLook C/V Task Measurement Configuration Dialog - Standard Bipolar Profile.
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Figure c.1.2 - QuikLook C/V Task Measurement Configuration Dialog - Custom File Profile.
c.2 - Description
This dialog fully configures the C/V Task for execution under QuikLook. All parameters
necessary for complete Task specification are present. The upper left section of the dialog
has controls to configure the waveform and the small signal pulse stimulus that forms the
C/V measurement. In addition the Task is named and the sample parameters Area and
Thickness are specified. Area and Thickness are mostly informational but Area is also
used in computing the measured capacitance, so must be properly entered. The lower left
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portion of the dialog provides sample information. These parameters have no effect on
the behavior of the Task or the value of the measured data. The external sensor is also
enabled in this region. The right half of the dialog deals with the hardware configuration.
If external amplifiers and/or multiplexers are to be used, they are configured here. Internal test elements can be switched into the signal path here as well. Finally the amplification level can either be selected or set to automatic. Note that the C/V measurement is a
very slow test. Selecting Automatic amplification will dramatically increase the duration
of the experiment.
Two nearly identical dialogs appear above. The first dialog shows the configuration of a
Standard Bipolar Triangular drive voltage stimulus waveform. This is the typical applied
stimulus. The waveform is computed from the number of points and the VMax value.
Additional parameters configure the small signal stimulus at each step. The second dialog
shows the Task configured to perform a custom drive profile read from a file. Most standard configuration controls have been disabled. New controls, not evident in the first dialog, appear to browse to the file that holds the custom configuration, or open a dialog that
will allow the creation of a custom profile file. Once the file is created and read, control
parameters are updated based on the file input. The VMax and Profile Offset controls remain active, since they can be used to alter the basic custom waveform as described below.
Three new controls have been added in Version 3.1.0.
y
y
Custom Amplifier - This radio button has been added to the External Amplifier
list. This control allows the user to attach an existing amplifier (not provided by
Radiant Technologies) to the experiment. The user must provide RTI the amplifier specifications such as voltage range, gain factor and maximum rise time. RTI
will then provide the user with an identifying module that will allow the amplifier
to be connected to the HVI.
Sensor Impedance - This is added to the suite of sensor controls. This control specifies an integer output impedance of the instrument attached to the Sensor port.
The sensor output impedance in series with the Precision input impedance (currently about 4 k-Ω) make a voltage divider that distorts the measured voltage by:
Measured = Actual x 4k / (4k + Sensor Impedance).
y
If the sensor output impedance is large with respect to the 4k input impedance, the
distortion will be significant. This control accepts a value that is used to correct
this distortion.
Start at Last Amp Value. When Auto Amplification is checked, the system will
begin to search for the correct amplification level by using the value specified in
the Amp Level control, even though the control is disabled. Checking the new
control will force the search to start at the amplification level that was established
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in the last measurement.
c.3 - Controls
Control
C/V Task Name
Type
Text
Default
C/V-#
Points
Integer
101
VMax
Real
5.0
Soak Delay
Real
1.0
Profile Offset
Real
0.0
Description
25 characters maximum. Provide an identifier for the C/V
Task being configured. The Task will be referred to using
this identifier in the DataSet Archive. The name should be
descriptive and unique to this instance of the Task.
1 or greater. This is the number of voltage steps that will
form the drive profile. It is also the number of measured
values that will be reported. For Standard Bipolar profiles,
this value must be an integer multiple of four, plus one. A
value of 1 may be entered. In that case a single measurement point will be made at VMax. The software will automatically set the number of points to the criterion if the
value entered is not an integer multiple of 4 plus one. If
the Drive Profile Type is set to "From File", the points
control becomes read only. It is adjusted to the number of
points read in the file. In the custom file configuration, no
criterion is placed on the number of points. This value is
critical to predicting the duration of the experiment. When
it is altered, the Run Time control will be updated.
-10,000.0 to 10,000.0. This is the key parameter in building a standard bipolar drive profile. The drive voltage profile will step from zero volts to this value, back to zero
volts, to -VMax and back to zero volts. If this value is negative, the first leg of the profile will be of negative voltage. The VMax control remains enabled if Drive Profile
Type is set to "From File". VMax is updated when the file
is read to the voltage of maximum absolute value in the
profile. However, the value can then be changed to scale
the custom profile so that it retains its original shape but
achieves different voltage values.
In milliseconds. 1e-3 to 30,000. Once the drive profile has
stepped to a voltage a fixed 1.0 ms delay occurs. Then a
user-controllable second soak delay of this duration occurs
before any small signal stimulus is applied to the sample.
The purpose of the delay is to allow any current induced
by the voltage step to dampen so that the sample is at a
steady state current condition. If the Drive Profile Type is
set to "From File", the points control becomes read only. It
is updated by the value read from the custom input file.
This value is critical to predicting the duration of the experiment. When it is altered, the Run Time control will be
updated.
-10,000.0 to 10,000.0. This is a voltage value that can be
added to either the standard bipolar or custom waveform
profiles to translate the profile up or down. This value is
not read from a custom file, but the control remains active
if the Drive Profile Type is set to "From File". Care must
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Tickle Pulse Volts
Real
Tickle Pulse Width
Real
Pulses to Average
Integer
Run Time
Real
Area
Real
Thickness
Real
Drive Profile Type
List Box
File Browse (>>)
Button
be taken by the user that the combination of this value and
of the drive profile values, whether custom or standard
bipolar, do not exceed the capabilities of the amplifier
under use.
0.06
-10,000 to 10,000. This is the value of the small signal
voltage applied during each stimulus period at each step
voltage. The value is normally very small with respect to
the step voltage. If the Drive Profile Type is set to "From
File", the points control becomes read only. It is updated
by the value read from the custom input file.
1.0
In milliseconds. 1e-3 to 30,000. This is the duration of a
single pulse in the small signal measurement of capacitance. It is also the duration between pulses when multiple
pulses are used. This value is critical to predicting the duration of the experiment. When it is altered, the Run Time
control will be updated. If the Drive Profile Type is set to
"From File", the points control becomes read only. It is
updated by the value read from the custom input file.
25
1-25. This is the number of small signal pulses to be used
in making the capacitance measurement at each step voltage. Since the signal applied is very small, the measurement is noise-prone. Increasing this value will reduce the
noise in the data. The drawback is that it also increases the
duration of the Task execution. If the Drive Profile Type is
set to "From File", the points control becomes read only. It
is updated by the value read from the custom input file.
This value is critical to predicting the duration of the experiment. When it is altered, the Run Time control will be
updated.
18.1 s In seconds. Read-Only. This control is updated when any
of the controls that affect the experiment duration is updated. It is a prediction of the duration of the Task execution. As a result of repeated measurements if Auto Amplification is selected as well as the accumulation of other
small software delays, this estimate will always be low.
1e-4
In cm2. This is the surface area of the sample electrode.
This value is informational, but is also used in computing
measured data. A mis-entered value will result in misscaled data.
0.3
In µm. This is the thickness of the ferroelectric material in
the sample. The value is strictly informational.
Standard This control switches between an automatically computed
Bipolar Standard Bipolar Triangular drive voltage profile and a
custom profile read in from an input file. With "Standard
Bipolar" selected, Points, Soak Delay, Tickle Pulse Volts,
Tickle Pulse Width and Pulses to Average are all enabled.
File Browse, File Name and Create File? are all hidden.
With "From File" selected, these conditions are reversed.
Unpressed This button opens the standard Windows file browser so
that the custom input file can be located. This button is
hidden when Drive Profile Type is "Standard Bipolar", but
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File Name
Create File?
Sample Name
Lot ID
Wafer ID
Die Row
Die Column
Capacitor Number
Sensor Enable
Sensor Scale
Sensor Offset
Sensor Label
visible when the type is "From File".
Read-only. This control shows the path and file name of
the custom input file. It is updated when an input file is
browsed and properly read or when a new file is created.
The control is read-only meaning that it cannot be used to
input the file path and file name. It is informational only.
The control is hidden when Drive Profile Type is "Standard Bipolar", but visible when the type is "From File".
Button
Unpressed When Drive Profile Type is "From File" this control opens
a dialog that allows a new custom drive profile file to be
created and stored as discussed below. The control is hidden when Drive Profile Type is "Standard Bipolar".
Text
""
24-characters maximum. An identifier used to describe the
sample being tested.
Text
""
12-characters maximum. An identifier used to describe the
lot from which the sample being tested comes.
Text
""
12-characters maximum. An identifier used to describe the
wafer on which the sample being tested is located.
Integer
0
A value used to indicate the y position on the wafer of the
die on which the sample under test is located.
Integer
0
A value used to indicate the x position on the wafer of the
die on which the sample under test is located.
Integer
0
A value used to indicate the position of the sample on the
die.
Check Box Unchecked An external voltage may be captured simultaneously with
the capacitance measurement during the C/V Task execution. The voltage might be produced by any instrument
that produces a voltage as a result of some physical property such as temperature, displacement, etc. The voltages
are captured, displayed and stored along with the measured capacitance. This control enables the capture of the
external voltage. Enabling this control also enables Sensor
Scale, Sensor Offset and Sensor Label.
Real
1
When an external voltage is read it is normally linearly
related to some physical property. That property can be
recovered by...
Property = mX + b
where X is the measured voltage and m and b are scale and
offset terms. This control is used to enter the scale term,
m. The control is disabled if Sensor Enable is unchecked.
Real
0
When an external voltage is read it is normally linearly
related to some physical property. That property can be
recovered by...
Property = mX + b
where X is the measured voltage and m and b are scale and
offset terms. This control is used to enter the offset term,
b. The control is disabled if Sensor Enable is unchecked.
Text
""
12-characters maximum. If the external sensor voltage is
read, its converted value will be displayed along with the
measured capacitance when recalled from the Archive.
This label will be associated with the sensor trace on the
Text
""
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Sensor Impedance
Internal Amplifier
External Amplifier
y ±500 V
y ± 2,000 V
y ±4,000 V
y ±10,000 V
y Custom
Amp
HVI Comm Port
plot. This control is disabled if Sensor Enable is unchecked.
Integer
50
Enter the output impedance of the instrument attached to
the sensor port. Provides a correction to the measured value as discussed above. This control is disabled if Sensor
Enable is unchecked.
Radio Button Checked One, and only one, of five possible voltage signal amplifiers must be selected to indicate the voltage scaling, voltage limits and the hardware to be used to produce the voltage. The Internal Amplifier button indicates that the voltage is to be generated by the Precision tester without the
need to attach an external accessory High Voltage Interface (HVI) or High Voltage Amplifier. With this option
selected, voltages are limited to ±100.0 Volts. This criterion is not checked until the Task is executed. With this
control checked, HVI Comm Port and HVI Channel are
disabled and forced to values of 0.
Radio Button Unchecked One, and only one, of five possible voltage signal amplifiers must be selected to indicate the voltage scaling, voltage limits and the hardware to be used to produce the voltage. These four radio button each select an external amplifier connected to the Precision tester through a High Voltage Interface (HVI). In order for the Task to execute, the
selected amplifier must be connected to the tester through
an HVI at the HVI channel specified in HVI Channel. The
HVI must be connected to the tester at the HVI port specified in HVI Port. The checking for the external accessories
and their configuration occurs at execution time so that the
Task may be configured with the hardware disconnected
or turned off. The specified voltages are constrained to be
less than or equal to the maximum voltage of the selected
amplifier. This too is checked at execution time. Care
must be taken that the combined specified voltage and
Profile Offset value remains within the voltage range. If
any of these external amplifiers is selected, HVI Comm
Port and HVI Channel are enabled and set to a new default
value of 1.
Custom Amp was added as of Version 3.1.0. See the discussion above.
Integer
0
0, 1 or 2. If an external amplifier is selected to produce the
drive signals, the amplifier is connected to the Precision
tester through a High Voltage Interface (HVI). The HVI is
connected to the tester at one of two DB-25 connectors on
the rear panel of the tester. This control selects the DB-25
connector at which the software is to look for the HVI and
the amplifier. A '0' value indicates that no HVI is to be
used. When Internal Amplifier is selected, this control is
disabled and forced to a '0' value. When any other amplifier is selected the control is enabled and preset to a default value of '1'. The control can then be adjusted to a
value of '2', but may not be set to '0' when an external amplifier is selected. An HVI must be located at the port
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HVI Channel
Integer
0
Drive Channel
Integer
0
Drive Port
Integer
0
Return Channel
Integer
0
specified. This is checked at Task execution time so that
the Task may be configured with the hardware absent or
turned off.
0, 1 or 2. If an external amplifier is selected to produce the
drive signals, the amplifier is connected to the Precision
tester through a High Voltage Interface (HVI). The HVI
has two channels to which up to two High Voltage Amplifiers may be connected. This control selects the channel to
which is connected the required amplifier. A '0' value indicates that no HVA is to be used. When Internal Amplifier is selected, this control is disabled and forced to a '0'
value. When any other amplifier is selected the control is
enabled and preset to a default value of '1'. The control can
then be adjusted to a value of '2', but may not be set to '0'
when an external amplifier is selected. An amplifier of the
specified voltage range must be attached to the HVI at the
specified channel. This is checked at Task execution time
so that the Task may be configured with the hardware absent or turned off.
0-48. An accessory 48-channel multiplexer may be connected to the Precision tester. The multiplexer is normally
used to route drive and return signals to various samples
connected to the multiplexer using a probe card. This control selects the multiplexer channel through which to route
the drive signal. A '0' indicates that no multiplexer channel
is to be used. If a non-zero value is selected the multiplexer must be attached to the Precision tester. This is
checked at Task execution time so that the Task may be
configured with the hardware absent or turned off. If a
zero value is entered into this control, Drive Port is disabled.
0, 1 or 2. An accessory 48-channel multiplexer may be
connected to the Precision tester. The multiplexer is normally used to route drive and return signals to various
samples connected to the multiplexer using a probe card.
The multiplexer may be connected to the tester at one of
two DB-25 connectors on the tester rear panel. This control selects the DB-25 connector to which the multiplexer
that is to route the drive signal is connected. A '0' indicates
that no multiplexer channel is to be used. If a non-zero
value is selected the multiplexer must be attached to the
Precision tester. This is checked at Task execution time so
that the Task may be configured with the hardware absent
or turned off. If a zero value is entered into the Drive
Channel control, this control is disabled.
0-48. An accessory 48-channel multiplexer may be connected to the Precision tester. The multiplexer is normally
used to route drive and return signals to various samples
connected to the multiplexer using a probe card. This control selects the multiplexer channel through which to route
the return signal. A '0' indicates that no multiplexer channel is to be used. If a non-zero value is selected the multiplexer must be attached to the Precision tester. This is
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Return Port
Enable Ref. Cap.
Integer
0
Check Box Unchecked
Enable Ref. Resistor Check Box Unchecked
Drive Closed
Check Box
Checked
Return Closed
Check Box
Checked
Amp. Level
List Box
1.0
checked at Task execution time so that the Task may be
configured with the hardware absent or turned off. If a
zero value is entered into this control, Return Port is disabled.
0, 1 or 2. An accessory 48-channel multiplexer may be
connected to the Precision tester. The multiplexer is normally used to route drive and return signals to various
samples connected to the multiplexer using a probe card.
The multiplexer may be connected to the tester at one of
two DB-25 connectors on the tester rear panel. This control selects the DB-25 connector to which the multiplexer
that is to route the return signal is connected. A '0' indicates that no multiplexer channel is to be used. If a nonzero value is selected the multiplexer must be attached to
the Precision tester. This is checked at Task execution
time so that the Task may be configured with the hardware
absent or turned off. If a zero value is entered into the Return Channel control, this control is disabled.
An internal high precision 1.0 nF reference capacitor may
be switched into the drive and return signal path for measurement. The purpose is for hardware and software validation and calibration. This internal test element will be
placed into the signal path in parallel with the internal
reference resistor (if it is enabled) and with any attached
sample.
An internal high precision 25 M-Ohm reference resistor
may be switched into the drive and return signal path for
measurement. The purpose is for hardware and software
validation and calibration. This internal test element will
be placed into the signal path in parallel with the internal
reference capacitor (if it is enabled) and with any attached
sample.
This control switches the relay that connects the drive signal to the sample and places the drive voltage into the signal path. This control would normally never be unchecked.
However, it may be unchecked in order to measure system
response with no drive signal to determine system parasitics.
This control switches the relay that connects the sample
return channel to the measurement circuitry, completing
the signal path. This control would normally never be unchecked. However, it may be unchecked in order to measure system response with no return signal to determine
system parasitics.
The return signal that is captured from the sample as a
result of the drive stimulus is integrated to produce a
measured value. Before the signal is integrated it is passed
through an amplifier with eight switchable gain levels.
This control selects the signal gain level. The control is
disabled if Auto Amplification is enabled. The utility of
deselecting Auto Amplification and manually setting the
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Start at Last Amp
Level
Check Box Unchecked
Auto Amplification
Check Box
Checked
Help
OK
Cancel/Plot
Button
Button
Button
Unpressed
Unpressed
Unpressed
gain is that Auto Amplification repeatedly applies the signal and adjusts the gain until the return signal is of acceptable strength. If unrecorded stimulus to the sample is unacceptable, the amplification level should be set manually.
Instructs the Hardware Driver to begin looking for the
proper amplification level by setting the amplification
level selected for the previously executed Measurement
Task. This control is disabled if Auto Amplification is disabled.
The return signal that is captured from the sample as a
result of the drive stimulus is integrated to produce a
measured value. Before the signal is integrated it is passed
through an amplifier with eight switchable gain levels.
When this control is enabled, the amplification level is
automatically adjusted. This is done by repeatedly applying the drive signal, then adjusting the amplification level
until the return signal is of acceptable strength. This lengthens any experiment and applies signals that are unrecorded before the measurement. If these conditions are not
acceptable, this control should be disabled. Checking this
control disables Amp. Level but enables Start at Last Amp
Level.
Read this help page.
Accept the configured values and execute the C/V Task
Close the dialog without executing.
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c.4 - Custom File Creation Dialog
Figure c.4.1 - Custom C/V Profile File Creation Dialog.
Figure c.4.2 - Standard Windows File Browser Dialog.
c.5 - Description
The dialog shown in Figure c.4.1 appears when the Create File? button is clicked. This
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dialog is used to create a custom input file. It utility is that is guarantees a correct file
format and automatically comments its output file. However, the dialog option is tedious
when trying to construct a file of more than a few step voltages. (More than 100 is impractical.) Such file might be created using a text editor such as Notepad.exe. They can
be created using a word processor provided the file is saved as Text type and not as a
standard word processor file. A more practical solution may be to create the file in a
spreadsheet such as Excel and exporting it to a text-only file format. The file may then
need some additional editing in a text editor such as Notepad.
The dialog is used to specify the various C/V parameters include number of sample
points, soak time, pulse volts and pulse width. Then each of the sample voltages is independently specified and added to the list until the number of points is reached. Voltages
may be independently selected and removed or the entire list cleared.
Figure c.4.2, above, is the standard Windows file browser that appears when the browser
(>>) button is clicked. It is used to select a file path and file name for a pre-existing C/V
custom input file when the custom profile option is selected.
c.6 - Controls
Control
Type
Number of Points Integer
Default
101
Help
Soak Time
Button
Real
Unpressed
1.0
Pulse Volts
Real
0.06
Pulse Width
Real
1.0
Pulses to Average Integer
25
Description
The total number of voltage steps to be applied during the
custom drive profile. This number must match the number of
voltage entries in the file. The value in this control combines
with the Set Point # value to control the Add button. When
Set Point # exceeds Number of Points, the Add button is disabled and the Save As button enabled. The Add button may
be reenabled by adjust the number of points.
Read this help page.
In milliseconds. 1e-3 to 30,000.0. Once the drive profile has
stepped to a voltage a fixed 1.0 ms delay occurs. Then a user-controllable second soak delay of this duration occurs
before any small signal stimulus is applied to the sample.
The purpose of the delay is to allow any current induced by
the voltage step to dampen so that the sample is at a steady
state current condition.
-10,000.0 to 10,000.0. This is the value of the small signal
voltage applied during each stimulus period at each step voltage. The value is normally very small with respect to the
step voltage.
In milliseconds. 1e-3 to 30,000. This is the duration of a
single pulse in the small signal measurement of capacitance.
It is also the duration between pulses when multiple pulses
are used. This value is critical to predicting the duration of
the experiment.
1-25. This is the number of small signal pulses to be used in
making the capacitance measurement at each step voltage.
Since the signal applied is very small, the measurement is
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Set Point #
Voltage To
Add
Delete Line
Delete All
Point #
Voltage
noise-prone. Increasing this value will reduce the noise in
the data. The drawback is that it also increases the duration
of the Task execution.
Integer
1
Read-Only. An indicator that shows the next voltage point to
be added to the Voltage list. This value is incremented by the
Add button. It is decremented by the Delete Line button and
reset to a value of '1' by the Delete All button. When the value in this control exceeds Number of Points, the Add button
is disabled. The Save As button is enabled when the control
exceeds Number of Points.
Real
Uninitialized -10,000.0 to 10,000.0. The next voltage to be added to the
list of voltages is entered into this control. When the Add
button is clicked the voltage in this control is highlighted and
the focus is set to the control so that the next voltage can be
added without having reselect the control. When Add is
clicked the voltage in this control is added to the end of the
Voltage list box.
Button
Unpressed
This control adds the voltage in Voltage To to the end of the
list in the Voltage list box. It increments the value in Set
Point #. When Set Point # exceeds Number of Points, Add is
disabled. It may be reenabled by deleting lines from the Voltage list box, clearing the Voltage list box or increasing
Number of Points. When Add is clicked, the focus is set on
Voltage To and the value in that control is highlighted. This
allows the changing of voltages in Voltage To to be accomplished without having to reselect the control.
Button
Unpressed
Any single value in the Voltage list box may be selected.
When Delete Line is clicked that value will be removed from
its position in the Voltage list. The Point # control will be
truncated by one entry. The Set Point # control will be decremented. This action may cause the Add button to be reenabled if it was disabled.
Button
Unpressed
Pressing this button will cause the Voltage and Point # list
controls to be emptied. Set Point # will be reset to a value of
'1'. If the Add button was disabled, it will be reenabled.
Integer List Empty
Read-only. This is a sequential and serial list of values. It is
positioned adjacent to the Voltage list and simply indicates
the position in the Voltage list of any entry in the list. When
Add is clicked this list has the next serial value appended to
it. That last entry becomes highlighted. When a value is selected in the Voltage list, the adjacent value is selected in the
Point # list. If Delete Line is pressed, the Point # list will be
truncated by one value. The number of entries in this list will
be the value in Set Point # less one.
Real List Empty
This is a sequential list of the step voltages that are to form
the C/V measurement profile. When Add is clicked the value
in Voltage To is appended to this list and that value is highlighted. Any other entry in the list may be selected. When
Delete Line is clicked the selected entry will be removed
from its position in the list. Delete All will empty the list.
The number of entries in this list will be the value in Set
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Save As
Button
Unpressed
OK
Button
Unpressed
Cancel
Button
Unpressed
Point # less one.
This control opens the standard Windows browser dialog.
This allows the user to identify a path and filename to save
the currently configured profile. If this action is not taken,
the OK control will not allow the user to leave the Create
File? dialog. This control is disabled unless Set Point # exceeds the value in Number of Points. Once a file has been
saved the OK control is enabled.
This control exits the dialog. The control will not permit the
user to exit the dialog unless a file has been saved. In order
to exit without saving, use the Cancel control. The control is
disabled until a file has been saved.
This control exits the dialog. No file need be saved to use
this control.
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d - QuikLook Plot Setup
d.1 - Setup Dialog
Figure d.1.1 - C/V Task QuikLook Plot Configuration Dialog.
d.2 - Description
This dialog is used to configure the plot that will be displayed as a result of the QuikLook
measurement. Most of the controls in the dialog relate to plot labeling and results dialog
text display. These are familiar to users of any QuikLook Measurement Task. The pri45
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mary control that is unique to the C/V Task is the Plot Filter list box. This box determines
the way that data will be manipulated before display. The various filter options are discussed further down on this page. Data manipulation controlled by the Plot Filter control
is exceptional for a Task, though it also appears in the Hysteresis Task. Normally such
manipulation would be performed by a Filter associated with the Task in a Test Definition. However, the various plotting options are so critical to the C/V measurement and
essential to the QuikLook data representation that they are included here.
d.3 - Controls
Control
Plot Title
Type
Text
Default
""
Description
60-characters maximum. Provide a description of the
data that are to be displayed.
Plot Subtitle
Text
""
60-characters maximum. Extend the available text
space for more detailed Task/data description.
Plot X Axis Label
Text
"Volts"
60-characters maximum. Provide a units label for the
value to be plotted along the independent X-Axis.
This value is always voltage. The label may be
changed by the user but should always reflect the
drive profile voltage.
Plot Y Axis Label
Text
"Capacitance (nF)" 60-characters maximum. Provide a units label for the
value to be plotted along the dependent Y-Axis. This
value is variable and depends on the Plot Filter.
When Plot Filter is adjusted the text in this control is
automatically adjusted. Once the Plot Filter is selected the text may be altered.
Data Label
Text
"C/V Data"
32-characters maximum. Provide a label that can be
associated with the data trace symbols, line type and
color and used to identify the plot trace that represents the measured data. This label appears when
there are multiple traces on the plot. That occurs
when Sensor data are enabled and plotted.
User Self-Prompt
Text
""
60-characters maximum. This is a text value that is
displayed above the plot on the results dialog. It allows the user to set a message to him/herself. The
prompt may have a single User Variable appended to
it. The example above shows the C/V point count
appended to the prompt.
Parameter to Append List Box
<<None>>
This box lists all of the available User Variables.
to Prompt
Any single available variable can be selected for
appending to the User Self-Prompt text. In the example, the C/V point count is selected.
Plot Filter
List Box Capacitance (nF) A list of the four plot filter that can be applied to the
measured data before they are shown. The filters are
described in more detail below. A single filter may
be selected using this control. As filters are changed,
the value in Plot Y Axis Label is updated
Comments
Text
""
255-characters maximum. A control that allows a
detailed description of the Task to be executed.
Help
Button
Unpressed
Read this help page.
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OK
Button
Unpressed
Cancel/Plot
Button
Unpressed
Accept the configured values and execute the C/V
Task
Close the dialog without executing.
d.4 - Plot Filters
Unlike most Tasks (though similar to the Hysteresis Tasks) the data measured in the C/V
QuikLook execution may be manipulated before they are displayed. This is accomplished
by selecting a Plot filter before the Task is executed. Normally a Task would be required
to associate itself with a Filter Task in a Test Definition and be executed within a DataSet
in order to alter the presented data. In the C/V Task, the filter options are important
enough to be required for the QuikLook execution. There are four filter options...
y
Capacitance (nF) - This is the default data representation. Acquired data represent Polarization in µC/cm2. Multiplying through by the Area * 1e3 nF/µF gives
Capacitance in nF.
Figure d.4.1 - QuikLook C/V Response - Capacitance (nF) Filter - Linear Sample.
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Figure d.4.2 - QuikLook C/V Response - Capacitance (nF) Filter - Ferroelectric Sample.
y
Normalized Capacitance (µF/cm2) - This representation involves the least manipulation of the original data. Acquired data represent Capacitance per area in
µF/cm2. This is the representation indicated by the Filter.
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Figure d.4.3 - QuikLook C/V Response - Normalized Capacitance (µF/cm2) Filter - Linear Sample.
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Figure d.4.4 - QuikLook C/V Response - Normalized Capacitance (µF/cm2) Filter - Ferroelectric Sample.
y
Charge (µC) - Here the Normalized Capacitance data are integrated with respect
to the step voltage at each measured point and multiplied by sample Area. The
numerical integration is simply the running sum of the area of a rectangle and triangle defined by the current measured value, the previous measured value and the
change in voltage from one step to the next. This is shown in the Figure.
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Figure d.4.5 - Numerical Integration.
This first figure shows how the integration calculation is made for a single step
voltage. The area under the curve has been laid on its side below the plot and
scaled up while retaining its scale to make the representation clearer. The figure
below shows an approximation to the overall integrated charge. It is an approximation because the small triangular portion of the calculation has been averaged
out. As a result, small perturbations in the plotted integration are not evident. The
entire example has been synthetically generated.
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Figure d.4.6 - Integration Results.
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Figure d.4.7 - QuikLook C/V Response - Charge (µC) Filter Linear Sample.
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Figure d.4.8 - QuikLook C/V Response - Charge (µC) Filter Ferroelectric Sample.
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Polarization (µC/cm2) - Polarization is simply the integrated Capacitance.
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Figure d.4.9 - QuikLook C/V Response - Polarization (µC/cm2)
Filter - Linear Sample.
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Figure d.4.10 - QuikLook C/V Response - Polarization
(µC/cm2) Filter - Ferroelectric Sample.
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e - Custom Drive Profile File Format
A profile option exists that allows the user to create an overall stimulus waveform of any
custom shape. This is accomplished by individually and independently stipulating every
voltage in the profile. The profile, along with the other waveform parameters including
number of points, soak time, pulse width, pulse voltage and pulses to average, is entered
through a strictly-formatted text input file. The file format is...
Number of points in the custom drive profile. No limit or criterion is placed on this
value. The number of voltage entries in the file must agree with this value.
The soak time in milliseconds. Value ranges from 1e-3 to 30,000.0.
Line 2:
The number of repetitive C/V pulses to perform and average. Value ranges from 1
Line 3:
to 30.
The tickle or pulse voltage to apply during the C/V measurement. This value
Line 4:
should be very small. 0.06 volts is default.
The pulse width of the measurement pulse in milliseconds. Value ranges from 1e-3
Line 5:
to 30,000.0.
Line 6 to Points + 5: A sequential list of the voltages to be applied in the profile. Voltages are independent. The allowed range is determined by the hardware to be used. There must be as
many lines with valid voltages as there are points specified on line one.
Line 1:
Figure e.1 shows a portion of a valid custom input file for the C/V Task. Note that there
are in-line comments. These are permitted provided they follow the value entry in the line
and are separated from the value by at least one space. The file must be text-only. It may
be created by a text editor such as Notepad.exe. If a Word processor is used, the file must
be saved as text only. A word processor formatted file includes binary header information
that cannot be read by Vision. The file may also be created in a spreadsheet and output as
a text-only file.
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Figure e.1 - C/V Task Custom Drive Profile Input File. The
Lines "Preset Volts" and "Preset Pulse Width (ms)" are Valid
for the Advanced C/V Task, but Should be Eliminated Here.
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The sample custom drive profile set in the file shown above is plotted below.
Figure e.2 - Sample Custom C/V Task Drive Profile.
A custom file profile may be create "Automatically" with the help of a dialog available
from both the QuikLook and Test Definition configuration dialogs. The dialog ensures
file correctness, but is not practical for large profiles (> 100 points). Dialog details are
presented in the configuration discussions.
When the custom file input is selected, most profile configuration parameters are disabled
in the configuration dialogs. However, the VMax parameter and the Profile Offset remain
enabled. This is because a single custom file can be used as a template for a family of
profiles that retains the basic profile shape, but translated and/or scaled. Whenever a custom file is read, the voltage of maximum absolute value is read and becomes VMax in the
configuration dialog. However, VMax may be changed. When the file is actually used to
drive the sample, it is scaled by:
VMax / File voltage of maximum absolute value
Entering the same file into the C/V Task, but adjusting VMax, therefore, allows the pro59
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file to be scaled and reused as a different profile. Entering a VMax of the opposite sign of
the voltage of maximum absolute value will invert the profile.
Likewise, as with the standard bipolar triangular profile, the custom voltages can be
translated up or down by entering a non-zero Profile Offset. Profile Offset is a voltage
value that is added to every point in the custom profile. A negative value will shift the
profile down, while a positive value translates it upwards. The user must take care that at
no point in the profile does the combined scaled file value and offset produce a voltage
that is greater in magnitude than the capability of the hardware being used. The figure
below shows the original profile as well as a profile scaled to -1/3 and shifted upwards by
5.5 Volts. This is accomplished by change VMax to +5.0 and the offset to +5.5.
Figure e.3 - Two Drive Profiles Created from the same Custom
Input File.
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f - Results and Data Presentation
f.1 - QuikLook Data Representation
Once a QuikLook execution has provided the C/V Task with measured data, the data are
displayed in a Results Dialog. The dialog is represented in Figure f.1.1.
Figure f.1.1 - C/V QuikLook Measurement Results Dialog - Linear Sample.
To the left of the dialog measurement configuration parameters are shown for review.
The central portion of the display is the plotted data. The plot can be adjusted by rightclicking on the plot surface, producing a popup menu from which selections can be made.
See the main help pages for a detailed description of this menu and its use. Above the
plot is the user Self-Prompt and its appended User Variable. Below the plot are a series of
check boxes that indicate the validity of the results of the measurement. If results are in61
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valid suggestions for correcting the problem may appear here.
QuikLook is intended for a "let's see what we've got" sampling of a wafer. Normally data
are intended to be reviewed and discarded. Once the dialog is closed by clicking OK, the
data cannot be recovered except by repeating the measurement. Nevertheless, several
tools are provided to save QuikLook measured data provided the tools are used before the
dialog is closed. The Export button opens a dialog that allows the data to be stored to a
Text file, stored to an Excel file or printed. This process is described in detail below. Another option is to Check the Create a DataSet control before closing the dialog. With this
option enabled, when the dialog is close, the DataSet creation process is initiated. Data
may either be stored to a new DataSet, or appended to a DataSet that is open and whose
tab is selected in the DataSet explorer. The dialog of Figure f.1.2 appears in which the
choice is made.
Figure f.1.2 - Send QuikLook Data to a New or Existing DataSet.
If the user opts to store data to a new DataSet, the New DataSet dialog appears into which
a DataSet name, file name and file path, comments and user's initials are entered. If the
dialog is Canceled, the DataSet is not created and all data are lost. If OK is pressed, the
DataSet is created and opened.
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Figure f.1.3 - DataSet Creation Dialog.
The new DataSet will have the single C/V Task, configured as it was in QuikLook as the
sole Task in the Current Test Definition. (The CTD is named as part of the DataSet creation process. A single Executed Test Definition will be placed in the DataSet Archive
with the C/V Task recorded along with the data that were measured during the QuikLook
execution. The DataSet is normal in every regard. The Task can be reexecuted as the
CTD. The CTD can be updated from the Editor and all subsequent executions will be
stored to the Archive.
Figure f.1.4 - New DataSet Created from C/V QuikLook Execution.
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f.2 - Archive Regraph
As with all Tasks, the C/V measurement is recalled from a DataSet Archive by browsing
to the measurement in the Archive portion of the tree in the DataSet tab of the DataSet
Explorer. Double-click on the Task in the Tab to open the configuration dialog.
Figure f.2.1 - Access the C/V Data in the DataSet Archive.
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Figure f.2.2 - C/V Configuration Dialog Recalled from the DataSet Archive.
The configuration dialog is opened for review. Most all controls are disabled. Adjust Mux
in a Loop and Adjust Parameters in a Loop are enabled so their subdialogs can be opened
for review. Those dialogs' controls are likewise disabled. Help is available. Cancel/Plot is
active to allow the dialog to be closed and the Archive Regraph to continue. External
Amplifier radio buttons are enabled because they cannot be disabled. Once the configuration dialog is closed, a second dialog opens to allow the plot to be configured. The dialog
is identical to the QuikLook Plot page except that the comments are not present here. See
QuikLook Plotting for details regarding the dialog.
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Figure f.2.3 - Configure C/V Archive Regraph Plot Titles and
Filters.
Once the plot is configured and the dialog closed, the Archived data are displayed in the
standard QuikLook Response dialog. The only difference between this display and the
QuikLook display is that Create a DataSet is disabled.
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Figure f.2.4 - C/V Data Recalled from a DataSet Archive.
f.3 - Data Exporting
Once the QuikLook Response dialog is displayed, whether it was created by QuikLook
execution or by Archive Regraph, the displayed data can be exported out of Vision into a
variety of formats that may be more suitable to the user. Note that the actual exporting
occurs once the QuikLook Response dialog is closed. Data can be exported to one of five
targets:
y
Printer - Pre-formatted text is sent to the when the configuration dialog is closed.
Before printing a printer setup dialog will appear, allowing printer options to be
adjusted.
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Figure f.3.1 - Standard Windows Printer Configuration Dialog.
y
y
y
Text File - Selecting this option enables the ">>" button. Clicking this button will
open a standard browser dialog in which a filename and path must be selected. If
the file already exists, the output will be appended to existing text. An output filename must be specified for this export.
Excel - Selecting this option enables the ">>" button. Clicking this button will
open a standard browser dialog in which a filename and path may be selected.
Specifying a filename is optional. However, if specified, a unique filename/file
path must be created or an overwrite situation will occur. Data are not appended
to existing files. When the configuration dialog is closed, the Excel program will
be started and a spread sheet created. When Excel is closed, the data will be written to the specified filename, or the user will be prompted to save if the file is not
specified. Office '97 must be loaded for this option. Office is not provided with
the tester or Vision software. Utilities to write to Office 2000 are not yet available.
Word - Selecting this option enables the >> (browser) button. Clicking this button will open a standard browser dialog in which a file name and path may be selected. Specifying a file name is optional. Word exporting can only be performed
during an Archive Regraph operation. The Print/Export Filter cannot be associated with a Task and export to Word. Long-duration Tasks cannot export to Word
during execution. The Word program will be opened and written when the regraph dialogs have been closed. If a new file name is specified, the document will
be saved immediately. Word export depends on two template files - "Tem68
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y
plate.doc" and "Template2.doc"- located in "C:\DataSets". These are blank Word
files. Template.doc is in portrait orientation with tabs at 1", 2.5", and 4". Template2.doc is in landscape orientation with tabs at 1", 2.5", 4" and 6". Both pages
are set to Times New Roman 12 pt font. Word export output is formatted to align
properly with these settings. Care must be taken not to overwrite the templates. If
no file name is specified, the user will be prompted to save the documents when
closed. If the documents are saved, the template file will be overwritten. In this
event, the file should be renamed appropriately and a new template file created
with the specifications given above. Office '97 must be loaded for this option.
Office is not provided with the tester or Vision software. Utilities to write to Office 2000 are not yet available. The Word export option has been added as of
Version 3.1.0. Samples using measured data are not yet available.
"Screen Dump" - Selecting this option will send a synthetic facsimile of the data
results dialog to the printer. A printer configuration dialog will appear. The "Advanced" option on this dialog should be used to set the format to Landscape. This
option is not yet available for C/V.
The Figures below show first the Export configuration dialog in which the "Export Text"
option is selected and the browser button enable. Second is shown the browser dialog.
Figure f.3.2 - Export Configuration Dialog.
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Figure f.3.3 - Standard Windows File Browser.
f.4 - Export Setup
Name
Select Option
Type
List Box
Browse Button (">>") Button
Filename
Text
Default
"Print"
Description
Select between the Print, Export Text, Export Word and Export Excel options. Export Word is not yet available. This
control enables the browser button for all selections except
the "Print" option.
Unpressed This control is enabled for all export options except "Print".
For the remaining options, this control must be selected. The
browser dialog will appear where a path and filename must
be specified for the export output.
""
This control is always disabled and cannot be used to specify
the filename or path for Text, Word or Excel export. Once
the browser is used to selected a path and filename, those
will be displayed in this control for review. Note that a path
and filename MUST be specified for all but the "Print" and
"Screen Dump" export option.
f.5 - Export Samples
y
Text File Sample - The two figures below show partial views of a sample C/V
Text Export file. The views are complete enough to present the entire file format.
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Figure f.5.1 - C/V Task Text Export File Format - Upper Portion.
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Figure f.5.2 - C/V Task Text Export File Format - Lower Portion.
y
Excel File Sample - These two figures show a partial view of the C/V Task Excel
export output format. The views are complete enough to represent the entire output format.
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Figure f.5.3 - C/V Task Excel Export Output Format - Upper
Portion.
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Figure f.5.4 - C/V Task Excel Export Output Format - Lower
Portion.
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g - Change and Version Record
Version 3.0.0 - 21 November 2001
1. Inserted a Custom Amp radio button into the Voltage Range control. Added code
to handle this selection. 21 November 2001. SPC.
2. Set the Task to Version 3.0.0 for development of the next release. 21 November
2001. SPC.
3. Added a Sensor Impedance control to the Sensor options. Adjusted the measured
Sensor value by this term. 23 November 2001. SPC.
4. Added a Start at Last Amp Level control and handled its selection. 23 November
2001. SPC.
5. Made adjustment of the Drive/Return Channel/Port controls more dynamic as Adjust Mux in a Loop is selected and deselected. 5 December 2001. SPC.
6. Eliminated several User Variables to make the list less cluttered. No functionality
was lost. Values eliminated are noted in the table below. 10 December 2001.
SPC.
Version 3.1.0 - 14 March 2002
1. Set to Version 3.1.0 for release - 14 March 2002 - SPC.
2. Initial Word Export feature was added. 28 March 2002 - SPC.
3. Task has been removed from the Library and QuikLook Menu. 03 April 2002 SPC.
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