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SEMI S2 Section 26 Laser Safety SEMI S2 Section 26 Changes Laser Data Sheet John O’Donnell Texas Instruments Objective • Communicate the rationale for and changes to the laser safety section of SEMI S2 0706 2 June 13, 2006 SEMI Step Laser Safety Task Force • The Laser Task Force scope was limited to: – Relocating needed information from Related Information 9 (Laser Data Sheet) to an Appendix (7) – Making suitable changes to Section 26 and RI-9 to reflect the relocation of the Laser Data Sheet – Addressing any international or regulatory changes. • This move would provide the equipment users needed information about lasers in equipment 3 June 13, 2006 SEMI Step Rationale for Change • The original purpose of the S2 Laser Data Sheet was to provide a standard format to communicate laser equipment hazards and control measures information to the user. • Located in Related Information 9, the Laser Data Sheet was not being used. • The change to S2 was made to get appropriate laser information to the people that need to use it to establish control measures during the use, maintenance, and service of semiconductor manufacturing equipment • Equipment users needed access to laser hazard and control data in order to implement effective laser safety programs. 4 June 13, 2006 SEMI Step Rationale for Change • The User Perspective – A standard format would communicate critical information on laser hazards and controls needed for installation and maintenance personnel to control laser hazards. • Efficient Use of Resources – Suppliers perform a laser hazard analysis once per model – Every user would have to perform an analysis for each tool that they have from every equipment manufacturer • ESH has few enough resources and needs to maximize the ability to provide a safe & healthy workplace 5 June 13, 2006 SEMI Step Who is affected? • Equipment manufacturers – Laser equipment requirements in SEMI S2, Section 26. • Third Parties – Evaluate control measures and laser hazards documented on Laser Data Sheet • Device manufacturers – Source of laser safety information to use in workplace laser safety programs 6 June 13, 2006 SEMI Step From Information To Requirement • The original Laser Data Sheet was published in Related Information 9 but remained there unused by equipment manufacturers • The laser line item required essential laser data to be documented on the Laser Data Sheet. • This change was approved in March 2004, but the effective date was delayed until July 2006 • Effective July 1, 2006, the Laser Data Sheet is Appendix 7, documentation for requirements of Section 26 7 June 13, 2006 SEMI Step Laser Data Sheet APPENDIX 7 Laser Data Sheet – SEMI S2 A7-1 Equipment Information - (All Laser Product Classes) Laser Equipment Manufacturer ____________________________________________________ Equipment Model # ________________________ Date Laser Data Sheet Completed ________________ Laser Product Classification ____________ (e.g., 1, 1M, 2, 2M, 3A, 3R, 3B, 4) Classification Standard(s) ____________ (e.g., IEC, FDA/CDRH, JIS) Certification File Identification Number ______________(e.g., CDRH accession number, or if CDRH accession number has been applied for, but not yet received ‘pending’ may be used. If self declaring under IEC 60825-1 or if certification is not required, e.g., if class 1 laser product is incorporated without changes, then ‘N/A’ may be used) A7-2 Laser Information (Greater than Class 2 & embedded Class 3R (3A), 3B & 4) Is access to laser radiation above the maximum permissible exposure (MPE) level YES NO required during maintenance or service tasks? ____ _____ If NO, then the information in Parts A7-2, A7-3 and A7-4 need not be provided. If YES, complete the information in Parts A7-2, A7-3 and A7-4 for each task and laser that requires access. If there are multiple lasers contained within the laser equipment, provide the following for each task/laser combination that meets the above criteria. Laser Parameters Laser ___1___, ___2___, __etc.__ Laser Manufacturer _______, _______, _______ Laser Model No. _______, _______, _______ A7-2.1 Laser Medium Type (HeNe, Nd:YAG, Argon, KrF, Diode, etc.) _______, _______, _______ A7-2.2 Wavelength(s) in nanometers (nm) _______, _______, _______ A7-2.3 Laser Hazard Classification (individual laser) _______, _______, _______ NOTE 1: If a laser is used in both continuous wave and pulsed modes, complete both A7-2.4 and A7-2.5. A7-2.4 Continuous Wave Lasers A. Power in Watts (W) _______, _______, _______ B. Irradiance in Watts/square centimeter (W/cm2 at aperture) _______, _______, _______ A7-2.5 Pulsed Laser Characteristics A. Pulse Duration in Seconds (s) _______, _______, _______ B. Energy per Pulse in Joules (J) _______, _______, _______ C. Pulse Repetition Frequency in Hertz (Hz) _______, _______, _______ D. Average Power in Watts (W) _______, _______, _______ E. Radiant Exposure Joules/square centimeter (J/cm2) _______, _______, _______ F. Q-Switch controlled pulses (Yes/No) _______, _______, _______ A7-2.6 Beam Parameters at maintenance or service access points Exception: In the case of proprietary information, an acceptable alternative to providing the Beam Parameters is to provide NOHD results for each access point according to IEC 60825 or equivalent. A. Beam shape Circular (C), Rectangular (R), Elliptical (E) _______, _______, _______ B. Beam size (mm) Major axis (R/E) or diameter (C) _______, _______, _______ Minor axis (R/E) _______, _______, _______ 8 June 13, 2006 SEMI Step Laser Parameters Laser C. Beam divergence in milliradians (mr) Major axis (R/E) or diameter (C) Minor axis (R/E) D. Focal length in millimeters (mm) (of the emitting lens) Major axis (R/E) or diameter (C) Minor axis (R/E) E. Is there a collecting optics hazard? (Yes/No) ___1___, ___2___, __etc.__ _______, _______, _______ _______, _______, _______ _______, _______, _______ _______, _______, _______ _______, _______, _______ A7-3 Laser Control Measures A7-3.1 Specify maintenance/service tasks requiring access to laser radiation in excess of the MPE and recommended laser control measures. A. Task 1 ________________________________________________________________ B. Task 2 ________________________________________________________________ C. Etc. ________________________________________________________________ Note 1: Suppliers may alternately provide a reference to laser control measures information that is located in a document available to users. A7-3.2 Of the tasks in A7-3.1, which tasks need a Laser Controlled Area? (e.g., for Class 3b or 4 lasers) _______________________________________________________________________________ A7-3.3 If a nominal ocular hazard distance (NOHD) is used as a control measure, then provide the NOHD calculations and assumptions. See IEC 60825-1 for NOHD calculations. Exception: If specific information required by A7-2.6 is proprietary, suppliers may provide the NOHD results and an explanation of the assumptions made. A7-3.4 Include a beam path diagram identifying the accessible points. NOTE 1: A description of the access points from the exterior of the tool can be considered equivalent to a diagram. A7-4 Personnel Protective Equipment (PPE) Provide information for accessible laser radiation hazards in excess of the Maximum Permissible Exposure (MPE) Laser Parameters Laser A. Optical Density (OD) of PPE required during maintenance B. OD of PPE required during service activities C. Other types of PPE (e.g., skin protection) if needed Note 2: ___1___, ___2___, __etc.__ _______, _______, _______ _______, _______, _______ _______, _______, _______ Suppliers may alternately provide a reference to PPE information located in a document available to users. Section 26 Changes • 26.1 Requirement for laser product class and applicable standard documented on Laser Data Sheet • 26.1.1 Alternate formatting option for Laser Data Sheet • 26.1.3 Laser and equipment labeling requirement 9 June 13, 2006 SEMI Step Section 26 Changes (continued) • 26.1.4 Maintenance and service task information with access above MPE • 26.1.4.1 Information on laser hazards, control measures and PPE documented on Laser Data Sheet. (Exceptions: Proprietary Information, Stand Alone system components) • 2.1.5 Identification of laser source locations in user documentation 10 June 13, 2006 SEMI Step Summary • Laser equipment classification and hazard information is now a requirement • Maintenance and Service task hazards and control measures are required to be documented • Laser Data Sheet provides format to document required information • This change was approved over 2 years ago 11 June 13, 2006 SEMI Step