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Advanced Digital IC-Design The MOS-transistor This lecture will Refresh the MOS-transistor function and models Especially short channel effects Especially, Digital IC-Design The Diode The Diode in an IC-device Diodes appears in all MOS-transistors (the drain & source area) They have parasitics that affects the performance (speed, power) Diodes should always y be backward biased (negative VBS) 1 Diode - The Simplest IC-device Advanced Digital IC-Design ICstructure Discrete component p SiO2 Metal p+ n+ Semiconductor n+ p+ The MOS Transistor p- pn-junctions The MOS-transistor: An Old Invention In 1925, Julius Edgar Lilienfeld described the first MOSFET structure What is a MOS-transistor? MOS = ”Metal Oxide Semiconductor” Polysilicon - U.S. U S Patent in 1930 In early thirties, a similar structure was shown by Oskar Heil - British Patent in 1935 None of them built a working component The first working MOS-transistor was shown in the early sixties SiO2 Metal Oxide Silicon, doped Semiconductor 2 The MOS-transistor (or MOSFET) N-MOS Transistor Most important device in digital design Gate Bulk Source Drain n+ n+ V Very good d as a switch i h Relatively few parasitics Each box in the layout represents a mask or a step in the process Rather low power consumption High integration density ++ pp Thin Oxide p - Simple manufacturing Mask Layout Economical for large complex circuits P-MOS Transistor How does it Work? Technologies Gate Bulk Source Drain N-Well N W ll VGS must be Opens a lager than a channel threshold VT P-Well ++ np p + p Twin-Tub p VDS drives a current ID VDS VGS + n- Silicon St Structure t ID N-Well The gate length sets the name of the technology Gate Source Drain 3 What is a MOS Transistor? MOS – a Four Terminal Device Gate voltage controls the current from drain to source A Switch VGS Circuit Symbol VGS G Ron eq S D Source connected to higher potential for p-channel devices (often to VDD) G S Source connected to lower potential for n-channel devices ((often to GND)) D Bulk keeps the substrate at a stable potential. If not shown – it is assumed to be connected to the supply/GND. Source Gate Gate Drain Infinite resistance when VGS < VT Source Req when VGS ≥ VT VT = Threshold voltage Bulk (Body) Important Dimensions How does the Transistor Work? Technology development: Gate Drain Source W tox Drain Bulk (Body) 1993: 0.6 um 2003: 65 nm 2013: 18 nm? When VGS is slightly increased g g are attracted Negative charges A depletion region is formed VGS > 0 L n+ The technology is named after the gate length L “Diode area” n+ p- Depletion Region 4 How does it Work? Linear Region (Resistive Operation) When VGS is increased above VT VDS is increased slightly More negative than positive charges are attracted close to the gate (turns to n-type material) Horizontal E-field from drain to source A channel is formed (Strong inversion) A current ID is established VGS > VT VGS > VT VDS<VGS-VT ID n+ n+ n+ n-channel - p Depletion Region Linear Region (Resistive Operation) ID is proportional to the vertical E-field n-channel p- i.e. to the charge velocity caused by the drain voltage VDS I D = k´n VGS forms a vertical E-field n+ n+ ID VDS establish a horizontal E-field p- V W (VGS − VT − DS )VDS 2 L Depletion Region Linear Region (Resistive Operation) I D = μn Q ξ W μn = Electron mobility ξ = E-field over the channel Q ∼ VGS −VT # of charges attracted by the gate Q ∼ VDS Less charges in drain region i.e. to the # of charges attracted by the gate voltage VGS ID is proportional to the horizontal E-field n+ V ξ = DS L I D = k´n V W (VGS - VT - DS ) VDS 2 L From charge conc. (k 'n = μnCox ) From Horizontal E-Field 5 Saturation Region Saturation Region VDS = VGS – VT Strong inversion reached precisely (i.e. VGD = VT) No channel close to the drain VGS > VT ID n+ ”VDS /2" p- Channel Length Modulation VDS > VGS-VT V W (VGS − VT − DS )VDS L 2 W V −V I D = k´n (VGS − VT − GS T )(VGS − VT ) L 2 k´ W I D = n (VGS − VT ) 2 2 L I D = k´n VDS=VGS-VT n+ Insert VDS = VGS - VT in the linear equation Channel Length Modulation ⇒ Pinch off Saturation The effective channel length g is modulated by y VDS VDS > VGS-VT Electrons are injected through the depletion region VGS>VT VDS>VGS-VT ID n+ n+ L´ I D = k´n W (VGS − VT ) 2 (1 + λVDS ) L Pinch off λ = Empirical constant L 6 The Threshold Voltage VT The Bulk (Body) Potential The substrate is slightly doped (p- for NMOS) The bulk is most often connected to GND (VDD for PMOS) There are always free electrons in the substrate Negative VSB opens the diode; Not Allowed T fform a channel, To h l we need d to t attract tt t these th negative ti charges h Positive P iti VSB makes k it h harder d tto attract tt t negative ti charges h tto the channel The threshold is when the number of negative and positive charges are equal That is, the threshold voltage will increase The value of VT is thus set by the p-doping concentration VSB VGS > VT p+ + n VGS n+ n+ + n n-channel p- Strongly p-doped Depletion Region p- The Threshold Voltage VT MOS Model for Long Channels VT = VT 0 + γ ( − 2φF + VSB − − 2φF ) Widely used model for manual calculations 2 φF = Fermi potential W V ((VGS − VT )VDS − DS )(1 + λVDS ) L 2 k´n W 2 ≥ VGS − VT ; I D = (VGS − VT ) (1 + λVDS ) 2 L VDS ≤ VGS − VT ; I D = k´n γ increases with the acceptor concentration VDS Low threshold ⇒ Low voltage transistors but they y are leaky y k´n = μ n Cox Two threshold voltage technologies can be used for low power VT = VT 0 + γ ( − 2φF + VSB − − 2φF ) Added to avoid discontinuity y 7 Velocity & Mobility Velocity & Mobility The electron (hole) velocity is related to the mobility (μ ) The electron (hole) velocity is related to the mobility The velocity is also dependent on the E-field m2 = Electron mobility Vs m2 μ p = 0.013 = Hole mobility Vs μn = 0.038 Typical 0.35μm technology (μ ) (ξ ) m s m υ p = μ pξ s υn = μnξ The mobility is dependent on doping concentration … Often determined empirically Note that the electron mobility is about 3 times higher Velocity Saturation (υ sat ) VDS forms a horizontal E-field Velocity Saturation (υ sat ) (ξ ) υn = μn ξEDS An increased E-field leads to higher electron velocity However at a critical E-field E field (ξ c ), the velocity saturates due to collisions with other atoms Constant Velocity it y m ≈ 105 for both electrons and holes s Drain n+ n+ ξ ns Source ta nt Mo b il νsat = 105 m/s Co υsat ν n (m/s) The mobility is not constant when velocity saturation is reached EDS [V/um] VDS establish a horizontal E-fieldp 0 ξE c sat 8 ID versus VDS ID versus VGS ID (mA) 0.5 -4 6 Long channel Long-channel model 0.4 5 2 4 For both 1 2 0 0 0 0.5 1.0 1.5 2.0 quadratic d ti 0.5 1 1.5 2 2.5 0 0 0.5 1 VGS(V) VDS (V) 0 0.5 1 VDSAT = 0.63 V 0.1 1.5 3 Short-channel model 0.2 linear quadratic ID (A) VGS = VDD = 2.5 0.3 -4 x 10 2.5 ID (A) VGS-VT = 2.5 - 0.43 = 2.07 V x 10 Long Channel 1.5 2 2.5 VGS(V) Short Channel 2.5 ID versus VDS Model for Manual Analysis Linear ID(VGS) Quadratic ID(VGS) VDS = VGS - VT 06 0.6 A first order model of the velocity 0 25 0.25 ID (mA) 0.5 VGS= 2.5 ID (mA) VGS= 2.5 0.2 VGS= 2.0 0.15 0.3 0.2 VGS= 1.5 0.1 VGS= 1.0 0 ⎧υ = μn ξ ⎪ ⎨ ⎪υ = υ = μ ξ sat n c ⎩ VGS= 2.0 0.4 0.1 VGS= 1.5 0 05 0.05 VGS= 1.0 0 0 0.5 1 1.5 VDS (V) Long Channel 2 2.5 0 0.5 1 1.5 2 for ξ ≤ ξ c f ξ ≥ ξc for 2.5 VDS (V) Short Channel 9 Model for Manual Analysis A first order model of the velocity y saturated region: I DSAT VDSAT 2 W = μn Cox ((VGS −VT )VDSAT − ) 2 L A Unified Model for Manual Analysis I D = kn' A Unified Model for Manual Analysis Vmin 2 W I D = k ((VGS −VT )Vmin − )(1+ λVDS ) L 2 ' n Vmin = min(VGS −VT , VDS , VDSAT ) Three Regions VDSAT V 2 W ((VGS −VT )VDS − DS )(1+ λVDS ) Resistive 2 L 0.63 V 0 15 0.15 ID = kn' W (VGS −VT )2 (1+ λVDS ) Saturated 2 L I D = kn' V 2 W ((VGS −VT )VDSAT − DSAT )(1+ λVDS ) Velocity saturated L 2 VGS = 2 V I D (mA) Velocity saturated Linear 0.1 VGS = 1.5 V 0.5 VGS = 1 V VGS-VT 0 0 Saturated 1 VDS (V) 2 10 The PMOS Transistor Sub-threshold Region Velocity saturation is less pronounced for PMOS due to lower mobility The sub threshold drain current have an exponential relation to the gate voltage (compare to bipolar) -4 0 x 10 VGS = -1.0V Assume that all variables are negative! VGS = -1.5V ID (A) -0.4 -0.6 -0.8 -1 -2.5 VGS = -2.0V 2 0V Super-threshold region (Super-VT) ln(ID) -0.2 Sub-threshold region (Sub-VT) VGS = -2.5V -2 -1.5 -1 -0.5 VT 0 VDS (V) MOS Dynamic Behavior Junction Capacitance - Diode areas - Divided in two parts - area and side wall 2 Gate Drain CGS CGD n+ n+ CG CSB CDB tox Channel Cap. Junction Cap. p Gate Capacitance - Gate to Bulk - Gate to Source/Drain 3 VGS (V) MOS Capacitances Source yp of Capacitance p Two Types 1 Overlap Cap. Xd 11 Junction Capacitance Junction Capacitance Drain/Source Diffusion CDiff = CBot + CSW G at e Bottom Ch To an wa ne rds l Don’t count the wall towards the channel CDiff = CBot + CSW CBot = Cj × Area CSW = CjSW × Perimeter Cj in F/um2 CjSW in F/um Nonlinear: dependent on the diode voltage W Side Wall Ls Gate Capacitance Channel Capacitance Gate Source Drain Cut off Xd CG = Cox × W × Leff Leff CGS CG depends p on the region g COX in F/um2 n+ Linear n+ n+ n+ CGD Saturation CGB n+ n+ 12 Overlap Capacitance Conclusions - Static Behavior Gate CGD = Cox × W × Xd CGS = Cox × W × Xd Source Xd Cox in F/um2 Or CGD = Co × W CGS = Co × W Drain I D = kn' ID = Leff CGS CGD CGB V 2 W ((VGS −VT )VDS − DS )(1+ λVDS ) Resistive 2 L kn' W (VGS −VT )2 (1+ λVDS ) Saturated 2 L I D = kn' V 2 W ((VGS −VT )VDSAT − DSAT )(1+ λVDS ) Velocity saturated L 2 Threshold Voltage Co in F/um VT = VT 0 + γ ( −2φF + VSB − −2φF ) A Unified Model for Manual Analysis Conclusions - Dynamic Behavior Vmin 2 W ID = k ((VGS −VT )Vmin − )(1+ λVDS ) L 2 ' n Vmin = min(VGS −VT , VDS , VDSAT ) CG = Cox × W × Leff CGD = CGS = W × Cox × Xd CDiff = CBot + CSW CBot = Cj × Area VT = VT 0 + γ ( −2φF + VSB − −2φF ) Gate Capacitance CSW = CjSW × Perimeter JJunction ti Capacitance 13