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Radiant Technologies, Inc. Ferroelectric Test & Technology Joe T. Evans, Jr. August 22, 2016 Autonomous Memory Radiant Technologies, Inc. Radiant Technologies • Focus on non-linear electromechanical materials technology. The company • Designs and manufactures test instruments and their operating procedures • Fabricates thin ferroelectric film devices • Integrates the two disciplines to create unique functions. Autonomous Memory Radiant Technologies, Inc. Test Instruments Radiant pioneered ferroelectric test with the development of the first commercial test system in 1989 and now makes a variety of testers and fixtures. Autonomous Memory Radiant Technologies, Inc. Test Instrument vs Integrated Ferroelectrics What follows is a series of measurements demonstrating the properties of Radiant’s thin PZT capacitors measured with Radiant test equipment. Autonomous Memory Radiant Technologies, Inc. IC Scale Cryogenic Testing Lakeshore CRM-EM-HF Autonomous Memory Radiant Technologies, Inc. IC Scale Cryogenic Testing Hysteresis & Remanent @ 20V [ AB403 ] 50 40 30 uC/cm2 20 10 0 -10 -20 -30 -40 -50 -20 -15 -10 -5 0 Voltage 5 10 15 20 0.25m-thick PZT from 10 K to 310 K Autonomous Memory Radiant Technologies, Inc. Quantum Design PPMS P450 The QD Model P450 Multifunction Probe can test disc-shaped bulk capacitors at high voltage down to 2.4 K. B Autonomous Memory Radiant Technologies, Inc. Bulk Capacitors vs Temperature Many surprises await at lower temperatures. Hyster esis at 300K, 253K, & 100K [ CTS 3241 HD ] Autonomous Memory 253K 700V 10s: Polarization (µC/cm2) 100 K 950V 1s: Polarization (µC/cm2) 300 K 580V 10s: Polarization (µC/cm2) 30 20 10 uC/cm2 The sample to the right is a commercial piezoelectric PZT from CTS Wireless in Albuquerque measured in a PPMS that indicates a normal hysteresis loop at room temperature but unexpectedly has no remanent polarization at 100 K. 0 -10 -20 -30 -1000 -800 -600 -400 -200 0 Voltage 200 400 600 800 Radiant Technologies, Inc. 1000 Leakage vs CV vs Remanent Polarization Decomposing the hysteresis loop on a probe station. Hysteresis Parameters uC/cm^2, uA/cm^2, uF/cm^2 50 40 30 20 10 Rhyst 0 -6 -4 -2 -10 0 2 4 6 SW CV*10 nSW CV*10 -20 SW IV*2.5 -30 nSW IV*2.5 -40 Volts Autonomous Memory Radiant Technologies, Inc. High Voltage Polarization & Piezeoelectric Loops Radiant Piezoelectr ic Refer ence Sample [ PZT 12.75mm Dia - 1mm Thick ] Proc. Hyst Proc. Disp Polarization (µC/cm2) 30 20 10 0 -10 -20 Displacement (Microns) -30 0.5 0 -0.5 -1.0 -1200 -1000 -800 -600 Autonomous Memory -400 -200 0 Volts 200 400 600 800 1000 Bulk Capacitor displacement at high voltage and elevated temperature. Radiant Technologies, Inc. Thin Film Polarization & Piezeoelectric Loops The laser vibrometer can measure the piezoelectric motion of a thin ferroelectric film capacitor Autonomous Memory Radiant Technologies, Inc. Thin Solid Capacitor Piezo Loop AFM Reference [ Cap A ] Proc. Hyst Proc. Disp 25 Polarization (µC/cm2) AFMs work too. Surface piston of the 1µm-thick PNZT at 25 volts and 500 hertz using an AFM. The capacitor is clamped by the substrate. 0 -25 15 Angstroms 10 5 0 -5 -25 Autonomous Memory -20 -15 -10 -5 0 Volts 5 10 15 20 25 Radiant Technologies, Inc. Thin Film PZT on Cantilever Displacement vs Volts 0.5 um 52/48 PZT on 75mmx5mm Cantilever 10 Capturing e31 for a thin film on a cantilever surface is a 3rd technique. 9 8 7 Microns 6 5 4 3 2 1 0 -1 -8 -6 Autonomous Memory -4 -2 0 Period (ms) 2 4 6 8 Radiant Technologies, Inc. Ferroelectric Transistor Operation Switching vs Nonswitching IV [ ND1-0903-2 ] 0.0000050 0.0000045 0.0000040 0.0000035 current 0.0000030 0.0000025 0.0000020 0.0000015 0.0000010 0.0000005 Source & Drain 0 -6 -4 -2 0 Volts InOx 2 4 6 I2C DAC Module I2C Port Premier II d g Drive Return PZT Gate Autonomous Memory Sensor Radiant Technologies, Inc. s Radiant Technologies • Integrated thin-ferroelectric-film capacitors. Radiant has developed a manufacturable process for discrete ferroelectric capacitors. Radiant inserts packaged capacitors into its testers as test references. Radiant processes thin PZT film wafers and devices for researchers studying non-linear materials. Autonomous Memory Radiant Technologies, Inc. Membrane Capacitors • A three micron membrane with an embedded 1mthick PNZT capacitor. Autonomous Memory Radiant Technologies, Inc. Membrane Capacitors • Remanent strain movie if the same capacitor. Autonomous Memory Radiant Technologies, Inc. pMEMs Devices . Autonomous Memory We have work still to do to reliably generate reproducible devices. Radiant Technologies, Inc. Mechanically Coupled Capacitors DRIVE Actuator Actuator Sensor RETURN 1.2mm Sensor Actuator GND Autonomous Memory Radiant Technologies, Inc. 1 2 mm White Light Membrane Numarski A 1-square-millimeter capacitor with the majority of its surface as a membrane. In white light the membrane looks smooth but in Numarski the membrane is unmistakable. Autonomous Memory Radiant Technologies, Inc. 2 16mm Membrane A 16 square millimeter membrane soldered directly to a PCB with an on-board charge amplifier that connects to the Radiant EDU educational tester using telephone cable. Pyroelectric constant is -22nC/cm2/K. The membrane is too fragile to be touched by a human. Autonomous Memory Radiant Technologies, Inc. Autonomous Analog Switch This entire PCB with discrete components and a packaged ferroelectric capacitor can be shrunk into the same solid state switch package on the PCB in the left image. This circuit can stand-alone and resist disturbs from dramatic power-line voltage events. Autonomous Memory Radiant Technologies, Inc. Nuts & Volts Magazine “A Simple Ferroelectric Memory” February 2015 Issue Autonomous Memory Radiant Technologies, Inc. Ferroelectric Circuits Autonomous Event Detector Autonomous Memory Event Input Line Output Buffer Ferroelectric Capacitor Input Overvoltage Protection Autonomous Memory Radiant Technologies, Inc. Demo Board - Piezo Piezo Flapper Latch Event Detector This piezoelectric flapper is a Measurement Specialties, Inc. LDT0-28K Piezo Film Sensor. Bent 90 degrees, it generates exactly 7nC of charge, precisely the amount required to saturate one of Radiant’s Type AB 20/80 PZT or Type AD 3/20/80 PNZT thin film capacitors. The Radiant ferroelectric capacitor is encased in the TO-18 transistor package on the Event Detector board. Autonomous Memory Radiant Technologies, Inc. Magnetoelectric Sensor Deposit magnetically sensitive material on membranes to make magnetic field sensors. Below are dice from a wafer prepared for this experiment but which have not yet seen the backside DRIE. This project, executed in a CRADA with SPAWAR, is difficult! Autonomous Memory Radiant Technologies, Inc. Best Magnetoelectric Response (so far) Compare CapB Viring/+Pole/-Pole @ 50G [ 1mm2 type AC w/nickel membrane ] Cap B 180d -Pole: Sie-Trace Loop Avg. Filter: 1 Cap B 180d +Pole: Sie-Trace Loop Avg. Filter: 1 0.8 Cap B 180d Virgin: Se-Trace Loop Avg. Filter: 1 0.6 0.4 pC 0.2 0 -0.2 -0.4 -0.6 -50 -40 Autonomous Memory -30 -20 -10 0 Oersted 10 20 30 40 50 Radiant Technologies, Inc. Autonomous Event Detector Set by a Magnetic Field? Can we magnetomechanically switch the ferroelectric capacitor and control the switch? Autonomous Memory Radiant Technologies, Inc.