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Course Name: VLSI Design Course Code: BEICEI 604R02/MICCEI604R01 UNIT-I 1. What are the steps involved in twin tub process? 2. Tub formation Thin oxide construction Gate formation Source & drain implantations Contact cut definitions Metallization Passivation When the channel is said to be pinched-off? For a MOSFET when VGS is greater than Vt, a channel is induced. As we increase VDS current starts flowing from Drain to Source (triode region). When we further increase VDS, till the voltage between gate and channel at the drain end to become Vt, i.e. VGS - VDS = Vt, the channel depth at Drain end decreases almost to zero, and the channel is said to be pinched off. This is where a MOSFET enters saturation region. 3. What are the two components of Power dissipation in CMOS inverter? 4. Static dissipation due to leakage current or other current drawn continuously from power supply. Dynamic dissipation due to switching transient current charging and discharging of load capacitances. What is noise margin? It represents the amount of noise voltage present in the circuit without affecting normal operation of circuit. NMH = VOH-VIH and NML = VIL-VOL 5. What are the advantages of Silicon-on-Insulator process? 6. Higher Performance at equivalent VDD Reduced Temperature sensitivity Latch up Eliminated Reduced Antenna issues No Body or Well Taps needed Small transistor saves lot of Area Power savings Why NMOS technology is preferred more than PMOS technology? The mobility of electrons, which are carriers in the case of an n-channel device, is about two times greater than that of holes, which are the carriers in the p-channel device. Thus an n-channel device is faster than a p-channel device. 1 7. Compare between CMOS and Bipolar technologies. 8. CMOS Low static power dissipation High input impedance High noise margin High packing density High delay sensitivity to load(fan –out limitations) Low output drive current Low Gm Bidirectional capability Define threshold voltage in CMOS. Bi-CMOS High power dissipation Low input impedance Low voltage swing logic Low packing density Low delay sensitivity to load High output drive current High Gm Essentially unidirectional It is defined as voltage applied between gate and source of MOS transistor below which drain to source current IDS effectively drops to zero. 9. What is pull up and pull down devices? Pull-up: A pull-up device when energized will pull the output to supply ie..1 Generally PMOS is used as pull up device Pull-down: 10. pull -down device when energized will pull the output to ground NMOS is used as pull down device What are the three operating regions of MOSFET? Cut off region Linear Saturation 11. Write various fabrication methods in CMOS. 12. P-well N-well Twin-tub SOI What is lateral diffusion? Lateral diffusion refers to the lateral movement of lipids and proteins found in the membrane. Membrane lipids and proteins are generally free to move laterally if they are not restricted by certain interactions. Lateral diffusion is a fairly quick and spontaneous process. 13. Draw the MOSFET capacitive device model. 2 14. What are the advantages of the CMOS technology over the NMOS technology? 15. 16. CMOS has relatively high performance and cost effective than NMOS technology. CMOS shows lower static power dissipation compared to NMOS. CMOS provides high noise immunity. Draw the DC transfer characteristics of CMOS inverter. What is meant by NMH and NML? HIGH noise margin: is defined as the difference in magnitude between minimum High output voltage of the driving gate and minimum input High voltage recognized by the receiving gate. NMH=|VOH – VIH| LOW noise margin: is defined as the difference in magnitude between the maximum Low output voltage of the driving gate and the maximum input Low voltage recognized by the driven gate. NML=|VIL – VOL| 17. Define rise time, delay time and fall time. 18. Rise time (tr) :time required for a node to charge from the 10% point to 90% point. Fall time (tf) : time required for a node to discharge from 90% to 10% point . Delay time (td) : delay from the 50% point on the input to the 50% point on the output . Define the terms SSI, MSI, LSI and VLSI. SSI: Small Scale Integration:- (10-100) transistors => Example: Logic gates . 3 19 MSI: Medium Scale Integration:- (100-1000) => Example: counters . LSI: Large Scale Integration:- (1000-20000) => Example:8-bit chip . VLSI: Very Large Scale Integration:- (20000-1000000) => Example:16 & 32 bit up. ULSI: Ultra Large Scale Integration:- (1000000-10000000) => Example: Special processors, virtual reality machines, smart sensors. Write the advantages and disadvantages of VLSI compared to other technologies. Advantages: simplicity of operation high component density design flexibility design security high reliability high performance and high functionality Disadvantages: long design and fabrication time higher risk to project high cost 20. Write the applications of VLSI technology. 21. digital signal processing multimedia information system wireless lan Bluetooth automobiles and toys computer and computer graphics State Moor’s law? The number of transistors embedded on the chip doubles after every 11/2 years. He predicted that semiconductor technology wills double its effectiveness every 18 months. 22. What are the pros and cons of MOSFETs? Pros : Cons: 23. Small compared to BJT, easy to fabricate and space saving Input impedance is high hence no loading effect Operating frequency is very high Handling is not easy Tran conductance is lower than BJT Mobility limitations since it depends on gate and drain voltage Draw the V-I and transfer characteristics of n-MOSFET. 4 24. Draw the V-I characteristics of p-MOSFET. 25. What is Enhancement type MOSFET and Depletion type MOSFET? Enhancement-mode MOSFETs are the common switching elements in most MOS. These devices are off at zero gate–source voltage, and can be turned on by pulling the gate voltage in the direction of the drain voltage; that is, toward the VDD supply rail, which is positive for NMOS logic and negative for PMOS logic. In a depletion-mode MOSFET, the device is normally ON at zero gate–source voltage. Such devices are used as load "resistors" in logic circuits (in depletion-load NMOS logic, for example). For Ntype depletion-load devices, the threshold voltage might be about –3 V, so it could be turned off by pulling the gate 3 V negative (the drain, by comparison, is more positive than the source in NMOS). In PMOS, the polarities are reversed. 26. Write the current equations in MOSFET for three operating regions. 5 27. What are the various parameters affects the threshold voltage in MOSFET? 28. gate conducting material gate insulation material gate insulation thickness channel doping impurities at silicon oxide interface and voltage between source and substrate Define body-effect / sub threshold effect? Vt is not constant with respect to Vsb of the transistor. This effect is called body effect or substrate bias effect 29. What is channel length modulation? In practice, when VDS is further increased beyond saturation point, it does have some effect on the characteristics of the MOSFET. When VDS is increased the channel pinch-off point starts moving away from the Drain and towards the Source. Due to which the effective channel length decreases, and this phenomenon is called as Channel Length Modulation. 30 Define the terms Trans conductance, output conductance and Figure of merit for MOSFET? Trans conductance: Relation between output current Ids and input voltage Vgs is trans conductance I ds atVds cons tan t V gs Output Conductance: I g ds ds Vds Figure of merit: Wo=( gm/Cg) 31. What are the various sources for Dynamic behavior of the MOSFET? 32. charge and discharge capacitances between device ports charge and discharge capacitances of interconnecting lines Define diffusion capacitance? Diffusion capacitance is a nonlinear capacitance and is caused by reverse biased source bulk and the drain bulk p-n junctions. This decreases as reverse bias increased. 33. Write the various channel capacitances present in MOSFET operation. 6 34. gate capacitance Cg overlap capacitance diffusion capacitance capacitance between gate and source, Cgs capacitance between gate and drain, Cgd capacitance between gate and bulk region, Cgb Define velocity saturation and mobility degradation? Velocity Saturation: vn m E (x) However when E(x) along the channel reaches the critical value is saturation, then velocity tends to saturate .this is called velocity saturation. Mobility degradation: Mobility degradation is an effect of reducing channel length. This reduces transistor current even at normal electric field levels. Reduction in mobility degradation is also observed by the vertical component of electric field. This effect is called mobility degradation. 35. Write the various secondary effects causes to vary the ideal characteristics of MOSFET. 36. threshold variations source drain resistance variation in I-V characteristics sub threshold conduction What is sub threshold condition in MOSFET? MOSFET partially conducts for voltages below the threshold voltages .this effect is called sub threshold conduction. 37. What are the pros and cons of CMOSFETs? 38. Advantages: low static power consumption high noise immunity reduce complexity of the circuit low wafer cost and mature technology Disadvantages: no bipolar secondary effects present mismatch of CMOS devices is high peak inverse voltage is high What is p well and n well? These two are CMOS technologies used to provide lower power delay product than comparable design rule of bipolar, NMOS or GaAs technologies P-well process: p-well is implanted in a n substrate n-well process: same as p-well process ,here n-well implanted in p-substrate 39. Define oxidation? 7 Oxidation is defined as the interaction between oxygen molecules and all the different substances they may contact, from metal to living tissue. But there are meanings for oxidation as in the following oxidation is gain of oxygen oxidation is loss of hydrogen oxidation is loss of electrons 40. What is photo lithography? Photolithography is the process of transferring geometric shapes on a mask to the surface of a silicon wafer. The steps involved in the photolithographic process are wafer cleaning; barrier layer formation; photo resist application; soft baking; mask alignment; exposure and development; and hard-baking. 41. What is ion implantation? Ion Implantation is an alternative to deposition diffusion As the impurity atoms enter the crystal; they give up their energy to the lattice in collisions and finally come to rest at some average penetration depth, called the projected range expressed in micro meters. Depending on the impurity and its implantation energy, the range in a given semiconductor may vary from a few hundred angstroms to about 1micro meter 42. What is negative resist and positive resist? Positive resists: The resist is exposed with UV light wherever the underlying material is to be removed. In these resists, exposure to the UV light changes the chemical structure of the resist so that it becomes more soluble in the developer. The exposed resist is then washed away by the developer solution, leaving windows of the bare underlying material. Negative resist: It behaves in just the opposite manner. Exposure to the UV light causes the negative resist to become polymerized, and more difficult to dissolve. Therefore, the negative resist remains on the surface wherever it is exposed, and the developer solution removes only the unexposed portions. 43. Why depletion load NMOS inverter is preferred over enhancement load NMOS inverter? In integrated circuits, depletion-load NMOS is a form of digital logic family that uses only a single power supply voltage, unlike ea nMOS logic families that needed more than one different power supply voltage . Although manufacturing these integrated circuits required additional processing steps, elimination of the extra power supply, and improved switching speed, made this logic family the preferred choice for many microprocessors and other logic elements. 44. Draw the transfer characteristics of CMOS inverter. 8 45. Draw the transfer characteristics of NMOS inverter. 46. What are advantages and limitations of CMOS inverter over NMOS inverter? Limitation: Since N MOS &PMOS transistor must be fabricated on the same chip side by side, CMOS process is more complex than the standard NMOS. Formation of parasitic bipolar transistor due to the close proximity of N and P MOS transistor causes CMOS latch up condition .Addition guard rings must be built around NMOS and PMOS transistor to prevent from undesirable effects. Advantages: Steady state power dissipation of the CMOS inverter is negligible voltage transfer characteristics exhibits the full output voltage swing between 0 &VDD.This results in high noise margin, also VTC transistor is usually very sharp and hence CMOS inverter resembles in ideal inverter characteristics 47. What are the various operating regions of CMOS inverter? 9 48. What are the various design parameters to be considered while designing the CMOS inverter? Threshold voltage & Trans conductance ratio (KR) symmetrical CMOS inverter noise margin temperature dependence supply voltage scaling power and area consideration 49. What is CMOS gate transistor sizing? 50. • Load Capacitance • Fall and rise time analysis. • Analytical models. • Propagation delay analysis. • Fall and rise time formulas • Transistor sizing • Multi-input Define symmetric CMOS inverter? 51. CMOS is also sometimes referred to as complementary-symmetry metal–oxide– semiconductor (or COS-MOS). The words "complementary-symmetry" refer to the typical design style with CMOS uses complementary and symmetrical pairs of p-type and n-type metal oxide semiconductor field effect transistors (MOSFETs) for logic functions. Define stage ratio in CMOS inverter? The ratio by which each stage is increased in size is called the stage ratio. 52. A MOS transistor has a threshold voltage of 0.75V, while the body effect coefficient equals to 0.54. Compute the threshold voltage for VSB=5V and Fermi level= -0.6V. 53 For the CMOS inverter circuit with VDD=3.3V, VTn= 0.6V, VTp= -0.7V, kn=200 uA/V2, kp=80 uA/V2. Calculate the noise margins of the circuit. 54 For a CMOS inverter with VTn= 0.6V,unCox=60uA/V2, (W/L)n=8, VTp= -0.7V,upCox=25uA/V2, (W/L)n=12, and VDD= 3.3V. Calculate the noise margin and the switching threshold voltage of this circuit. 55 An abrupt junction has doping densities of NA=1015 atoms/cm3 and ND=1016 atoms/cm3. 10 Calculate the built in potential at 300K. 56. Why low power has become an important issue in the present day VLSI circuit realization? In deep submicron technology the power has become as one of the most important issue because of: Increasing transistor count; the number of transistors is getting doubled in every 18 months based on Moore’s Law. Higher speed of operation; the power dissipation is proportional to the clock frequency. Greater device leakage currents; In nanometer technology the leakage component becomes a significant percentage of the total power and the leakage current increases at a faster rate than dynamic power in technology generations. 57. How reliability of a VLSI circuit is related to its power dissipation? It has been observed that every 10ºC rise in temperature roughly doubles the failure rate because various failure mechanism such as silicon interconnect fatigue, electro migration diffusion, Junction diffusion and thermal runaway starts occurring as temperature increases. 58. How environment is affected by the power dissipation of VLSI circuits? Generally the power is dissipated mostly in the form of heat. The cooling techniques, such as AC transfers the heat to the environment. 59. What is the latch up problem that arises in bulk CMOS technology? How is it overcome? Latch-up can be defined as the formation of a low-impedance path between the power supply and ground rails through the parasitic n-p-n and p-n-p bipolar transistors. Some of the important techniques to overcome are Latch-up are: use guard ring around p- and/or n-well with frequency contacts to the rings. To reduce the gain product B1XB2. Moving the n-well and the n+ source/drain further apart. Buried n+ layer in well to reduce gain of Q1. Higher substrate doping level to reduce R-sub. Reduce R-well by making low resistance contact to GND. 60. The following parameters are given for an nMOS process: tox=500Å, NA = 1x1016cm-3, ND = 1x1020cm-3, NOX = 2x1010cm-1. (i) Calculate Vt for an un implanted transistor, (ii) What type and what concentration must be implanted to achieve Vt = +1.5V and Vt = 2.0V? 61. Explain the behavior of a NMOS transistor as a switch. 62. The input of a lightly loaded transmission gate is slowly changes from HIGH level to LOW level. How the currents through the two transistors vary? In this case, the output closely follows the input. In this case the transistors operate in three regions depending on the input voltage as follows: Region I: NMOS non-saturated, PMOS cut-OFF. Region II: NMOS non-saturated, PMOS non-saturated. Region III: NMOS cut off, PMOS non-saturated. 11 63. What is the inversion voltage of an inverter? The inversion voltage Vinv is defined as the voltage at which the output voltage Vo is equal to the input voltage Vin. For a CMOS inverter it can be expressed in terms of the threshold voltages of the MOS transistors and other parameters 64. How the inversion voltage is affected by the relative sizes of the NMOS and PMOS transistors of the CMOS transistors of the CMOS inverter? In a CMOS process kn/kp=un/up=2.5 To make one may choose (W/L)p=2.5 (W/L)n to get the Vinv=Vdd/2 65. How the noise margin is affected by voltage scaling? As the supply voltage is reduced, the margin also decreases as shown in the figure. 66. What are the various ways to reduce the delay time of a CMOS inverter? The width of the MOS transistors can be increase width of the MOS transistors can be increased to reed to reduce the duce the delay. This is known as gate sizing, which will be discussed later in more details. The load capacitance can be reduced to reduce d load capacitance can be reduced to reduce delay. This is achieved by using transistors of smaller and smaller dimensions as provided by future generation technologies. Delay can also be reduced by increasing the sup can also be reduced by increasing the supply voltage ply voltage Vdd and/or reducing the threshold voltage and/or reducing the threshold voltage Vt of the MO of the MOS transistors. S transistors. 67. Why do the present VLSI circuits use MOSFETs instead of BJTs? Compared to BJTs, MOSFETs can be made very small as they occupy very small silicon area on IC chip and are relatively simple in terms of manufacturing. Moreover digital and memory ICs can be implemented with circuits that use only MOSFETs i.e. no resistors, diodes, etc. 12