Survey
* Your assessment is very important for improving the workof artificial intelligence, which forms the content of this project
* Your assessment is very important for improving the workof artificial intelligence, which forms the content of this project
IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY, VOL. 7, NO. 1, MARCH 2007 181 Impact of Strain or Ge Content on the Threshold Voltage of Nanoscale Strained-Si/SiGe Bulk MOSFETs M. Jagadesh Kumar, Senior Member, IEEE, Vivek Venkataraman, Student Member, IEEE, and Susheel Nawal Abstract—The impact of strain on the threshold voltage of nanoscale strained-Si/SiGe MOSFETs is studied by developing a compact analytical model. Our model includes the effects of strain (Ge mole fraction in SiGe substrate), short-channel length, source/drain junction depths, substrate (body) doping, strained silicon thin-film thickness, gate work function, and other device parameters. The model correctly predicts a decrease in threshold voltage with increasing strain in the silicon thin film, i.e., with increasing Ge concentration in SiGe substrate. The accuracy of the results obtained using our analytical model is verified using two-dimensional device simulations. Index Terms—Nanoscale strained-Si/SiGe MOSFET, shortchannel effects, simulation, threshold voltage, two-dimensional modeling. nanoscale MOSFETs including the short-channel effects. The effect of varying device parameters can easily be investigated using the analytical model presented in this paper. The model results are verified by comparing them with the 2-D simulation results obtained using MEDICI [14]. II. E FFECT OF S TRAIN A silicon thin film grown pseudomorphically over a relaxed Si1−x Gex substrate experiences biaxial tension leading to changes in band structure [10], [11]. Due to strain, the electron affinity of silicon increases and the bandgap decreases. Also, the effective mass of carriers decreases. The effect of strain on Si band structure can be modeled as [10], [11], [15] I. I NTRODUCTION S TRAINED-SILICON devices have been receiving considerable attention owing to their potential for achieving higher performance due to improved carrier-transport properties, i.e., mobility and high-field velocity [1], and compatibility with conventional silicon processing [2]–[9]. Tremendous improvement in static and dynamic CMOS circuit performance has been demonstrated using strained-Si/SiGe MOSFETs [5]. Studying the impact of strain on the threshold voltage of nanoscale strained-Si devices becomes necessary for future device and circuit design. Earlier works on the threshold voltage of strained-Si/SiGe MOSFETs [10], [11] have concentrated on the band offsets due to strain and modified the long-channel threshold voltage model. One-dimensional Poisson equation solution has also been considered [12], [13]; however for short-channel devices, 2-D effects such as the influence of source/drain (S/D) depletion widths becomes important. The aim of this paper is, therefore, to study the impact of strain on the threshold voltage of short-channel (sub 100 nm) nanoscale strained-Si/SiGe MOSFETs by solving the 2-D Poisson equation in the strained-Si thin film and analyzing the dependence of threshold voltage on various device parameters such as strain (Ge mole fraction in SiGe), gate length, junction depth, etc. This model thus provides an efficient tool for design and characterization of high-performance strained-Si/SiGe Manuscript received July 19, 2006; revised September 5, 2006. The authors are with the Department of Electrical Engineering, Indian Institute of Technology, Delhi, New Delhi 110 016, India (e-mail: mamidala@ ieee.org). Digital Object Identifier 10.1109/TDMR.2006.889269 (∆Eg )s−Si = 0.4x (∆EC )s−Si = 0.57x, 3/2 m∗h,Si NV,Si ≈ 0.075x VT ln = VT ln NV,s−Si m∗h,s−Si (1) where x is the Ge mole fraction in Si1−x Gex substrate, (∆EC )s−Si is the increase in electron affinity of silicon due to strain, (∆Eg )s−Si is the decrease in bandgap of silicon due to strain, VT is the thermal voltage, NV,Si and NV,s−Si are the density of states (DOS) in the valence band in normal and strained silicon, respectively, m∗h,Si and m∗h,s−Si are the hole DOS effective masses in normal and strained silicon, respectively. The band structure parameters for relaxed Si1−x Gex substrate can also be estimated as [14]–[16] (∆Eg )SiGe = 0.467x NV,SiGe = (0.6x + 1.04(1 − x)) × 1019 cm−3 εSiGe = 11.8 + 4.2x (2) where (∆Eg )SiGe is the decrease in bandgap of Si1−x Gex from that of Si, NV,SiGe is the DOS in the valence band in relaxed Si1−x Gex , and εSiGe is the permittivity of Si1−x Gex . The flatband voltage of a MOSFET is thus modified due to strain as [11] (VFB,f )s−Si = (VFB,f )Si + ∆VFB,f 1530-4388/$25.00 © 2007 IEEE Authorized licensed use limited to: INDIAN INSTITUTE OF TECHNOLOGY DELHI. Downloaded on December 25, 2009 at 08:35 from IEEE Xplore. Restrictions apply. (3) 182 IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY, VOL. 7, NO. 1, MARCH 2007 where (VFB,f )Si = φM −φSi ∆VFB,f = −(∆EC )s−Si (∆Eg )s−Si + −VT ln q q NV,Si NV,s−Si (4) χSi Eg,Si + + φF,Si q 2q NA = VT ln . ni,Si φSi = φF,Si (5) In the above relations, φM is the gate work function, φSi is the unstrained Si work function, φF,Si is the Fermi potential in unstrained Si, χSi is the electron affinity in unstrained Si, Eg,Si is the bandgap in unstrained Si, q is the electronic charge, NA is the body doping concentration and ni,Si is the intrinsic carrier concentration in unstrained Si. The built-in voltage across the source-body and drain-body junctions in the strained-Si thin film is also affected by strain as Vbi,s−Si = Vbi,Si + (∆Vbi )s−Si Fig. 1. Cross-sectional view of the strained-Si/SiGe MOSFET showing the depletion regions. (6) where Vbi,Si = (∆Vbi )s−Si Eg,Si + φF,Si 2q −(∆Eg )s−Si + VT ln = q NV,Si NV,s−Si . (7) The built-in voltage across the source-body and drain-body junctions in the relaxed Si1−x Gex substrate can be written as Vbi,SiGe = Vbi,Si + (∆Vbi )SiGe (8) Fig. 2. Box approximation of the depletion region for solving 2-D Poisson equation. where Vbi,Si = (∆Vbi )SiGe = Eg,Si + φF,Si 2q −(∆Eg )SiGe + VT ln q NV,Si NV,SiGe . (9) III. T HRESHOLD V OLTAGE M ODEL Fig. 1 shows the cross section of a short-channel strainedSi/SiGe nMOSFET with depletion regions also indicated. The depletion region under the gate for short-channel MOSFETs is not uniform, and is affected by the lateral source-body and drain-body depletion widths (xdl ) and their respective charges, as shown in Fig. 1. The exact solution of the 2-D Poisson equation for such a case is too complicated and would most probably require numerical methods and iterations. To obtain a meaningful analytical solution, Fig. 1 is transformed to a boxtype approximation of the depletion region as shown in Fig. 2 with a uniform charge density NA,eff and a uniform depth of depletion thickness xd . The gate-S/D charge sharing [17] and source-body/drain-body built-in potential barrier lowering [18] due to overlap of the lateral source-body and drain-body depletion regions (xdl in Fig. 1) become important as the channel length reduces. To incorporate these short-channel effects, the effective doping NA,eff is defined taking into account only the effective charge under the influence of the gate [17] as rj 2xdν −1 1+ NA,eff = NA 1 − (10) rj L where xdν = 2εSiGe (φth − Vsub ) qNA φth = 2φF,Si + ∆φs−Si ∆φs−Si −(∆Eg )s−Si + VT ln = q NV,Si NV,s−Si xdν is the vertical depletion region depth due to gate bias only, φth is the minimum surface potential required for inversion [11], rj is the S/D junction depth, L is the channel or gate length, and Vsub is the substrate bias. φth is that value of surface potential at which the inversion electron charge density in the strained-Si device is the same as that in unstrained-Si at threshold [11] (i.e., ∆φs−Si = 0 for unstrained-Si). The above Authorized licensed use limited to: INDIAN INSTITUTE OF TECHNOLOGY DELHI. Downloaded on December 25, 2009 at 08:35 from IEEE Xplore. Restrictions apply. KUMAR et al.: IMPACT OF STRAIN OR Ge CONTENT ON THE THRESHOLD VOLTAGE approach is analogous to the one used in [13], where a voltagedoping transformation [19] is used to define an effective doping to extend the long-channel threshold voltage model to the shortchannel case. To complete the box approximation, an average vertical depletion region depth (xd in Fig. 2) is calculated using simple geometry (see Appendix) from Fig. 1 as 2xdl rj + 4π xdl + (L − 2xdl ) xdν for L ≥ 2xdl xd ∼ = L (11) 2 ∼ rj + x2 − L + θ xdl for L ≤ 2xdl xd = (12) dl 4 2 where θ = sin−1 (L/2xdl ) and xdl = 2εSiGe Vbi,SiGe /qNA is the lateral source-body and drain-body depletion region width. It can be seen that in the case of large channel length, i.e., L 2xdl , (11) reduces to xd ≈ xdν . Also, for extremely shortchannel lengths, i.e., L 2xdl , (12) reduces to xd ≈ rj + xdl . These results are along expected lines. For L = 2xdl , (11) and (12) yield the same value for xd . For the simplified structure in Fig. 2, the 2-D Poisson equation in the strained silicon thin film, before the onset of strong inversion can be written as [20] qNA,eff d2 φ1 (x, y) d2 φ1 (x, y) + = dx2 dy 2 εSi for 0 ≤ x ≤ L, 0 ≤ y ≤ ts−Si (13) where εSi is the dielectric constant of silicon, and ts−Si is the strained-Si thin-film thickness. The potential profile in the vertical direction in the strained-Si film (y-direction in Fig. 2) and the depletion region in the SiGe substrate below (y -direction in Fig. 2) can be approximated by a parabolic function, as done in [20] as φ1 (x, y) = φs (x) + c11 (x)y + c12 (x)y 2 for 0 ≤ x ≤ L, 0 ≤ y ≤ ts−Si (14) φ2 (x, y ) = Vsub + c21 (x)y + c22 (x)y 2 for 0 ≤ x ≤ L, 0 ≤ y ≤ tSiGe 183 2) Electric flux/field at the end of the depletion region (y = 0 in Fig. 2) in the SiGe substrate is zero. dφ2 (x, y ) = 0. (17) dy y =0 3) Potential at the interface of strained-Si thin-film and SiGe substrate is continuous. φ1 (x, ts−Si ) = φ2 (x, tSiGe ). (18) 4) Electric flux (displacement) at the interface of strained-Si thin-film and SiGe substrate is continuous. dφ1 (x, y) εSiGe dφ2 (x, y ) =− . (19) dy εSi dy y=ts−Si y =tSiGe 5) The surface potential at the source end is φ1 (0, 0) = φs (0) = Vsub + Vbi,s−Si . (20) 6) The surface potential at the drain end is φ1 (L, 0) = φs (L) = Vsub + Vbi,s−Si + VDS . (21) where VDS is the drain-to-source bias voltage. The coefficients c11 (x), c12 (x), c21 (x), and c22 (x) in (14) and (15) can be deduced from the boundary conditions (16)–(19). Substituting the values of c11 (x) and c12 (x) in (14), we obtain the expression for φ1 (x, y). Then, substituting φ1 (x, y) in (13) and putting y = 0, we obtain d2 φs (x) − αφs (x) = β dx2 (22) where 2 1 + 2CCf + CCSif SiGe α= 2 Si ts−Si 1 + CCSiGe Cf Cf 2V + GS 2CSiGe CSi qNA 2V − sub − β= C εSi Si Si t2s−Si 1 + CSiGe t2s−Si 1 + CCSiGe (15) (23) where tSiGe = xd − ts−Si , φS (x) is the surface potential and the coefficients c11 (x), c12 (x), c21 (x), and c22 (x) are functions of x only. The Poisson equation is solved using the following boundary conditions. where Cf = εox /tf , CSi = εSi /ts−Si , CSiGe = εSiGe /tSiGe . The above equation is a simple second-order nonhomogenous differential equation with constant coefficients which has a solution of the form 1) Electric flux (displacement) at the gate-oxide/strained-Si film interface is continuous. dφ1 (x, y) εox φs (x) − VGS = (16) dy εSi tf y=0 where εox is the dielectric constant of the gate oxide, tf is = VGS − (VFB,f )s−Si , and the gate oxide thickness,VGS VGS is the gate-to-source bias voltage. (24) φs (x) = A exp(λx) + B exp(−λx) − σ √ where λ = α and σ = β/α. Now, using boundary conditions (20), (21) to solve for A and B, we obtain (25) and (26), found at the bottom of the next page. The minimum surface potential can be calculated from (24) by putting dφs (x) = 0. dx Authorized licensed use limited to: INDIAN INSTITUTE OF TECHNOLOGY DELHI. Downloaded on December 25, 2009 at 08:35 from IEEE Xplore. Restrictions apply. (27) 184 IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY, VOL. 7, NO. 1, MARCH 2007 TABLE I DEVICE PARAMETERS USED IN THE SIMULATION The minimum surface potential is √ φs,min = 2 AB − σ. (28) The threshold voltage Vth is that value of the gate voltage VGS at which a conducting channel is induced under the gate oxide at the surface of a MOSFET. In a conventional unstrained silicon MOSFET, the threshold voltage is taken to be that value of gate-source voltage for which φS,min = 2φF,Si , where φF,Si is the difference between the extrinsic Fermi level in the bulk region and the intrinsic Fermi level [20]. For the strained-Si MOSFETs, the condition for threshold is modified as [11] φs,min = 2φF,Si + ∆φs−Si = φth where ∆φs−Si −(∆Eg )s−Si + VT ln = q NV,Si NV,s−Si (29) . (30) In (29), φth is that value of surface potential at which the inversion electron charge density in the strained-Si device is the same as that in unstrained-Si at threshold [11]. Therefore, the threshold voltage is defined as the value of VGS at which the minimum surface potential φS,min equals φth . Hence, we can determine the value of threshold voltage by substituting (28) into (29) and solving for VGS , as 2 − 4ξV −Vφ1 + Vφ1 φ2 (31) Vth = k 2ξ where ξ = 2 cosh(λL) − 2 − sinh2 (λL) (32) Vφ1 = Vbi1 (1 − exp(λL)) + (2φth − 2u) sinh (λL) − Vbi2 (1 − exp(−λL)) (33) 2 Vφ2 = Vbi1 Vbi2 − (φth − u)2 sinh2 (λL) Vbi1 = (Vsub + Vbi,s−Si − u) (1 − exp(−λL)) + VDS Vbi2 = (Vsub + Vbi,s−Si − u) (exp(λL) − 1) − VDS Vsub qNA − u= εSi α 1 + 2CCf + CCSif SiGe Cf Cf 2CSiGe + CSi − (VFB,f )s−Si 1 + 2CCf + CCSif SiGe Cf 1 + CSi + 2CCf SiGe . k= Cf Cf + CSi 2C SiGe A= B= (34) (35) (36) (37) (38) Fig. 3. Threshold voltage versus strain x (Ge content in SiGe substrate) for channel lengths (L) of 50 and 30 nm. The parameters used are: VDS = 50 mV, Vsub = 0 V, NA = 1 × 1018 cm−3 , ts−Si = 15 nm, rj = 50 nm, tf = 2 nm, φM = 4.35 eV. IV. R ESULTS AND D ISCUSSION To verify the proposed analytical model, the 2-D device simulator MEDICI [14] was used to simulate the threshold voltage of strained-Si/SiGe MOSFETs for various device parameters and compared with the values predicted by the model. The threshold voltage is extracted from MEDICI simulations as the gate voltage at which the surface inversion electron volume concentration becomes equal to the body (channel) doping, consistent with the model formulation. The parameters used in our simulation are given in Table I. Fig. 3 shows the variation of threshold voltage with change in strain, i.e., Ge mole fraction of SiGe substrate, for gate lengths of 50 and 30 nm. The threshold voltage obtained from the model tracks the simulation values very well. It is evident that there is a significant fall in threshold voltage with increasing strain, and the decrease in Vth is almost linear. Vth rolls off drastically with strain x, even going negative for Ge content of (Vsub + Vbi,s−Si + σ + VDS ) − (Vsub + Vbi,s−Si + σ) exp(−λL) 1 − exp(−2λL) (Vsub + Vbi,s−Si + σ) − (Vsub + Vbi,s−Si + σ + VDS ) exp(−λL) 1 − exp(−2λL) exp(−λL) (25) Authorized licensed use limited to: INDIAN INSTITUTE OF TECHNOLOGY DELHI. Downloaded on December 25, 2009 at 08:35 from IEEE Xplore. Restrictions apply. (26) KUMAR et al.: IMPACT OF STRAIN OR Ge CONTENT ON THE THRESHOLD VOLTAGE Fig. 4. Threshold voltage versus channel length L. The parameters used are: VDS = 50 mV, Vsub = 0 V, NA = 1 × 1018 cm−3 , ts−Si = 15 nm, rj = 50 nm, tf = 2 nm, φM = 4.35 eV. 30%–40%. The threshold voltage decreases with increasing Ge content x because of decrease in flatband voltage (3), decrease in source-body/drain-body built-in potential barrier (4), and earlier onset of inversion due to decrease in φth (29). Also, it can be seen from the figure that Vth for L = 50 nm is noticeably greater than that for L = 30 nm, indicating the on-set of the short-channel effects. Fig. 4 shows the variation of threshold voltage with gate length for different values of Ge mole fraction x in the SiGe substrate. It is observed that short-channel effects become prevalent below 70–80-nm gate length, as predicted above, and is marked by the sharp decrease in Vth value. The gate-S/D charge sharing and source-body/drain-body built-in potential barrier lowering due to overlap of the lateral source-body and drain-body depletion regions (xdl in Fig. 1) become significant for such short-channel lengths. Also, the threshold voltage is lower for higher strain for the same channel length, thus confirming the results from Fig. 3. The Vth values from the analytical model are in close proximity with the simulation results. In Fig. 5, the variation of threshold voltage with change in strain (Ge mole fraction x in SiGe substrate) for a gate length of 50 nm is plotted for two different body doping concentrations and corresponding gate work functions. It is evident from the figure that the threshold voltage of the strained-Si/SiGe MOSFETs can be controlled by using an appropriate gate material with a suitable work function φM . A higher work function (e.g., Mid-gap metal with φM = 4.71 eV) increases the flatband voltage (3) thereby affording a lower doping concentration and higher strain levels for the same Vth , as compared to a normal n+ polysilicon gate (φM = 4.35 eV). Thus, by using a suitable gate material, we can achieve higher mobility of charge carriers due to larger strain and consequently higher transconductance without affecting Vth . There is again a close match between the analytical results and the 2-D simulation results [14]. In Fig. 6, the variation of threshold voltage with change in strain (Ge mole fraction x in SiGe substrate) for a gate length of 50 nm is plotted for two different S/D junction depths. It is observed that Vth also reduces slightly with increase in S/D 185 Fig. 5. Threshold voltage versus strain x (Ge content in SiGe substrate) for body dopings NA = 1 × 1018 cm−3 and NA = 1 × 1017 cm−3 , and corresponding gate work functions φM = 4.35 eV (n+ poly) and φM = 4.71 eV (Mid-gap metal), respectively. The parameters used are: VDS = 50 mV, Vsub = 0 V, L = 50 nm, ts−Si = 15 nm, rj = 50 nm, tf = 2 nm. Fig. 6. Threshold voltage versus strain x (Ge content in SiGe substrate) for S/D junction depths rj = 50 nm and rj = 80 nm. The parameters used are: VDS = 50 mV, Vsub = 0 V, L = 50 nm, NA = 1 × 1018 cm−3 , ts−Si = 15 nm, tf = 2 nm, φM = 4.35 eV. junction depth, for the same gate length. This is because of the increase in average vertical depletion region depth (11) and (12), and lower effective doping (10) due increased gate-S/D sharing and overlap of the lateral source-body and drain-body depletion regions. Thus, a lower S/D junction depth is desirable for better performance. The variation of threshold with the thickness of the strainedSi thin film is plotted in Fig. 7. As can be seen from the figure, there is no discernible change in threshold voltage with change in strained-Si film thickness from 10–15 nm. This suggests that one can allow small variations and tolerances in the fabrication process without affecting the Vth too much. V. C ONCLUSION For the first time, we have examined the impact of various device parameters like strain (Ge mole fraction in SiGe substrate), gate length, S/D junction depths, substrate (body) Authorized licensed use limited to: INDIAN INSTITUTE OF TECHNOLOGY DELHI. Downloaded on December 25, 2009 at 08:35 from IEEE Xplore. Restrictions apply. 186 IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY, VOL. 7, NO. 1, MARCH 2007 Fig. 7. Threshold voltage versus strained-Si film thickness ts−Si . The parameters used are: VDS = 50 mV, Vsub = 0 V, NA = 1 × 1018 cm−3 , L = 50 nm, rj = 50 nm, tf = 2 nm, φM = 4.35 eV. doping, strained silicon thin-film thickness, and gate work function on the threshold voltage of nanoscale strained-Si/SiGe MOSFETs by developing an analytical model for the same. The 2-D Poisson equation is solved in the strained-Si thin film using appropriate boundary conditions. The model results are compared with accurate 2-D simulations [14]. The calculated values of the threshold voltage obtained from the proposed model agree well with the simulated results. There is a significant drop in threshold voltage with increasing Ge content of relaxed Si1−x Gex substrate and decreasing channel length. The increase in strain, i.e., Ge content, enhances the performance of MOSFETs in terms of transconductance and speed because of an increase in the carrier mobility [1]–[5]. However, as demonstrated by our results, there are undesirable side effects with increasing Ge content such as a roll-off in Vth which may affect the device characteristics and performance significantly. Our compact model accurately predicts the threshold voltage over a large range of device parameters and can be effectively used to design and characterize nanoscale strained Si/SiGe MOSFETs with the desired performance [21]. The model can be easily implemented in a circuit simulator also. A PPENDIX The average vertical depletion region depth (xd in Fig. 2) in (11) and (12) is calculated using the constraint that the total depletion region area under the gate should remain the same as before after transformation to the box approximation. For L ≥ 2xdl , the total depletion region area (DA) under the gate is calculated from Fig. 8(a) as DA = (Area of Region 1) + (Area of Region 2) + (Area of Region 3). Thus π π DA ∼ = rj xdl + x2dl + (L − 2xdl )xdν + rj xdl + x2dl . 4 4 (A1) In the box approximation of Fig. 2, the total DA under the gate is DA = xd L. (A2) Fig. 8. Depletion region of the strained-Si/SiGe MOSFET for (a) L ≥ 2xdl and (b) L ≤ 2xdl . Equating (A1) and (A2), we get the expression for average vertical depletion region depth xd as 2xdl rj + 4π xdl + (L − 2xdl )xdν xd ∼ = L for L ≥ 2xdl . (A3) Equation (A3) is the same as (11). Similarly, for L ≤ 2xdl , the total DA under the gate is calculated from Fig. 8(b) as DA = (Area of Region 1) + (Area of Region 2) = 2∗ (Area of Region 1or 2). Thus, DA can be approximated as L DA ∼ =2 2 rj + θ L2 + xdl x2dl − 4 2 where θ = sin−1 (L/2xdl ). Authorized licensed use limited to: INDIAN INSTITUTE OF TECHNOLOGY DELHI. Downloaded on December 25, 2009 at 08:35 from IEEE Xplore. Restrictions apply. (A4) KUMAR et al.: IMPACT OF STRAIN OR Ge CONTENT ON THE THRESHOLD VOLTAGE Again, in the box approximation of Fig. 2, the total DA under the gate is given by (A2). Equating (A4) and (A2), we get the expression for average vertical depletion region depth xd as xd ∼ = rj + x2dl − θ L2 + xdl 4 2 for L ≤ 2xdl . 187 [20] K. K. Young, “Short-channel effect in fully depleted SOI MOSFETs,” IEEE Trans. Electron Devices, vol. 36, no. 2, pp. 399–402, Feb. 1989. [21] M. J. Kumar, V. Venkataraman, and S. Nawal, “A simple analytical threshold voltage model of nanoscale fully depleted single-layer strainedsilicon-on-insulator (SSOI) MOSFETs,” IEEE Trans. Electron Devices, vol. 53, no. 10, pp. 2500–2506, Oct. 2006. (A5) Equation (A5) is the same as (12). R EFERENCES [1] T. Vogelsang and K. R. Hofmann, “Electron mobilities and high-field drift velocities in strained silicon on silicon-germanium substrates,” in Proc. 50th Annu. Device Res. Conf. Dig., Jun. 1992, pp. 34–35. [2] J. Welser, J. L. Hoyt, and J. F. Gibbons, “Electron mobility enhancement in strained-Si N-type metal–oxide–semiconductor field-effect transistors,” IEEE Electron Device Lett., vol. 15, no. 3, pp. 100–102, Mar. 1994. [3] K. Rim, S. Koester, M. Hargrove, J. Chu, P. M. Mooney, J. Ott, T. Kanarsky, P. Ronsheim, M. Ieong, A. Grill, and J.-S. P. Wong, “Strained Si nMOSFETs for high performance CMOS technology,” in VLSI Symp. Tech. Dig., Jun. 2001, pp. 59–60. [4] K. Rim, J. Chu, H. Chen, K. A. Jenkins, T. Kanarsky, K. Lee, A. Mocuta, H. Zhu, R. Roy, J. Newbury, J. Ott, K. Petrarca, P. Mooney, D. Lacey, S. Koester, K. Chan, D. Boyd, M. Ieong, and H. Wong, “Characteristics and device design of sub-100 nm strained Si n- and pMOSFETs,” in VLSI Symp. Tech. Dig., Jun. 2002, pp. 98–99. [5] S. G. Badcock, A. G. O’Neill, and E. G. Chester, “Device and circuit performance of SiGe/Si MOSFETs,” Solid State Electron., vol. 46, no. 11, pp. 1925–1932, Nov. 2002. [6] M. J. Kumar and A. A. Orouji, “Two-dimensional analytical threshold voltage model of nanoscale fully depleted SOI MOSFET with electrically induced source/drain extensions,” IEEE Trans. Electron Devices, vol. 52, no. 7, pp. 1568–1575, Jul. 2005. [7] G. V. Reddy and M. J. Kumar, “A new dual-material double-gate (DMDG) nanoscale SOI MOSFET—Two-dimensional analytical modeling and simulation,” IEEE Trans. Nanotechnol., vol. 4, no. 2, pp. 260–268, Mar. 2005. [8] M. J. Kumar and A. Chaudhry, “Two-dimensional analytical modeling of fully depleted dual-material gate (DMG) SOI MOSFET and evidence for diminished short-channel effects,” IEEE Trans. Electron Devices, vol. 51, no. 4, pp. 569–574, Apr. 2004. [9] A. Chaudhry and M. J. Kumar, “Controlling short-channel effects in deep submicron SOI MOSFETs for improved reliability: A review,” IEEE Trans. Device Mater. Rel., vol. 4, no. 1, pp. 99–109, Mar. 2004. [10] J. S. Lim, S. E. Thompson, and J. G. Fossum, “Comparison of thresholdvoltage shifts for uniaxial and biaxial tensile-stressed nMOSFETs,” IEEE Electron Device Lett., vol. 25, no. 11, pp. 731–733, Nov. 2004. [11] W. Zhang and J. G. Fossum, “On the threshold voltage of strainedSi-Si1−x Gex MOSFETs,” IEEE Trans. Electron Devices, vol. 52, no. 2, pp. 263–268, Feb. 2005. [12] K. Chandrasekaran, X. Zhou, and S. B. Chiah, “Physics-based scalable threshold-voltage model for strained-silicon MOSFETs,” in Proc. NSTI Nanotech, Boston, MA, 2004, vol. 2, pp. 179–182. [13] K. Iniewski, S. Voinigescu, J. Atcha, and C. A. T. Salama, “Analytical modeling of threshold voltages in p-channel Si/SiGe/Si MOS structures,” Solid State Electron., vol. 36, no. 5, pp. 775–783, 1993. [14] MEDICI 4.0, Technol. Model. Assoc., Inc., Palo Alto, CA, 1997. [15] T. Numata, T. Mizuno, T. Tezuka, J. Koga, and S. Takagi, “Control of threshold-voltage and short-channel effects in ultrathin strainedSOI CMOS devices,” IEEE Trans. Electron Devices, vol. 52, no. 8, pp. 1780–1786, Aug. 2005. [16] ATLAS Users Manual, Silvaco Int., Santa Clara, CA, 2000. [17] L. D. Yau, “A simple theory to predict the threshold voltage of shortchannel IGFETs,” Solid State Electron., vol. 17, no. 10, pp. 1059–1063, Oct. 1974. [18] P. Su, S. Fung, P. Wyatt, H. Wan, A. Niknejad, M. Chan, and C. Hu, “On the body-source built-in potential lowering of SOI MOSFETs,” IEEE Electron Device Lett., vol. 24, no. 2, pp. 90–92, Feb. 2003. [19] T. Skotnicki, G. Merckel, and T. Pedron, “The voltage-doping transformation: A new approach to the modeling of MOSFET short-channel effects,” IEEE Electron Device Lett., vol. 9, no. 3, pp. 109–112, Mar. 1988. M. Jagadesh Kumar (M’95–SM’99) was born in Mamidala, Nalgonda District, Andhra Pradesh, India. He received the M.S. and Ph.D. degrees in electrical engineering from Indian Institute of Technology (IIT), Madras, India. From 1991 to 1994, he performed postdoctoral research in modeling and processing of high-speed bipolar transistors with the Department of Electrical and Computer Engineering, University of Waterloo, Waterloo, ON, Canada. While with the University of Waterloo, he also did research on amorphous silicon thin-film transistors. From July 1994 to December 1995, he was initially with the Department of Electronics and Electrical Communication Engineering, IIT, Kharagpur, India, and then joined the Department of Electrical Engineering, IIT, Delhi, India, where he became an Associate Professor in July 1997 and a Full Professor in January 2005. His research interests are in very large scale integration (VLSI) device modeling and simulation for nanoscale applications, integrated-circuit technology, and power semiconductor devices. He has published extensively in the above areas with more than 115 publications in refereed journals and conferences. His teaching has often been rated as outstanding by the Faculty Appraisal Committee, IIT Delhi. Dr. Kumar is a Fellow of Institution of Electronics and Telecommunication Engineers (IETE), India. He is a recipient of the 29th IETE Ram Lal Wadhwa Gold Medal for distinguished contribution in the field of semiconductor device design and modeling. He is an Editor of IEEE TRANSACTIONS ON ELECTRON DEVICES. He is also on the editorial board of 1) Recent Patents on Nanotechnology, 2) Journal of Nanoscience and Nanotechnology, and 3) IETE Journal of Research as a subject area Honorary Editor for Electronic Devices and Components. He has reviewed extensively for different journals including IEEE TRANSACTIONS ON ELECTRON DEVICES, IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY, IEE Proceedings on Circuits, Devices, and Systems, Electronics Letters, and Solid-state Electronics. He was Chairman, Fellowship Committee, The Sixteenth International Conference on VLSI Design, January 4–8, 2003, New Delhi, India. He was also Chairman of the Technical Committee for High Frequency Devices, International Workshop on the Physics of Semiconductor Devices, December 13–17, 2005, New Delhi. Vivek Venkataraman (S’05) received the B.Tech degree in electrical engineering from Indian Institute of Technology (IIT), Delhi, New Delhi, India. He is currently working toward the Ph.D. degree in electrical and computer engineering at Cornell University, Ithaca, NY. His current research interests include device physics, optoelectronics, and nanoelectronics. Susheel Nawal received the B.Tech degree in electrical engineering from Indian Institute of Technology (IIT), Delhi, New Delhi, India. His research interests include modeling and simulation for nanoscale applications. Authorized licensed use limited to: INDIAN INSTITUTE OF TECHNOLOGY DELHI. Downloaded on December 25, 2009 at 08:35 from IEEE Xplore. Restrictions apply.