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Semiconductor Materials Product Guide Company Overview MEMC® is a global leader in semiconductor and solar technology, and a leading solar energy services provider. Our products are the building blocks for the $1 trillion electronics and the $51 billion solar energy markets. Driven by world class research and development capabilities, MEMC has earned over 750 patents and continues to build on the corporate culture of innovation and cutting-edge technology. In the energy arena, through our SunEdison® subsidiary, MEMC is one of the largest developers of solar power projects. Our solar materials and SunEdison businesses are providing the electricity that powers those technologies — while reducing the world’s dependence on fossil fuels. Our semiconductor wafer products are the foundation for the technologies that entertain us, educate us, and connect us to each other. Ultimately, our strength lies not only in producing best-in-class products, but in forging mutually beneficial relationships with our customers. Figure 1 MEMC Process Granular polysilicon Chunk polysilicon MEMC produces its own electronic-grade polysilicon using a fully-integrated front-end manufacturing strategy with strict quality control across each step of the process. 1 MEMC Semiconductor Materials Ingot Wafers Our on-site technical field engineers work closely with customers to ensure each product meets precise specifications and technical requirements suited to their specific applications. St. Peters, Missouri Epi 100 mm 125 mm 150 mm 200 mm SOI 200 mm 300 mm CZ Mono-crystal 100 mm 125 mm 150 mm 300 mm 450 mm Arsenic Antimony DSS Multi-crystal Mono-crystalline and Multi-crystalline Solar Wafers Merano, Italy Ipoh, Malaysia CZ Mono-crystal Polysilicon 100 mm Chunk 125 mm Gas/Other 150 mm Trichlorosilane 200 mm Hydrochloric Arsenic acid Red Phosphorus Antimony Polished 200 mm Polished 300 mm Epi 100 mm 125 mm 150 mm 200 mm Epi 300 mm Utsunomiya, Japan Cheonan, South Korea CZ Mono-crystal for Silicon Parts 325 mm+ Polished 200 mm 300 mm CZ Mono-crystal 200 mm 300 mm BG SOI 200 mm CZ Mono-crystal for Silicon Parts 315 mm Novara, Italy Polished 150 mm 200 mm Epi 100 mm 125 mm 150 mm 200 mm Hsinchu, Taiwan Kuala Lumpur, Malaysia Polished 100 mm 125 mm 150 mm Polished 200 mm 300 mm CZ Mono-crystal 200 mm 300 mm Epi 200 mm 300 mm CZ Mono-crystal for Silicon Parts 315 mm Semiconductor Customer Locations Manufacturing Facilities MEMC Semiconductor Materials 2 The MEMC Advantage MEMC is uniquely positioned to deliver maximum value to customers. We utilize leading-edge design and manufacturing to continually improve both our processes and end-product attributes. And we deliver our solutions to customers through a global footprint to meet customer requirements and mitigate risk. Innovative, Vertically-Integrated Manufacturing Building on Advanced Manufacturing Processes MEMC is one of only three companies in the world that produce both chunk and granular polysilicon in high volume. Our fully-integrated front-end manufacturing strategy with strict quality control delivers a steady supply of exceptionally pure polysilicon that can be blend-tailored to meet specific customer requirements. The result is maximum yield and efficient delivery to customers — as well as superior value. Delivering Dependable Quality and Consistency An established leader in semiconductor wafering, MEMC applies 50 years of technical expertise, together with continued R&D focus, to every step of product development. We apply robust management to every parameter and step of wafer production, for dependable delivery and consistently superior quality. • Exercising complete control over defects and oxygen/precipitation boosts quality and efficiency of manufacturing. • Best-in-class quality levels in impurity concentrations, surface defects, and wafer flatness ensure maximum performance and reliability. Figure 2 Polysilicon Production Processes Siemens FBR Chunk Polysilicon Granular Polysilicon Batch Process Continuous Process Traditional Technology Proprietary Technology Chunk polysilicon manufactured using an industry standard Siemens process 3 MEMC Semiconductor Materials Granular polysilicon supports multiple recharge, providing a continuous supply of polysilicon for customers Expertise in Developing Customized Wafers to Meet Customer Needs MEMC applies leading-edge design technology rules to create customized wafers developed and built to meet our customers’ requirements. Depending on customer requirements, MEMC delivers single-side or double-side wafers polished to a mirror-like surface. MEMC prime polished wafer products are used in a variety of integrated circuit (IC) applications, including memory and other leading market segments. For applications that are sensitive to extended point defects, such as crystal-originated-pits (COPs), we offer a full range of wafer products, from low COP prime to annealed to Optia™ offerings. • Advanced wafers can meet demanding design rules such as 22 nm or below. • Attributes including range of diameter, dopants, and defect levels drive the design of polished, Epi, and SOI wafers. A Global Manufacturing Footprint Local, Responsive Customer Service As a global organization, MEMC prides itself on its ability to respond to customers’ specific requirements. Our field application engineers stationed near customer sites work continuously to understand application requirements, providing constant, real-time feedback that can be incorporated in our wafer production and align them precisely with customer needs. • On-site field application engineering support provides access to MEMC research and development scientists, to build a collaborative customer relationship and a deep understanding of their requirements. Maximum Quality, Minimal Risk MEMC leverages a global manufacturing presence to help minimize risk and ensure steady, uninterrupted supplies. In the event of a natural disaster or other disruption, MEMC can smoothly offload manufacturing tasks to avoid any interruption and continue to meet customer requirements. • With more than 40 local manufacturing, sales, and support centers worldwide, MEMC enhances business agility, mitigates risk, and accelerates time to market. Commitment to our customers has enabled MEMC to create new products, new manufacturing methods, and innovation critical to our continued success. MEMC Semiconductor Materials 4 Semiconductor Products for a Broad Range of Applications MEMC offers a diverse portfolio of semiconductor wafers that are appropriate for a wide range of applications, as shown in Figure 3, “Product Portfolio.” MEMC products utilize our innovative polysilicon manufacturing processes to deliver unmatched value to our customers. MEMC offers a broad range of polished wafer products with diameters from 100 mm to 300 mm, manufactured through standard and advanced Cz crystal technologies. Our wafers are p-type doped with boron to the desired resistivity target or n-type doped with arsenic, antimony, phosphorus or red phosphorus to the desired resistivity target. Figure 3 Product Portfolio ® MDZ Optia ™ Perfect Sta Silicon+MD Z C M ndar EP I P Di ow sc er Ep rete / i Sta nda rd High Resistivity Wafers I PW = Polished Wafer MDZ = Magic Denuded Zone EPI = Epitaxial Wafer SOI = Silicon On Insulator MEMC Semiconductor Materials SOI SO Perfect SOI wer Po 100 mm 125 mm 150 mm 200 mm 300 mm 5 OS d Ep i om st i Cu Ep Lo w Pr CO im P e PW led ea n An t rfec Pe con™ Sili Magic d Denude ® Zone Optia ™ Figure 4 Semiconductor Wafer Application Based on IC Design Leading edge IC design with smallest design rule and tightest wafer specifications — especially for flatness, particles, and uniformity. Proven IC design with smallest design rule. Somewhat less stringent wafer specifications. Scales to lower voltage supply lines (e.g. from 5 V to 3.3 V). Proven IC design, optimized around 350-90 nm technology. Less stringent wafer flatness and particle specifications. Tight resistivity and uniformity specifications. Wafer specification depends on device function. May also require special orientations to achieve desired etching characteristics. Microprocessors Memory, DRAM, Flash, SRAM and other Microcontrollers CMOS logic Analog: Amplifiers, Regulators, Automotive Opto ICs: CIS with CMOS image sensor Mixed Signal MEMS: Applicationspecific PW = Annealed = Optia = Discrete: RF, power and Opto EPI = SOI = MEMC Semiconductor Materials 6 Polished Products Our Flagship Product, Ideal for Many Applications MEMC prime polished wafers are highly refined, ultra-pure wafers of crystalline silicon with ultra-flat surfaces free of particles and defects. MEMC prime polished wafers are highly versatile products and offer a broad portfolio that is ideal for a variety of applications. Product Portfolio Standard Polished—Single and double-sided polished wafers are tailored to customer needs. Our standard polished wafers are flat to ultra-flat, available with a symmetric or asymmetric edge profile. Low COP Prime—Low Crystal Originated Pits (COP) prime wafers minimize wafer defect density for high yield. COPs are undesirable because they decrease CMOS device yields by increasing field oxide leakage and junction leakage. Annealed— As device geometries continue to shrink, there is an increasing need for a silicon wafer that is free of COPs and has Epi-like gate oxide integrity (GOI) together with built-in gettering capability for removal of harmful metallic impurities away from the active device regions. Argon annealed wafers provide a defect-free surface region for high device yield and internal gettering for resistance to contamination. They are excellent for advanced CMOS technology processes. Perfect Silicon™—The most advanced silicon materials available today, Perfect Silicon brand wafers utilize MEMC’s proprietary defect-free crystal growth process that rapidly transports growth-incorporated excess intrinsic point defects to harmless sinks— before they have a chance to react to form defects. The result is a highly homogenous, defect-free silicon wafer that requires no post-growth engineering. Annealed Attributes Creates a well-defined denuded zone of ≥ 20 μm BMD density ≥ 5x108 defects/cm3 7 MEMC Semiconductor Materials Perfect Silicon Attributes Bulk defects — eliminated Surface defects — eliminated Metal contamination on surface — none Bulk precipitation — denuded High-Resistivity Prime— To support RF-CMOS process technologies scaled to the 0.1 μm design rule and smaller, wafers must be available in large diameter sizes like 200 mm and 300 mm, and must support all the advanced wafer parametrics such as site flatness and nanotopography. As wireless standards move to even higher GHz range frequencies, ultra-high resistivity wafers will be required to maintain acceptable inductor quality factors and minimize cross-talk between transistors. Micro Electro Mechanical Systems (MEMS) Grade Prime—MEMS Grade Prime wafers are designed to meet the demanding needs of miniscule mechanical devices built into semiconductor chips. Applications include accelerometers, pressure, and temperature sensors. In some cases, non-standard thickness of < 400 microns to > 1000 microns is also available. Benefits • Meets all advanced wafer parametric requirements for global and local flatness, warp, surface roughness, and metals. • Minimal COPs provide high GOI yield and improved fabrication efficiency. • Out of Box Gettering (OOBG) ensures that any harmful metals introduced during fab processing are safely gettered into the bulk, away from the active device regions. • Robust internal gettering and precipitate free zone (PFZ) provided by patented MDZ treatment if required by customer. • One hundred percent free of COPs, D-defects, I-defects, and other defects. • MEMC high resistivity wafers provide substrate resistivity ≥ 1000 ohm-cm. • Optia and Annealed wafers offer Epi-like performance at lower cost. • BMDs present in an annealed wafer ensure immediate gettering for low thermal budget processes. MEMC Semiconductor Materials 8 Magic Denuded Zone® (MDZ) The Magic Denuded Zone (MDZ) manufacturing process is a patented Rapid Thermal Process (RTP) technique that manipulates vacancy to control precipitation behavior and minimize device yield issues. It enables robust, reliable internal gettering that is superior to other gettering processes, such as hydrogen annealing and nitrogen doping. MEMC utilizes its proprietary MDZ process to minimize contamination risks and help customers control integrated circuit (IC) fabrication costs. The MDZ process pre-programs oxygen precipitation density and depth distribution to specific targets (Figure 4). This rapid method of achieving reproducible, reliable internal gettering is nearly independent of initial oxygen concentration, IC application, and thermal history effects, such as the wafer’s position within an ingot. The result is a silicon wafer with the ideal oxygen precipitation behavior — even when other variables fluctuate in the manufacturing and IC processes. The process erases the crystal history of the wafer and provides a singular, highly simplified solution, regardless of the crystal growth process or the wafer’s oxygen content. MEMC’s groundbreaking MDZ process plays a critical role in our effort to help customers improve device yield consistency and efficiency. Benefits • MDZ simplifies the IC process, reducing thermal budgets by 40% and reducing processing costs. • Advanced manufacturing process reduces risks to significantly enhance device yields. • MDZ is adaptable to present and future technologies, providing maximum flexibility. Challenge 9 Solution Improve reliability of DRAMs & NAND by excellent gate oxide integrity (GOI ) Perfect Si completely free of COPs guarantees superior GOI performance Prevent trench to trench shorts in the DRAM caused by COPs in the bulk Perfect Si completely free of COPs in the entire bulk Prevent die loss due to oxygen precipitates at near surface MDZ provides a denuded zone where oxygen precipitation is avoided Prevent die loss due to excessive junction leakage current MDZ provides robust intrinsic gettering outside the denuded zone to capture metallic impurities Improve processing cost of ownership by reduced thermal cycle time MDZ helps reduce the thermal budget by as much as 40%, eliminating denuding and nucleation cycles at FEOL Minimize stored charge loss at tunnel oxide region of NAND Perfect Si provides excellent GOI of tunnel oxide, while MDZ getters metals causing charge loss MEMC Semiconductor Materials Optia™—The Optia wafer is a high-performance silicon substrate for Very Large-Scale Integration (VLSI) and Ultra Large-Scale Integration (ULSI) IC devices, which utilize increasingly dense and complex architectures. Crystal-related defects in wafers have been correlated with decreased GOI performance. Optia wafers have zero COPs and feature Epi-like GOI, providing an ideal solution for next-generation IC devices. These wafers are also ideal for leading-edge memory applications at sub-50 nm design rule. In addition to low COP densities, many customers require intrinsic gettering, with increasingly tight specifications. Optia wafers achieve this using the MEMC patented process, Magic Denuded Zone thermal treatment. MEMC Optia wafers offer an unparalleled combination of superior quality, performance, and cost of ownership compared to annealed wafers. A built-in IG template through MDZ eliminates the need for custom oxygen out-diffusion and nucleation, and reduces customer cycle time. LPDs: Light Point Defects Advanced Flatness: 30 max @ > 0.05 micron SFQR ≤ 0.04 μm for 300 mm (site flatness quality requirements ) GOI: > 95% Figure 5 MDZ Cycle Time Savings 1800 minutes total time when using MDZ 2900 minutes total time without MDZ 1100 minutes total process time savings Modified Thermal Cycle with MDZ Standard Thermal Cycle without MDZ 0 500 1000 1500 2000 2500 3000 Process Time (min) MEMC Semiconductor Materials 10 EPI Products Built for Advanced Semiconductor Applications MEMC Epi wafers enable improved electrical isolation of IC elements, which is critical for maximum performance and reliability. Without sufficient isolation, latchup issues can ruin device performance. Smaller device features reduce the distance between circuit elements, exacerbating isolation problems, as well as increasing sensitivity of the devices to microscopic surface imperfections in the wafer. MEMC Epi wafers support customization of attributes such as resistivity, conductivity type, layer thickness, and the number of layers. This provides additional flexibility and enables MEMC to deliver high-quality wafers designed to precise customer requirements. Benefits • MEMC epitaxial wafers offer high performance in a bulk wafer, together with increased reliability of finished semiconductor devices. • Our epitaxial wafers are designed to help minimize latchup issues. • MEMC wafers provide the ability to tailor attributes in the substrate and Epi layer to meet specific application requirements. Challenge 11 Solution Maintain dimensional scaling at maximum yields & performance Perfect surface and bulk quality with ultra-flat edge to edge, minimal nanotopography & edge rolloff Highly reliable GOI Defect free Epi layer provides GOI benchmark performance Prevent excessive junction leakage The P+ substrate provides built-in gettering. Add MDZ or nitrogen in the P- substrate to enhance gettering Improve resistance to furnace slip, dislocations, etc. Optimized window of oxygen concentration and resistivity in the P+ substrate to maintain sufficient yield strength Low on-state resistance of low voltage power devices Epi substrate doped highly with arsenics, red phosphorus or boron lowers sub-drain resistance High yields of power devices despite the tradeoff of BV and Rds Precisely controlled Epi layer thickness and resistivity targets and variability Reduce dark current of CMOS image sensor Lowest trace metals in the Epi layer MEMC Semiconductor Materials Product Portfolio Standard CMOS Epi—MEMC standard CMOS epitaxial wafers meet the technological demands of our advanced manufacturing customers. We offer a variety of resistivity targets. CMOS Image Sensor Epi—Our CMOS image sensor Epi wafers are ideal for demanding optical and imaging applications. Power Discrete Epi— MEMC provides Epi wafers specifically for power metal–oxide semiconductor fieldeffect transistor (MOSFET), bipolar and other discrete applications. Combinations of n-type and p-type Epi layers and heavily-doped substrates are available for these applications. Thin Layer P/P Epi—These advanced wafers offer highly-controlled resistivity for the electrically active region in devices. TABLE 1 Uniformity: Thickness and Resistivity Diameter Reactor <=150 mm Uniformity Thickness Resistivity Batch 5% 8% 150 mm Single Wafer 2% 4% 200 mm Single Wafer 2% 5% 300 mm Single Wafer 2% 7% TABLE 2 DEVIATION from TARGET: thickness and Resistivity Diameter Reactor <=150 mm Deviation from Target Thickness Resistivity Batch 2% 9% 150 mm Single Wafer 2% 4% 200 mm Single Wafer 2% 4% 300 mm Single Wafer 2% 4% MEMC Semiconductor Materials 12 SOI Products: Increased Cost-effective Performance and Functionality SOI enables very high voltage devices for power control. SOI also significantly increases fabrication productivity by allowing for more compact circuit designs, yielding more chips per wafer. They include an advanced insulating layer that enables smooth, efficient performance to support faster applications. These products offer superior power consumption, and are ideal for applications that require the performance and die shrink advantages provided by SOI. They provide robust performance desirable in industrial applications. SOI technology also enables increased chip functionality without the cost of major fab process equipment changes. Product Portfolio Perfect SOI—Our CMOS SOI wafers utilize Perfect Silicon to provide superior performance, flexibility, and functionality, while minimizing power consumption. CMOS SOI wafers meet nominal thickness targets of < ~ 2 um. Thicker specifications are available for specific applications as required. Perfect SOI wafers are produced on Perfect Silicon that is free of COPs. Utilizing Perfect Silicon, together with MEMC’s superior technology, provides a simplified SOI process compared to traditional manufacturing processes. The result is cost-effective SOI wafer fabrication with exceptional material quality and yield. High resistivity handle SOI is a high performance and lower cost alternative to RF switches on expensive GaAs wafers. Challenge 13 Solution Achieve low power System On Chip (SOC) with increased performance at faster speed Exploit Perfect SOI’s thin Si and buried oxide (BOX) enabling no floating body effect for full depletion (FD) Higher level of integration with increased packing density Perfect SOI ‘s BOX eliminates junction isolation structures and reduces parasitic capacitance Higher bandwidth and low noise of high performance analog devices Perfect SOI with high resistivity handle wafer reduces substrate coupling to passives at high frequency High breakdown voltage at low Rds(on) of high power and analog devices Power SOI offers a wide range of thicknesses of the top silicon and the buried oxide layers Cost effective micromachining process for various MEMS applications Power SOI’s BOX acts a natural etch stop releasing a thick top Si for a strong moving part Design and fabricate back illumination CMOS image sensors at low cost of ownership Exploit SOI’s BOX as a natural etch stop, helping the process flows MEMC Semiconductor Materials Applications MEMC Perfect SOI wafers are ideally suited for ultra-thin applications for advanced CMOS devices, as well as thick SOI applications that include MEMS and power devices. Thick SOI wafers meet nominal thickness targets of > 5 um. Power SOI—Flexible Power SOI wafers from MEMC can be customized for a wide range of attributes, including SOI layer thickness, carrier type, resistivity, and orientation. MEMC thick SOI wafers utilize Power SOI, and are an excellent choice for automotive applications, as well as analog and power applications, including accelerometers and gyroscopes in consumer electronic devices. MEMC Power SOI products take advantage of a unique SOI layer smoothing process performed in a commercial epitaxial reactor. The use of an epitaxial reactor for smoothing processes enables precise insitu thickening of the SOI layer to the layer thickness specification. The result is a highly uniform SOI layer produced in the most cost-effective manner available. Applications MEMC SOI products are well-suited for RF front-end devices, which are utilized in integrated handsets that require cost and footprint reduction. They are also appropriate for MEMS applications, as well as CMOS image sensors. SOI with high resistivity handles allow integration of CMOS with RF switching. The faster circuit operation and higher power handling and breakdown voltages made possible by SOI technology enhances the performance of integrated circuits for a broad variety of consumer, automotive, and industrial applications. • Improve device performance such as switch signal speed • Enhance thermal performance and noise resistance • Minimize latchup issues • Maximize power efficiency and performance MEMC Semiconductor Materials 14 MEMC Semiconductor Materials Figure 6 Semiconductor Product Evolution TECHNOLOGY NODE PROGRESSION OVER TIME >110 nm 90 nm 65 nm 45 nm 32 nm 22 nm 10 nm Materials Improvements Wafering Improvements Polished Silicon Flatness, particles, metals, 3 mm edge exclusion Thick SOI Thick SOI Engineered Orientation Engineered Orientation Engineered Orientation SOI SOI SOI SOI Defect Engineered Si Defect Engineered Si Defect Engineered Si Defect Engineered Si Defect Engineered Si Epi Epi Epi Epi Epi Epi Polished Silicon Polished Silicon Polished Silicon Polished Silicon Polished Silicon Polished Silicon ... plus polished edge, smooth backside ... plus nanotopography, double-side polished ... plus 2 mm edge exclusion ... plus fab process specific wafer shape ...plus flatter, edge to edge ... plus flatter, cleaner and purer for 13 nm/10 nm max 1 large area defect TO SuPPOrT ONe geNerATiON AHeAD Crystal Improvements INNOVATION AT EVERY STEP DRIVEN BY APPLICATION 450 mm Bulk Si ...plus Oxygen Control, Point Defect Control ... plus Perfect Si + MDZ, Resistivity 0.002 to 100 Ohm-cm FLATTer, Purer, CLeANer AND CuTTiNg eDge POrTFOLiO ... plus 300mm Perfect Si + MDZ, Resistivity 0.0015 to 250 Ohm-cm ... plus Resistivity 0.0012 to 1000 Ohm-cm ... plus Enhanced Resistivity 0.001 to >1000 Ohm-cm ... plus Next Gen Hot Zone Resistivity <0.001 to >10 k ohmcm enhanced Portfolio MEMC drives innovation at every step of the value chain to maximize efficiency, deliver superior value for customers and a relentless effort in research and development. R&D: ProDUCT: Constantly and consistently improving our manufacturing Our strength stems from decades of experience Customer: Our relentless effort to be in tune with our customers 17 MEMC Semiconductor Materials A Commitment to Innovation and Our Customers MEMC leverages advanced manufacturing capabilities and industry-leading technology to consistently improve efficiency while reducing cost. Our innovative processes, together with our clear understanding of customers’ business objectives, offer a clear path to success now and in the future. Relentless Innovation Innovation lies at the heart of MEMC’s corporate culture. Our commitment to innovation has enabled MEMC to create new products, new manufacturing methods, and above all, build on advanced research and development. MEMC drives innovation in all areas of our businesses and at all levels within the company, including R&D, manufacturing, and in our customer relations and services. • MEMC is an industry pioneer with decades of participation in global standards organizations to drive advanced technologies and maximize inter-operability. • Partnerships with leading universities propel innovation and support the latest features and functionality. • Rigorous quality control with ISO-certified manufacturing enhances performance and reliability. Aligning Our Processes to Meet Customer Needs Our strength lies not only in producing best-in-class products, but in forging mutually beneficial relationships with our customers. Every step of our design, development, and manufacturing processes is focused on close collaboration with our customers to meet their specific technical requirements. MEMC leverages a global organization to station field application engineers near customer sites. These engineers work continuously with our customers to understand their specific product requirements, providing constant, real-time feedback to MEMC. We then apply this input to our production processes to refine and customize our products and align them precisely with customer needs. Ready to Make a Difference MEMC extends its innovation and customer-centric focus well beyond manufacturing. We apply what we have learned to our research and development processes, to continually fine-tune and optimize every aspect of product development. The result is maximum efficiency and consistent superior value for our customers. © 2012 MEMC Electronic Materials Inc. All rights reserved. MEMC, SunEdison, the MEMC logo, the SunEdison Logo and the Joint MEMC SunEdison logo are registered trademarks or trademarks of MEMC Electronic Materials, Inc. and/or its affiliates in the United States and certain other countries. All other trademarks mentioned in this document are the property of their respective owners. The use of the word “partner” does not imply a partnership relationship between MEMC Electronic Materials Inc. and any other company. MEMC Semiconductor Materials 18 Global Locations North America Canada Puerto Rico United States South America Brazil Europe Germany Greece Italy Spain Asia China Dubai India Japan Korea Malaysia Singapore Taiwan Thailand MEMC • 501 Pearl Drive • St. Peters, MO 63376 • (636) 474-5000 • www.memc.com SunEdison • 600 Clipper Drive • Belmont, CA 94002 • (650) 453-5600 • www.sunedison.com 1/12