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1 P10345 – Automated TFT Noise Characterization Platform Kendell Clark1, Stephen Marshall1, Carmen Parisi1, James Spoth2, Ryan Vaughn3 Faculty Advisor: Dr. Robert Bowman1 1)Department of Electrical Engineering, Rochester Institute of Technology 2)Department of Computer Engineering, Rochester Institute of Technology 3)Department of Mechanical Engineering, Rochester Institute of Technology Abstract—A low noise, automated measurement environment is constructed for the purpose of characterizing on wafer devices. Novel analog circuitry provides both the low noise bias capabilities needed for device characterization as well as the low noise amplification of low level signals. Custom digital hardware and LabVIEW software are used to control the analog circuitry and measurement automation. The entire project is encased in a RF/EMI shielded container to reduce the effect of external noise coupling into the sensitive signal path and is designed to fit over an existed wafer probe station. Index Terms— Noise Measurement, RF/EMI Shielding, Low Noise Amplification, Low Noise Biasing, 1/f Noise, Current Source I. INTRODUCTION The purpose of the Automated TFT Noise Characterization Platform is to provide researchers a fast and easy way of characterizing the noise in on-wafer devices by providing an electrically quiet environment and automation of connection switching, instrument control, and data acquisition. Major competing products retail for over one million dollars and are marketed to large corporations with an interest in characterizing thousands of devices of widely varying types for use in R&D or production testing. Small research budgets do not allow for purchase of these expensive systems, nor do they require the extensive functionality provided. The Characterization Platform aims to address the needs of small research groups on a low budget, interested in retrofitting an existing, low-cost wafer probe station with a low-noise measurement environment. There are many key features and design components of the project. One of these is a shielded container which reduces the influence of environmental RF and EMI noise on the measure. Another component is a low noise amplifier designed to provide gain to very low level measurement signals inside the shielded environment. Low noise current and voltage sources to bias the device under test without contributing additional noise are also incorporated into the platform. The bias circuitry and device measurement process is user controlled through a LabVIEW interface and includes a high resolution mode for the current sources. II. SYSTEM OVERVIEW The system was designed with several considerations. First, it is difficult to manually measure a statistically significant sample of devices in an efficient manner. Each measurement requires the user to make connections between different pieces of lab equipment to first measure the device’s I-V characteristics, and then to set up the low noise measurement system, bias the device carefully, and record data. By automating IV curve measurement and providing an easily adjustable and programmable bias source, measurement time is reduced. By providing an electrically shielded container, any noise sources in the surrounding environment are prevented from contaminating the measured signal. Custom circuit and PCB design also help to reduce the amount of noise contributed by the measurement system. Previous 1/f noise measurement systems typically use a voltage source and a resistor to provide current bias to the device. This circuit topology has a noise floor fundamentally limited by the thermal noise of the resistor. The bias current circuit developed in this project is able to source comparable amounts of current while significantly reducing the noise floor from that of a resistor. The system was designed to have a PC LabVIEW based user interface. The measurement board communicates with this software using an NI USB development board and onboard logic. The onboard logic is used to control bias circuitry, amplifier gain, and connection switching. The PC software coordinates IV measurements, bias generation, settling times, and data acquisition. A system block diagram is shown below. PC NI USB Development Board Digital Control Circuit Biasing Circuit DUT Signal Conditioning (Amplification) Measurement (DSA, B1500) Figure 1 – Overall system block diagram. III. ELECTRICAL THEORY OF OPERATION A. Digital Circuitry The digital hardware component is a Xilinx CoolRunner II XC2C64A CPLD. This part was chosen because it was available in a VQ44 package, which minimizes board space without the complexity of a BGA device, while providing a 2 sufficient 33 I/O pins. Ignoring BGA devices, competing products from are only available in 100 pin or greater TQFP packages. To isolate the ground used by the controller PC, inputs to the CPLD are isolated using Fairchild Semiconductor FOD8001-ND opto-couplers. These devices accept a digital input and produce an isolated digital output. Since the NI USB 6501 uses a 5V VCC and the CPLD requires a 3.3V VCCIO, these devices also perform the necessary level shifting. The CPLD’s digital outputs are connected to the attached peripherals (relay drivers and D/A Converter) using its general purpose I/Os at 3.3V LVCMOS levels. In addition to the 3.3V VCCIO supply, the CPLD requires a 1.8V supply for its logic core. (VCC) To provide these rails, Linear Technology regulators (specifically, LT1761 for the 1.8V and LT1965 for the 3.3V) were chosen. These regulators were desirable because they would accept the +18V supply provided by the batteries. Fixed output devices were chosen to simplify circuit design. The final element required to utilize the CPLD in a real system is a JTAG test/programming interface. To facilitate easy programming using a Xilinx Parallel Cable IV or Xilinx USB Platform Cable II (The most common programming devices supplied by Xilinx), a 14 pin Molex 87833-1420 connector is used, so the 14 pin ribbon cable included with those two programming cables can be used without modification. B. Computer Interface The controller PC running the LabVIEW software will connect to the board using an NI USB 6501 device. This device provides 24 digital I/O lines at 5V TTL logic levels. While only 5 I/Os are necessary for the current design, this is the least expensive USB interface provided by National Instruments. This device is easily controlled with the LabVIEW software. C. CPLD Design The CPLD was designed to use a four wire full-duplex SPI interface to send and receive configuration information from the PC. To allow for easy control, the data input is broken into an instruction (4 bits) and data. The CPLD design allows for variable bit length transmission, allowing flexibility in connected components and internal registers. Figure XX show the operation of a 20 bit write over the bus. The CPLD provides a DOUT signal, which is only used to test communication with the board. While not in use, the clock, data, and strobe bits are held at VCC. Figure 2 – SPI communication timing diagram The instruction input is processed by a state machine, which then enables the appropriate register or state machine inside the CPLD to process the data. The internal structure of the CPLD is shown in Figure 3 Figure 3 – CPLD logic architecture D. Control Software To control the measurement circuitry and test equipment a LabVIEW-based control application was developed. The software controls an HP3562A dynamic signal analyzer (DSA) and the USB 6051 board used to communicate with the board. Drivers for DSA control needed to be written using the LabVIEW instrument I/O assistant, while a publicly available driver was used to obtain measurements from the DSA. Control of the USB-6501 was achieved using the DAQ Assistant. To enable easy modification of the measurement flow and easy expansion for added tests or measurement equipment, a number of sub VIs (Virtual Instruments) were written to make the top level VI easy to understand and modify. Individual VIs were created to control each peripheral connected to the CPLD and the CPLD interface itself. The data bits produced by each sub VI were abstracted to integer, string, or Boolean parameters that are passed to the VI during execution. The top level control software implements the algorithm shown in Figure 4 to take a noise measurement: 3 before being applied to its respective node. To establish a drain current for the DUT the control voltage is converted into a precision low noise current using an active low noise current source. Once the DUT is biased correctly and the measurement process begins low level noise signals are passed through amplification stages up to levels that can be measured by the lab’s dynamic signal analyzer. F. Voltage Bias Circuit The circuit shown below in Figure 5 is used twice in the project to bias both the gate of the device under test as well as the negative terminal of the low noise amplifier. The gate bias voltage is needed to set the DUT into the correct region of operation for measurement while the LNA voltage is used to cancel out DC offset at its output in order to correctly interface with the measurement equipment. RCharge Control Voltage Figure 4 – Measurement software flow E. Analog Measurement and Bias Circuitry To test the 1/f noise of a transistor (henceforth referred to as a device under test, or DUT), it must be biased in the desired operating region. 1/f noise may be measured in any of the states of operation. The 1/f noise contributed by a device may also differ depending on the state of operation it is in. It is desirable for the characterization platform to be able to bias a DUT in all regions of operation: cutoff, triode, and saturation. To bias a device, a known current must be passed through the drain. Controlling this current can change the operating region, assuming a fixed voltage bias on the gate. This gate voltage can also be varied, to produce a wide range of bias points for the DUT. Thus, a voltage biasing circuit and a current biasing circuit were developed. VDD DAC V_cntrl1 I_DUT LPF I_noise I_noise V_noise 12b Din I_Bias LPF DAC V_cntrl2 Low Noise Bias Current Generator 12b Din DAC V_cntrl3 12b Din -VSS Figure 5 – Analog block diagram Figure 5 depicts a block diagram of the analog bias and measurement circuitry. Three control voltages are established via commands from the digital circuitry and LabVIEW software through the three DACs in order to correctly bias the DUT. At the DUT gate and low noise amplifier nodes, the control voltage is first filtered to ensure correct noise levels RFilter Charging Relay C DUT Gate or LNA (-) Terminal LPF Figure 6 – Low Noise Voltage Bias Circuit Using the custom LabVIEW software the user selects a desired bias voltage for the device under test between ±10V. Their choice is then sent from the computer to the digital circuitry located in the shielded container where it is outputted from a D/A converter’s output as the control voltage to the bias circuit. This control voltage is then filtered by the lowpass RC filter to bring its noise level to within specification before being output by the bias network to the correct node elsewhere in the circuit. Throughout the entire measurement process the control voltage is held at the user defined level. In order to filter the control voltage noise to acceptable levels RFilter and C need to have a cutoff frequency of 1mHz or lower. For this project RFilter = 1MΩ and C = 1mF creating a cutoff frequency of 159µHz. Because the bias networks RC time constant is relatively large (~6000s) it requires a large amount of time in order to charge to the correct voltage needed at the output. To speed up the circuit’s settling time the charging relay is flipped by a signal from the CPLD before the control voltage is outputted from the D/A converter. Flipping the relay connects RCharge (10Ω) in parallel with RFilter. Since RCharge is very small compared to RFilter the bias circuit’s time constant is greatly reduced (< 0.1s) and the circuit can charge to the required output bias voltage in much less time than it would normally be capable of. Once the output voltage has settled, a second signal from the CPLD flips the switching relay back to no connection and the control voltage is then filtered and the output held at a constant value. G. Low Noise Current Source Since the 1/f noise characteristic of a device is measured at its drain (or collector, in the case of a BJT), it is imperative 4 that any measurement apparatus that connects to this node must not contribute a significant amount of current noise. A bias current source must connect to this node, so this current source must be low noise. Furthermore, it must be capable of providing extremely low currents (single nano-amp levels) for biasing the DUT in cutoff. For this reason, it must have very high output impedance. The circuit block must also have a digitally programmable output current. A 12-bit D/A converter was selected to provide programmable voltage biases for other parts of the circuit. This D/A converter was also chosen to be used to program the bias current, and as such is a multiple output D/A. The current source circuit topology was developed to provide extremely high output impedance, low noise, a maximum output of 100µA, and a 100dB dynamic range, resulting in a minimum output current of 1nA. A dynamic range of 100dB equates to approximately 17 bits of resolution. 17-bit D/A converters are difficult to find, expensive, and often will often sacrifice performance characteristics such as INL (integral nonlinearity) and DNL (differential nonlinearity) to achieve such a high resolution. While linearity is not crucial to the operation of the current source, a cheaper solution was found this still allowed preservation of linearity. The current source was designed with two operation modes, one for high current and one for low current. The low current mode allowed a minimum output of 1nA with 1nA resolution, and the high current mode allowed 100µA maximum output current with 24nA resolution. This is summarized in Table 1. The circuit uses a control voltage and an operational amplifier to establish a fixed bias across a resistor, Rs. The control voltage comes from the D/A converter, which allows the output current to be set digitally. This control voltage is referenced to be a maximum of 1V from ground. The two output modes (high current and low current) are achieved by changing Rs. The simplified schematic of Figure 6 does not show the switching scheme. Since Rs is known, and the maximum control voltage is 1V, then the maximum current through Rs can be determined. The control voltage has 12-bit resolution, and hence the current through Rs will also have this resolution. Current in Rs is also the output current. The JFET serves as an active output device, enhancing output impedance and providing isolation of the output node from the input. This isolation is key to the low output noise of the circuit. The circuit is only designed to provide a DC output current, so low pass filters are used on the gate and the drain to reduce the amount of noise injected at those nodes. The noise signals present at the output of the circuit will the sum of the channel noise, any noise sources injecting into the channel node, and any noise injected into the gate times the transconductance of the JFET. 𝑖𝑛𝑜 = 𝑔𝑚 𝑣𝑛,𝑔 + 𝑣𝑐ℎ The noise in the channel, vch, is the sum of the op-amp input noise voltage, the noise voltage from Rs, and the channel noise intrinsic to the JFET, which is a combination of 1/f noise and white noise. JFETs are naturally low noise devices. The design uses a JFET with intrinsic noise lower than the desired output noise level. It can be assumed that noise created by the resistor Rs or the op-amp will be far greater. Equation 2 provides a simplified model of the current noise present in an MOS device: 2 𝐾𝑔𝑚 3 𝑊𝐿𝐶𝑜𝑥 𝑓 2 𝑖𝑐ℎ = 4𝑘𝑇 𝑔𝑚 + VDD Sensitive Measurement DUT Node Control Voltage LPF Iout C LPF Noise Injection C Rs FIGURE 7 – Low-noise current source shown with sensitive measurement node and points where noise is injected. (1) (2) The current noise in the channel has two terms; the first describes channel thermal noise, and the second describes channel 1/f noise. 5 the circuit, RS can be 10kΩ or 243kΩ). For this reason, C is chosen to be large so that most of the noise current is shunted to ground through that low impedance branch, rather than flowing through the JFET channel and adding noise. Noise voltage source Vn2 is not filtered. It is a voltage source that sees the parallel combination of R S, 1/sC, and 1/gm to ground. The amount of current Vn2 sources through 1/gm is equal to gmVn2. It is presumed that, since Vn2 of the amplifier is 8nV/sqrt(Hz) and gm is on the order of mΩ-1, the contributed noise current will be small enough. If operational testing proves it is too much, the contributed noise can be attenuated by inserting a large resistor in the feedback loop to create a voltage divider. VDD DUT Iout Vn1 LPF Vg Rf Vn2 In1 In,ch Cf LPF C Rs Inr Figure 8 – Current source circuit with equivalent noise sources inserted. Inr is the equivalent thermal noise current of Rs, In1 and Vn2 are the equivalent input noise sources of the op-amp for the positive terminal. Vn1 is the output noise of the amplifier and any additional sources of noise present at the inverting terminal (D/A converter output noise, for example). The circuit here is shown with equivalent noise sources. These sources are undesirable, and analysis of the circuit shows that they are negligible at the output. Each source can be treated independently by zeroing out the other sources. The objective of this analysis is to determine the contribution of each noise source to the current noise at the channel. Results of the analysis show that all sources add negligible noise compared to the intrinsic JFET channel noise, In,ch. Since 1/f noise is typically a very low frequency phenomenon, the noise contributed at low frequencies will be considered. We define a minimum bandwidth for the system of 0.1Hz. The circuit topology heavily relies on using capacitors to attenuate the noise, even at low frequencies. Thus, attenuations for LPF blocks can be evaluated at 0.1Hz. This will provide a worst-case estimate of the total noise injected into the channel node. The amplifier used in the design, an ADA4004, has input noise sources of 8 nV/sqrt(Hz) at 0.1 Hz and 30 pA/sqrt(Hz) at 0.1 Hz. These values are extrapolated from noise spectral density plots on the datasheet. Noise voltage source Vn1 is the first source to consider. It is passed through the LPF consisting of Rf and Cf. The resulting signal, Vg, is then amplified by the transfer function of the JFET. The output noise current is thus gmVg. Typical transconductances for a JFET in the active region are 1 to 3 mΩ-1. For the low frequencies considered here, Vn1 is any noise on the inverting terminal multiplied by the DC openloop gain of the amplifier. By choosing Rf and Cf large, Vn1 can be attenuated enough so that the contributed noise at the channel is small. Noise current sources Inr and In1 can be combined into one noise current source. These currents will see the parallel combination of impedances present at the JFET source node. These impedances are RS, 1/sC, and the impedance looking into the source of the JFET, 1/gm. This creates a current divider. 1/gm can be a small value compared to the large RS (in H. Low Noise Amplifier A low noise transconductance amplifier is used to amplify the noise current signal at the drain of the DUT. A simplified diagram of the analog measurement circuit is shown below. Two amplification stages are used to achieve the desired maximum system gain of 160dB. This gain is adjustable in increments of 20dB by switching feedback resistors in and out. Ri is a small value of 100Ω and does not affect the operation of the amplifier as a transconductor. Current Bias Circuit Rf1 Rf2 Ri Ri DUT Vout Vbias Circuit Figure 9 – The LNA circuit attached to the DUT drain node. I. PCB Layout The main concern during PCB layout is noise. Signals coming from the wafer must be protected up until they enter the first low-noise amplifier, at which point the thermal noise of the surrounding circuitry has no significant effect on the signal of interest. The signal from the wafer attach to the PCB board using SMA connectors. The traces are then coaxed (three traces being ground-signal-ground) to the relays and then fed from the relays into the low noise amplifier. The goal during layout was to minimize the distance from the SMA connectors to the low-noise amplifier. The figure below shows the complete PCB layout. Green is the bottom copper layer, Red is the top copper layer, and yellow is the silkscreen layer. The left side of the board is comprised of analog circuitry, while the right side of the board contains the digital circuitry that controls the relays and interfaces with the outside world. 6 Figure 12: Sensitive signal path. Blue dots highlight the path from the relays to the low-noise amplifier (R15). Figure 10: Complete board layout with bottom metal layer (green), top metal layer (red), and silkscreen (yellow) shown. The next figure shows a close up view of the sensitive signal path. The SMA connectors can be seen on the left side of the board with their respective labels for Drain, Source, and Gate of the DUT. The groupings of three traces are the co-axed traces that touch relay nodes of SW8 and SW9. Figure 13: Bottom copper layer view only. Bottom layer acts as ground plane for all circuitry, with all grounds tied together at a single point. Figure 11: Sensitive signal path. DUT S, G, and D are SMA connectors connected to the DUT nodes. The next figure shows the signal path from the relays to the low noise amplifier. The path is very short to minimize the risk of contamination and the trace width is wide to minimize the resistance seen by the incoming sensitive signal. The figure above shows the bottom copper layer of the PCB, which is electrically the ground plane. One important tactic employed to reduce noise in the circuit is to tie all of the grounds together in one place. The left side of the board is the ground for all analog circuitry and the right side of the board is the ground for all digital circuitry. The two are connected in one place, as seen above. The external batteries also have their grounds tied to the same spot. All free space on the bottom of the board is filled with metal to provide, as much as possible, and uninterrupted and solid ground plane. All pins that require grounding are immediately tied to ground through a via. By reducing ground loops, the potential for noise contamination in the circuit can be reduced. IV. MECHANICAL THEORY OF OPERATION A. Mechanical Design Process The main goal of the mechanical components of the noise characterization system is to provide continuous physical RFI and EMI protection for the measurement apparatus while the M150 was in use. It was also specified that the protective barrier must fit on, and not interfere with the operation of, the M150 during operation, as well as contain the electronic components of the system and provide a window through which the positioning microscope of the M150 could see. 7 B. Material Selection The critical first step in creating the shielded container was to select the appropriate materials to construct the apparatus out of. The shielded enclosure had to be constructed out of a rigid material that could be affixed to the M150 easily that was light enough so as not to break the M150. This material also had to shield the container from EMI and RFI, as well as be non-ferrous so the container did not introduce any noise of its own. The selected material, rolled Aluminum, met all of these criteria. To include a viewport for the M150’s microscope a substance that was transparent and conductive was required. The chosen material was ClearShield™ plastic film because the material allows 80% visible light transmission, over 80db of attenuation below 100kHz, and is conductive. C. Three Dimensional CAD Design The design of the shielded enclosure was created using Pro/ENGINEER® (Parametric Technology Corporation) CAD software to define the shapes and physical part geometries. By using the CAD software, it was possible to create multiple designs for each part and asses the positive and negative attributes of differing geometries. This greatly reduced the time needed to redesign the assembly when space or design requirements changed. The actual geometries created in Pro/ENGINEER were constrained two main specifications: the need to fit on the M150 without damaging it, the need to allow the M150 its full range of motion, and the need to house all of the electronic components used in measurement. The first specification required the creation of detailed dimensional references for all of the components on the M150 and recording the movements that the M150 might have to make for the measurement of a 150mm wafer. After these measurements and movements were taken, the parts required for the electronic system components were measured to determine the volume required inside the shielded area. All of this information was then combined to create a three dimensional system model for shielded container. The model creation was made significantly easier through Pro/ENGINEER’s ability to combine multiple part files to be into one assembly drawing, allowing the designer to quickly determine if the parts that have been combined will fit. D. Manufacture The metallic structures of the shielded enclosure were created from plate aluminum using a combination of machining, hand working, and the use of epoxy resin. The manual machining was done in the RIT machine shop using a three axis milling machine, a band saw, and a belt sander. The band saw was used to create rough cuts, while the milling machine was used for finer work to create straight lines, 90° angles, and any holes needed in the design. The belt sander was used to clean any excess material from the cut sections. Hand working was used in the final stages of manufacture, just before the application of the metallic epoxy, to insure that the surfaces fitted together correctly. The epoxy was used to bond the plates together and to ensure a continuous conductive surface between pieces. V. FUTURE WORK AND IMPROVEMENTS One piece of future work on the Noise Characterization Platform would be to correct a problem with the low noise amplifier. Currently, using the circuit described in Section H causes the DC offset of the second stage to be larger than the rails of the operational amplifier for certain Vbias voltages. The applied Vbias appears on the output of the first amplifier because it is being used as a transimpedance amplifier and the noise current which is gained up and converted to a voltage rides on top of this DC offset. Since the second stage of amplification is a voltage amplifier both the noise signal and Vbias offset are amplified by the circuit. Amplifying Vbias (which can be between ±10V) causes the output of the circuit to hit the upper or lower rail. This railing of the second op-amp affects the quality of the measurement and makes interfacing with the dynamic signal analyzer more difficult. A simple fix to the issue is shown below in Figure 14. Current Bias Circuit Rf1 Rf2 Ri Ri - DUT + + Ri Vout Rf2 Vbias Circuit Figure 14 – Low noise amplifier offset correction The circuit in Figure 14 is identical to the one in Figure 9 with the addition of two more resistors. These resistors are the same values as the two feedback resistors on the negative terminal of the second amplifier and form a voltage divider using the applied Vbias voltage and ground. The voltage between the two resistors is connected to the second stage positive terminal. Since the two new resistors are the same value as the feedback resistors and Vbias is applied to both RI resistors identical voltage dividers are formed with the same potential seen at the both input terminals of the second stage. This forces Vout to be 0V with only the measured signal being transmitted to the dynamic signal analyzer. A second piece of work that must be accomplished in order to make the project fully functional is to modify the low noise current sources so they can fully provide the range of needed bias currents. Presently, the output swing of the current amplifier being used is not close enough to either supply to allow for the full range of needed bias currents. An amplifier with rail-to-rail output swing is required to fully implement the needed features in the circuit. Also a JFET with a smaller pinch off voltage range should be used for the active device in the current source. The JFET being used now has a pinch off 8 voltage between 0.5V and 3V which depending on what its exact value is can affect how the overall circuit performs and how well the operational amplifier can set the desired bias current. A potential improvement to the overall system would be to streamline the layout of the PCB. Currently component density is quite high due to the presence of large capacitors, power resistors, relays, etc. and steps could be taken to reduce the amount of layout space required and component density. If a suitable dual package low noise amplifier be found the low noise amplifier circuitry could be condensed. This would also benefit the noise performance of the system as having both low noise amplifiers in one package reduces the probability of noise coupling into the signal as the amps are located as close together as they could possibly be. Removing some of the relays in the circuit would also serve to reduce layout area and complexity. While the relays are required in the signal path for physical isolation from unneeded circuitry to keep noise performance at acceptable levels not all of the switches need to be relays. In these cases MOSFET switches should be able to be implemented without any loss of performance though testing and/or simulations should be done to confirm this assumption. One such example of where MOSFET switches could be used would be in the DUT gate and low noise amplifier bias circuitry. The relays in place now are not in the signal path and most likely can be replaced smaller MOSFET switches. If the MOSFET switches can be driven by 3.3V then they can be toggled directly from the CPLD which may mean fewer relay drivers are needed potentially getting rid of more components from the board. VI. REFERENCES [1] Johns, David A. and Ken Martin. Analog Integrated Circuit Design. John Wiley and Sons. 1997. [2] Stanford Research Systems. Model SR570 – Low Noise Current Preamplifer. SRS, Inc. 1997. [3] Xilinx Inc. A Quick JTAG ISP Checklist. App Note XAPP104. 2005. [4] Xilinx Inc. Bulletproof CPLD Design Practices. App Note XAPP784. 2005.