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A world class facility to develop
the technology needed
to fulfill the CITRIS vision.
18 / 9 / 2001
UC Berkeley Microfabrication Laboratory
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CITRIS Research Priorities
Disaster Response - new sensors for rapidly determining casualties,
structural integrity, and most effective emergency response
Microfabricated neural probe
L.P. Lee group
Low energy 16mm3 integrated sensor
KSJ Pister Group
Micromirror Drive Mechanism
M.P. Young
Energy Efficiency - networked miniature sensors proposed for
monitoring building conditions to maximize efficiency of utility systems
18 September 2001
UC Berkeley Microfabrication Laboratory
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CITRIS Research Priorities
Healthcare - discrete sensors for automated or point of use health
monitoring. Integration with biological receptor materials of BNC.
Electrolytic oxygen microbubbler
R.T. Howe, J.D. Keasling groups
Biological processing microdevice
A.P. Pisano, T.D. Sands groups
Transportation - optoelectronic sensors required for analysis of traffic flow
to maximize efficiency of transportation networks
Environment – networked sensors for automated air and water analysis
to enable immediate detection of and response to contamination situations
18 September 2001
UC Berkeley Microfabrication Laboratory
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The Challenge: Integrate Research
across several disciplines
MEMS
ICs
Bioelectronics
Optoelectronics
18 September 2001
UC Berkeley Microfabrication Laboratory
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The opportunity:
The Integrated Microfabrication Facility
Integrated Circuit
Design
MEMs
Berkeley Sensor
and Actuator Center
Berkeley
Microlab
Optoelectronic materials
18 September 2001
UC Berkeley Microfabrication Laboratory
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Based Upon the Successful Microlab Model:
Shared Laboratory Capabilities
Common Academic Model:
Individual Fiefdoms
Successful Microlab Model:
Shared Laboratory
The shared model implies professional administration
and support staff, funded by “per use” fees:
 efficient use of valuable laboratory space
 significant improvement in quality of support
 PI research flexibility
 research cross fertilization
18 September 2001
UC Berkeley Microfabrication Laboratory
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Existing Microlab / Future IMF:
Accessible to All
>70 Principal Investigators; 7 departments, >240 active users
from UCD, UCSB and UCSD LBL, LLNL, Sandia NL
Process/IC/CIM
5%
Chem/ChemE
7%
Compound
4%
LBL Cryo
2% 1%
Sensor
21%
MechE
7%
Device
8%
BMLA/Sundry
18%
Physics
9%
18 September 2001
MatSci
9%
UC Berkeley Microfabrication Laboratory
Univ
9%
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A Unique High Tech Incubator among the
California Institutes for Science and Innovation
The Berkeley Microfabrication Laboratory Affiliates has
28 member companies, many with fewer than 10 employees.
The IMF will greatly expand these activities.
Adriatic Research Institute
MicroAssembly Tech
Onix Microsystems, Inc.
Advanced Integrated Photonics Emitronix, Inc.
MicroGen Systems
Paracer, Inc.
Alien Technology Corp.
General Nanotechnology
Molecular Reflections
Photon Imaging, Inc.
Analog Devices
GENOA Corporation
Nanochip, Inc.
Progressant Technologies
Bandwidth9
Hewlett-Packard Company
NewPeregrine, Inc.
Robert Bosch Corporation
Bluefox
Jet Propulsion Laboratory
Network Photonics Inc.
Sandia National Lab
Covalent Materials, Inc.
MEMS PI
OMM, Inc.
18 September 2001
DICon Fiberoptics, Inc.
UC Berkeley Microfabrication Laboratory
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Integrated Microfabrication Facility
Compound
MEMs processing
semiconductor
compatible with
processing for
biologically modified
integration of
substrates and
optoelectronic
silicon ICs
Silicon Integrated
components
circuit fabrication
with
better than
Berkeley
mm minimum Integrated
Bioengineering 0.25Microlab
geometries
Nanotechnology
Materials
Center
Laboratory
Education - fiber connected teaching laboratories for long distance
learning and remote access to specialized analytical equipment.
18 September 2001
UC Berkeley Microfabrication Laboratory
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Significant Infrastructure Requirements
20,000 ft2 Class 100 clean room (1st floor)
16-20 ft ceilings and 20-30 ft spans critical for equipment installation
8” silicon, 8”/6” MEMs, optoelectronics, and multi-substrate integration
16,000 ft2 utilities and support
(basement / roof / perimeter)
5000 gal DI water, 7gpm, 60gpm non-DI recirc. chilled water
30 changes per hour air filtering, 60 ft3/min 80-100psi clean dry air
multiple hazardous gas and liquid effluent treatment systems
300 tons cooling capacity, >50,000 ft3/min supply and exhaust air
9000 gal liquid nitrogen storage tank, 400 gal liquid oxygen storage
toxic and flammable compressed gas delivery and storage area
equipment and supplies delivery and staging area
18 September 2001
UC Berkeley Microfabrication Laboratory
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Significant Space Allocation
18 September 2001
UC Berkeley Microfabrication Laboratory
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Extensive Equipment Requirements
Laboratory construction from CITRIS development funds (~44M)
Laboratory equipment funding (~50M)
corporate equipment donations
existing Microlab equipment
new funding
Detailed tool lists will include:
<.25mm photolithography (8”, 6” and manual)
in house >1mm minimum feature mask production
thin film deposition (furnace, rapid thermal, and plasma)
thin film etching (wet etching and plasma)
Analysis (CDSEM, TEM, ellipsometry, profilometry, interferometry)
MEMs specific (etch release, supercritical drying,capillary self assembly)
packaging (electroplating, dicing, wafer/wire/flipchip bonding)
18 September 2001
UC Berkeley Microfabrication Laboratory
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“Small Feature Reproducibility” Group –
key potential sponsors for equipping IMF
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Advanced Energy
ASML
Atmel Corp.
Advanced Micro Devices
Applied Materials
Asyst Technologies Inc.
Cymer
Etec Systems Inc.
Intel Corporation
18 September 2001
• KLA-TENCOR
• Lam Research Corp.
• Mykrolis Corp.
• Nikon Research Corp.
• Novellus Systems Inc.
• Silicon Valley Group
• Schlumberger
• Tokyo Electron Limited
UC Berkeley Microfabrication Laboratory
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