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sensors Article High Performance CMOS Light Detector with Dark Current Suppression in Variable-Temperature Systems Wen-Sheng Lin, Guo-Ming Sung * and Jyun-Long Lin Department of Electrical Engineering, National Taipei University of Technology, Taipei 10608, Taiwan; [email protected] (W.-S.L.); [email protected] (J.-L.L.) * Correspondence: [email protected]; Tel.: +886-2-27-712-171 (ext. 2121); Fax: +886-2-27-317-187 Academic Editor: Vittorio M. N. Passaro Received: 26 September 2016; Accepted: 9 December 2016; Published: 23 December 2016 Abstract: This paper presents a dark current suppression technique for a light detector in a variable-temperature system. The light detector architecture comprises a photodiode for sensing the ambient light, a dark current diode for conducting dark current suppression, and a current subtractor that is embedded in the current amplifier with enhanced dark current cancellation. The measured dark current of the proposed light detector is lower than that of the epichlorohydrin photoresistor or cadmium sulphide photoresistor. This is advantageous in variable-temperature systems, especially for those with many infrared light-emitting diodes. Experimental results indicate that the maximum dark current of the proposed current amplifier is approximately 135 nA at 125 ◦ C, a near zero dark current is achieved at temperatures lower than 50 ◦ C, and dark current and temperature exhibit an exponential relation at temperatures higher than 50 ◦ C. The dark current of the proposed light detector is lower than 9.23 nA and the linearity is approximately 1.15 µA/lux at an external resistance RSS = 10 kΩ and environmental temperatures from 25 ◦ C to 85 ◦ C. Keywords: light detector; dark diode (DD); photodiode (PD); current amplifier (CA); dark current cancellation; variable-temperature system 1. Introduction With the ever-increasing demand for eco-design, environmental legislation for electronics is focused on two major requirements. One is the internationalization of the restriction of hazardous substances and the waste of electrical and electronic equipment; the other is a new directive especially for energy using products and the registration, evaluation, authorization, and restriction of chemicals [1]. Lifetime extension is an important eco-design strategy for mitigating the environmental burden of developing new devices. Organic semiconductors increase the lifetime of large-area, low-cost image sensors by several thousand hours, and they monolithically integrate with photonic microsystems [2]. Miniaturized power supply units tend to have a smaller environmental impact at the production stage than traditional electronics do [1]; integrated circuitry can miniaturize power supplies. Colace reported on the first silicon-integrated, 2-D, light-sensitive array fabricated with CMOS technology and readout electronics. The proposed chip includes a light-sensitive array, analog-to-digital converters, dark current cancellation circuitry, and facilities for testing and calibration. It operates as a near-infrared camera [3]. Dark current cancellation is another important eco-design element for photosensors. In reference [4], a hybrid CMOS microfluidic microsystem was proposed for electrochemiluminescence-based biochemical sensing. In the CMOS imager, a two-transistor reset path technique is employed to attenuate the subthreshold leakage current and to reduce the dark current. The imager achieves a low photodiode Sensors 2017, 17, 15; doi:10.3390/s17010015 www.mdpi.com/journal/sensors Sensors 2017, 17, 15 2 of 12 (PD) dark current of 3.6 nA/cm2 , but the reset voltage is as high as 2.3 V. However, sub-dark current measurement by subtracting the dark signal frame from the captured frame, Sensors 2017, is 17, completed 15 2 ofand 12 the dark signal frame is stored off chip. Furthermore, a prototype integrated phototransistor-based CMOS current measurement completed by subtracting dark signal frame imaging. from the captured activedark pixel sensor circuit withisscintillating material was the presented for X-ray Cancellation and the dark framephototransistor is stored off chip. Furthermore, a prototype integrated of theframe, leakage current usingsignal a dummy technique was tested and proved efficient [5]. phototransistor-based CMOS active pixel sensor circuit with scintillating material was presented for In reference [6], an ultralow dark signal was presented for an embedded active-pixel CMOS image X-ray imaging. Cancellation of the leakage current using a dummy phototransistor technique was sensor. To achieve in-pixel dark current cancellation, a combined photogate and PD photon-sensing tested and proved efficient [5]. In reference [6], an ultralow dark signal was presented for an device was developed [6]. Specifically, the dark current was cancelled using a sensing device that was embedded active-pixel CMOS image sensor. To achieve in-pixel dark current cancellation, a fabricated withphotogate a large area. Inphoton-sensing the current study, dark cancellation wasthe performed using a combined and PD device was current developed [6]. Specifically, dark current current amplifier (CA). A CA is a good photo-detection circuit, which is easily fabricated with CMOS was cancelled using a sensing device that was fabricated with a large area. In the current study, dark technology. cancelling the dark current, can not only enhance of the CA but also current By cancellation was performed usingwe a current amplifier (CA). Athe CAsensitivity is a good photo-detection circuit, which is easily fabricated with CMOS technology. By cancelling darkperformance current, we can notsmall reduce the power consumption. The proposed light detector provides the a high and only enhance the sensitivity of the CA but also reduce the power consumption. The proposed light chip area. detector provides arange high performance and smallconverter chip area. (LFC) chip is proposed with dark current A high dynamic light-to-frequency A high dynamic range light-to-frequency converter (LFC) chip is proposed with dark current ◦ suppression up to 125 C. By regulating the cathode voltage of the PD and using a replica amplifier, suppression up to 125 °C. By regulating the cathode voltage of the PD and using a replica amplifier, the dark current is reduced. Measurements show that the output frequency is more insensitive the dark current is reduced. Measurements show that the output frequency is more insensitive to the to theambient ambient temperature and process variation. Supply voltage variation is also minimized by temperature and process variation. Supply voltage variation is also minimized by implementing a delay Figure11shows showsa ademonstration demonstration board design which is implementingconstant a constant delaymodule module [7]. [7]. Figure board design which is implemented withwith the light-dependent resistor (LDR), thethe light-emitting diode (LED), and ananLED implemented the light-dependent resistor (LDR), light-emitting diode (LED), and LEDdriver printed circuit board (PCB). The(PCB). typicalThe LED driver with the LDR operates with a large current. driver printed circuit board typical LED driver with the LDR operates with dark a large dark current. In this study, a CA with enhanced dark current cancellation was fabricated using 0.18 µm 1P2M In this study, a CA with enhanced dark current was fabricated using 0.18and µ m 1P2M CMOS technology with a chip area of 762 µm × 452cancellation µm, including pads. Simulated measured CMOS technology with a chip area of 762 μm × 452 μm, including pads. Simulated and measured results were obtained with white LED light and characterized using a lux meter at a supply voltage results were obtained with white LED light and characterized using a lux meter at a supply voltage VCC of 3.3 V, an external resistance RSS of 10 kΩ, and an environmental temperature varying from VCC of 3.3 V, an external resistance RSS of 10 kΩ, and an environmental temperature varying from −40 ◦ C to 125 ◦ C. The rest of this paper is organized as follows. Section 2 elucidates the proposed −40 °C to 125 °C. The rest of this paper is organized as follows. Section 2 elucidates the proposed circuit topology of the light detector. thesimulated simulated and measured results, and in circuit topology of the light detector.Section Section 33 presents presents the and measured results, and in Section 4, conclusions areare drawn. Section 4, conclusions drawn. Figure 1. Demonstration board design implemented with the LDR, LED, and LED driver PCB. Figure 1. Demonstration board design implemented with the LDR, LED, and LED driver PCB. 2. Proposed Circuit Topology of the Light Detector 2. Proposed Circuit Topology of the Light Detector In this section, we propose a CA with dark current cancellation that is composed of a dark diode In thisand section, we propose CADD with darkthe current that is composed of a the dark (DD) a photodiode (PD).aThe senses dark cancellation current in dark environment, while PDdiode (DD)senses and athe photodiode The DD senses the Figure dark current inthe dark environment, while the PD photodiode(PD). current in electric lighting. 2 presents schematic cross-section of an senses the photodiode current in electric lighting. Figure 2 presents schematic n+/p-substrate PD and its equivalent circuit. The PD is built with a p-nthe junction, whichcross-section is sensitive toof an the environmental Figure 3 shows the simulated PD adark current aswhich a function of n+/p-substrate PD andtemperature. its equivalent circuit. The PD is built with p-n junction, is sensitive environmental temperature (°C) and bias voltage (V) in dark conditions. According to the simulated to the environmental temperature. Figure 3 shows the simulated PD dark current as a function of results, the PD dark current (nA) is highly sensitive(V) to the environmental temperature, but environmental temperature (◦ C) and bias voltage in dark conditions. According toinsensitive the simulated to the bias voltage. results, the PD dark current (nA) is highly sensitive to the environmental temperature, but insensitive to the bias voltage. Sensors 2017, 17, 15 Sensors 2017, 17, 17, 15 15 Sensors 2017, 3 of 12 3 of 3 of 12 12 Anode Anode Cathode Cathode N-well N-well P-substrate P-substrate (a) (a) Anode Anode PD PD Cathode Cathode Anode Anode IIpp IId d Cathode Cathode (b) (b) Figure 2. n+/p-substrate PD: (a) cross-section; and (b) the equivalent circuit. Figure PD:(a) (a)cross-section; cross-section;and and(b) (b)the theequivalent equivalentcircuit. circuit. Figure 2. 2. n+/p-substrate n+/p-substrate PD: Figure 3. Simulated PD dark currents versus the environmental temperature (°C) and bias voltage (V) in dark conditions. Figure Figure 3. 3. Simulated Simulated PD PD dark dark currents currents versus versus the the environmental environmental temperature temperature (°C) (◦ C) and and bias bias voltage voltage (V) (V) in conditions. in dark dark conditions. Furthermore, the sensing area of the PD is another important factor. The simulated dark current is approximately proportional to the area ratio, which is defined as the ratio of the PD area to 300 μm Furthermore, the sensing area of PD another important factor. The dark Furthermore, sensing of the thedark PD is iscurrent another factor. The simulated simulatedtemperature dark current current × 300 μm. Figurethe 4 shows thearea simulated as important a function of the environmental is approximately proportional to the area ratio, which is defined as the ratio of the PD area to 300 is approximately proportional to the area ratio, which is defined as the ratio of the PD areaμm to (°C) in dark conditions. The smaller the area ratio is, the smaller the dark current is. All simulated ×300 300µm μm. Figure 4 shows the simulated dark current as a function of the environmental temperature 300 µm. Figure 4 shows simulated dark current as model, a function of is theprovided environmental dark × current levels are settled to the 0.3 pA due to imperfect diode which from (°C) in dark conditions. The smaller the area ratio is, the smaller thethe darkcurrent current is.dark All simulated temperature (◦ C) in dark conditions. The smaller area ratio is, the current foundry. Figure 5 shows the CA of the PD, which the operates without darksmaller cancellation. The is. dark current oflevels areRPD settled to pAvoltage due imperfect diode which is provided from the current PD is equal tosettled the VPDtoinimperfect the PD model, divided by its current . The Allresistance simulated dark levels are0.3 to 0.3todrop pA due diode model, which isILight provided foundry. FigureFigure shows theisCA theofPD, operates without dark dark current The light current of5the PD ILight amplified with aPD, current mirror, whose magnification iscancellation. approximately from foundry. 5 shows theofCA thewhich which operates without current cancellation. resistance of the PD R PD is equal to the voltage drop V PD in the PD divided by its current I Light . The to (W2/W × (WPD 4/WR 3) × (W 5) with length (L) for V allPD MOSFETs. Thus, the output Theequal resistance of1)the equal to equal the voltage drop in the PD divided by itscurrent current PD is6/W light current of the PD I Light is amplified with a current mirror, whose magnification is approximately IO.can belight expressed with A: ILight The current of the thetotal PD current ILight is gain amplified with a current mirror, whose magnification is equal to (W 2/W1) × (W4/W3) × (W6/W5) with equal length (L) for all MOSFETs. Thus, the output current approximately equal to (W 2 /W 1 ) × (WW ) × (W /W length (L) for all MOSFETs. Thus, 4 /W 3 6 W L 5 )WwithL equal 2 L2 A: 4 4 6 6 I Light Ithe O can be expressed with the totalI current gain O output current IO can be expressed with the total current gain A: W1 L1 W3 L3 W5 L5 (1) W L2 W4 L4 W6 L6 2 I A Light I O( W2 /L2 ) (W4 /L4 ) (W6 /L6 )I Light W1 L1 × W3 L3 ×W5 L5 × ILight IO = (1) W1 /L /L3 ) (the W5 /L ( ) (W3includes 5) 1current, where ILight, also called the photodiode illumination current ILux and the dark(1) A I Light current IDark, which flow from=VA DD × toIthe ground in a dark environment. The photocurrent ILight and Light darkILight current are amplified A times.current, If the CAincludes operatesthe in aillumination variable-temperature where , alsoIDark called the photodiode current Isystem Lux andwithout the dark dark current cancellation, the dark current causes malfunction. This is the reverse of the characteristic where I , also called the photodiode current, includes the illumination current I and Lux Light current IDark, which flow from VDD to the ground in a dark environment. The photocurrent the ILightdark and of p-i-n PDs. For a reverse biased diode, the reverse bias current I R can beThe defined by the following current I , which flow from V to the ground in a dark environment. photocurrent I and Dark IDark are amplified ADD dark current times. If the CA operates in a variable-temperature system Light without equation with reverse bias voltage V [8]: dark current current cancellation, IDark are amplified A times. If causes the CAmalfunction. operates in aThis variable-temperature system without dark the dark current is the reverse of the characteristic dark current cancellation, the dark current causes malfunction. This is the reverse of the characteristic of p-i-n PDs. For a reverse biased diode, IR can be defined by the following I R the I Sreverse exp qVbias nkTcurrent 1 (2) of p-i-n PDs. a reverse biased diode, equation withFor reverse bias voltage V [8]: the reverse bias current IR can be defined by the following equation with reverse bias voltage V [8]: I R I S exp qV nkT 1 (2) Sensors 2017, 17, 15 4 of 12 IR = IS × exp(qV/nkT − 1) Sensors 2017, 17, 15 Sensors 2017, 17, 15 4 of 12(2) 4 of 12 where IS Iis the saturation current, q is the electronic charge, kT is the Boltzman energy, and n is a where S is the saturation current, q is the electronic charge, kT is the Boltzman energy, and n is a where I S is the saturation current, q is the electronic charge, kT is the Boltzman energy, and n is a parameter ofof which fromboth bothdiffusion diffusionand andsurface-generation surface-generation parameter whichthe thevalue valuedepends dependson on contributions contributions from parameter ofa which the value depends on contributions from both diffusion and to surface-generation currents. For 4H-SiC avalanche photodiode (APD), the dark current is close the measurement currents. For a 4H-SiC avalanche photodiode (APD), the dark current is close to the measurement currents. For a 4H-SiC avalanche photodiode (APD), the dark current is close to the measurement limit at atlow At high high bias, bias,the thedark darkcurrent current relatively insensitive to temperature, limit lowbias biaslevels. levels. At is is relatively insensitive to temperature, a limit at low bias levels. At high bias, the dark current is relatively insensitive to temperature, a a characteristic that signifies signifies tunneling. tunneling.IfIfwe weassume assumethat thatthe thetunneling tunnelingdark darkcurrent current undergoes characteristic that undergoes characteristic that signifies tunneling. If we assume that the tunneling dark current undergoes avalanche photocurrentatathigh highbias, bias,the thetotal totaldark dark current avalanchemultiplication multiplicationsimilar similar to to that that of the photocurrent current is is avalanche multiplication similar to that of the photocurrent at high bias, the total dark current is expressed byby reference expressed reference[9]: [9]: expressed by reference [9]: Gain(V, V , ) ×Itunneling IdarkIIdark = Gain Gain V ,T T I Itunneling dark (3) (3) (3) tunneling where Gain(V, an additional additionalcorrection correction factor obtained through photocurrent measurement. where Gain(V,T) T) is is an factor obtained through photocurrent measurement. The where Gain(V, T) is an additional correction factor obtained through photocurrent measurement. The 3/2 with the device area A and the effective bias The tunneling currentItunneling Itunneling is proportional to ×A V×3/2 V tunneling current is proportional to A with the device area A and the effective bias tunneling current Itunneling is proportional to A × V3/2 with the device area A and the effective bias voltage [9].The The objectiveof of thisstudy study to obtain order toto achieve higher voltage VV [9]. obtainaaazero zerodark darkcurrent currentin order achieve higher voltage V [9]. Theobjective objective ofthis this study was was to obtain zero dark current ininorder to achieve higher photo resistance sensitivity. photo resistance sensitivity. photo resistance sensitivity. Figure SimulatedPD PD (dark) current current versus standardized dark Figure 4.4. standardizedarea arearatio ratioin darkconditions. conditions. Figure 4.Simulated Simulated PD(dark) (dark) current versus versus standardized area ratio inindark conditions. V VDD DD M M11 M M22 M M55 M M66 IILight Light IIO O M M33 M M44 V VSS SS Figure 5. CA without dark current cancellation. Figure5.5.CA CA without without dark dark current Figure currentcancellation. cancellation. Figure 6 shows a CA with dark current cancellation that is composed of a dark diode (DD) and Figure 6shows showsaa CA CA with dark thatthat is composed of a dark (DD) and Figure darkcurrent currentcancellation is composed of a diode dark diode (DD) a PD [10].6The DD senseswith the dark current Icancellation Dark in dark environments, while the PD senses the a PD [10]. The DD senses the dark current IDark in dark environments, while the PD senses the and a PD [10]. The DD senses the dark current I in dark environments, while the PD senses Dark photodiode current ILight in electric lighting. The photodiode size of PD (APD) is two times of that of photodiode current ILight in electric lighting. The photodiode size of PD (APD) is two times of that of theDD photodiode current ILightsize in of electric lighting. The PD (W/L) (APD )M2is= two times (ADD); and the MOSFET M2 is two times that of photodiode M1, e.g., APD = size 2 × Aof DD and 2 × (W/L) M1. of DD (ADD); and the MOSFET size of M2 is two times that of M1, e.g., APD = 2 × ADD and (W/L)M2 = 2 × (W/L)M1. that of DD ); and the MOSFET size of M is two times that of M , e.g., A = 2 × A and Thus, the (A drain current I D3 of M 3 is equal to the illumination current I Lux and the output current I O is DD 1 PD Thus, the drain current ID3 of M3 is equal to the2illumination current ILux and the output currentDD IO is (W/L) = 2 × (W/L) . Thus, the drain current I of M is equal to the illumination current ILux expressed by: 3 M2 M1 D3 expressed by: and the output current IO is expressed by: II D3 II Light II Dark II Dark II Lux II Dark II Lux (4) (4) D3 Light Dark Dark Lux Dark Lux Sensors 2017, 17, 15 5 of 12 ID3 = ILight − IDark = IDark + ILux − IDark = ILux (4) Sensors 2017, 17, 15 Sensors 2017, 17, 15 5 of 12 5 of 12 (W/L)6 × ILux = B × ILux (5) (W/L )L5 W W L 6 6 I Lux B I Lux (5) IIOO IBLuxisthe B current I Lux gain. That is, (W/L) = (W/L) (5) WMnL L,and where (W/L)n is the metric ratio of transistor M3 M4 5 W 5 and (W/L)M6 = B × (W/L)M5 . The output current IO operates without the dark current IDark . That is, where (W/L) (W/L)nn is is the the metric metric ratio ratio of of transistor transistor M Mnn,, and and B B is is the the current current gain. gain. That is, is, (W/L) (W/L)M3 M3 = (W/L)M4 = (W/L) M4 thewhere dark current is cancelled in Figure 6. However, it is difficult to achieve That a zero illumination current and (W/L) M6 = B × (W/L)M5. The output current IO operates without the dark current IDark. That is, the M6 = B × (W/L)M5. The output current IO operates without the dark current IDark. That is, the in and light(W/L) application because of the MOSFET mismatch in the CA. When both the DD and PD operate dark current current is is cancelled cancelled in in Figure 6. 6. However, However, it it is is difficult difficult to to achieve achieve aa zero zero illumination illumination current current in in dark only with dark current, theofFigure two equivalent resistors ofthe theCA. DDWhen and PD are expressed as operate RDD and light application because the MOSFET mismatch in both the DD and PD light application and because of the MOSFET in the CA. ,When both, the DD and PD operate RPD , respectively, thethe current symbols,mismatch IDark1 , IDark2 , IDD and denote the currents Dark3and only with dark dark current, current, two equivalent equivalent resistors of the the PDIDark4 are expressed expressed as R Rdark DD and RPD, only with the two resistors of DD and PD are as DD and RPD, of M and the M4 ,current respectively, in dark conditions. As shown in Figure 7, the output current I 1 , M2 , M3 , and respectively, symbols, Dark1, IDark2, IDark3, and IDark4, denote the dark currents of M1, M2, O respectively, and the current symbols, IIDark1 , IDark2, IDark3, and IDark4, denote the dark currents of M1, M2, is achieved: M3, and M4, respectively, in dark conditions. As shown in Figure 7, the output current IO is achieved: IO = M3, and M4, respectively, in dark conditions. As shown in Figure 7, the output current IO is achieved: IOII O= BB B× (6) (6) Dark 4 IIDark4 (6) O Dark 4 where B is the current gain and is approximately approximately10,000 10,000times. times.The The output where B is is the the current gaindisplayed displayedin inEquation Equation (6) (6) and output where B current gain displayed in Equation (6) is approximately 10,000 times. The output current IOIIincludes the Thiscircuit circuitoperates operateswith witha large a large dark current. current O includes theamplified amplifieddark darkcurrent current of M44.. This dark current. current O includes the amplified dark current of M4. This circuit operates with a large dark current. VDD V DD M2 M 2 M1 M 1 0.5·IIDark 0.5· Dark PD PD DD DD (Photo diode) (Photo diode) (Dark diode) (Dark diode) M4 ILux M3 M 4 ILux IILux M 3 II Dark Lux Dark =B IILux IIOO=B Lux +IDark Lux+I IILux Dark M5 M 5 M6 M 6 VSS V SS Figure 6. CA with with dark current cancellation. Figure currentcancellation. cancellation. Figure6.6. CA CA with dark current VDD V DD M2 IIDark2 M4 M3 M M M 2 Dark2 4 3 Dark3 Dark4 IIDark3 IIDark4 =BIDark4 IIOO=BI Dark4 M1 M 1 Dark1 IIDark1 RDD R DD RPD R PD +IDark3 Dark2+I IIDark2 Dark3 M5 M5 M6 M 6 VSS V SS Figure 7. All dark currents of MOSFETs in Figure 6 in dark conditions. Figure7.7.All Alldark darkcurrents currents of of MOSFETs MOSFETs in Figure in Figure Figure66in indark darkconditions. conditions. The dark dark current current in in Figure Figure 77 must must be be reduced. reduced. Figure Figure 88 displays displays aa CA CA with with enhanced enhanced dark dark The The dark current The in Figure 7 must be reduced. Figure 8 displays a CA with enhanced dark current cancellation. MOSFET size of M 3 is two times of that of M4, e.g., (W/L)M3 = 2 × (W/L)M4. As current cancellation. The MOSFET size of M3 is two times of that of M4, e.g., (W/L)M3 = 2 × (W/L)M4. As current cancellation. MOSFET size M3 is two times of that of M4 , e.g., (W/L) =Dark 2 ,×which (W/L)isM4 . M3 shown in Figure Figure 8, 8,The current steering is of implemented to draw draw different current, Light shown in current steering is implemented to aa different current, IILight −− IIDark , which is Asequal shown in Figure 8, current steering is implemented toIOdraw a different current, ILight −total IDark , to the illumination current I Lux. The output current can then be expressed with the equal to the illumination current ILux. The output current IO can then be expressed with the total which is equal to the illumination current I . The output current I can then be expressed with the current gain gain A AEE,, if if (W/L) (W/L)M1 M1 = (W/L)M2, (W/L)M5 (W/L)M6 M6, and (W/L)M8 = O AEE ×× (W/L) (W/L)M7 M7. The output current Lux current = (W/L)M2, (W/L)M5 == (W/L) , and (W/L)M8 = A . The output current total current AE , if without (W/L)M1 = dark (W/L) in Figuregain operates without the dark current. M2 , (W/L)M5 = (W/L)M6 , and (W/L)M8 = AE × (W/L)M7 . IIOO in Figure 88 operates the current. The output current IO in Figure 8 operates without the dark current. W L I O W L 88 I Light I Dark AE I Lux (7) I O W L I Light I Dark AE I Lux (7) (W/LW )8 L 77 IO = × ILight − IDark = A E × ILux (7) W/L)7 only with When both both the the DD DD and and PD PD (operate operate dark currents, currents, the the two two equivalent equivalent resistors resistors of of the the When only with dark DD and and PD PD are are expressed expressed as as R RDD DD and RPD, and the current symbols, IDark1, IDark2, and IDark3, denote the DD and RPD, and the current symbols, IDark1, IDark2, and IDark3, denote the dark currents of M 1, M2, and M3, respectively. As shown in Figure 9, the output current IO is obtained. dark currents of M1, M2, and M3, respectively. As shown in Figure 9, the output current IO is obtained. Sensors 2017, 17, 15 6 of 12 When both the DD and PD operate only with dark currents, the two equivalent resistors of the DD and PD are expressed as RDD and RPD , and the current symbols, IDark1 , IDark2 , and IDark3 , denote the Sensors 2017, 66 of dark currents Sensors 2017, 17, 17,of15 15M1 , M2 , and M3 , respectively. As shown in Figure 9, the output current IO is obtained. of 12 12 IO = × (IDark2 IIDark3)=AA EA E I× Io f f II OA I 2− O AE E I Dark Dark2 I Dark Dark33 AE E I off off (8) (8) (8) where A isE is the current gain, as in Equation (7). The The outputcurrent current I can be reduced to approximately where whereEA AE is the the current current gain, gain, as as in in Equation Equation (7). (7). The output output current IIOOOcan can be be reduced reduced to to approximately approximately zero if the dark current of M is approximately equal to that of M (I I ). The proposed ≈ zero if the dark current of 22 is approximately equal to that of M3 (IDark2 ≈ I Dark3). The proposed circuit 3 Dark2 Dark3 zero if the dark current of M2 is approximately equal to that of M3 (IDark2 ≈ IDark3). The proposed circuit circuit can also suppress the dark current induced by the environmental temperature, as described can also suppress the dark current induced by the environmental temperature, as described can also suppress the dark current induced by the environmental temperature, as described in in in Equation (3). Equation (3). Equation (3). V VDD DD IILight Light M M11 M M22 M M33 IIDark Dark IILight Light IIDark Dark PD PD M M55 M M66 IIOO=A =AEEI ILux Lux M M44 IILight -IDark=I =ILux Light -IDark Lux DD DD 0.5· IIDark 0.5· Dark M M77 M M88 V VSS SS Figure CA with enhanced Figure darkcurrent currentcancellation. cancellation. Figure8.8. 8.CA CA with with enhanced enhanced dark dark current cancellation. V VDD DD IIDark1 Dark1 |||| IIDark2 Dark2 M M11 M M Dark2 M22 IIDark2 M33 IIDark3 Dark3 IIDark3 Dark3 R RPD PD M M55 M M66 M IIDark3 M44 0.5· 0.5· Dark3 IIOO=A =AEEI Ioff off IIDark2 -IDark3=I =Ioff Dark2-IDark3 off R RDD DD M M77 M M88 V VSS SS Figure 9. Dark currents all MOSFETs in the CA with enhanced dark current cancellation. Figure Darkcurrents currentsofof ofall allMOSFETs MOSFETs in in the the proposed proposed current cancellation. Figure 9. 9. Dark proposed CA CAwith withenhanced enhanceddark dark current cancellation. 3. Simulated Simulated and and Measured Measured Results Results 3. 3. Simulated and Measured Results Figure Figure 10 10 presents presents the the simulated simulated PD PD dark dark current current versus versus temperature temperature for for CAs. CAs. Three Three types types of of Figure 10 presents the the simulated PD dark current versus temperature for CAs. Three types of CA were compared. First, proposed CA with enhanced dark current cancellation is indicated by CA were compared. First, the proposed CA with enhanced dark current cancellation is indicated by CAFigure were 10a. compared. First, the proposed CA with enhanced dark current cancellation is indicated by Figure 10a. Next, Next, aa CA CA without without dark dark current current cancellation cancellation is is denoted denoted by by Figure Figure 10b. 10b. Finally, Finally, aa CA CA with with Figure 10a. Next, a CA without dark current cancellation is denoted by Figure results, 10b. Finally, a CA with dark current cancellation is denoted by Figure 10c. According to the simulated the proposed dark current cancellation is denoted by Figure 10c. According to the simulated results, the proposed dark current cancellation is denoted by Figureoperates 10c. According to the simulated results, the proposed CA with CA with with enhanced enhanced dark dark current current cancellation cancellation operates with the the lowest lowest dark dark current. current. This This means means that that CAthe with enhanced dark current cancellation operates with the lowest dark current. This means that the dark dark current current can can be be cancelled cancelled perfectly perfectly with with the the proposed proposed CA. CA. The The CA CA without without dark dark current current thecancellation, dark current can is cancelled perfectly the with proposed CA. The CA without dark which by 10b, operates aa larger dark current. Note the dark cancellation, which isbedenoted denoted by Figure Figure 10b,with operates with larger dark current. Note that that the current dark cancellation, which is denoted by Figure 10b, operates with a larger dark current. Note that current level of curve Figure 10c is higher than that of Figure 10b below approximately 50 °C, because current level of curve Figure 10c is higher than that of Figure 10b below approximately 50 °C, becausethe the magnification of curve of curve Figure dark level of 10c is higherthan thanthat that Figure 10b10b. below approximately 50 ◦ C, thecurrent magnification ofcurve curve Figure Figure 10c 10c isishigher higher than that ofof curve Figure 10b. 11 total IIDD of the proposed as function of becauseFigure the magnification of curve Figure 10c is higher than that of CA curve 10b. Figure 11 shows shows the the simulated simulated total current current DD of the proposed CA as aaFigure function of illumination illumination at resistances, namely R =1 SS = of 10 kΩ, and = 25 shown in Figure Figureexternal 11 shows the simulated total as aAs function at three three external resistances, namely RSS SS current =1 kΩ, kΩ, R RIDD SS = 10the kΩ,proposed and R RSS SS = CA 25 kΩ. kΩ. As shown of in illumination Figure 11, 11, a lower R SS expands the illumination detection range. Two higher resistances, R SS = 10 kΩ and R SS at athree external resistances, namely RSSdetection = 1 kΩ, range. RSS = 10 kΩ,higher and Rresistances, Figure lower RSS expands the illumination Two SS =shown 10 kΩ in and RSS == 11, SS = 25 kΩ.RAs 25 kΩ, sharply force the proposed CA into saturation at 280 lux and 140 lux, respectively. Thus, 25 kΩ,Rsharply force the proposed CA into saturation at 280 luxhigher and 140 lux, respectively. for a lower illumination detection range. Two resistances, RSS = Thus, 10 kΩfor and SS expands wide application, selecting a low R SS is beneficial. Figure 12 shows the setup of the proposed CA that selecting a low RSS is beneficial. Figure 12 shows of the CA that RSSwide = 25application, kΩ, sharply force the proposed CA into saturation at 280 the lux setup and 140 lux,proposed respectively. Thus, used for aa current meter voltage (V), and the design under was used for measurement, measurement, with current meter (A), (A),Figure voltage12meter meter (V), and the of design under test testCA forwas wide application, selectingwith a low RSS is beneficial. shows the setup the proposed (DUT) chip. The external resistance R SS was used to measure the total current IDD, which was varied (DUT) chip. The external resistance R SS was used to measure the total current I DD , which was varied that was used for measurement, with a current meter (A), voltage meter (V), and the design under test by illumination (lux) LED by applying applying illumination (lux) with withRwhite white LED light. light. (DUT) chip. The external resistance SS was used to measure the total current IDD , which was varied by applying illumination (lux) with white LED light. Sensors 2017, 17, 15 7 of 12 Sensors 2017, 17, 15 Sensors 2017, 17, 15 7 of 12 7 of 12 Sensors 2017, 17, 15 7 of 12 Figure 10. Simulated PDdark dark currents versus versus temperatures for various CAs. (a)(a)Proposed CA with Figure 10.10. Simulated forvarious variousCAs. CAs.(a) Proposed with Figure SimulatedPD PD darkcurrents currents versus temperatures temperatures for Proposed CACA with enhanced dark current cancellation; (b) the CA without dark current cancellation; and (c) the CACA with enhanced dark current cancellation; (b) the CA without dark current cancellation; and (c) the with enhanced dark current cancellation; (b) the CA without dark current cancellation; and (c) the CA with Figure 10. Simulated PD dark currents versus temperatures for various CAs. (a) Proposed CA with dark current cancellation. dark current cancellation. dark current cancellation. enhanced dark current cancellation; (b) the CA without dark current cancellation; and (c) the CA with dark current cancellation. Figure 11. Simulated total currents versus illumination (lux) for the proposed CMOS light detector. Figure 11.Simulated Simulatedtotal totalcurrents currents versus illumination (lux) for the proposed CMOS light detector. Figure 11. (lux)for for the proposed CMOS detector. Figure 11. Simulated total currentsversus versus illumination illumination (lux) the proposed CMOS lightlight detector. VCC VVCC CC A A A VDD DD VVDD VDD V VDD DD DUT DUT DUT V SS VVSS SS V V V V SS VVSS SS RSS SS RRSS IDD DD IIDD GND GND GND Figure CAfor formeasurement. measurement. Figure12. 12.Setup Setupof of the the proposed proposed CA Figure proposed CAfor formeasurement. measurement. Figure12. 12. Setup Setup of the proposed CA Tables 1 and 2 2summarize measureddark darkcurrent currentIDark IDarkand and total current Tables 1 and summarizethe thesimulated simulated and measured total current IDDIDD of of Tables 1 and andmeasured measureddark darkcurrent current IDark current Tables 1 and2 2summarize summarizethe the simulated simulated and IDark andand totaltotal current IDD ofIDD proposed CAwith withenhanced enhanceddark darkcurrent current cancellation cancellation at × 300 μm and a a thethe proposed CA atthe thePD PDarea areaofof300 300μm μm × 300 μm and of the theproposed proposedCA CA with enhanced dark current cancellation the PDofarea of 300 µmμm × and 300 aµm with enhanced dark current cancellation at theatPD area 300 μm × 300 Sensors 2017, 17, 15 8 of 12 17, 15 of 12 andSensors a PD 2017, to DD area ratio of 2 times. Table 1 indicates that the measured dark currents are8smaller than those of the simulations. This is because the PD model was always adopted in the simulations, PD to DD area ratio of 2 times. Table 1 indicates that the measured dark currents are smaller than but is not proven in the silicon process. However, the measured total currents are larger than those those of the simulations. This is because the PD model was always adopted in the simulations, but is of the simulations. The total light current is approximately linear as a function of illumination in the not proven in the silicon process. However, the measured total currents are larger than those of the simulation and the measurements in Table 2. simulations. The total light current is approximately linear as a function of illumination in the simulation and the and measurements in Table 2. versus temperature for the proposed CA with enhanced Table 1. Simulated measured dark currents dark current cancellation. Table 1. Simulated and measured dark currents versus temperature for the proposed CA with enhanced dark current cancellation.◦ Temperatures ( C) Simulations Measurements 25 13.6 nA 1.24 nA Temperatures (°C) Simulations Measurements 85 21.6 nA 9.23 nAnA 25 13.6 nA 1.24 105 77.0 nA 36.4 nA 85 21.6 nA 9.23 nA 105 77.0 nA 36.4 nA Table 2. Simulated and measured total currents versus illumination (lux) of the proposed CA with enhanced dark currentand cancellation. Table 2. Simulated measured total currents versus illumination (lux) of the proposed CA with enhanced dark current cancellation. Illuminations (lux) Illuminations (lux) 10 100 10 200 100 200 Simulations Simulations 8.78 µA 99.3 8.78 µA μA 194.0 µA 99.3 μA 194.0 μA Measurements Measurements 18.2 µA 145.0 18.2µA μA 236.0 145.0µA μA 236.0 μA Figure 13 shows a 65,536-point FFT simulation with a noise level of 80 dB and an external 13 shows a 65,536-point FFT simulation with a noise level of 80 dB and an external resistor resistor RFigure SS of 1 kΩ for the proposed CMOS light detector. This figure presents a simulated frequency R SS of 1 kΩ for the proposed CMOS light detector. This figure presents a simulated frequency response of 10 Monte Carlo samples with random noises at node VSS , which is shown in Figure 12. of 10current Monte Carlo samples noises atofnode VSSlux , which is shown in Figure 12. Ifsine If a response photodiode signal, whichwith is a random superposition a 250 (peak-to-peak) noiseless a photodiode current signal, which is a superposition of a 250 lux (peak-to-peak) noiseless sine wave wave with a frequency of 210 Hz and a DC 500 lux, is fed to the proposed CMOS light detector, a plot with a frequency of 210 Hz and a DC 500 lux, is fed to the proposed CMOS light detector, a plot of of the frequency response of the simulated 10 Monte Carlo samples with random noises is made in the frequency response of the simulated 10 Monte Carlo samples with random noises is made in Figure 14 at node VSS for the proposed light detector. The current signal with frequency of 210 Hz Figure 14 at node VSS for the proposed light detector. The current signal with frequency of 210 Hz performs without any any random noises. TableTable 3 shows the simulated total harmonic distortions (THDs), performs without random noises. 3 shows the simulated total harmonic distortions signal-to-noise ratios (SNRs), and signal-to-noise+distortion ratios (SNDRs) of the 10 Monte Carlo (THDs), signal-to-noise ratios (SNRs), and signal-to-noise+distortion ratios (SNDRs) of the 10 Monte samples with random noises at node V of Figure 14 for the proposed light detector. As shown SS VSS of Figure 14 for the proposed light detector. As shown in Carlo samples with random noises at node Table those simulated results of THD, SNR, and consistent.The The Monte-Carlo in 3, Table 3, those simulated results of THD, SNR, andSNDR SNDRare are roughly roughly consistent. Monte-Carlo approach cancan capture very nonlinear approach capture very nonlinearnoise noisebehaviors. behaviors. Figure Frequency response simulated10 10Monte Monte Carlo Carlo samples samples with atat node VSSV Figure 13. 13. Frequency response ofof simulated withrandom randomnoises noises node SS of Figure 12 for proposed light detector, with R SS = 1 kΩ. of Figure 12 for proposed light detector, with RSS = 1 kΩ. Sensors 2017, 17, 15 Sensors 2017, 17, 15 9 of 12 9 of 12 Sensors 2017, 17, 15 9 of 12 Figure Frequency response of simulated 10Monte Monte Carlosamples sampleswith withrandom random noises noises and and aa 210 210 Hz Figure 14. 14. Frequency response Figure 14. Frequency response of of simulated simulated10 10 MonteCarlo Carlo samples with random noises and a 210 Hz sine wave at node V SS of Figure 12 for the proposed light detector, with RSS = 1 kΩ. sinesine wave at node VSSVof Figure 12 for the proposed light detector, with RSSR=SS 1= kΩ. Hz wave at node SS of Figure 12 for the proposed light detector, with 1 kΩ. Table 3. Simulated THDs, SNRs,and andSNDRs SNDRs of of the the 10 Monte with random noises at at Table 3. Simulated Simulated THDs, SNRs, 10 Monte MonteCarlo Carlosamples samples with random noises Table 3. THDs, SNRs, and SNDRs of the 10 Carlo samples with random noises at node VSS of Figure 14 for the proposed light detector. node VVSSSSofofFigure Figure14 14for forthe theproposed proposedlight lightdetector. detector. node Samples 1 2 3 4 5 6 7 8 9 10 Samples 2−39.82 33 44 55 66 77 8 10 Samples 1 2 99 −40.7510 THD (dB) 1−39.84 −39.84 −40.41 −39.85 −39.75 −40.27 −40.52 −40.06 THD (dB) −39.84 −39.82 −39.84 −40.41 −39.85 −39.75 −40.27 −40.52 −40.06 −40.75 SNR(dB) 52.60 51.16 50.99 50.15 51.86 52.41 50.39 50.05 51.43 52.64 THD (dB) −39.84 −39.82 −39.84 −40.41 −39.85 −39.75 −40.27 −40.52 −40.06 −40.75 SNDR(dB)52.60 39.61 51.16 39.51 50.99 39.52 39.97 39.58 39.52 SNR(dB) 50.15 51.86 52.41 50.39 50.05 51.43 40.48 52.64 SNR(dB) 52.60 51.16 50.99 50.15 51.86 52.41 39.87 50.39 40.07 50.05 39.76 51.43 52.64 SNDR(dB) 39.61 39.61 39.51 39.51 39.52 39.52 39.97 39.58 39.52 39.87 40.07 39.76 40.48 SNDR(dB) 39.97 39.58 39.52 39.87 40.07 39.76 40.48 Figure 15 shows the measured dark current versus temperature for the proposed CA with enhanced dark current cancellation. dark The maximum versus dark current is approximately 135 nA at 125 °C. Figure Figure 15 15 shows shows the the measured measured dark current current versus temperature temperature for for the the proposed proposed CA CA with with This measurement proves that the proposed CA performs with low dark current as a function of the ◦ C. enhanced dark current cancellation. The maximum dark current is approximately 135 nA at 125 enhanced dark current cancellation. The maximum dark current is approximately 135 nA at 125°C. environmental temperature. According to the measurements inlow Figure 15,current the device performs with This measurement proves that the proposed CA performs with dark as a function of the This measurement proves that the proposed CA performs with low dark current as a function of the zero dark current at temperatures lower than 50 °C and exhibits an exponential relation at temperatures environmental temperature. According to the measurements measurements in in Figure Figure 15, 15, the the device device performs performs with environmental temperature. According to the with higher than 50 °C. Notice that two measured dark currents are consistent in Figure 15, although chip ◦ zero dark current at temperatures lower than 50 °C and exhibits an exponential relation at temperatures zero#1dark temperatures lower maximum than 50 Cdark and currents exhibits an exponential relation at temperatures and current chip #2 at perform with different at 125 °C. ◦ C.Notice higher higherthan than50 50°C. Noticethat thattwo twomeasured measureddark darkcurrents currentsare areconsistent consistentininFigure Figure15, 15,although although chip chip ◦ #1 and chip #2 perform with different maximum dark currents at 125 °C. #1 and chip #2 perform with different maximum dark currents at 125 C. Figure 15. Measured dark currents versus temperatures for the proposed CAs with enhanced dark current cancellation. Figure 15. 15. Measured Measured dark dark currents currents versus versus temperatures temperaturesfor for the the proposed proposed CAs CAs with with enhanced enhanced dark dark Figure current cancellation. cancellation. current Sensors 2017, 17, 15 Sensors 2017, 17, 15 10 of 12 10 of 12 Table 4 summarizes the measured dark currents versus temperature of the proposed CAs, Chap #1 and Chip4 #2. Table 5 summarizes thedark measured output with respect to the illumination Table summarizes the measured currents versuscurrents temperature of the proposed CAs, Chap of #1 the proposed CAs. According to the measured output currents in Table 5, the proposed CA performs and Chip #2. Table 5 summarizes the measured output currents with respect to the illumination of the with goodCAs. linearity and wide illumination proposed According to the measured range. output currents in Table 5, the proposed CA performs with good linearity and wide illumination range. Table 4. Measured dark currents versus temperature of the proposed CAs, Chip #1 and Chip #2. Table 4. Measured dark currents Temperatures (°C)versus temperature Chip #1of the proposed CAs, ChipChip #2 #1 and Chip #2. 25 1.39 nA Temperatures (◦ C) Chip #1 85 9.7 nA 25 1.39 nA 105 35 nA 1.24 nA 9.23 nA 1.24 nA36.4 nA Chip #2 85 9.7 nA 9.23 nA 105 35 nA 36.4 nA Table 5. Measured output currents with respect to illumination with RSS of 1 kΩ for the proposed CAs. Table 5. Measured output currents with respect to illumination with RSS of 1 kΩ for the proposed CAs. Illumination (lux) Chip #1 Illumination (lux) 10 17.2Chip μA #1 100 142 17.2 μA µA 10 100 200 237 142 μA µA 200 237 µA 300 426 μA 300 426 µA 600 776 776 μA µA 600 750 943 943 μA µA 750 900 900 975 975 μA µA Chip #2 Chip #218.2 μA 18.2 µA145 μA 145 µA 236 μA 236 µA 430 μA 430 µA 776 µA 776 μA 947 µA 947 μA 980 µA 980 μA Figure Figure 16 16shows showsthe thetotal totalcurrent currentas asaafunction functionof ofillumination illumination(lux) (lux)for forthe theproposed proposedCMOS CMOSlight light detector with dark current suppression at room temperature. The larger R SS is, the lower the total detector with dark current suppression at room temperature. The larger RSS is, the lower the total current. in Figure Figure16, 16,two twocurves curves with RSS = 10 and SS = 25 kΩ indicate saturation at current. As As shown shown in with RSS = 10 kΩkΩ and RSSR= 25 kΩ indicate saturation at low low illumination, but the curve with R SS = 1 kΩ does not display saturation until 1000 lux. The illumination, but the curve with RSS = 1 kΩ does not display saturation until 1000 lux. The measured measured totalI currents IDD match those in Figure 11. Figure 17 shows the microphotograph of the total currents DD match those in Figure 11. Figure 17 shows the microphotograph of the proposed proposed CMOS light detector darksuppression current suppression in a variable-temperature Note CMOS light detector with darkwith current in a variable-temperature system. system. Note that the that the PD area A PD is twice as large as the DD area ADD. This arrangement not only lowers the dark PD area APD is twice as large as the DD area ADD . This arrangement not only lowers the dark current current by contracting DD but also enhances the luminous efficiency by enlarging APD. by contracting A butAalso enhances the luminous efficiency by enlarging A . DD PD Figure16. 16.Measured Measuredtotal totalcurrents currentsversus versusillumination illumination(lux) (lux)for forthe theproposed proposedCMOS CMOSlight lightdetector. detector. Figure Sensors 2017, 17, 15 11 of 12 Sensors 2017, 17, 15 11 of 12 Figure Figure 17. 17. Microphotograph Microphotograph of of the the proposed proposed CMOS CMOS light light detector. detector. 4. Conclusions 4. Conclusions This study study presents presentsaacurrent currentsteering steeringmethod method drawing current difference lowering This forfor drawing thethe current difference andand lowering the the dark current is applied tolight the light detector in a variable-temperature system. The maximum dark current thatthat is applied to the detector in a variable-temperature system. The maximum dark dark current the proposed CA is approximately nA◦ C; at and 125 that °C; the andlight that detector the lightproposed detector current of the of proposed CA is approximately 135 nA 135 at 125 proposed in this study performs with a low dark current as a function of the environmental in this study performs with a low dark current as a function of the environmental temperature. temperature. Furthermore, the device a zeroatdark current atlower temperatures lower than 50 °C Furthermore, the device obtains a zero obtains dark current temperatures than 50 ◦ C and exhibits an ◦ and exhibits an exponential relation at temperatures higher than 50 °C. In addition, the larger R SS is, exponential relation at temperatures higher than 50 C. In addition, the larger RSS is, the lower the the lower the total current is. Two curves with R SS = 10 kΩ and R SS = 25 kΩ indicate saturation at low total current is. Two curves with RSS = 10 kΩ and RSS = 25 kΩ indicate saturation at low illumination, illumination, with RSSnot = 1display kΩ does not display saturation until external 700 lux. resistance Low external but the curve but withthe RSScurve = 1 kΩ does saturation until 700 lux. Low Rss resistance Rss results in a wide detected range of illumination (lux). The PD area A PD is twice as large results in a wide detected range of illumination (lux). The PD area APD is twice as large as the DD area asDD the DD area ADDnot . This design not only lowers theby dark current by contracting ADD but also enhances A . This design only lowers the dark current contracting ADD but also enhances the luminous the luminous efficiency by enlarging A PD . The chip area of the light detector is 762 μm × 452pads. μm, efficiency by enlarging APD . The chip area of the light detector is 762 µm × 452 µm, including including pads. According to the measured results, the proposed CA successfully eliminates dark According to the measured results, the proposed CA successfully eliminates dark current from 50 ◦ C current from 50 °C to 125 °C. to 125 ◦ C. Acknowledgments: The authors would like to thank thank James James Zhang Zhang and and Wayne Wayne Wei for the project sponsorship, sponsorship, Ann Lain for the layout, and Bryan Chan for providing providing silicon silicon test test support. support. Author W.-S.L. and Author Contributions: Contributions: This This study study is is completed completed with with three three authors. authors. W.-S.L. and J.-L.L. J.-L.L. conceived conceived and and designed designed the experiments; W.-S.L. performed the experiments; G.-M.S. analyzed the data and wrote the paper. the experiments; W.-S.L. performed the experiments; G.-M.S. analyzed the data and wrote the paper. Conflicts of Interest: The authors declare no conflict of interest. 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