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White Paper
Transition to 300-mm Wafers
300-mm wafer fabrication is a major milestone for many semiconductor companies. New 300-mm wafer
production provides greater efficiency in manufacturing than 200-mm wafer production, which ultimately
translates to lower long-term cost. For this reason, many foundries have been adding 300-mm production
capacity during the past few years.
Even though these new fabrication plants were planned for many years, 300-mm production capacity is
still limited worldwide. The recent downturn in the economy is one of the major factors, since new
fabrication plants require significant investment in the facility and in new equipment. Another factor is
limited resources. Many companies are still improving the 200-mm 0.13-µm copper process. While their
200-mm 0.13-µm process is still in the development stage, it would be difficult to start on the 300-mm
process because it requires the same kind of resources as the 200-mm 0.13-µm process.
Given the market dynamics, many seminconductor companies have taken different approaches in
developing the 300-mm wafer process. This white paper explains Altera’s approach in delivering
successful 300-mm wafer fabrication into production.
Altera’s Approach
Altera has engaged with the TSMC process development team in working on various 300-mm processes
for the past few years. During this time, Altera’s goal was to duplicate the same qualified process from
200-mm to 300-mm. Initial development work was in the 0.18-µm process in 2000. Working jointly with
TSMC, Altera successfully verified that 300-mm wafers can be produced using the same process as
200-mm wafers.
Since the begining of this year, Altera has worked on a 0.13-µm copper process in 300-mm wafers. The
0.13-µm 300-mm process transition has been one of the smoothest transitions for Altera and we expect the
same experience for our customers.
Altera has already qualfied the 0.13-µm process in 200-mm and 300-mm wafers. Altera is currently
shipping 10 different product lines in the StratixTM and CycloneTM device families in volume production
using 200-mm 0.13-µm technology. No mask change or design change is required for these products to
transition to 300-mm as all the design and process issues have been fully addressed.
Moreover, Altera is using the same physical mask sets for both 200-mm and 300-mm processes. Using the
same mask sets reduces the risk of a new mask not working properly and the cost of generating new mask
sets. Because Altera is using the same mask in the same process, device performance will be identical,
further reducing risks with the change.
Altera introduced Stratix, Cyclone, and Startix GX products in 0.13-µm copper process using 200-mm
wafers. All of these products have received very strong acceptance from the market. As the volume for
these products increases, adding a second source will greatly enhance long-term supply.
August 2003, ver. 1.1
WP-TRNS300WFR-1.1
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Transition to 300-mm Wafers
Altera Corporation
Other Approaches
Many companies have introduced new products from 300-mm wafers. Some of them introduced new
products while others transferred products from 200-mm wafer size. However, many of these transition
were done while the 200-mm wafer process was still in development. Thus, many un-solved process issues
transferred right into the 300-mm wafer process and further delayed qualification. Some companies even
made design changes during the transition, which involved new mask and design check outs. This also
affects AC performance. This kind of change must be re-qualified by everyone including the end users.
Since the cost of a mask is expensive, many companies took this approach and left the burden to its
customers. Customers who experienced the pain from this kind of transition will not go through it again
with Altera.
Conclusion
Altera is ready to provide customers with various characterization and reliability reports. If there are any
customers who are interested in evaluating the 300-mm wafer samples, Altera is committed to providing
the necessary samples to its customers to ensure a seamless transition. Altera® sales and distribution
partners are ready to take sample orders today.
Copyright © 2003 Altera Corporation. All rights reserved. Altera, The Programmable Solutions
Company, the stylized Altera logo, specific device designations, and all other words and logos
101 Innovation Drive
San Jose, CA 95134
(408) 544-7000
www.altera.com
that are identified as trademarks and/or service marks are, unless noted otherwise, the
trademarks and service marks of Altera Corporation in the U.S. and other countries.* All other
product or service names are the property of their respective holders. Altera products are
protected under numerous U.S. and foreign patents and pending applications, maskwork
rights, and copyrights. Altera warrants performance of its semiconductor products to current
specifications in accordance with Altera’s standard warranty, but reserves the right to make
changes to any products and services at any time without notice. Altera assumes no
responsibility or liability arising out of the application or use of any information, product, or
service described herein except as expressly agreed to in writing by Altera Corporation. Altera
customers are advised to obtain the latest version of device specifications before relying on
any published information and before placing orders for products or services.
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