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EECS130 Integrated Circuit Devices Professor Ali Javey 8/28/2007 Semiconductor Fundamentals Lecture 1 Announcements • Welcome back and happy Fall semester!!! • No discussion sections this week • No HW assignment for this week Evolution of Devices Yesterday’s Transistor (1947) Today’s Transistor (2006) Why “Semiconductors”? • Conductors – e.g Metals • Insulators – e.g. Sand (SiO2) • Semiconductors – conductivity between conductors and insulators – Generally crystalline in structure • In recent years, non-crystalline semiconductors have become commercially very important Polycrystalline amorphous crystalline What are semiconductors Elements: Si, Ge, C Binary: GaAs, InSb, SiC, CdSe, etc. Ternary+: AlGaAs, InGaAs, etc. Electrons and Holes in Semiconductors Silicon Crystal Structure • Unit cell of silicon crystal is cubic. • Each Si atom has 4 nearest neighbors. 5.43 Å Silicon Wafers and Crystal Planes z z z y (100) x y y x (011) (111) x (100) plane (011) flat Si (111) plane • The standard notation for crystal planes is based on the cubic unit cell. • Silicon wafers are usually cut along the (100) plane with a flat or notch to help orient the wafer during IC fabrication. Bond Model of Electrons and Holes (Intrinsic Si) Si Si Si Si Si Si Si Si Si • Silicon crystal in a two-dimensional representation. Si Si Si Si Si Si Si Si Si Si Si Si Si Si Si Si Si Si • When an electron breaks loose and becomes a conduction electron, a hole is also created. Dopants in Silicon Si Si Si Si Si Si Si As Si Si B Si Si Si Si Si Si Si N-type Si P-type Si • As (Arsenic), a Group V element, introduces conduction electrons and creates N-type silicon, and is called a donor. • B (Boron), a Group III element, introduces holes and creates P-type silicon, and is called an acceptor. • Donors and acceptors are known as dopants. GaAs, III-V Compound Semiconductors, and Their Dopants Ga As Ga As Ga As Ga As Ga As Ga • GaAs has the same crystal structure as Si. • GaAs, GaP, GaN are III-V compound semiconductors, important for optoelectronics. • Which group of elements are candidates for donors? acceptors? From Atoms to Crystals conduction band Energy p s valence band isolated atoms lattice spacing Decreasing atomic separation • Energy states of Si atom (a) expand into energy bands of Si crystal (b). • The lower bands are filled and higher bands are empty in a semiconductor. • The highest filled band is the valence band. • The lowest empty band is the conduction band . Energy Band Diagram Conduction band Ec Eg Band gap Ev Valence band • Energy band diagram shows the bottom edge of conduction band, Ec , and top edge of valence band, Ev . • Ec and Ev are separated by the band gap energy, Eg . Measuring the Band Gap Energy by Light Absorption electron Ec photons Eg photon energy: h v > E g Ev hole • Eg can be determined from the minimum energy (hν) of photons that are absorbed by the semiconductor. Bandgap energies of selected semiconductors Material E g (eV) PbTe Ge Si GaAs GaP Diamond 0.31 0.67 1.12 1.42 2.25 6.0 Temperature Effect on Band Gap conduction band Energy p s valence band isolated atoms lattice spacing Decreasing atomic separation How does the band gap change with temperature? Semiconductors, Insulators, and Conductors Ec Top of conduction band Ec E g= 9 eV empty E g = 1.1 eV Ev Ev Si (Semiconductor) SiO (Insulator) 2 filled Ec Conductor • Totally filled bands and totally empty bands do not allow current flow. (Just as there is no motion of liquid in a . totally empty bottle.) totally filled or • Metal conduction band is half-filled. • Semiconductors have lower Eg 's than insulators and can be doped. Donor and Acceptor Levels in the Band Model Conduction Band Ed Donor Level Ec Donor ionization energy Acceptor ionization energy Acceptor Level Ea Valence Band Ev Ionization energy of selected donors and acceptors in silicon Donors Dopant Sb Ionization energy, E c –E d or E a –E v (meV) 39 Hydrogen: E ion = P 44 m0 q4 8ε02h2 Acceptors As 54 B 45 = 13.6 eV Al 57 In 160 Dopants and Free Carriers Donors n-type Acceptors p-type Dopant ionization energy ~50meV (very low). Electrons as Moving Particles • An electron moves with a certain characteristic mass (from f=ma) in vacuum • In a solid, f=ma changes, so we can model this change via an “effective” mass Effective Mass In an electric field, , an electron or a hole accelerates. electrons Remember : F=ma=-qE holes Electron and hole effective masses m n /m 0 m p /m 0 Si 0.26 0.39 Ge 0.12 0.30 GaAs 0.068 0.50 GaP 0.82 0.60