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Semicon Pte Ltd
Semicon Pte. Ltd
Chemical Leak Finder
1. Purpose
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If a chemical leaks at the bottom of equipment or pipe fitting area,
•
An Engineer can confirm the chemical type by visual without inspection without
using litmus paper
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Even small leaks or fumes can be detected.
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Therefore, an Engineer can find the exact leak point and can prevent
secondary accidents.
Semicon Pte. Ltd
Chemical Leak Finder
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2. Current Issues
1.
An engineer needs Litmus paper to determine if a leak is acidic or alkali
2.
Its not easy to find the exact leak point at the bottom of the tool.
3.
Its difficult to detect small volume leaks.
4.
Its almost impossible to detect chemical fumes without leak detectors.
5.
Its too expensive to install leak detectors in all areas
6.
It’s difficult to confirm chemical type at upper plenum area because it is difficult
to reach.
7.
Can’t use Litmus paper due to particle and fire issues.
If Litmus Paper meets
Acid it will cause a
burn
Semicon Pte. Ltd
Chemical Leak Finder
3.Tool Weak Point
* If a chemical leak occurs in the inside of tool, Engineers need litmus
paper to check chemical type. They also need time to find the exact
leak point. It is very dangerous for the engineer to spend too much
time identifying the type and exact leak point inside the tool because
long exposures can cause health issues.
Semicon Pte. Ltd
Chemical Leak Finder
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3. Line Weak point
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* At the bottom of equipment and upper area of Plenum, there are many
chemical pipe lines and difficult reach to check for leaks.
Semicon Pte. Ltd
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Chemical Leak Finder
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3. Valve area Weak Point
1.
Can’t confirm chemical type by visual
2.
Need litmus paper if find liquid leak.
3.
Can’t detect small size leak even if onje
has a liquid leak detector
4.
Can’t detect Chemical Fume
(Chemical fume is more dangerous)
Semicon Pte. Ltd
Chemical Leak Finder
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4. The Solution
•
If one installs leak finder at suspect areas, Engineers can easily find
chemical leak points and type by visual inspection.
•
Leak finder can detect chemical fume and small leaks as well so engineers
can prevent secondary accident with quick action
* Leak finder material is PVC. It doesn’t catch fire nor generate particles.
Semicon Pte. Ltd
Chemical Leak Finder
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5 . Product Test
After install ACID
Pipe
ACID leak
After install Alkali
Pipe
Alkali leak
Semicon Pte. Ltd
Chemical Leak Finder
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5. Product Test
Paper type
Bottom area of tool
Acid chemical leak
Semicon Pte. Ltd
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Chemical Leak Finder
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6. Chemical Reaction Test ( Sheet & Tape type)
PH 1
PH 2
PH 3
DIW
PH 7~8
PH 9
PH 10
PH 11
■ Character : Same character with Litmus paper by Chemical optimization
Can detect DI water Leak by visual.
■ Reaction Test : Different colors based on Acid & Alkali Ph concentration,
It doesn’t melt even with 100% H2SO4
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Semicon Pte. Ltd
Chemical Leak Finder
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6. Chemical Reaction Test ( C Ring type)
PH 1
PH 2
PH 3
DIW
PH 9
PH 10
PH 11
■ Character : Can detect Acid, Alkali and DI water.
Can use high temperature ( Max 100℃ )
■ Reaction Test : Different colors based on Acid & Alkali Ph concentration,
Can confirm chemical type by visual
Semicon Pte. Ltd
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Chemical Leak Finder
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6. Fume Reaction Test (C Ring Type)
Pump Exhaust line
(No Gas Flow )
Chamber BCL3 Gas flow
Pump Exhaust BCL3 Gas
flow
React by
Chloline Fume
Semicon Pte. Ltd
Chemical Leak Finder
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7. Product Type
Ring Type
Tape Type
Leak Finder
Product
Sheet Type
Wipes Type
Apron Type
Semicon Pte. Ltd
7. Product Type : C Ring Type
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Chemical Leak Finder
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■ Application : Liquid Delivery pipe Fitting
■ Size
: Can supply Customer spec
( ¼” , ½” , ¾” , 1” , 2” etc. )
■ Packing : 12EA / Box
■ Use : Acid & Alkali
■ Material : PE(Polyethylene)
Semicon Pte. Ltd
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Chemical Leak Finder
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7. Product type :Tape Type
■ Application : Bottom area of tool
■ Size : 20mm ~ 250mm / 50m
■ Packing : 1 EA
■ Use : Acid & Alkali
■ Material :
PVC (Polyvinyl chloride)
Semicon Pte. Ltd
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Chemical Leak Finder
7. Product type : Wiper Type
■ Application : Tool Cleaning or out side cleaning
Can check Chemical during cleaning
■ Size
: 215mm * 215mm
■ Packing : 100EA
Wiper type
■ Use : Acid & Alkali
■ Material : Polyester
■ Application : Working and Repair
■ Size : 770mm * 620mm
■ Packing : 10EA
■ use : Acid & Alkali
■ Material : PU Coating and no Particle
Semicon Pte. Ltd
7. Product type : Pipe cover
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Chemical Leak Finder
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Semicon Pte. Ltd
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8. Leak zone Install sample
■ Installed Tape and sheet type leak finder at base of tool.
■ Installed name and contact point sheet at corner area
Chemical Leak Finder
Semicon Pte. Ltd
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Chemical Leak Finder
10. Benefit
Chemical Leak Finder
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This product doesn’t have any particle and fire issues and can detect Acid
and Alkali chemicals by visual inspection. Its easily to find the exact leak
point in order to prevent secondary accidents
Semicon Pte. Ltd
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Chemical Leak Finder
9. Product Feature
Specifically designed for Chemical Lines
No melting and fire issue for high concentration acid chemicals (PH 0~2)
for Tape & Sheet
No Particle issue
No twisting or lifting with Chemical reaction
Long life time inside of Fab.
(Only reacts with chemicals and Direct Sun light)
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Semicon Pte. Ltd
Chemical Leak Finder
11. RFID Reader for Safety Patrol
After the engineer attaches an RF Tag at the Leak
zone, Engineer can input Leak status (OK/no good)
Can manage Patrol history with status
Option : 1D, 2D BARCODE SCANER 및 CAMERA
MODULE
■ RFID READER with Software