Download VSN40S (All Op ons) NexGenera on Ultra High Vacuum Suitcase

VSN40S (All Op ons)
NexGenera on Ultra High Vacuum
Suitcase
I
Version 2.1
February 2017
Ferrovac GmbH, Thurgauerstrasse 72, CH-8050 Zurich,
Switzerland
FON +41 44 273 16 38, FAX +41 44 273 16 30
www.ferrovac.com, [email protected]
NexGenera on Ultra High Vacuum Suitcase
Warranty
Ferrovac GmbH warrants this product to be free of defects in material and workmanship
for a period of 12 months from the date of shipment. In case of proof of any defec ve parts in
the product, we will at our op on, either repair the product or replace it.
Warranty limita ons
The warranty for this product does not apply to defects resul ng from the following:
• non-observance of opera onal- and safety instruc ons
• natural wear of components
• consumables
• modifica ons to our products without our wri en consent
• misuse of any product or part of the product
This warranty stands in place of all other warran es, implied or expressed, including any
warranty of merchantability implied or fitness for a par cular use. The remedies provided
herein are buyer’s sole and exclusive remedies.
Neither the company Ferrovac GmbH nor any of its employees shall be liable for any
direct, indirect, incidental, consequen al or special damages arising out of the use of its products, even if the company Ferrovac GmbH has been advised in advance of the possibility
of such damages. Such excluded damages shall include but are not limited to: Costs of removal
and installa on, losses sustained as the result of injury to any person, or damage to property.
Copyright
Copyright 2016, Ferrovac GmbH. All rights reserved. All informa on in this document is
the sole property of Ferrovac GmbH and is protected by Swiss copyright laws and internaonal conven ons. Ferrovac GmbH grants the right for reproduc on for the purchasers
own use. No part of this manual may be reproduced or transmi ed by any third party in any
form or by any means and for any purpose without the wri en permission of Ferrovac
GmbH.
February 2017
Page 2 / 29
Version 2.1
NexGenera on Ultra High Vacuum Suitcase
Contents
1 Introduc on
9
2 Unpacking and inspec on
10
3 Overview and descrip on
11
4 Setup and installa on
12
5 Installing the suitcase to a UHV system
5.1 Preparing the host UHV system . . . . . . . . . . . . . . . . . . . . . . . . . .
5.2 Pump-down of the buffer volume . . . . . . . . . . . . . . . . . . . . . . . .
5.3 Transfer of samples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
13
13
14
14
6 Transpor ng samples under UHV
15
6.1 Preparing the suitcase for transport . . . . . . . . . . . . . . . . . . . . . . . 15
6.2 Air diffusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
7 Ven ng and pumpdown
15
7.1 Ven ng . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
7.2 Pumpdown . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
8 NEG ac va on and bakeout
8.1 Preparing the system for bakeout . . . . .
8.2 Bakeout with hea ng jacket VSN40SBT-HE
8.3 NEG (re-)ac va on . . . . . . . . . . . .
8.4 Baking . . . . . . . . . . . . . . . . . . .
8.5 Cooldown . . . . . . . . . . . . . . . . .
8.6 NEG flashing . . . . . . . . . . . . . . . .
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
17
17
18
19
20
20
21
9 Cryo op ons
21
9.1 Cryo-cooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
9.2 Example data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
9.3 Temperature sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
10 Upgrades
10.1 Upgrade to LSA2.1 ba ery powered ion pump controller . . . . . . . . .
10.2 Addi onal ports . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.2.1 Addi onal service port UPGRADEVSN40S(+SP40) . . . . . . . . .
10.2.2 Addi onal rare view window UPGRADEVSN40S(+RV) . . . . . . .
10.2.3 Two addi onal DN16CF service ports UP-GRADEVSN40S(+SP2X16)
10.3 Upgrade to 200 l/s nominal pumping speed . . . . . . . . . . . . . . . .
10.4 Hea ng jacket with heater available, VSN40SBT-HE . . . . . . . . . . . .
10.5 Flightcase . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
February 2017
Page 3 / 29
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
.
27
27
27
27
27
27
27
27
27
Version 2.1
NexGenera on Ultra High Vacuum Suitcase
10.6 Fast pump down dock with LN2 UHV Booster . . . . . . . . . . . . . . . . . . 28
10.7 Compact DN40CF T-piece . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
10.8 Retrofit your suitcase with other manipulators . . . . . . . . . . . . . . . . . . 28
11 Addi onal informa on
29
11.1 Return of defec ve items . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
11.2 Download . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
List of Figures
1
2
3
4
5
6
7
8
9
10
11
12
13
Configura on examples of the VSN40S . . . . . . . . . . . . . . . . . . . . .
Package contents of a complete system. . . . . . . . . . . . . . . . . . . . .
Overview of the NexGenera on UHV suitcase and its parts. . . . . . . . . . .
Plug in the SHV cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Front of the LSA2 controller. . . . . . . . . . . . . . . . . . . . . . . . . . .
Current reading on the LSA2 connected to the ion pump. . . . . . . . . . . .
Pump current vs pump pressure (for N2 ). . . . . . . . . . . . . . . . . . . . .
Silicone cable for NEG ac va on. (This cable can be used during bakeout.) . .
Bakeout jacket and heater placement. . . . . . . . . . . . . . . . . . . . . .
The Cryo-UHV suitcase with LN2 dewar on top. . . . . . . . . . . . . . . . .
Temperature data taken from the in-built temperature sensor and a second
sensor on a sample holder (the suitcase was kept under vacuum by turbo
pumping). First the sample holder had been cooled with the shields. Then
the sample was moved away from the thermal coupling, but kept within the
shields. A erwards it was cooled down again and moved into a warm space
outside the shields. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Temperature versus resistance curve for a Pt100 resistor. . . . . . . . . . . .
Pin layout of the feedthrough for the Pt100 resistor connec on and four-wire
measurement. (In case of using LSA3 for temperature measurement, please
do not invert +I and −I or +V and −V .) . . . . . . . . . . . . . . . . . . .
February 2017
Page 4 / 29
.
.
.
.
.
.
.
.
.
.
9
10
11
12
12
13
14
18
19
22
. 24
. 25
. 26
Version 2.1
NexGenera on Ultra High Vacuum Suitcase
Terms and symbols
The informa on in this document represents the state of the product at the date of print.
Technical changes may be made without no ce. Ferrovac GmbH makes no warran es or
representa ons with respect to accuracy or completeness of the contents of this publica on.
Figures and photos are not binding. The product names used are for iden fica on purposes
and may be trademarks of their respec ve companies.
A triangle with explana on mark indicates a passage in the manual with informa on that is crucial for the operator. READ THESE PARAGRAPHS CAREFULLY or the product might be damaged by misuse.
The hot surface symbol refers to hot surfaces which can lead to injury and
burns when touched.
The high voltage symbol, if found on a product or accessory of a product,
indicates voltages that are poten ally lethal. READ THESE PARAGRAPHS
CAREFULLY in order to protect the operator from any injury.
A triangle with a snow flake indicates a passage in the manual with informaon that is crucial for the operator with respect to cryo cooling and handling
cryogenic liquids. READ THESE PARAGRAPHS CAREFULLY in order to protect
the operator from any injury.
WARNING!
The WARNING heading in a manual explains dangers that may result in personal injury or death. Read the associated informa on always very carefully.
CAUTION!
The CAUTION heading in a manual explains hazardous situa ons that could
damage the product. Such damage may invalidate warranty.
Normal use
The product described in this manual must always be used:
• With original cable sets supplied by Ferrovac which are explicitly specified for the
use with the product described in this publica on
• With all cabling connected and secured, if applicable
• With all electronic equipment switched on a er all cables are connected properly
• In an indoor research laboratory environment
• By personnel qualified for opera on of delicate scien fic equipment
• By personnel trained in using cryogenic liquids and gas handling systems
February 2017
Page 5 / 29
Version 2.1
NexGenera on Ultra High Vacuum Suitcase
• In accordance with all related manuals.
CAREFULLY READ THE SAFETY INFORMATION AND ALL RELEVANT MANUALS
BEFORE USING THE PRODUCT AND ANY RELATED INSTRUMENTATION!
WARNING: lethal voltages!!
Any adjustment, fault finding procedure, installa on and maintenance
of the products described in this manual must be carried out by authorized personnel, fully qualified to handle poten ally lethal voltages.
WARNING: Liquid nitrogen (LN2 ), nitrogen gas (N2 )
Nitrogen is a colourless, odourless and tasteless non-toxic substance.
LN2 is a clear liquid. Be aware that an amount of 1 liter liquid turns
into about 700 liters of gas which can cause large pressure build up in
a closed system when warming up. Make sure to take precau ons for
overpressure and prevent any blocking by ice forma on.
LN2 /N2 can cause rapid suffoca on without no cing, therefore these
substances have to be stored and handled in areas with adequate venla on. Be aware that N2 gas accumulates on the ground.
If any symptoms such as drowsiness, dizziness, headache, unconsciousness or even vomi ng occur, bring vic m to fresh air, provide
oxygen or ar ficial respira on if needed. Look for professional medical
assistance.
LN2 can cause severe frostbite. In case of injury, warm up exposed
parts, but don’t use hot water. Look for medical assistance.
The handling of liquid nitrogen is only allowed by authorized and
trained personal respec ng the general safety precau ons for cryogenic liquids.
Always use the safety equipment, i.e. wear safety glasses and gloves
as well as closed shoes.
In addi on to this manual, read carefully the safety instruc ons given
by your liquid nitrogen supplier.
Safety precau ons
The following safety precau ons must be observed at all mes before using the product described in this manual and any associated instrumenta on.
February 2017
Page 6 / 29
Version 2.1
NexGenera on Ultra High Vacuum Suitcase
The product described in this manual is intended for use by qualified personnel who recognize
shock hazards and are familiar with the precau ons necessary to avoid possible injury.
Responsible body is the individual or group of persons that are responsible for the proper use
and maintenance of the product, ensuring that the product is operated within its specificaons and opera ng limits. The responsible body must ensure that users of the product are
adequately trained.
Operators are using the product for its intended purpose. Users must be trained in electrical
safety, handling of cryogenic liquids and adequate use of the instrument. They must be protected from electric shock and contact with poten ally dangerous situa ons.
Maintenance Personnel perform rou ne tasks on the product to keep it in proper opera ng
condi ons i.e. se ng up the line voltage or replacing consumables, se ng up and controlling
the LN2 filling lines, cooling setups, gas bo les, dewars or replacing consumables. Maintenance procedures are described in the manual and must be followed at all mes.
Service Personnel are trained to work on live circuits and to work cryogenic liquids as well
as perform fault finding measurements and repair work to the product. Only fully trained service personnel qualified to handle poten ally lethal voltages may perform servicing and repair.
The American Na onal Standards Ins tute states that a shock hazard exists when voltage levels are greater than 30 V RMS, 42.2 V peak or 60 VDC. A good safety prac ce is to assume that
hazardous voltages are present in any unknown circuitry.
CAUTION: Always check for correct mains voltage before connec ng any equipment!
WARNING: Lethal Voltages! Adjustments and fault finding measurements may only be carried
out by authorised service personnel. Lethal Voltages may be present at parts of the instrument
during opera on.
February 2017
Page 7 / 29
Version 2.1
NexGenera on Ultra High Vacuum Suitcase
WARNING:
• Always observe and strictly follow the safety notes and regula ons given in
this and related documenta ons.
• Always use the configured cables delivered with the product for electrical connec ons.
• Always disconnect the mains supplies of all electrically connected units before
ven ng, pump-down, opening the vacuum chamber, touching any part of the
in-vacuum components.
• Always observe and strictly follow the safety notes and regula ons given in
this and related documenta ons.
• Never operate the high voltage supply when the ion pump is not connected
and under vacuum.
• Never operate the ion pump in a pressure range above 1 × 10−5 mbar.
• Read safety instruc ons first and be familiar with general safety precau ons
for cryogenic liquids and compressed gases.
• Always strictly follow the safety notes and regula ons of handling cryogenic
liquids given by the vendor of cryogenic liquids.
• Make sure that a proper ven la on is present in the laboratory while using
cryogenic liquids.
This product is only to be used indoors, in laboratories mee ng the following requirements:
• Room temperature lies between 5°C/41°F and 40°C/104°F.
• Mains supply voltage fluctua ons must not exceed ±10% of the nominal voltage.
February 2017
Page 8 / 29
Version 2.1
NexGenera on Ultra High Vacuum Suitcase
Figure 1: Configuration examples of the VSN40S
1 Introduc on
The transport of samples under true UHV condi ons from one instrument to another, somemes from one ins tu on to the other, is an increasingly important task in modern surface
science.
The VSN40S NexGenera on UHV Suitcase is a full featured, miniaturized UHV-system for transport and storage of samples under ultra-clean condi ons. The vacuum suitcase is equipped
with a combined Non Evaporable Ge er (NEG)/Ion-pump which is driven by a ba ery powered
controller.
The usage of combined Non Evaporable Ge er (NEG)/Ion-pump technology allows to build
a fully featured, truly portable, at the same me compact and light weighted (8.8 kg) UHV
system. The weight (2.2 kg) of the NEG/Ion pump used being less than one third of a 20lt/s
ion pump, its nominal pumping speed is five mes higher (100lt/s). The NEG-element can be
ac vated with any standard DC lab power supply. High voltage for the ion-pump element is
delivered by our rechargeable ba ery driven power supply LSA2 for up to 60 hours without a
power connec on. Base pressures well below 1 × 10−10 mbar can be reached.
The suitcase can be individually configured for ver cal or horizontal usage, type and travel
range of the transfer arm as well as the sample grabbing mechanism. It is fully compa ble
with our wide range of manipulators such as linear/rotary feedthroughs, wobbles cks and
sample transporters.
The VSN40S NexGenera on UHV Suitcase is our newest model of NEG/Ion pumped UHV suitcases op mized in size, cost and performance.
February 2017
Page 9 / 29
Version 2.1
NexGenera on Ultra High Vacuum Suitcase
Figure 2: Package contents of a complete system.
2
Unpacking and inspec on
Before unpacking, inspect the parcel for any visible damage. If any evidence for damage of
the package is found take pictures of the parcel and send them to Ferrovac immediately.
Prepare a very clean workspace. Carefully unpack the suitcase and perform a visual check for
any damage of the package, its contents and accessories.
The UHV Suitcase is shipped under vacuum, fully baked and ready to use.
Compare the contents of the package with the delivery note. Any damage or missing items
must be reported to Ferrovac within 48 hours a er delivery.
The package should contain:
1. Fully assembled NexGenera on UHV Suitcase
2. Ba ery Powered Ion Pump Controller
3. Ba ery Charger including 4 power adapters
4. Cable LSA2 PUN Silicone for ac va on of the ge er element
5. Cable LSA2 PUN SHV for opera on of the ion pump
6. This manual and any manuals of addi onal subunits
7. Cable for temperature measure (in add on only in case of LSA3)
February 2017
Page 10 / 29
Version 2.1
NexGenera on Ultra High Vacuum Suitcase
Figure 3: Overview of the NexGeneration UHV suitcase and its parts.
CAUTION!
• Please ensure enough working space on a clean table for unpacking and inspec on.
• Never open the gate valve before the suitcase is mounted to a system with
reasonable base pressure.
• Read this manual carefully before using the device.
• Never expose the suitcase and its manipulators to physical shocks or aggressive chemicals.
• Never hit the knife edge nor the bellows.
3 Overview and descrip on
The main parts of the NexGenera on UHV suitcase are named as follows:
1. Buffer volume
2. Gate valve
3. Chamber with 1-3 viewport(s)
February 2017
Page 11 / 29
Version 2.1
NexGenera on Ultra High Vacuum Suitcase
Figure 5: Front of the LSA2 controller.
Figure 4: Plug in the SHV cable
4. Storage manipulator (or viewport or dewar with CF50 flange)
5. Transfer manipulator (or blank flange)
6. Pump
7. Side/ baseplate(s) 1-2 items
8. Carrying handle
4
Setup and installa on
Your VSN40S vacuum suitcase is being shipped under vacuum. During transport, the NEGelement maintained its base pressure. Unpack the universal ba ery charger that is shipped
with the suitcase and plug its cable into the rear socket of the LSA2 Ba ery Powered Ion Pump
Controller. Then plug the ba ery charger into a mains supply socket.
Before using the controller please consult the manual of your specific LSA device. Press the
“ON” bu on of the LSA for five seconds.
Check the readings of the display. If vacuum condi ons are sufficient, the ion pump will start
and the display will indicate the pump current in micro amps. An overload (”1.”) reading for
the first few seconds a er power on might occur and is normal.
The pump current is directly propor onal to the pressure in the vacuum system. The diagram
in Fig. 7 ”Pump Current vs pump pressure (for N2 )” provides the current to pressure conversion
curve of the SAES™ NexTorr pump models D100-5 and D200-5.
Depending on the readings of the LSA display, choose one of the following op ons:
1. The pump current indicates that the pressure is higher than 1 × 10−6 mbar (i.e. the LSA
shows “1.”): Switch the ion pump controller off and proceed to sec on 7.2 ”Pumpdown”
on page 16.
2. The pressure is between 1×10−9 mbar and 1×10−6 mbar: Proceed to sec on 8.3 ”NEG
ac va on and bakeout” on page 17.
3. The pressure is below 1 × 10−9 mbar: Proceed to next sec on 5 ”Installing the Suitcase
to a UHV System” on page 13.
February 2017
Page 12 / 29
Version 2.1
NexGenera on Ultra High Vacuum Suitcase
Figure 6: Current reading on the LSA2 connected to the ion pump.
5 Installing the suitcase to a UHV system
This sec on contains step by step procedures for installing the suitcase to a host UHV system
and transferring samples.
5.1 Preparing the host UHV system
Your host UHV-System must be equipped with a DN40CF flange. Usually a gate valve and a
short CF40 T-piece or VSCT40 is installed as a buffer volume for pumpdown using a turbopump.
If the UHV System is equipped with a load lock system, the load lock can be used as buffer
volume.
The UHV suitcase must be properly aligned in height and posi on and it’s weight must be supported by a suitable structure depending on the selected configura on (type and length of
manipulators). A height adjustable spindle trolley for instance, provides a good solu on.
CAUTION: Always support the UHV-suitcase by a suitable structure which
is stable enough to suspend its weight depending on the selected configura on!
CAUTION: If the suitcase is not properly aligned and supported, leakages
may result and welds can be damaged depending on the selected configura on.
CAUTION: The height adjustable structure should not be a hydraulic li .
Hydraulic li s can usually not guarantee long me stability.
February 2017
Page 13 / 29
Version 2.1
NexGenera on Ultra High Vacuum Suitcase
Figure 7: Pump current vs pump pressure (for N2 ).
5.2
Pump-down of the buffer volume
A er a achment of the UHV suitcase (gate valve closed) to the buffer volume, pump down
the buffer volume un l a sufficiently low vacuum level is reached. “Sufficiently low” in this
context depends on the sensi vity (reac vity) of your sample surface. Baking of the buffer
volume might be necessary case by case.
If the UHV Suitcase is in ex-works condi on (delivered fully assembled including UHV condioning) the system is now ready for transferring samples. Otherwise your UHV suitcase should
already have been condi oned as described in sec ons 7.2 ”Pumpdown” page 16 and 8 ”NEG
ac va on and bakeout” page 17 of this manual.
5.3
Transfer of samples
Open the gate valve of the suitcase and recheck the reading of the LSA display. If the pump
current reading, i.e. pressure, is as expected, you can start with sample transfer between the
host UHV system and the suitcase.
For more informa on about transfer please consult the specific manipulator(s) manual.
February 2017
Page 14 / 29
Version 2.1
NexGenera on Ultra High Vacuum Suitcase
6 Transpor ng samples under UHV
6.1 Preparing the suitcase for transport
Firmly close the gate valve of the suitcase and open the CF40 connec on between T-piece and
gate valve of the suitcase. For protec on of the knife edge of the gate valve, install a blank
flange (or the buffer tube VSN40SBT, see next sec on 6.2 “Prevent air diffusion”). Disconnect all cables except the cable for opera on of the ion pump. A er disconnec ng the power
adapter from the LSA, recheck that the high voltage is on and the ion pump is running properly.
Your suitcase, now running on ba eries, is ready for transport. The maximum power-up me
on ba eries is approximately 60 hours.
6.2 Air diffusion
IMPORTANT: The gate valve of your VSN40S is sealed with an FPM rubber
gasket. There is always a certain diffusion of air through such a gasket. Thus,
star ng from a base pressure in the low 1×10−10 mbar range, with the gate
valve securely closed, you may s ll observe a slight increase of the base
pressure in the suitcase a er ven ng the buffer volume.
This does not indicate a leakage. The increase in base pressure happens
very slowly within a me span of several hours and should not exceed 1 ×
10−9 mbar. For maintaining the ul mate base pressure in the suitcase, it
is recommended that it remains connected to any kind of oil-free vacuum
available or has the buffer volume VSN40SBV installed and evacuated, such
that both sides of the gate valve are under vacuum.
To prevent air diffusion use the buffer volume VSN40SBV as follows:
Install the buffer volume VSN40SB. Connect the angle valve of the buffer volume VSN40SBV to
any oil-free vacuum. Pump down the buffer volume and close the angle valve.
A membrane pump with a base pressure around 5 mbar is sufficient for this opera on.
7 Ven ng and pumpdown
This sec on contains step by step procedures for controlled ven ng and pumpdown of the
suitcase.
7.1 Ven ng
• The suitcase is delivered with the gate valve closed and blanked off by a CF40 blank flange
or with mounted buffer volume VSN40SBV. With the gate valve s ll closed, unscrew the
blank flange or VSN40SBV and take it off. The small volume between the gate and the
blank flange or VSN40SBV will be vented with air.
February 2017
Page 15 / 29
Version 2.1
NexGenera on Ultra High Vacuum Suitcase
CAUTION: Keep the gate valve firmly closed when taking off the blank
flange or the buffer volume VSN40SBV!
CAUTION: CF knife edges are very sensi ve! Avoid using any sharp instrument in the vicinity of the knife edge. CF flanges must be handled by
qualified personnel only!
• For a controlled ven ng of the UHV suitcase, establish a pumping connec on to a turbo
molecular pump. This is usually done by means of CF40 flexible bellows tube. The turbo
pump can be either a mobile pumping sta on or the turbo pumping system installed on
a load lock for instance.
• Start the turbo pump and wait un l it reaches its normal opera on at full speed.
• If possible, connect the ven ng valve of the turbo pump to a source of dry nitrogen.
• Make sure that the ion pump controller and (if present) the vacuum gauge of the VSN40S
are switched off.
• Open the gate valve of the suitcase and subsequently turn the turbo pump off.
• Wait un l the turbo pump vents automa cally or vent it manually through its ven ng
valve.
7.2
Pumpdown
• Establish a pumping connec on to a turbo molecular pump as described in sec on Venting
• Start the turbo pump and wait un l it reaches its full speed.
• Start the pressure gauge as described in the manual of this gauge.
• Wait un l the ion gauge displays a vacuum level < 1 × 10−6 mbar. If no pressure gauge
is installed to the buffer volume, wait approximately 10 minutes before switching on the
LSA.
• Press the “ON” bu on of the LSA ion pump controller for five seconds.
• Confirm the reading of the pump current and compare it with the displayed value of the
vacuum gauge.
• Your vacuum suitcase is ready for sec on 8 “NEG ac va on and bakeout” on page 15
when the vacuum level reaches 1 × 10−6 mbar.
February 2017
Page 16 / 29
Version 2.1
NexGenera on Ultra High Vacuum Suitcase
8 NEG ac va on and bakeout
This sec on contains step by step procedures for controlled NEG ac va on and bakeout and
of the suitcase.
8.1 Preparing the system for bakeout
In oder to reach a good base pressure inside a UHV system, it must be baked at a temperature
>100°C for a sufficiently long me. The me needed for bakeout depends on how long the
system was exposed to air and other parameters, such as general cleanliness of the internal
surfaces and many more. Your VSN40S system was factory baked for a periode of 24 hours at a
temperature of 100°C - 150°C and reached a base pressure of ≪ 1 × 10−6 mbar. If you use the
hea ng jacket VSN40SBT-HE read the addi onal informa on about the usage of the hea ng
jacket (Sec. 8.2, p. 18).
• Perform a pumpdown as described in sec on 7.2 Pumpdown on page 16.
• If your VSN40S vacuum suitcase reaches a vacuum level below 1 × 10−6 mbar, it is ready
for bakeout and NEG ac va on.
• Make sure that there is nothing le inside the bakeout zone that does not withstand
at least 150°C, i.e. plas c lids, packing material, tools, non-bakeable cables, pressure
gauge electronics,...
• If not otherwise described in the manual, the manipulator(s) are bakeable up to 150°C.
Please consult the specific manipulator(s) manual. Do not remove the magne c coupling
for the bakeout procedure. It is recommended to use the parking rail if provided during
bakeout.
• Plug in the silicone cable for ac va on of the ge er element into the matching socket
of the NEG/Ion pump.
• Make sure that the bakeout temperature never exceeds 150°C! We recommend using a
suitable bakeout controller (or the heater provided with our hea ng jacket).
• Cover all windows and not used feedthroughs with two layers of aluminum foil.
• In case of using hea ng tapes, cover the chamber and the manipulator(s) with two layers
of aluminum foil if you want to avoid hea ng marks from the cable.
• If no hea ng jacket with integrated heater, like the VSN40SBT-HE is available, place heating tapes around the gate valve, chamber and the manipulator(s). These should not
cross. Any hot spots should be avoided and the system heated up evenly. Cover the
chamber and the manipulator(s) with some layers of aluminum foil for thermal insulaon.
• Recheck that the turbopump and the ion pump are running normally and that the vacuum level is below 1 × 10−6 mbar.
February 2017
Page 17 / 29
Version 2.1
NexGenera on Ultra High Vacuum Suitcase
Figure 8: Silicone cable for NEG activation. (This cable can be used during bakeout.)
• Make sure that the gate valve of the VSN40S is open.
• Before start with baking (re-)ac vate the ge er material of the pump if needed.
CAUTION! Never remove the magne c coupling of the manipulator(s) for
the bakeout procedure if that is not explicitly described in the manipulator(s) instruc on. Make sure, its temperature never exceeds 150°C!
8.2
Bakeout with hea ng jacket VSN40SBT-HE
The hea ng jacket is provided with a hea ng element and integrated thermocouple of type K.
When using the hea ng jacket VSN40SBT-HE prepare the vacuum suitcase as described above
(removal of all non-bakeable items and coverage of windows/feedthrough with Al foil). Make
sure to use the correct heater model with the correct opera ng voltage, it is marked on the
plug.
WARNING:
Only use a heater with the correct opera ng voltage. Never connect a heating element to any supply voltage other than stated. Never remove the
opera ng voltage marking of the plug.
• Place the suitcase onto the (long rectangular) bo om part of the jacket
February 2017
Page 18 / 29
Version 2.1
NexGenera on Ultra High Vacuum Suitcase
Figure 9: Bakeout jacket and heater placement.
• Place the heater on the rails of the wobble s ck as shown in the image with the heater
facing downwards. The cables can be passed through one of the corners of the hea ng
jacket.
• If wanted, place another thermocouple on the suitcase. This is not absolutely necessary
if you use the provided heater and jacket correctly. The temperatures are limited to safe
values.
• Carefully put together the hea ng jacket as shown in the figure. (The li le hat on top
might not be needed in case you don’t have higher parts — e.g. a sample storage with
sample transporter or dewar — installed on top.) There should not be any opening le
which might lead to lower bakeout temperatures.
8.3 NEG (re-)ac va on
• Plug in the banana plugs of the silicone cable for ac va on into any standard DC lab
power supply. If it is not possible to monitor the current and voltage properly, two standard mul meters can serve as monitor display.
• The pressure should be at all mes below 5 × 10−5 mbar during (re-)ac va on.
• The suggested current/ me combina on for the best (100%) ac va on for the pumps
with St 172 alloy ge er material is wri en in table 1. The chamber wall will act as thermal shield allowing the ge er material to reach higher ac va on temperature. Lower
current values might therefore be sufficient to reach 450°C.
• The reac va on of the ge er material is necessary every me the pump was exposed
to air or when the pumping speed falls below acceptable limits. If reac va on is preceded by an air exposure and successive pump down cycle, follow the same procedure
of ac va on.
February 2017
Page 19 / 29
Version 2.1
NexGenera on Ultra High Vacuum Suitcase
• If the reac va on follows normal opera on in vacuum without air ven ng, it can be
shorter and carried out at lower temperature (approximately 25% lower).
• For more informa on please consult the authorita ve opera ng instruc ons of the pump
manufacturer.
IMPORTANT:
The maximum applicable current for NEG (re-)ac va on is 5 Ampere.
8.4
Baking
• Connect the heater tapes to a temperature controller. Baking temperatures must be
monitored using a suitable temperature sensor (typically K-type thermocouples).
• Start with evenly hea ng the UHV system. The temperature inside the bakeout zone
should reach 100°C - 150°C within approximately 4 h hours.
• At this stage, note down the vacuum condi ons and the star ng me of the bakeout.
• Bake the suitcase for at least 24 hours.
• Control the temperature on a regular basis during the bakeout.
CAUTION: The surface of the bakeout zone reaches a temperature of
100°C - 150°C. Keep all inflammable substances and items well clear of
the bakeout zone.
8.5
Cooldown
• Turn off the heaters.
Pump model
NexTorr D-100-5
NexTorr D-200-5
Voltage
9V
12.5 V
Current
5A
4.8 A
Power
45 W
60 W
Time
60 minutes
60 minutes
Max. Current
5A
5A
Table 1: Table of NEG activation data for different pumps. Never exceed the maximum applicable
current.
February 2017
Page 20 / 29
Version 2.1
NexGenera on Ultra High Vacuum Suitcase
• During cooldown of the UHV system ac vate or flash the NEG element at a system temperature of around 80°C - 100°C (see sec on 8.3 “NEG ac va on” or if applicable 8.6
“NEG flashing”).
• Let the system cool down un l you can touch the handle of the gate valve.
CAUTION: Do not touch the handle of the gate valve without checking if
its temperature is below 40°C. Use a laboratory thermometer.
• Close the gate valve as soon as you can touch it.
• Start the ion element (the pressure should have rese led from the NEG ac va on).
• If possible, degas the manipulator(s) by moving them occasionally while the system is
s ll warm.
• Wait for another 24 hours and let it se le un l your ul mate base pressure is reached.
• Keep the turbo pump connected and running, even though your gatevalve is closed.
A er the bakeout and NEG ac va on the system is ready for opera on. Please go back
to chapter 5 ”Installing the suitcase to a UHV system” on page 13 in this manual.
8.6 NEG flashing
If the system has not been exposed to air, a shorter flashing could be sufficient a er bakeout.
NEG flashing is the same procedure as described in sec on 8.3 “NEG ac va on” on page 19
but during shorter me and carried out at lower temperature. We recommend flashing the
ge er material with: 3.6 V - 2.5 A (9 W) for 30 minutes.
9 Cryo op ons
This sec on only applies to suitcases with cryo op ons. The UHV suitcase can be upgraded to
a cryogenic version with a DN50CF flange and dewar for liquid nitrogen (LN2 )̇ on top as well as
cryo shields inside.
This cryo version is meant to transport sensible cryo cooled samples close to LN2 temperature
without breaking the cooling chain or vacuum. The cryo shield protects the sample from the
influence of the outer warm surfaces. In addi on the sample is ac vely cooled either via the
cold sample grabber or a cooling block inside the shields. For monitoring the temperature, a
sensor is mounted on the shields.
The transfer in the cryo version has to be done with lots of care, since the cryo shields, sample
grabber and sample cooling contact are adapted to each other to op mize the thermal contact
February 2017
Page 21 / 29
Version 2.1
NexGenera on Ultra High Vacuum Suitcase
Figure 10: The Cryo-UHV suitcase with LN2 dewar on top.
while the space is restricted. Therefore the posi oning of the sample inside needs to be done
with care keeping the sample in horizontal posi on.
For retrac ng the transfer arm back into its parking posi on, that is moving the grabber and
sample into their parking posi ons within the shields, it is important to keep the marking/screw
of the magnet strictly upright such that it matches in posi on with the guidance on the end
piece. The sample and grabber otherwise might be damaged or get stuck on the cooling block
of the shields.
CAUTION:
When retrac ng the RM/WM transfer arm be aware of the correct parking
orienta on in which the screw/marking of the outer magnet needs to be
kept strictly upright to move it into its guided end posi on! Be careful
when the sample is retracted.
9.1
Cryo-cooling
The Cryo-UHV suitcase has an addi onal dewar on top which can be filled with liquid nitrogen
(LN2 )̇. This will cool down the shields and sample block inside the chamber which will keep
your sample at low temperatures (below -150°C).
February 2017
Page 22 / 29
Version 2.1
NexGenera on Ultra High Vacuum Suitcase
CAUTION:
Always use the safety equipment as safety glasses and gloves when handling cryogenic liquids and make sure a proper ven la on of the room is
given.
For cool-down use a small dewar with LN2 and pour the LN2 slowly into the dewar of the CryoUHV suitcase. As the dewar is not very large, it is not recommended to fill it from a LN2 cylinder
pressurized, a lot of LN2 might spill. Be careful not to spill LN2 out of the dewar or onto the
windows. It takes about 30 min – 40 min un l the shields reach their base temperature. Only
fill the dewar maximum up to about 4 cm below the upper rim. The shields stay cold as long
as there is LN2 le in the dewar.
Place the lid onto the dewar and carry the suitcase carefully, so that no LN2 spills out of the
dewar!
9.2 Example data
Cold samples are very sensi ve to hea ng and surface contamina on, therefore it is important
to keep the temperature as low as possible. The exposure to warm surfaces should be kept as
short as possible. In Fig. 11 an example graph for a temperature measurement is given with a
sample situated on a cooling block. (Be aware that the inner setup and the thermal coupling
of the sample holder to the shields varies with the type of sample holders.) Within the shields
the sample is protected from warm surfaces and heat radia on. Once the sample is moved
outside, it will warm up faster due to the heat impact. In addi on atoms/molecules in the
warm space might condense faster on the sample surface. Therefore a fast transfer within a
few minutes (keeping safe handling) is preferable.
9.3 Temperature sensor
Inside the chamber on the sample cooling block or shield a Pt100 resistor (tolerance class A,
DIN EN 60751 F 0.15: 0.15+0.002×|T | with T in °C) is mounted. This resistor has a resistance
of 100 Ω at 0 °C and its calibra on curve is well known (in °C):
0◦ C − 850◦ C
R(T ) = R0 (1 + A × T + B × T 2 ),
R(T ) = R0 (1 + A × T + B × T + C × [T − 100] × T ),
2
3
◦
(1)
◦
− 200 C − 0 C
(2)
with R0 = 100 Ω, A = 3.9083 × 10−3 °C−1 , B = −5.775 × 10−7 °C−1 and C = −4.183 ×
10−12 °C−1 . It is nearly linear in the range of interest, the standard resistance-temperature
curve for such a sensor is given in Fig. 12.
The temperature can be monitored using this resistor. Recommended is a four wire measurement with a current of about 1 mA. In Fig. 13 the pin layout for the feedthrough is shown.
February 2017
Page 23 / 29
Version 2.1
NexGenera on Ultra High Vacuum Suitcase
Figure 11: Temperature data taken from the in-built temperature sensor and a second sensor on
a sample holder (the suitcase was kept under vacuum by turbo pumping). First the
sample holder had been cooled with the shields. Then the sample was moved away
from the thermal coupling, but kept within the shields. Afterwards it was cooled down
again and moved into a warm space outside the shields.
February 2017
Page 24 / 29
Version 2.1
NexGenera on Ultra High Vacuum Suitcase
Figure 12: Temperature versus resistance curve for a Pt100 resistor.
February 2017
Page 25 / 29
Version 2.1
NexGenera on Ultra High Vacuum Suitcase
Figure 13: Pin layout of the feedthrough for the Pt100 resistor connection and four-wire measurement. (In case of using LSA3 for temperature measurement, please do not invert +I
and −I or +V and −V .)
February 2017
Page 26 / 29
Version 2.1
NexGenera on Ultra High Vacuum Suitcase
10 Upgrades
A variety of addi onal op ons and upgrades for the UHV suitcase are available. For details visit
also our website www.ferrovac.com or Suitcase Acessoiries. If you have any ques ons please
do not hesitate to contact us ([email protected]).
10.1 Upgrade to LSA2.1 ba ery powered ion pump controller
The LSA2.1’s pumping current display has a 10 mes be er resolu on than the LSA2.0 ( 1 nA).
This op on allows you to measure a base pressure in the 10−11 mbar range.
10.2 Addi onal ports
10.2.1 Addi onal service port UPGRADEVSN40S(+SP40)
This op on is only possible at the me the order is placed and cannot be retro-fi ed. The
suitcase is also available with an addi onal DN40CF service port for a vacuum gauge, electrical
feedthrough, etc. Not compa ble with UPGRADEVSN40S(+RV).
10.2.2 Addi onal rare view window UPGRADEVSN40S(+RV)
This addi onal RV-viewport provides an auxiliary viewpoint, which for example facilitates sample exchange from the storage. Not compa ble with SP40 or cryo op on.
10.2.3 Two addi onal DN16CF service ports UP-GRADEVSN40S(+SP2X16)
The two addi onal DN16CFT service ports enable installa on of mul ple devices like vacuum
gauges, electrical feedthroughs and other equipment.
10.3 Upgrade to 200 l/s nominal pumping speed
The ion pump element of the NexTorr D-200-5 with its magnet and housing is iden cal to the
100 l/s pump. The NEG element with 200 l/s capacity is a li le longer but s ll fits into the
suitcase chamber without modifica on.
10.4 Hea ng jacket with heater available, VSN40SBT-HE
The Hea ng Jacket VSN40SHJ allows easy and fast isola on for bakeout of the suitcase. It can
be ordered together with a heater. Please specify the local supply voltage (230 V/110 V) it
should be used for!
10.5 Flightcase
For transport or shipment a flightcase VSN40SFLIGHTCASE is available with the suitcase. This
keeps your suitcase in a secure padded box.
February 2017
Page 27 / 29
Version 2.1
NexGenera on Ultra High Vacuum Suitcase
The case is compa ble with Wobbles ck Manipulators, Linear/Rotary Feedthroughs and Sample Transporters or Liquid Nitrogen Dewars. It is equipped with two handles at both ends of
the case and edge rollers at one end. The case is lockable with four bu erfly fasteners.
10.6
Fast pump down dock with LN2 UHV Booster
The VSCT40 transfer chamber enables the excep onally fast transfer of a sample from a UHV
suitcase into the UHV-System. Vacuum in the transfer chamber is created using a turbo pump
as well as a cryogenic pump. Thus a sufficient vacuum is established within approximately 30
minutes, as opposed to 24 hours when baking out the buffer volume conven onally.
The turbo pump is not part of the product.
10.7
Compact DN40CF T-piece
In case the space around your machine is restricted, this very small T-piece VSTEE40 can be of
help for you.
10.8
Retrofit your suitcase with other manipulators
If the requirements for the suitcase have changed, maybe the retrofit with other manipulators
are a possible solu on. The VSN40S is fully compa ble with our wide range of manipulators
such as line-ar/rotary feedthroughs, wobbles cks and sample transporters. (Only the cryogenic version, depending on the implementa on, has a couple of restric ons. Please contact
us for further details.)
The suitcase can be used in combina on with a single sample transfer mechanism such as
a pincer grip, fork or similar mounted on the suitcase-manipulator. Therefore the suitcasemanipulator grabs the samples directly from the connected UHV system. An op onal key feature is to install an addi onal linear/rotary feedthrough featuring a stack of sample receptacles
serving as sample storage for mul ple samples. This allows the user not only to transport just
one sample at a me, but also to store a larger number of samples under true UHV condi ons
and to exchange several samples at once from the connected system in a step-by-step mode.
Also the suitcase can be used in combina on with a storage sample transfer mechanism such
as a stack of receptacles, carousel or similar mounted on the suitcase-manipulator. Therefore
an external ma-nipulator of the UHV system, on where the suitcase is connected, must ac vely
grab the samples from the extracted suitcase-manipulator’s sample storage.
February 2017
Page 28 / 29
Version 2.1
NexGenera on Ultra High Vacuum Suitcase
11 Addi onal informa on
11.1 Return of defec ve items
Ferrovac GmbH will require an RMA (Return of Materials Authoriza on) number and a complete declara on of contamina on to be issued, before any item is returned to us. Please
contact us therefore. You will be given an RMA number and informa on on how to proceed
with the return of your defec ve items.
11.2 Download
This manual can be downloaded from our website. It can be found in the specifica ons of the
VSN40.
For any sugges ons or ques ons considering this manual, please contact us and write an email to [email protected].
February 2017
Page 29 / 29
Version 2.1