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Flowsensor for compressed air
Ideal for plant energy-saving control
This sensor is ideal for controlling and checking the flow of compressed air at plants and equipment lines, etc.
Flow rate sensor - FLUEREX PF500D to PF16000E Series.
Refrigerating
type dryer
Desiccant
type dryer
Optimum for ISO14001 acquisition
ISO14001
Major applications
Large flow rate types compatible with controlling energy saving in the each
plant are available.
This component is indispensable for acquiring International Standard
Organization ISO14001 certification for your environment management system.
This sensor also functions as a flow sensor for different devices.
• Flow rate control at plants
Eliminate compensation - read directly with a digital gauge
• Flow rate control in manufacturing
Pressure range
Bothersome pressure compensation and
0.1MPa
1.5MPa
temperature correction are not required.
40°
The digitally displayed value can be directly read in.
P
Temperature range
• Pressure compensation not necessary: detection of mass flow
0°
• Temperature correction not necessary: Automatic
temperature correction function integrated
lines or devices
• Energy-saving measures at plants
Auxiliary
Flow control
valve
ERROR
Nkm3
READ
• This sensor can be installed in position.
• A straight piping section is not needed when installing the flow meter
Four analog output types and a pulse output type ideal for networking, are
available in addition to switch output.
Nm3
N
CHANGE
PF SERIES
Portable kit
Five types of tester kits (PFK) containing a sensor,
monitor, and piping, etc., in a trunk are available.
This kit is used for different applications.
• Quick wiring and piping connections are used.
FLUEREX
Tester kit
PFK500D
PF1000D
PFK1000D
PF2000D
PFK2000D
PF4000D
PFK4000D
PF8000D
PFK8000D
PF16000E
—
Note: Only the port sizes indicated with
1004
40A
50A
1,000
10,000
Pressure SW
for coolant
Flow sensor
for air
Flow sensor
for water
Switch output (Standard)
Instantaneous flow display (Standard)
1000
50
Water
cooling
refrigerator
Output function
100,000
500
25
100
Analog output
Cumulative flow display (Standard)
2000
200
Peak flow display (Standard)
4000
400
Flow load display (Standard)
8000
Mechanical
pressure SW
0 to 5 VDC (Standard)
4 to 20 mADC (Option)
1 to 5 VDC (Option)
0 to 10 VDC (Option)
Flow sensor
For compressed air
PF500D
25A
Vacuum
auxiliary
/ pad
Total air
system
Monitor functions
Flow rate range NL/min
10
100
Vacuum
F.
Electronic
dif. pres.
SW
Seating / close
contact conf.
SW
Covering a wide range of flow rates with 11 models
Port size
10A 15A
Joint
/ tube
Electronic
pressure SW
(excluding the PF16000E).
Model series system
Check valve
/ others
Vacuum
generator
Nm3/min
TOTAL
OUT1
Variety of output functions
• The separated type enables operation at random sites.
Small
F.R.
Vacuum
R.
IP64 drip-proof-compatible
• Display functions are switched with one-touch key operations.
F.R.L
(Separate)
FLUEREX
AIR FLOW MONITOR
Easy-to-read digital display
F.R.L
(Module)
Silencer
Easily estimate working air capacity
Monitor
Automatic
drain
other
Electro
pneumatic R.
A practical precision of ±3%F.S. is realized without correction at temperatures
from 0 to 40°C and pressures from 0.1 to 1.5 MPa. Practical precision
expresses linearity, pressure, and temperature with a composite error based on
JIS Standards JISZ8103.
Sensor section
Air filter
Precise
R.
High practical precision at ±3%F.S.
The standard estimate function makes it easy to measure
working air capacity.
High polymer
membrane
dryer
Pulse output (option)
800
16000
Perfect for networks connecting
personal computers, etc.
are available for the tester kit.
1005
PF Series
Applications
For flow rate control in paint lines
For flow rate control in automobile
manufacturing lines
• For flow rate control per line !
• Cost conversion by integrating flow rate display
For semiconductor manufacturing
equipment
• For flow rate control of expensive air with low
dew point !
Ready detection of trouble such as "overflow", etc. !
For low pressure casting devices
• For control of die cooling temperature !
Ejection cylinder
Die
Compressed air
Molten
metal
Stoke
Crucible
1006
For flow rate control of loom plant
Pneumatic components (Sensor devices)
Safety Precautions
Read this before starting use.
Please refer to Intro 43 for general details on the pneumatic components, and to "
Precautions" in this section for detailed cautions pertaining to each series.
Refrigerating
type dryer
Safety
Desiccant
type dryer
High polymer
membrane
dryer
Compressor air flow sensor PF and PFK Series
DANGER
Explosion-proof environment
Do not use this product in an atmosphere containing
flammable gas. It does not have an explosion-proof
structure, so flame or fires could occur.
WARNING
2
3
1
2
3
4
Filter
Air dryer
Oil mist filter Flow sensor
Valve
CAUTION
1
PF4000 sensor A
PF4000 monitor A
PF4000 sensor B
• Only sensor A can be connected to monitor A. Sensor B
cannot.
Precise
R.
Electro
pneumatic R.
Vacuum
F.
Vacuum
R.
Vacuum
generator
Vacuum
auxiliary
/ pad
Mechanical
pressure SW
Electronic
pressure SW
Electronic
dif. pres.
SW
Seating / close
contact conf.
SW
Flow sensor
for air
Total air
system
PF500D monitor A
PF500D sensor A
PF500D monitor A
PF500D sensor B
Water
cooling
refrigerator
PF500D monitor A
PF500D sensor C
Flow sensor
for water
PF1000D monitor
PF500D sensor
PF4000 monitor
PF4000D sensor
• Sensors A, B, and C can be freely interchanged and connected with monitor A if
sensors are from the same model.
• Differing models cannot be interchanged.
• Old and new models cannot be interchanged.
3
Joint
/ tube
Pressure SW
for coolant
(2) PF500D/1000D/2000D/4000D/8000D/16000E
<Example>
2
Check valve
/ others
Flow sensor
For compressed air
PF4000 monitor A
Small
F.R.
Silencer
Corrosive environment
Do not use this product in an environment containing
corrosive gases such as sulphur dioxide.
Fluid temperature
Keep the fluid temperature within 0 to 40°C.
Do not use this product where temperature suddenly
changes, even if ambient temperature is within
specifications. Otherwise, dew could form.
Maximum working pressure and specified flow rate
range
Applications exceeding the maximum working
pressure and specified flow rate range may result in
faults. Use this product only within the specified
range.
Drip-proof environment. Only the sensor conforms to IP64.
The sensor is dust-proof and drip-proof, so problems
do not occur if water gets on the sensor during
maintenance or cleaning. The sensor should not be
exposed to water for long periods or used in places
where water and oil scatter with force.
Design & Selection
Sensor and monitor combination
With the conventional PF4000/8000, the sensor and
monitor were used as a non interchangeable pair.
The PF500D, 1000D, 2000D, 4000D, 8000D, and 16000D
Series have independent sensors and monitors. Sections within the same model series can be interchanged.
(1) PF4000/8000
<Example>
F.R.L
(Separate)
Flow control
valve
Working environment
This product is not to be used as a business meter.
This product does not conform to Measuring Laws,
and thus cannot be used for commercial purposes.
Use this sensor for industrial applications.
Compressed air or nitrogen can be used. Do not use other
fluids or the precision cannot be guaranteed.
Compressed air from the compressor contains
drainage – water, oil oxide, foreign substances, etc. –
so install a filter, air dryer, and oil mist filter on the
primary side (upper stream side) of the sensor. The
sensor's meshing rectifies flow in the pipe. It does
not filter out foreign substances, so provide a filter.
F.R.L
(Module)
Auxiliary
Design & Selection
Working fluid
1
Applicable fluids
There is a risk of oxygen deficiency if nitrogen gas is
used for the applicable fluid. Observe the following
points when handling:
(1) Use this product in a well-ventilated place.
(2) Ventilate the area while using nitrogen gas.
(3) Regularly check nitrogen gas piping for leaks.
2
Do not use this product for flammable fluids.
Work environment
1
Automatic
drain
other
Design & Selection
Working fluid
1
Air filter
Use within an ambient temperature range 0 to 50°C.
Avoid using in areas where vibration exceeds 49m/s2
and impact 294m/s2.
Vibration of
49 m/s2 and over
Impact of
294 m/s2 and over
1007
Pneumatic components (Sensor devices)
Safety Precautions
Read this before starting use.
Please refer to Intro 43 for general details on the pneumatic components, and to "
Precautions" in this section for detailed cautions pertaining to each series.
Safety
Compressor air flow sensor PF and PFK Series
DANGER
1
Installation, Piping & Wiring
Set the power voltage and output at the specified
voltage.
Application of voltage exceeding the specified
voltage could result in malfunctions, sensor damage, electrical shock, or fire.
WARNING
Do no use a load exceeding the output rating.
Failure to observe this could result in output damage or fire.
Installation, Piping & Wiring
Wiring
1
Check the wire color and terminal numbers when
wiring. Incorrect wiring connections could result in
3
sensor damage, problems, and malfunctions, so
check wire color and terminal numbers against the
instruction manual before wiring.
Use a wire with the same or higher performance
than the 600 V vinyl wire for the power supply and
other wiring. Insert a noise filter if required.
2
Ground the FG terminal with Class 3 grounding
Ω or less). Do not use a common ground with
(100Ω
the power distribution system.
CAUTION
Check wiring insulation.
Check that wires do not contact other circuits and
that there are no ground faults or insulation faults
across terminals. Overcurrent could flow in and
damage the sensor.
4
Separate the monitor from high-voltage wires, high
voltage devices, and powered devices such as
motors.
5
Check that there are no swarf or wire scraps on the
monitor's gland and sensor connectors before wiring.
Installation, Piping & Wiring
Piping
1
This sensor can be installed vertically, horizontally, or
in any other position.
2
When adjusting the flow with a metering valve (globe
valve, ball valve, etc.), install the metering valve on the
secondary side of the sensor (downstream). If the
metering valve is installed on the primary side, drift
(turbulent flow) could occur and result in an error.
4
Do not install a regulator before the sensor (on the
primary side).
5
When using an elbow or bushing (up to 1 port size
rank difference) in piping for the PF16000E Series,
install a 10D or larger straight pipe on the upstream side and a 5D or larger straight piping
section on the downstream side. If there is no
straight piping section, drift (turbulent flow) could
occur and result in an error.
* "D" here refers to the piping material bore.
Metering valve
3
Metering valve
When installing a stop valve on the primary side of the
sensor for maintenance, use the stop valve fully open
or fully closed.
10 D
5D
Using an elbow
10 D
5D
Using a bushing
1008
Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
dryer
Air filter
When installing the sensor on piping, use the following torque so that excessive screw-in torque or load
torque is not applied to the connection port:
Model No.
1
PFS500D PFS1000D PFS2000D PFS4000D PFS8000D PFS16000E
A. max. screw torque N·m
29
29
29
48
72
80
B. max. load torque N·m
14
14
14
38
48
60
F.R.L
(Module)
Wiring
2
Resin cover
power distribution wires.
Failure to do so could result in malfunctions caused
by noise.
Small
F.R.
Use the enclosed cable PF-FL-280774 (3 m) to wire
the sensor to the monitor. Use the CKD extension
cable PF-FL-280775 (length 3 m) to extend the cable.
The enclosed cable can be connected to the exten-
Electro
pneumatic R.
sion cable for a maximum of 6 m. Contact CKD if
longer distances are required. The extension cable is
compatible with all models.
Load torque
14.5 dia.
Screw torque
7
Align the fluid direction and the direction shown on
the body when piping. The indicated flow rate increases if connected in reverse.
3
Flow direction
8
4
10
Check that force is not applied to resin parts when
piping.
Check that sealing tape or adhesive does not get
inside when piping.
When winding fluorine resin sealing tape around threads, wind
sealing tape 1 to 2 times, leaving 2 to 3 threads open at the
Auxiliary
Flow control
valve
Silencer
Check valve
/ others
Vacuum
F.
3000
Vacuum
R.
Do not short-circuit the output contact.
Do not use this product for loads generating surge
voltage. When directly driving a load that generates a
source of surge in the power supply line. (Refer to
"Protection circuit for monitor contact" on the
following page.)
5
Precise
R.
Joint
/ tube
surge, such as a relay or solenoid valve, use a
sensor with integrated surge absorbing element.
Similarly, use surge countermeasures if there is a
Clean out piping to remove foreign substances and
swarf, etc., before piping. The rectifying unit or
platinum sensor could be damaged if a large amount
of foreign substances or swarf, etc., enters.
9
F.R.L
(Separate)
Separate the cable from sources of noise such as
6.7 dia.
6
Automatic
drain
other
Installation, Piping & Wiring
CAUTION
Do not repeatedly bend or tension to leads or wires
could disconnect.
Vacuum
generator
Vacuum
auxiliary
/ pad
Mechanical
pressure SW
Electronic
pressure SW
Electronic
dif. pres.
SW
Seating / close
contact conf.
SW
Pressure SW
for coolant
Flow sensor
for air
Total air
system
end of the screw. Press down on tape to stick it to threads.
When using liquid sealing agent, leave 1 to 2 threads open
from the end, and avoid applying too much. Check that the
sealing agent does not get on the device's threads.
Sealing tape
Flow sensor
for water
Solid/liquid sealing agent
Solid/
liquid
sealing
agent
Flow sensor
For compressed air
Solid/
liquid
sealing
agent
Acceptable Not acceptable
Water
cooling
refrigerator
Acceptable Not acceptable
1009
Pneumatic components (Sensor devices)
Safety Precautions
Read this before starting use.
Please refer to Intro 43 for general details on the pneumatic components, and to "
Precautions" in this section for detailed cautions pertaining to each series.
Safety
Compressor air flow sensor PF and PFK Series
WARNING
1
A flow several times higher than the rated flow occurs
if the valve connected to the sensor is suddenly
secondary side. Gradually open the valve connected
to the sensor while checking that the monitor display
opened. This can damage the platinum membrane
sensor or rectifying unit and cause fluid to flow to the
does not exceed the rated flow.
CAUTION
1
2
During use & Maintenance
During use & Maintenance
If an error occurs during operation, immediately turn
power OFF, stop use, and contact your dealer. Slight
4
Inspect the sensor at least once a year and confirm
that it is operates correctly.
heating (40°C) of the display section is not a problem.
Internal settings, such as the hardware check, are
5
Do not disassemble or modify the sensor or problems could result.
made in the first 10 seconds after power is turned
ON. The display and output do not function correctly
during this time. If an interlock circuit is established
3
with control system devices using switch output, an
abnormal stop could occur, so mask the output
during this time.
When the output setting is changed, the control
system devices could operate unintentionally. Stop
devices before changing settings.
1010
PF/PFK Series
Contact protection circuit for monitor
Contact protection circuit for monitor
Refrigerating
type dryer
The monitor has an integrated switch contact.
Provide the following protection circuit to protect the contact from inductive loads:
Application
AC DC
Circuit example
Desiccant
type dryer
Features and other items
Monitor
(OUT1)
*
C
R
Inductive
load
* When using with an AC voltage, check
that load impedance is sufficiently
smaller than CR impedance.
Power supply
CR
Monitor
(OUT1)
C
Inductive
load
Power supply
R
High polymer
membrane
dryer
Selecting the element
When the load is a relay or solenoid,
recovery time is delayed. Connect the
circuit between loads when using a 24
or 48 V power voltage and across
contacts for a 100 to 200 V power
voltage for maximum effect.
The guide for C and R is:
C: 1 to 0.5 (uF) of the contact current 1 A
R: 0.5 to 1 (W) of the contact voltage 1 V.
These may not necessarily match due to
dispersion in load characteristics, etc.
Test the state while considering that C is
affected by discharge suppression when
the contact is opened, and R plays a role
in suppressing current when power is
turned ON next.
Generally, C should have a withstand
voltage between 200 and 300 V. When an
AC circuit is involved, use an AC capacitor
(no polarity).
Air filter
Automatic
drain
other
F.R.L
(Module)
F.R.L
(Separate)
Small
F.R.
Precise
R.
Electro
pneumatic R.
Auxiliary
Monitor
(OUT1)
Diode
Power supply
Inductive
load
Energy accumulated in coils is passed
as current by the parallel diode, and
consumed as Joule heating by inductive
load resistance. Recovery for this takes
even longer than for CR.
Use a diode with a reverse withstand voltage
that is 10-fold or more than circuit voltage
and for which forward current is larger than
load current. If circuit voltage is not that high
for the electronic circuit, a diode with a
reverse withstand voltage 2 to 3 times larger
than the power voltage can be used.
This is effective when recovery of the
diode is too slow.
The Zener voltage of the Zener diode is
approximately the same as the power
voltage.
Flow control
valve
Silencer
Check valve
/ others
Joint
/ tube
Monitor
(OUT1)
Diode and
Zener diode
Power supply
Inductive
load
Vacuum
F.
Vacuum
R.
Vacuum
generator
Monitor
(OUT1)
Variable resistor
Inductive
load
Power supply
This uses the constant voltage of the variable
resistor to prevent very high voltage from being
applied across contacts. Recovery is also
slower with this method. Connect the circuit
between loads when using a 24 to 48 V power
voltage and across contacts for a 100 to 200 V
power voltage for maximum effect.
Vacuum
auxiliary
/ pad
Select cut voltage Vc to satisfy the following
condition: When using alternating current,
voltage must be multiplied by 2 .
Mechanical
pressure SW
Maximum contact voltage > Vc > Power voltage
Electronic
dif. pres.
SW
Seating / close
contact conf.
SW
• Avoid using the following arc suppressors:
C
Load
These are extremely effective for
extinguishing arcs at cut off, but
capacity is accumulated in C when
the contact is opened. C's shortcircuit current flows when the
contact is tripped and causes the
contact to melt easily.
Monitor
(OUT1)
Power supply
Power supply
Monitor
(OUT1)
C
Load
Electronic
pressure SW
This is extremely effective for
extinguishing arcs at cutoff, but
charged current flows to C when
the contact is tripped, causing the
contact to melt easily.
Pressure SW
for coolant
Flow sensor
for air
• It is usually more difficult to switch a DC induction load than to a resistance load, so performance can be increased to the same level as the resistance
load by using an appropriate arc suppressor.
• Keep wiring short to prevent effects from noise. Separate wire from sources of noise such as power distribution cables.
Total air
system
Water
cooling
refrigerator
Flow sensor
for water
Flow sensor
For compressed air
1011
PF/PFK Series
PF and PFK Series electrical wiring
1 Switch output
The monitor has 1 independent contact. Observe the following precautions when using this contact:
Contact specifications
Load
Descriptions
Inductive load
Resistance load (COS φ = 1) (COS φ = 0.4, L/R = 7ms)
RatedLoad
AC110V
0.5A
AC110V
0.2A
DC24V
1A
DC24V
0.3A
Rated energizing current
2A
Maximum contact voltage
AC125V, DC60V
Maximum contact current
1A
Maximum contact capacitance
60VA, 30W
• If the ratings at left are exceeded, use an
auxiliary relay to turn the load ON and OFF.
• When using an inductive load, such as an
auxiliary relay, on the relay contact's output, use a CR filter as the arc suppressor
circuit (when using AC), or protect the circuit with a diode, etc.
(Refer to the Contact protection circuit for
monitor section on page 1011.)
30VA, 15W
Integrated relay: G2Q-187P-V, OMRON
2 Analog output (Option symbol: No symbol, -A1, -A2, -A3)
Load resistance for analog output
Analog output
Analog output (mA)
Analog output (V)
Load resistance
1MΩ or more
DC 4 to 20mA
500Ω or less
DC1 to 5V
1MΩ or more
DC 0 to 10V
1MΩ or more
Model no.
Min. value (N /min)
FS(N /min)
PF500D
PFK500D
PF1000D
PFK1000D
PF2000D
PFK2000D
PF4000D
PFK4000D
PF8000D
PFK8000D
400
8000
PF16000E
800
16000
25
500
50
1000
100
2000
200
4000
• The relation of the flow and analog output
is shown in the graphs at left. Analog output is not output correctly when lower than
the minimum. Note that flow is displayed
on the monitor even when less than the
minimum.
• Do not short-circuit the analog output terminal (AO) with other terminals. Failure to
observe this could result in problems.
• Keep wiring short to prevent the effect of
noise. Separate the wire from sources of
noise such as power distribution cables.
Analog output (V)
Analog output (V)
Descriptions
DC 0 to 5V
3 Cumulative pulse output (Option symbol: -A6)
Model No.
Cumulative flow
rate per pulse
PF500D
PF1000D
PF2000D
PF4000D
10
Example: The pulse waveform for the PF8000D is shown below.
When the cumulative display exceeds
100N
40msec
ON
When the cumulative display exceeds
200N
40msec
40msec
ON
OFF
40
msec
OFF
Time
Time
Note that the cumulative display is updated at 1 s intervals.
1022
PF8000D
[N ]
PF16000E
100
• Electrical specifications
Output circuit
Transistor
output
Internal circuit
• The cumulative pulse outputs the pulse at the following cumulative value:
OUT21
Rating across OUT21 and 22
Maximum rated voltage: 35 VDC
Maximum rated current: 50 mA
OUT22
Common GND
PF/PFK Series
Electric wiring
4 Wiring the sensor and monitor
Refrigerating
type dryer
• Observe the following precautions when wiring
Desiccant
type dryer
High polymer
membrane
dryer
Gland layout
Use the CKD dedicating connector cable (PF-FL-280774).
Specifications : For DC applications
Equivalent
Air filter
4-core 0.5 mm2
: X2S2F-D421-G80-A,
OMRON Note that the cable is 5 m long.
Use the CKD extension cable (PF-FL-280775) to extend the
cable. The dedicating cable can be connected with the
extension cable to achieve a maximum length of 6 m.
Extending the cable any longer results in errors.
Automatic
drain
other
F.R.L
(Module)
F.R.L
(Separate)
Small
F.R.
Precise
R.
Electro
pneumatic R.
• Cumulative flow is cleared by connecting the RES terminal
to the GND terminal.
Auxiliary
Flow control
valve
Silencer
Check valve
/ others
Joint
/ tube
Vacuum
F.
Vacuum
R.
Pulse output (Option symbol: -A6)
Vacuum
generator
Vacuum
auxiliary
/ pad
Mechanical
pressure SW
Electronic
pressure SW
Electronic
dif. pres.
SW
Seating / close
contact conf.
SW
Pressure SW
for coolant
Flow sensor
for air
Total air
system
PFK500D to 8000D
Cable and power cord
storage section
Water
cooling
refrigerator
Flow sensor
for water
Coupler storage
section
Cable (3m)
Flow sensor
For compressed air
Switch output terminal
Recorder terminal
Power cord (2. 5m)
Power switch
AC100V
1023
PF/PFK Series
PF/PFK Series
Explanation of functions and operation
Explanation of monitor functions and operations
<MEASUREMENT MODE>
Sensor error light
Refrigerating
type dryer
Flow display changeover
Bar graph
Shows the peak value and load factor.
The normal flow is measured and displayed.
Indicates errors in the sensor section.
N
The sensor's power is shut off when this light is ON.
Switch operation : Operating state
Analog output : Operating state
5-digit digital display
<MEASUREMENT MODE>
Displays the instantaneous and
cumulative flows.
<WRITE MODE> <READ MODE>
Displays the switch setting, bar graph
setting, peak value, etc.
Switch output light
Indicates the switch's output state.
N
Cumulative flow
<Unit> N
READ
Indicates the unit for the "5-digit digital
display".
Reads the setting value.
Shifts to the <READ MODE>.
Shift key
UP key
<WRITE MODE> Increments the blinking digit.
N
N
N
N
Use this to show cumulative flow rate for a short time,
while show the instantaneous flow normally.
1) The display shown at left is displayed when the CHANGE
key is pressed.
Note that only the unit matching the current cumulative flow
is displayed when this display is opened first.
2) The unit light blinks when the temporary value is displayed.
3) The original display is returned to after 10 seconds.
N
CHANGE key
<WRITE MODE> Shifts the blinking digit to the right.
N
N
Unit display light
Read key
Instantaneous flow
<Unit> N
Desiccant
type dryer
Changing the flow temporarily
Changing the normally displayed flow
Cumulative flow
<Unit> N
<MEASUREMENT MODE>
Toggles between instantaneous and
cumulate flows.
<WRITE MODE>
Changes the setting.
N
N
N
N
Cumulative flow
<Unit>
N
* The unit of instantaneous flow displayed for the PF16000E is Nm3/min.
N
N
N
High polymer
membrane
dryer
Air filter
Automatic
drain
other
F.R.L
(Module)
F.R.L
(Separate)
Small
F.R.
Use this to select the flow to be displayed at all times.
Precise
R.
1) Press the CHANGE key. When the required display is
displayed, hold down the CHANGE key for 5 seconds.
2) The changeover is completed when the unit light changes
from blinking to continuously lit.
3) The instantaneous flow is displayed at shipment.
Electro
pneumatic R.
Auxiliary
Flow control
valve
Silencer
CHANGE
<READ MODE>
READ
Check valve
/ others
Hold down the and keys
simultaneously for 3 seconds.
<WRITE MODE>
Joint
/ tube
Vacuum
F.
The switch setting, bar graph setting value, etc., are set or changed.
The switch setting, bar graph setting, etc., are read out.
Switch operation : Operating state
Analog output : Operating state
Switch parameters
Three types of parameters are selected
based on the application.
READ
Switch High display
READ
Mechanical
pressure SW
CHANGE
Electronic
pressure SW
Switch Low setting
CHANGE
Switch High setting
Flow
CHANGE
Hysteresis
Pressure SW
for coolant
CHANGE
Hysteresis setting
Hysteresis display
CHANGE
READ
Bar graph 100% setting
Peak display
READ
Cumulative value display
Peak value cleared
Cumulative value cleared
Set the required value by pressing the
(SHIFT key) and
(UP key) at the
blinking digit.
(Shift Key)
1024
(Up Key)
The load factor is displayed on the
bar graph when the 100% flow rate is
set.
Displaying and clearing the
peak value
The peak value within 24 hours after
power ON or after the peak value
was cleared is displayed.
To clear the value, hold down the and
keys simultaneously for 10 seconds,
then change to MEASUREMENT
MODE. Data is cleared.
Displaying and clearing the
cumulative value
Flow sensor
for air
Total air
system
Water
cooling
refrigerator
Flow sensor
for water
Flow sensor
For compressed air
READ
Hold down the and keys
simultaneously for 10 seconds.
Bar graph 100% display
Electronic
dif. pres.
SW
Seating / close
contact conf.
SW
(Hysteresis is set with
parameters 0 and 1.)
Bar graph 100% setting
READ
Vacuum
generator
Vacuum
auxiliary
/ pad
Hysteresis
Hold down the and keys
simultaneously for 3 seconds.
Switch Low display
Hysteresis
A wide setting can be made randomly.
Switch parameter setting
Switch parameter display
READ
Vacuum
R.
Switch operation: Stopped
Analog output: Operating state
The cumulative flow from the value at
shipment is displayed. To clear the
value, hold down the and keys
simultaneously for 10 seconds, then
change to MEASUREMENT MODE.
Data is cleared.
1025
PF/PFK Series
Explanation of functions
Piping adapter
Platinum membrane sensor
(fluid temperature detection resistor)
Platinum membrane sensor
(heater temperature detection resistor)
Flow path
Rectifier
Fluid direction
Pressure loss characteristics
• PF1000D-15 / PFK500D / PFK1000D
0.080
0.060
0.060
0.060
0.040
0.1
MPa
0.020
0.4
MPa
0.7
MPa
750
0.020
0.000
1000
0
0.080
0.080
0.060
0.060
0.1
MPa
0.040
0.020
0.4
MPa
0.7
MPa
0.000
1000
500
Flow (N /min)
1500
750
0.1
MPa
0.4
MPa
0.7
MPa
0.020
0.040
0.4
MPa
0.7
MPa
0.020
0.000
2000
1000
Flow (N /min)
3000
6000
8000
1500
0.080
2000
0.1
MPa
0.060
0.040
0.4
MPa
0.7
MPa
0.020
4000
0
2000
1000
Flow (N /min)
2000
0.080
0.080
0.060
0.060
0.1
MPa
0.040
0.020
0.4
MPa
0.7
MPa
0.040
0.1
MPa
0.020
0.000
0
4000
2000
Flow (N /min)
4000
• PF16000E-50
0.000
4000
2000
Flow (N /min)
500
1000
Flow (N /min)
0.000
0
Pressure loss (MPa)
0.1
MPa
0
0
• PF4000D-25 / PFK4000D
• PF8000D-40 / PFK8000D
0.060
0.4
MPa
0.7
MPa
0.020
0.000
0.000
0.080
0.1
MPa
0.040
1000
0.040
2000
• PF8000D-25
Pressure loss (MPa)
500
250
Flow (N /min)
• PF4000D-15
Pressure loss (MPa)
Pressure loss (MPa)
• PF2000D-15 / PFK2000D
0
0.4
MPa
0.7
MPa
Pressure loss (MPa)
500
250
Flow (N /min)
0.1
MPa
Pressure loss (MPa)
0
0.040
Pressure loss (MPa)
0.080
0.000
1020
PF2000D-10
0.080
Pressure loss (MPa)
Pressure loss (MPa)
• PF500D / PF1000D-10
The sensor section consists of a rectifier that passes
an even amount of compressed air, a heater temperature detection resistor with integrated heater,
and fluid temperature detection resistance for detecting fluid temperature.
When compressed air is not flowing, electricity flows
to the heater at the heater temperature detection
resistor to maintain it at a set temperature. When
compressed air flows, heat is lost in proportion to
the air mass, so current flows to the heater temperature detection resistor to maintain the set temperature.
The monitor receives a signal indicating the amount
of electricity that has flowed, and displays the air's
instantaneous and cumulative flows obtained by
converting to 0°C with practical atmospheric pressure.
The fluid temperature detection resistor measures
and compensates for the temperature of compressed air.
6000
8000
0
8000
4000
Flow (N /min)
12000
0.4
MPa
0.7
MPa
16000
Flow sensor for compressed air (flow rate sensor)
PF500D to PF8000D / PF16000E Series
Flow sensor for compressed air with various functions
• Flow rate range: 25 to 500, 50 to 1000, 100 to 2000
200 to 4000, 400 to 8000 and 800 to 16000N /min
CAD DATA AVAILABLE.
Specifications
PF500D PF500D PF1000D PF1000D PF2000D PF2000D PF4000D PF4000D PF8000D PF8000D
-15
-10
-15
-25
-10
-10
-15
-15
-25
-40
Spec.
Descriptions
Diversion range
N /min
Port size
25 to 500
Rc3/8
Rc1/2
50 to 1000
Rc3/8
Working conditions
Applicable fluid
Rc3/8
Working air quality
Min. working pressure
MPa
0.1
Withstanding pressure
MPa
2.25
400 to 8000
0 to 40
± 1.5%F.S (0.7MPa, 20°C)
± 2.0%F.S (0 to 40°C, while 20°C standard)
Temperature characteristics
Approx. 1.25
sec
Approx. 2.5
5 digits LED display
*3
10N /min
20N /min
30N /min
50N /min
100N /min
0.2Nm3/min
Max. 9 digits
However, display switched by change key
Integrating flow rate
Standard: DCO to 5V Option: DC4 to 20mA, 1 to 5V and 0 to 10V
Analog output
Relay contact (1ch, a contact)
Switch output
Pulse output (option)
± 2.5%F.S. * 2
± 1.5%F.S (0.1 to 1.5MPa, 0.7MPa standard)
Pressure characteristics
Min. display flow rate
*4
10N /pulse
100N /pulse
AC100V ± 10%(Max. 10W)
Power supply
Auxiliaries (3m connector, 0.5mm2 conductor)
Cable
Semipermanent due to EEPROM
Set value holding function
Both vertical and horizontal (resin cover facing downward excluded)
Installation attitude
Installation strait piping section
Upper stream: 10D
Not required
Protective structure
Down stream : 5D * 5
Equivalent to IP64 (sensor section only)
kg
1.5
2.0
2.2
* 1: If foreign matter, moisture or oil is contained in the compressed air, detecting flow rate is failed, so " sensor error " is displayed.
Install a filter, refrigerating type dryer and oil mist filter before a flow sensor.
* 2: Same conditions as PF8000D; 0.7MPa, 20°C are applied.
* 3: If lower than min. flow rate range, 0 is indicated. Also, for indicated value under flow rate range, accuracy is not guaranteed.
* 4: Refer to descriptions of integrating pulse output on Page 1022 for details of pulse output.
* 5: 1D shows pipe inner diameter, so prepare 10D= approx. 530mm and 5D= approx. 265mm long strait piping section.
1012
Rc2
0 to 50°C, 85%RH or less
°C
Linearity
JIS symbol
800 to 16000
Rc11/2
Rc1
1.5
Ambient temperature and humidity
Mass
Rc1
Atmospheric dew point -17°C or less (* 1)
MPa
Display
Output
Rc1/2
Max. working pressure
Output response time
Installation
200 to 4000
Rc1/2
Compressed air / N2 gas
Fluid temperature
Accuracy
100 to 2000
Rc1/2
PF16000E
-50
5.0
PF Series
How to order
How to order
Symbol
A
A
Flow rate range
B
B
Port size
C
C
Output
PF16000E
PF8000D
PF4000D
Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
dryer
Descriptions
Flow rate range
500D
25 to 500N /min
1000D
50 to 1000N /min
2000D
100 to 2000N /min
4000D
200 to 4000N /min
8000D
400 to 4000N /min
16000E
800 to 16000N /min
Air filter
Automatic
drain
other
F.R.L
(Module)
F.R.L
(Separate)
Small
F.R.
Precise
R.
Port size
10
Rc3/8
15
Rc1/2
25
Rc1
40
Rc11/2
50
Rc2
Electro
pneumatic R.
Auxiliary
Flow control
valve
Silencer
Output
Blank
PF2000D
A1
PF1000D
15
PF500D
PF 4000D
Model
Analog output DC0 to 5V (standard)
A1
Analog output DC4 to 20mA
A2
Analog output DC1 to 5V
A3
Analog output DC0 to 10V
A6
Integrating pulse output
Above circled combination can be manufactured.
Check valve
/ others
Joint
/ tube
Vacuum
F.
Vacuum
R.
Vacuum
generator
[Example of model number]
Vacuum
auxiliary
/ pad
PF4000D-15-A1
Mechanical
pressure SW
Model: PF4000D
A Flow rate range : 200 to 4000N /min
B Port size
: Rc1/2
C Output
: Analog output DC4 to 20mA
Electronic
pressure SW
Electronic
dif. pres.
SW
Seating / close
contact conf.
SW
Pressure SW
for coolant
Flow sensor
for air
Total air
system
Water
cooling
refrigerator
Flow sensor
for water
Flow sensor
For compressed air
1013
PF Series
Internal structure and parts list
• PF500D to PF8000D
10
8
4
No.
11
6
Parts name
7
9
5
3
Material
12
13
1
2
No.
8
6
4
Parts name
Material
1
Platinum thin film sensor 1 Ceramic / platinum
8
O ring
NBR
2
Platinum thin film sensor 2 Ceramic / platinum
9
Mesh
SUS304
Stainless steel
3
Body
A6063
Aluminum alloy
10
Collar
A6063
Aluminum alloy
4
Attachment
A6063
Aluminum alloy
11
Gasket
NBR
Nitrile rubber
5
Sensor base
PBT
PBT
12
Sensor circuit board
—
6
O ring
NBR
Nitrile rubber
13
Sensor cover
ABS
7
O ring
NBR
Nitrile rubber
Nitrile rubber
ABS resin
• PF16000E
6
1
2
No.
1014
4
5
Parts name
6
10
Material
1
Separate flow sensor section Refer to the figure above.
2
Body 1
A6063
3
Body 2
4
5
7
No.
8
5
9
4
Parts name
3
Material
6
Sub attachment
SUS304
Stainless steel
Aluminum alloy
7
O ring
NBR
Nitrile rubber
A6063
Aluminum alloy
8
Orifice
C3604
Copper alloy
Spacer
A6063
Aluminum alloy
9
Aspirator
C3604
Copper alloy
O ring
NBR
Nitrile rubber
10
O ring
NBR
Nitrile rubber
PF Series
Dimensions
Dimensions
Refrigerating
type dryer
(File name: Page 1026 or Ending 30)
• PF500D to PF8000D
Sensor section
Desiccant
type dryer
High polymer
membrane
dryer
A
60
F
End of model no.
Port size
-10
Rc3/8
Air filter
-15
Rc1/2
-25
Rc1
Automatic
drain
other
-40
Rc11/2
3000
7 dia.
Entrance
Exit
F.R.L
(Module)
4.5
F.R.L
(Separate)
Bracket
6.5
K
J
Small
F.R.
B
47
L
Precise
R.
36
Electro
pneumatic R.
Auxiliary
Flow control
valve
C
E
Port size
D
Silencer
I
H
G
N
24
Model no.
M
Joint
/ tube
8
3
Check valve
/ others
Vacuum
F.
Vacuum
R.
A
B
C
D
E
F
G
H
I
J
K
L
M
N
PF500D / 1000D / 2000D-**
135
52
82
22.5
59.5
24
72
64
33
36
26
49.5
55.5
PF4000D-**
176
57
91
27
64
38
72
64
33
36
26
70
76
PF8000D-**
188
66
99
31
68
44
84
74
42
40
28
74
82
M4 thread
length 4.5
M4 thread
length 4.5
M5 thread
length 3.6
Vacuum
generator
Vacuum
auxiliary
/ pad
Mechanical
pressure SW
Electronic
pressure SW
Monitor section
68
16
72
Electronic
dif. pres.
SW
Seating / close
contact conf.
SW
Pressure SW
for coolant
Flow sensor
for air
Total air
system
72
5
108
Water
cooling
refrigerator
122
76
Flow sensor
for water
52
68
68
80 and over
80 and over
80 and over
68
80 and over
Flow sensor
For compressed air
• Panel cut dimension
Standard panel cut dimension is shown as below.
(Note) Appropriate panel plate thickness is 1 to 4mm.
68
1015
PF Series
Dimensions
• PF16000E
Sensor section
(File name: Page 1026 or Ending 30)
Note 1: This product is always used with applicable monitor PFM16000E.
Note 2: When installation, the flow direction must
be as same as flow direction on name
plate.
59.5
37.5
75
128.5
2-Rc2 (S)
79
99
300
68
16
72
Monitor section
72
5
68
68
80 and over
80 and over
1016
68
68
52
68
• Panel cut dimension
Standard panel cut dimension is as shown below.
(Note) Appropriate panel plate thickness is 1 to 4mm.
80 and over
80 and over
108
122
76
Flow sensor for compressed air, tester kit
PFK Series
Air flow rate measuring component kit is available to measure the flow
rate instantly at workshop.
• Flow rate range: 25 to 500, 50 to 1000, 100 to 2000,
200 to 4000, 400 to 8000N /min
Specifications
Spec.
Descriptions
PFK500D
Flow rate range N /min
Port size
PFK1000D
PFK2000D
PFK4000D
PFK8000D
25 to 500
50 to 1000
100 to 2000
200 to 4000
400 to 8000
Rc1/2
Rc1/2
Rc1/2
Rc1
Rc11/2
Working conditions
Applicable fluid
Compressed air / N2 gas
Working air quality
Accuracy
1.5
Min. working pressure MPa
0.1
Withstanding pressure MPa
2.25
Ambient temperature and humidity
0 to 50°C 85%RH or less
Fluid temperature
°C
0 to 40
± 1.5%F.S (0.7MPa and 20°C)
Linearity
Pressure characteristics
± 1.5%F.S (0.1 to 1.5MPa, 0.7MPa standard)
Temperature characteristics
± 2.0%F.S (0 to 40°C, 20°C standard)
Response time
Output
Atmospheric dew point -17°C or less (* 1)
Max. working pressure MPa
sec
Approx. 1.25
Analog output
Standard DC0 to 5V Option: DC4 to 20mA, 1 to 5V and 0 to 10V
Switch output
Relay contact (1ch, a contact)
AC100V ± 10% (10W or less)
Power voltage
Auxiliaries (3m connector, 0.5mm2 conductor) * 2
Cable
Installation
Set value holding function
Semipermanent due to EEPROM
Installation attitude
Both vertical and horizontal (resin cover facing downward excluded)
Installation strait piping section
Not required
Protective structure
Mass
Equivalent to IP64 (sensor section only)
kg
5.6
7.4
9.2
* 1: If foreign matter, water or oil is contained in the compressed air, detecting flow rate could be failed, so " sensor error " is displayed.
Always install a filter, refrigerating type dryer and oil mist filter before a flow sensor.
* 2: Extension cable (3m) can be connected. Model no. PF-FL-280775
How to order
Product structure
PFK
4000D
Symbol
A
A
Case
(Monitor)
Sensor
Coupler (2 pieces)
Cable (3m)
1018
Power cable (2.5m)
Flow rate range
Descriptions
Flow rate range
500D
25 to 500N /min
1000D
50 to 1000N /min
2000D
100 to 2000N /min
4000D
200 to 4000N /min
8000D
400 to 8000N /min
PFK Series
Dimensions
Dimensions
Refrigerating
type dryer
• PFK
Sensor section
Desiccant
type dryer
B
A
A
B
C
Sensor for PFK500D to 2000D
215
251
Rc1/2
Sensor for PFK4000D
292
338
Rc1
338
390
Rc11/2
Sensor for PFK8000D
High polymer
membrane
dryer
Air filter
Automatic
drain
other
F.R.L
(Module)
C
F.R.L
(Separate)
Coupler
Knob
Case
Small
F.R.
Precise
R.
Electro
pneumatic R.
245
Auxiliary
Flow control
valve
Silencer
389
220
Check valve
/ others
Joint
/ tube
Vacuum
F.
Vacuum
R.
Vacuum
generator
Vacuum
auxiliary
/ pad
Mechanical
pressure SW
Electronic
pressure SW
Electronic
dif. pres.
SW
Seating / close
contact conf.
SW
Pressure SW
for coolant
Flow sensor
for air
Total air
system
Water
cooling
refrigerator
Flow sensor
for water
Flow sensor
For compressed air
1019
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