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ELEC-E3220 - Semiconductor Devices Spring 2016 Course overview Hele Savin Ville Vähänissi Alessandro Inglese Department of Micro and Nanosciences Overview of the course • • • • • Topics to be covered Schedule Course material Examination Mycourses website Topics to be covered • Summary of pn- and metal-semiconductor junction physics • MOS • MOSFET • Semiconductor device fabrication (basics, background for Microfabrication course) • Operation principle and latest application examples of – – – – radiation sensors mechanical sensors solar cells company seminar (Vaisala Oyj) Lectures • Time: Monday 13.15 - 16.00 Wednesday 13.15 - 16.00 and • Place: Micronova building, large seminar hall • Lecturers: Hele Savin, Micronova building 4th floor (4158), [email protected] Ville Vähänissi, Micronova building 4th floor (4154), [email protected] Alessandro Inglese, Micronova building 4th floor (4152), [email protected] Mikko Juntunen, Micronova building 4th floor (4150), [email protected] Course material • Chenming Calvin Hu "Modern Semiconductor Devices for Integrated Circuits", Pearson Education (2010) - chapters 3,4,5,6,7 https://www.eecs.berkeley.edu/~hu/Book-Chapters-andLecture-Slides-download.html Lecture slides, available at mycourses webpage • Handouts on solar cells and mechanical sensors Choices for passing the course TWO possibilities 1. Take the exam (in February) + Solve the exercises (you get extra points) or 2. Take only the exam (in February and fall 2016) Grading 1. Exam → grade from the exam (max 30 points) 2. Exercises (max 10 points) Grade Points 1 15-18 2 19-21 3 22-24 4 25-27 5 28-40 Exam • • • The next exam is held on 17.2.2016 Typically the exam is held once during spring and once during autumn The exam consists of 6 exercises covering all the course topics Exercises • Numerical exercises that must be solved before each exercise session. • The solution will be provided during the exercise sessions (see schedule). • You will earn extra points by solving the exercises and returning the solution before the deadline! – Excellent training for the final exam…(participation highly recommended) Schedule Date Time Content 4.1. 13-16 Course overview / Schottky and pn-junctions 11.1. 13-16 MOS capacitor 13.1. 13-16 MOSFET transistor + Exercise session #1 (2p - homework) 18.1. 13-16 MOSFET transistor 20.1. 14-16 Oxidation + Lithography + Exercise session #2 (2p - homeork) 25.1. 13-16 Doping ,Thin film deposition 27.1. 13-16 Mechanical sensors + Exercise session #3 (1p – during lecture) 1.2. 13-16 Radiant + Medical sensors + Exercise session #4 (1p – during lecture) 3.2. 13-16 Company presentation ( Vaisala Oyj) 8.2. 13-16 Solar cells 10.2. 13-16 Device fabrication + Exercise session #5 (1p) 15.2. 13-16 Summary exercises (3p – homework) 17.2. 13-16 Exam My Courses • https://mycourses.aalto.fi/course/view.php?id=5129 • All material available there – – – – – – Book chapters Lecture slides Videos Assignments (exercises) News … • Return your work/exercises to mycourses!