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Nanoelectrochemical Systems on CMOS PI: Sameer R Sonkusale Associate Professor PhD University of Pennsylvania Nanoscale Integrated Sensors and Circuits Laboratory Department of Electrical and Computer Engineering Advanced Technology Laboratory 200 Boston Avenue, Medford, MA 02155 Goal
To develop a low-cost, mask-less nano-fabrication paradigm that
combines the top-down process (CMOS) with the bottom-up
approach (directed assembly) for single chip sensing
applications
2
Artificial Nose
Sensor Chip
rGO
CuO
Sensor Array output
CNT
Classificat
Breath diagnostics for detection of lung cancer,
asthma, COPD is possioble