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Review Novel Molecular Non-Volatile Memory: Application of Redox-Active Molecules Hao Zhu 1,2 and Qiliang Li 2, * Received: 1 December 2015; Accepted: 21 December 2015; Published: 26 December 2015 Academic Editor: Hung-Yu Wang 1 2 * State Key Laboratory of Application-Specific Integrated Circuits and System, School of Microelectronics, Fudan University, Shanghai 200433, China; [email protected] Department of Electrical and Computer Engineering, George Mason University, Fairfax, VA 22030, USA Correspondence: [email protected]; Tel.: +1-703-993-1596; Fax: +1-703-993-1601 Abstract: This review briefly describes the development of molecular electronics in the application of non-volatile memory. Molecules, especially redox-active molecules, have become interesting due to their intrinsic redox behavior, which provides an excellent basis for low-power, high-density and high-reliability non-volatile memory applications. Recently, solid-state non-volatile memory devices based on redox-active molecules have been reported, exhibiting fast speed, low operation voltage, excellent endurance and multi-bit storage, outperforming the conventional floating-gate flash memory. Such high performance molecular memory will lead to promising on-chip memory and future portable/wearable electronics applications. Keywords: molecular electronics; redox-active molecules; non-volatile memory; high density; high endurance 1. Introduction The continuous complementary metal-oxide-semiconductor (CMOS) scaling is reaching the fundamental limits imposed by heat dissipation and short-channel effects. This will finally stop the increase of integration density and the ability of metal-oxide-semiconductor field-effect transistors (MOSFET) predicted by Moore’s law [1–4]. Huge demand has been thus created for high-performance semiconductor devices for future applications in memory and emerging portable/wearable electronic devices. Molecular technology has been aggressively pursued for its potential impact in nano-scale electronics since the early 1970s due to the inherent scalability and intrinsic properties [5–7]. Molecular memory, among all of the new emerging candidates in recent years, is considered promising, particularly for the aim of reducing the size per cell and enhancing the memory speed, density and reliability [8–10]. Molecular electronic devices are typically fabricated by forming a self-assembled monolayer (SAM) or multi-layer on different surfaces with very inexpensive and simple processing methods. Moreover, molecular memory works by the controlling of fewer electrons at the molecule scale and, therefore, has potential for low-power and ultra-high-density memory applications with a lower fabrication cost. Redox-active molecules have become attractive to replace the floating gate in conventional flash memory, due to their inherent and reliable redox behaviors. Typically, applying an oxidation voltage will cause electron loss in redox molecules; reversely, under a reduction voltage, electrons will be driven back to the molecules. Due to the oxidation and reduction of the redox centers, these redox molecules can exhibit distinct charged or discharged states, which can be deemed as logic on and off states, at different voltages with very fast write and erase speeds. It has been demonstrated that redox-active molecules attached to Si structures are stable and can endure more than 1012 program/erase (P/E) cycles [11]. This excellent performance is naturally derived from the intrinsic Appl. Sci. 2016, 6, 7; doi:10.3390/app6010007 www.mdpi.com/journal/applsci Appl. Sci. 2016, 6, 7 2 of 15 properties of the redox behavior in molecules. These advantageous properties of redox molecules make them very promising candidates for future applications in on-chip non-volatile memory, such as SRAM and dynamic random-access memory (DRAM). In addition, due to the scalability of molecules and the naturally-derived multiple redox states for robust charge storage, the molecular memory density can be much higher than the conventional memory devices. Great efforts have been made to integrate molecules as the active component for future electronic devices. In this paper, we review the development of molecular electronics for non-volatile memory applications with a focus on redox-active molecules, meanwhile presenting further strategies to extend their applications in future low-power and ultra-high-density non-volatile memory applications. 2. Molecular Logic Switching Devices Two fundamentally different approaches to molecular electronics are graphically termed “top-down” and “bottom-up”. Instead of top-down, which includes making nano-scale structures by machining and etching techniques, molecular electronics rely on the “bottom-up” approach, by taking advantage of molecule self-assembly. Bottom-up refers to building organic or inorganic structures by atom-by-atom or molecule-by-molecule techniques. In the past few decades, research on molecular electronics has been focusing more and more on the combination of top-down device fabrication (mainly lithography) with bottom-up molecule self-assembly. The crossbar molecular circuit is one of the earliest logic forms of molecular memory arrays. The switching element is a metal/molecule/metal sandwich junction, wherein the molecules are located at the cross-section of two nanoscale metal wires (Figure 1). The early demonstration of such junction molecular switching devices utilized molecules consisting of two mechanically-interlocked rings [12–15]. The molecular monolayers were deposited as a Langmuir–Blodgett film. The mechanical motion of these molecules is an activated redox process, and two stable and electrochemically-switchable states of the molecules form the logic on and off states. As shown in Figure 1, the molecular switching devices can exhibit a ~102 on/off current ratio, but with limited endurance cycles. Based on such switching devices, an 8 ˆ 8 crossbar has been built by the Hewlett-Packard research group [16]. This approach has the advantage of architectural simplicity and the potential of high density via fabrication of highly dense nanowires. However, this approach has two major disadvantages, including a high rate of defective switching elements and the difficulty in controlling the metal/molecule interface. Even though a defect-tolerant architecture had been established earlier, the metal/molecule problems in such junction switching devices and crossbar circuits are still to be addressed [17]. In later publications, it was reported that the electron transport phenomena in the metal/molecule/metal junction were molecule independent; instead, they were dominated by electrode reactions with molecules, and the intrinsic spacing of the energy levels might be modified [18–20]. Another architecture utilizing metal/molecule/metal junction is the so-called nanocell molecular circuit, proposed by researchers at Rice University and Yale University [21–24]. A nanocell is a two-dimensional network of self-assembled metallic particles connected by molecules that show reprogrammable negative differential resistance (illustrated in Figure 2) [21,22]. The nanocell is surrounded by a small number of lithographically-defined metal lines that provide input and output leads. The active component for a nanocell is also a metal/molecule/metal switch, and one pathway may include more than one molecular switch [25–27]. The molecule pathways can be learned first by developing appropriate computation algorithms; then, the whole cell can be programmed to perform a particular function. Such a nanocell molecular circuit uses similar molecular switches as the crossbar molecular circuit, but the circuit architecture is quite different. Compared to the crossbar approach, the nanocell approach has the advantages of large-scale circuit fabrication and integration. However, the disadvantage is that it relies on complex programming algorithms. Meanwhile, both the nanocell and crossbar approaches may have the same difficulty in controlling the metal/molecule interface. Appl. Sci. 2016, 6, 7 Appl. Sci. 2016, 6, 7 3 of 15 Figure 1. (Top) Atomic force microscopy image of a nanoscale cross-point molecular switching device Figure 1. (Top) (Top)Atomic Atomic force microscopy image a nanoscale cross-point molecular switching Figure 1. force microscopy image of a of nanoscale cross-point molecular switching device with [2] a rotaxane monolayer sandwiched between two metal line electrodes; (Bottom) device device with [2] a rotaxane monolayer sandwiched between two metalline lineelectrodes; electrodes; (Bottom) (Bottom) device with [2] a rotaxane monolayer sandwiched between two metal device resistance read at 0.2 V after multiple switching cycles. Reproduced with permission from [14], © AIP resistance resistance read read at at 0.2 0.2 V V after after multiple multiple switching switching cycles. cycles. Reproduced Reproduced with with permission permission from from [14], [14], © © AIP AIP Publishing LLC, 2003. Publishing LLC, 2003. Publishing LLC, 2003. Figure 2. SEM SEM image image of of aananocell nanocell after afterassembly assembly of ofthe theAu Aunanowires nanowires and andmononitro mononitro oligo(phenylene oligo(phenylene Figure 2. Figure 2. SEM image of aTop: nanocell after assembly of the Au nanowires and mononitro oligo(phenylene ethynylene) compound. five pairs of leads across the nanocell; Bottom: higher magnification ethynylene) compound. Top: five pairs of leads across the nanocell; Bottom: higher magnification of of ethynylene) compound. Top: fivewith pairs ofattached leads acrossnanowire, the nanocell; Bottom: higher magnification of the is is affixed viavia thethe derivative of the central central portion portion of ofthe thenanocell nanocell withan an attachedAu Au nanowire,which which affixed derivative the centraloligo(phenylene portion of the nanocell with an attached Au nanowire, which is[22], affixed via the derivative mononitro ethynylene). Reproduced with permission from © American Chemical of mononitro oligo(phenylene ethynylene). Reproduced with permission from [22], © American of mononitro oligo(phenylene ethynylene). Reproduced with permission from [22], © American Society, 2003. Chemical Society, 2003. Chemical Society, 2003. In addition been tested as addition to tothe themetal/molecule/metal metal/molecule/metal switching switching devices, devices,molecules moleculeshave havealso also been tested In addition to the metal/molecule/metal switching devices, molecules have also been tested the channel material in ainstandard MOSFET structure [28–31]. As As shown in Figure 3, by the as the channel material a standard MOSFET structure [28–31]. shown in Figure 3, replacing by replacing as the channel material in a standard MOSFET structure [28–31]. As shown in Figure 3, by replacing high-k dielectric withwith an ultra-thin SAM of an active layer in ain field-effect transistor (FET), the the high-k dielectric an ultra-thin SAM oforganic an organic active layer a field-effect transistor (FET), the high-k dielectric with an ultra-thin SAM of an organic active layer in a field-effect transistor (FET), Infineon researchers havehave reported an organic field-effect transistor (OFET)(OFET) with low operation voltage the Infineon researchers reported an organic field-effect transistor with low operation the Infineon researchers have reported an organic field-effect transistor (OFET) with low operation voltage and low gate leakage current [31]. The demonstrated OFETs operate with a supply voltage voltage and low gate leakage current [31]. The demonstrated OFETs operate with a supply voltage 3 3 Appl. Sci. 2016, 6, 7 Appl. Sci. 2016, 6, 7 4 of 15 and low gate leakage current The lower demonstrated operate with supply less than of less than 2 V, yet have gate [31]. currents than thatOFETs of the traditional Si aFET withvoltage the SiOof 2 dielectric. 2 V, yet have gate currents lower than that of the traditional Si FET with the SiO dielectric. However, However, the switching speed of the OFET is still not comparable to Si transistors, and the limited 2 the switching of theasOFET comparable to Si for transistors, the limitedAnother device device lifetimespeed remains one isofstill thenot major bottlenecks further and applications. lifetime remains as one of theismajor bottlenecks applications.and Another disadvantage of disadvantage of such OFETs the poor stabilityfor in further a high temperature volatile environment. such OFETs is the poor stability in a high temperature and volatile environment. Thus, the application Thus, the application of organic molecules in advanced silicon CMOS technology is still under of organicand molecules advanced siliconefforts. CMOS technology is still under question and requires further question requiresinfurther research research efforts. Figure 3. Structureand and electrical electrical characteristics characteristics ofof aa molecular molecular FET. FET. (a) (a) Structure Structure of of Figure 3. Structure (18-phenoxyoctadecyl)trichlorosilane (b) structure of the organic pentacene; (18-phenoxyoctadecyl)trichlorosilane(PhO-OTS); (PhO-OTS); (b) structure of the semiconductor organic semiconductor (c) cross-section of a pentacene organic field-effect transistor transistor (OFET); (d) output transfer pentacene; (c) cross-section of a pentacene organic field-effect (OFET); (d)and output and characteristics, with subthreshold region showing a subthreshold swing of 100 mV per decade transfer characteristics, with subthreshold region showing a subthreshold swing of 100 mV [31]. per Reproduced with permission [31], © Nature Publishing 2004. Group, 2004. decade [31]. Reproduced withfrom permission from [31], © NatureGroup, Publishing Redox-ActiveMolecule-Based Molecule-BasedNon-Volatile Non-Volatile Memory Memory 3. Redox-Active Appropriate modifications thethe molecular structures and switching elements have been designed Appropriate modificationsof of molecular structures and switching elements have been to change the switching kinetics and to enhance the performance for different memory applications. designed to change the switching kinetics and to enhance the performance for different memory Different device platforms have been engineered interface with the molecules, such as dielectrics, applications. Different device platforms have beentoengineered to interface with the molecules, such oxides, nanowires, carbon nanotubes, andnanotubes, so forth. Aand well-known method to achieve a memory effect as dielectrics, oxides, nanowires, carbon so forth. A well-known method to achieve a is by employing redox-active Theelements. redox mechanism electrons being transferred memory effect is by employingelements. redox-active The redoxinvolves mechanism involves electrons being from one element to another, that a donor gives element up an electron (oxidation) to an accepting transferred from one elementsuch to another, suchelement that a donor gives up an electron (oxidation) element (reduction). This(reduction). process usually external stimulus for redoxstimulus reactions, as to an accepting element This requires process an usually requires an external forsuch redox an electric such field or in temperature. Suchinredox-active molecule-based memory devices can reactions, as change an electric field or change temperature. Such redox-active molecule-based show fastdevices speed, low operation voltagelow andoperation high reliability, the intrinsic redox of the memory can show fast speed, voltagedue andtohigh reliability, duebehavior to the intrinsic molecules. Therefore, it is very attractive for DRAM and flash memory device applications. redox behavior of the molecules. Therefore, it is very attractive for DRAM and flash memory The research group at North Carolina State University proposed hybrid CMOS/molecular device applications. memory which redox-active charge-storage incorporated into Si The devices, research in group at the North Carolina State Universitymolecules proposedwere hybrid CMOS/molecular structuresdevices, to generate a new class of electronic memory devices molecules [32–36]. These molecules, memory in which the redox-active charge-storage wereredox-active incorporated into Si which canto begenerate designed to self-assemble on surfaces asdevices monolayers, exhibit states at structures a new class of electronic memory [32–36]. Thesecharge-storage redox-active molecules, discretecan voltage levels. to This approach can transition from CMOS technology which be designed self-assemble on provide surfaces aassmooth monolayers, exhibit charge-storage states to at discrete voltage levels. This approach can provide a smooth transition from CMOS technology to 4 Appl. Sci. 2016, 6, 7 Appl. Sci. 2016, 6, 7 5 of 15 molecular electronics electronicstechnology technology by integrating theinfrastructure vast infrastructure of developed CMOS by integrating the vast of developed CMOS technology technology with inherentproperties. molecular properties. with inherent molecular Figure Figure 4. 4. Structure Structure of of redox-active redox-active molecules molecules (a) (a) Fc-BzOH Fc-BzOH and and (b) (b) Por-BzOH Por-BzOH for for memory memory applications; applications; (c) (c) schematic schematic of of an an electrolyte-molecule-Si electrolyte-molecule-Si capacitor capacitor with with aa simplified simplified equivalent equivalent circuit. circuit. Reproduced Reproduced with permission from [36], © John Wiley Wiley and and Sons, Sons, 2004. 2004. This approach focuses on developing hybrid molecular non-volatile memory with redox-active This approach focuses on developing hybrid molecular non-volatile memory with redox-active molecules as the active charge-storage medium. The redox-active molecule used in such molecular molecules as the active charge-storage medium. The redox-active molecule used in such molecular memory usually consists of a redox-active component, a linkage component and surface attachment memory usually consists of a redox-active component, a linkage component and surface attachment groups. Figure 4 shows two examples of such molecules with different redox-active components. groups. Figure 4 shows two examples of such molecules with different redox-active components. Physically, the redox-active component acts as the charge-storage center, with both the linkage and Physically, the redox-active component acts as the charge-storage center, with both the linkage and the the surface group acting as the insulator. From this standpoint, different redox-active component can surface group acting as the insulator. From this standpoint, different redox-active component can be be designed or synthesized for multiple redox states, thus for complex and high memory density. designed or synthesized for multiple redox states, thus for complex and high memory density. The The linkage component can be engineered to tune the memory retention properties, while the surface linkage component can be engineered to tune the memory retention properties, while the surface attachment groups can be specifically designed for attachment on different surfaces via covalent attachment groups can be specifically designed for attachment on different surfaces via covalent bonds. The redox component, such as the Fe in 4-ferrocenylbenzyl alcohol (Fc-BzOH) and Zn in bonds. The redox component, such as the Fe in 4-ferrocenylbenzyl alcohol (Fc-BzOH) and Zn in 5-(4-hydroxymethylphenyl)-10,15,20-trimesitylporphinatozinc(II) (Por-BzOH) (shown in Figure 4), is 5-(4-hydroxymethylphenyl)-10,15,20-trimesitylporphinatozinc(II) (Por-BzOH) (shown in Figure 4), the charge-storage medium, which can be in neutral and positively-charged states through losing is the charge-storage medium, which can be in neutral and positively-charged states through losing electrons. The molecular components surrounding the redox center act as the barrier against charge electrons. The molecular components surrounding the redox center act as the barrier against charge loss. loss. The electrons tunnel through the barrier during oxidation and reduction processes. The The electrons tunnel through the barrier during oxidation and reduction processes. The electrolyte/ electrolyte/molecule interface acts as another barrier between the molecule and top gate electrode, molecule interface acts as another barrier between the molecule and top gate electrode, which blocks which blocks the electron tunnel into the molecule from the electrolyte to reduce an oxidized the electron tunnel into the molecule from the electrolyte to reduce an oxidized molecule. The positive molecule. The positive charges in the molecule can be reduced at a lower gate potential, wherein an charges in the molecule can be reduced at a lower gate potential, wherein an electron tunnels back to electron tunnels back to the molecule from the Si substrate. the molecule from the Si substrate. The SAM attachment of redox molecules to Si, SiO2 or other surfaces was typically carried out The SAM attachment of redox molecules to Si, SiO2 or other surfaces was typically carried out by using chemical solution deposition [35–37]. The attachment is characterized by using cyclic by using chemical solution deposition [35–37]. The attachment is characterized by using cyclic voltammetry (CyV) measurement, a current-voltage measurement at various voltage scan rates. voltammetry (CyV) measurement, a current-voltage measurement at various voltage scan rates. Figure 5a,b shows the CyV curves of electrolyte-molecule-oxide-Si (EMOS) structures with the Figure 5a,b shows the CyV curves of electrolyte-molecule-oxide-Si (EMOS) structures with the Fc-BzOH Fc-BzOH and Por-BzOH redox molecules attached to SiO2 for charge storage, respectively [35,37]. and Por-BzOH redox molecules attached to SiO2 for charge storage, respectively [35,37]. The CyV The CyV curves of both molecular structures demonstrate oxidation and reduction peaks. Fc-BzOH curves of both molecular structures demonstrate oxidation and reduction peaks. Fc-BzOH shows shows one pair of redox peaks, because the redox center Fe only demonstrates a neutral state and one one pair of redox peaks, because the redox center Fe only demonstrates a neutral state and one positively-charged state. However, the Zn redox center in Por-BzOH exhibits a neutral state and two positively-charged state. However, the Zn redox center in Por-BzOH exhibits a neutral state and two (mono- or di-) positively-charged states; therefore, two pairs of redox peaks were observed. (mono- or di-) positively-charged states; therefore, two pairs of redox peaks were observed. 5 Appl. Sci. 2016, 6, 7 Appl. Sci. 2016, 6, 7 6 of 15 Figure 5.5. Cyclic Figure Cyclic voltammetry voltammetry of of electrolyte-molecule-oxide-Si electrolyte-molecule-oxide-Si (EMOS) (EMOS)structures structureswith with(a) (a) the the 2 at different voltage scan rates; Fc-BzOH and (b) the Por-BzOH redox molecule attached to SiO Fc-BzOH and (b) the Por-BzOH redox molecule attached to SiO2 at different voltage scan rates; capacitance-voltage (C-V) (C-V) and and conductance-voltage conductance-voltage (G-V) capacitance-voltage (G-V)curves curvesof of(c) (c)Fc-BzOH Fc-BzOHand and(d) (d)Por-BzOH Por-BzOH EMOS capacitors at 100 Hz. Reproduced with permission from [35,37], © AIP Publishing LLC, 2003, EMOS capacitors at 100 Hz. Reproduced with permission from [35,37], © AIP Publishing LLC, 2004.2004. 2003, The capacitance-voltage (C-V) and conductance-voltage (G-V) characteristics also exhibited The capacitance-voltage (C-V) and conductance-voltage (G-V) characteristics also exhibited clear clear capacitance and conductance peaks associated with trapping and detrapping of charge in the capacitance and conductance peaks associated with trapping and detrapping of charge in the molecules. molecules. Similarly, multiple peaks were observed with the Por-BzOH EMOS capacitor due to its Similarly, multiple peaks were observed with the Por-BzOH EMOS capacitor due to its two charged two charged states. Interestingly, the two charged states within molecules, such as Por-BzOH, can be states. Interestingly, the two charged states within molecules, such as Por-BzOH, can be employed employed for a multi-bit storage application to further enhance the memory density. Despite using a for a multi-bit application further enhance the memory Despite usingstrategy a redox redox moleculestorage exhibiting multiple to charged states, an alternative and density. perhaps more efficient molecule multiple states, an alternative and perhaps more efficient strategy to achieveexhibiting higher memory bitscharged is afforded by simply mixing different redox-active molecules whoseto achieve higher memory bits is afforded by simply mixing different redox-active molecules whose potentials are well separated. Fc-BzOH and Por-BzOH SAMs have been mixed on Si, and the mixed potentials are well separated. Fc-BzOH and Por-BzOH SAMs have been mixed on Si, and the mixed SAMs exhibit well-defined redox states [36]. The mixed SAM approach is very attractive owing to SAMs exhibit well-defined redox states [36]. The mixed SAM approach is very attractive owing to the the fact that this approach is synthetically far simpler than preparing a single molecule that exhibits fact that approach is synthetically simpler than a single molecule that distinct exhibitsthan three three orthis more redox states. In addition,far the potential of preparing the redox charged states is more or more redox states. In addition, the potential of the redox charged states is more distinct than that of a single molecular redox center with multiple charged states. However, the disadvantagethat of of a single molecular redox centerofwith multiple states. However, the disadvantage this this method is that the density a given peakcharged goes down [38]. Nevertheless, this mixed of SAM method is that the density of afor given peak goes down [38]. Nevertheless, this mixed SAM approach approach still paves the way constructing multi-bit memory storage devices. still paves the way for constructing multi-bit memory storage devices. 4. Solid-State Molecular Memory 4. Solid-State Molecular Memory The conventional polysilicon floating-gate flash memory has benefited the semiconductor The conventional polysilicon floating-gate flash memory has benefited the semiconductor memory memory technology for decades, due to its scalability, compatibility with CMOS process, and so forth. technology to its from scalability, compatibility CMOS process, and so forth. Itoxide relies It relies on for hotdecades, electron due injection the channel into thewith floating gate through a tunneling on hot electron injection from the channel into the floating gate through a tunneling oxide layer. By attaching redox-active molecules to Si as the floating gate in the CMOS structure, onelayer. can By attaching redox-active to Sireduce as the the floating in the CMOS structure, one further further enhance the cell molecules density and cell gate variations. The combination of can top-down enhance the cell and reduce theself-assembly cell variations. The combination of top-down lithography and lithography anddensity bottom-up molecule processes renders a uniform charge density, and the monodisperse nature of the molecular orbitals leading to distinct energy levels can enable precise 6 Appl. Sci. 2016, 6, 7 7 of 15 bottom-up molecule self-assembly processes renders a uniform charge density, and the monodisperse nature of the molecular orbitals leading to distinct energy levels can enable precise controlling of charged states [39]. Moreover, with a solid-state insulating barrier deposited on both sides of the molecules, the possibility of orbital hybridization from the gate will be further lessened. Such an integration of redox-active molecules in a solid-state memory provides an efficient platform to study the molecules and devices with microelectronic characterization metrologies, which is unique in comparison with the liquid electrolyte-based electrochemical method. The self-assembly process of the redox-active molecules to form a solid-state molecular memory enables not only high-quality attachment of molecules to semiconductor surfaces, but also uniform and high-density fabrication of low-cost devices and circuits. The disadvantages of molecular flash memory mainly lie in its reliability in volatile environments. Some redox-active molecules are instable or even do not function at temperatures higher than 200 ˝ C due to evaporation or redox center reaction. Under volatile environments with oxygen or water, the molecule’s bond might be broken, leading to poor redox behavior. As a result, some specific conditions and environments need to be taken into account when integrating such redox molecules in CMOS devices and circuits. Future molecular technology requires advancement in both molecule properties and device integration processes. The researchers from North Carolina State University reported a study on preventing contact metal penetration into the molecular layer in the metal-insulator-molecule-metal structure [40]. Similar work demonstrating that redox properties of molecules can be preserved after thin film encapsulation, such as atomic layer deposition (ALD), initiated the investigation on high-performance solid-state molecular memory [41]. The Cornell University research group reported a study on a metal-oxide-semiconductor (MOS) structure with molecules encapsulated in a high-k dielectric and functioning as the charge storage medium [42,43]. As shown in Figure 6, molecules with different redox centers, which can show one and two charged states, have been studied for multi-bit memory. With the electrostatics determined by the alignment between the highest occupied or the lowest unoccupied molecular orbital (HOMO or LUMO, respectively) energy levels and the charge neutrality level of the dielectric, the asymmetric charge injection behavior in flat-band voltage shift (∆VFB ) vs. programming voltage measurement (Figure 7) is due to the Fermi-level pinning between the molecules and the high-k dielectric [44–46]. The three programmable molecular orbital states of the 5-(4-Carboxyphenyl)-10,15,20,-triphenyl-porphyrin-Co(II) (CoP) molecule have been experimentally observed and are attractive for low-variation multi-bit memory applications. However, the charge retention of this capacitor molecular memory is still far below the modern flash memory requirements. The engineering by the same group on the tunnel layer has greatly enhanced the electron retention and programming performance by forming an organic-inorganic tunnel barrier [43]. Nevertheless, the endurance of this molecular memory (~104 cycles) is still quite limited; further engineering and improvement on the molecular orbitals and device structure are needed to achieve higher memory performance. Recently, the NIST researchers have reported a similar capacitor-structure molecular non-volatile memory, but with enhanced charge retention and excellent endurance [47]. The molecular memory uses an α-ferrocenylethanol redox molecule, which has a very simple structure and one redox center. As shown in Figure 8, with the molecules attached to the SiO2 tunnel oxide and encapsulated in the ALD Al2 O3 dielectric, the solid-state molecular memory exhibited excellent memory behavior, such as a sufficient memory window, good retention and endurance. Even though only ~15% of the molecules were effectively involved in the redox processes after ALD, effective memory can be realized with sufficient charge density. These characteristics are attributed to the intrinsic redox behavior of the ferrocene molecule and the effective protection from the presence of the gate dielectric covering the molecule SAM. The molecular memory showed excellent endurance properties, with negligible memory window degradation after 109 P/E cycles, which is about 10,000-times better than that of the conventional floating gate memory (1 ˆ 105 P/E cycles). However, the operation voltage of such molecular memory is still high, and the operation speed needs to be improved. Further study of the Appl. Sci. 2016, 6, 7 8 of 15 molecular memory depends on the engineering of redox-active molecules, such as molecules with multiple redox centers and a proper linker for multi-bit memory, and the device structure engineering Appl. Appl. Sci. Sci. 2016, 2016, 6, 6, 77 to optimize the dielectric stack thickness and improve the molecule/dielectric interface. Such an Such anwill exploration will be a breakthrough significant breakthrough in the for charge-storage non-volatile exploration be a significant in the quest forquest charge-storage non-volatile memory memory andthe will enable the application of flash-like devices foron-chip future on-chip memory applications. and will enable application of flash-like devices for future memory applications. Figure 6. of (MOS) capacitor with Figure 6. Schematics of the metal-oxide-semiconductor (MOS) capacitor structure with (a)structure ferrocenecarboxylic Figure 6. Schematics Schematics of the the metal-oxide-semiconductor metal-oxide-semiconductor (MOS) capacitor structure with (a) ferrocenecarboxylic acid (FcCOOH) and (b) CoP SAM attached to Si structures. Reproduced with (a) ferrocenecarboxylic acid (FcCOOH) andto (b)SiCoP SAM attached to Si structures. Reproducedfrom with [42], acid (FcCOOH) and (b) CoP SAM attached structures. Reproduced with permission permission permission from [42], [42], © © IEEE, IEEE, 2011. 2011. © IEEE, 2011. from Figure 7. High-frequency C-V and as ofprogramming programming voltage at K 10and K and Figure 7. C-V and ΔV function voltage at room FBFB Figure 7. High-frequency High-frequency C-V and∆V ΔV FB as as aaa function function of of programming voltage at 10 10 K and roomroom temperature for the with (a,b) FcCOOH CoPmolecules. molecules. Reproduced with permission temperature for the with (a,b) FcCOOH and (c,d) Reproduced with permission temperature for device the device device with (a,b) FcCOOHand and (c,d) (c,d) CoP CoP molecules. Reproduced with permission © 2011. from from [42], © IEEE, 2011. from [42], [42], © IEEE, IEEE, 2011. 8 Appl. Sci. 2016, 6, 7 Appl. Sci. 2016, 6, 7 9 of 15 Appl. Sci. 2016, 6, 7 Figure 8.8. (a) (a)Molecule Molecule structure of α-ferrocenylethanol and a schematic of the Figure structure of α-ferrocenylethanol and a schematic of the Metal-Al 2O3Metal-Al -Ferrocene2 O3 Ferrocene-Oxide-Silicon (MAFOS) capacitor memory structure; (b) ∆V of the molecular memory FB of the molecular memory and control Oxide-Silicon (MAFOS) capacitor memory structure; (b) ΔV Figure 8. (a) Molecule structure of α-ferrocenylethanol and a schematic of FB the Metal-Al2O3-Ferroceneand controlassamples as aofcapacitor function of program/erase voltage; (c) charge retention at room samples a function program/erase (P/-E) voltage; (c)FBcharge at room temperature; of the retention molecular memory and control Oxide-Silicon (MAFOS) memory structure; (b)(P/-E) ΔV (d) deviceasendurance differentwith P/Epulse widths. Reproduced with permission from [47], © AIP samples a function of program/erase (P/-E) voltage; (c) charge retention at room temperature; temperature; (d) devicewith endurance different P/Epulse widths. Reproduced with permission (d)[47], device endurance different P/Epulse widths. Reproduced with permission from [47], © AIP Publishing LLC, 2013.with LLC, from © AIP Publishing 2013. Publishing LLC, 2013. Nanowire/Nanotube-Based Molecular Molecular Memory 5. 5. Nanowire/Nanotube-Based Memory 5. Nanowire/Nanotube-Based Molecular Memory Semiconductor nanowire and nanotube MOSFETs have been regarded as the building blocks for Semiconductor nanowire and nanotube MOSFETs have been regarded as the building blocks for Semiconductor nanowire and nanotube have been regarded the building for nanoelectronics devices and circuits [48–50].MOSFETs Compared to planar devices as based on bulk blocks materials, nanoelectronics devices and circuits [48–50]. Compared to planar devices based on bulk materials, the nanoelectronics devices and circuits [48–50]. Compared to planar devices based on bulk materials, the nanowires have smaller channels and a larger surface-to-volume ratio. Thus, they require less nanowires have smaller channels and a larger surface-to-volume ratio. Thus, they require less stored the nanowires smaller and a larger surface-to-volume ratio. Thus, they require less stored charges have to induce thechannels same memory window for the memory application. Moreover, the charges induce to theinduce same memory window for the memory Moreover,Moreover, the nanowire storedtocharges the samecan memory for theapplication. memory application. the or nanowire or nanotube channel enablewindow a gate-surrounding structure, allowing excellent nanotube channel can enable a gate-surrounding allowing excellent electrostatic gate control. nanowire orgate nanotube can enable astructure, gate-surrounding allowing excellent electrostatic control.channel Integrating redox-active molecules withstructure, semiconductor nanowire or Integrating redox-active molecules with semiconductor nanowire or nanotube FETs for solid-state flash electrostatic gate control. Integrating redox-active molecules with semiconductor nanowire or nanotube FETs for solid-state flash memory will not only improve the memory performance by memory will not only improve the memory performance by utilizing the properties nanotube FETs for solid-state flash memory will not molecules, only improve memory performance by of utilizing the advantageous properties of redox-active but the alsoadvantageous will provide an efficient redox-active molecules, but also will provide an efficient platform to study the redox-active molecules utilizing the advantageous properties of redox-active molecules, but also will provide an efficient platform to study the redox-active molecules with microelectronics characterization metrologies. with microelectronics metrologies. platform to study thecharacterization redox-active molecules with microelectronics characterization metrologies. Figure 9. Nanowire-based non-volatile memory, with the nanowire surface functionalized with Figure 9. Nanowire-based non-volatile memory, nanowire by surface functionalized with redox-active molecules. Logic on and memory, off stateswith are the represented different charged states. Figure 9. Nanowire-based non-volatile with the nanowire surface functionalized with redox-active molecules. Logic on and off states are represented by different charged states. Reproduced with permission © American Chemicalby Society, 2002. redox-active molecules. Logic onfrom and[51], off states are represented different charged states. Reproduced Reproduced with permission from [51], © American Chemical Society, 2002. with permission from [51], © American Chemical Society, 2002. 9 9 Appl. Sci. 2016, 6, 7 Appl. Sci. 2016, 6, 7 10 of 15 In 2002, the researchers from Harvard University reported a molecular non-volatile memory based on a back-gated nanowire FET with the nanowire surface functionalized with cobalt In 2002, the researchers from Harvard University reported a molecular non-volatile memory based phthalocyanine (CoPc) redox-active molecules (Figure 9) [51]. By modulating the channel on a back-gated nanowire FET with the nanowire surface functionalized with cobalt phthalocyanine conductance with back gate voltage, reversible switching between on and off states has been achieved, (CoPc) redox-active molecules (Figure 9) [51]. By modulating the channel conductance with back with the on/off ratio exceeding 104. The retention (>20 min) and endurance (>100 cycles) of the gate voltage, reversible switching between on and off states has been achieved, with the on/off molecular memory device have outperformed the earlier junction molecular switching devices. ratio exceeding 104 . The retention (>20 min) and endurance (>100 cycles) of the molecular memory Integrated arrays of independently-addressable molecular nanowire memory have also been device have outperformed the earlier junction molecular switching devices. Integrated arrays characterized, which demonstrated another advantage of implementing nanowire structure memory of independently-addressable molecular nanowire memory have also been characterized, which in programmable logic arrays. The memory performance has been further improved with molecule demonstrated another advantage of implementing nanowire structure memory in programmable logic and device engineering. In 2004, the University of Southern California research groups reported a arrays. The memory performance has been further improved with molecule and device engineering. back-gate nanowire FET-based molecular memory, which utilized In2O3 nanowires and a family of In 2004, the University of Southern California research groups reported a back-gate nanowire FET-based bis(terpyridine)-Fe(II) molecules for charge storage (Figure 10) [52,53]. It was demonstrated that molecular memory, which utilized In2 O3 nanowires and a family of bis(terpyridine)-Fe(II) molecules bis(terpyridine)-Fe(II) with a larger or more complex linkage component showed better retention, for charge storage (Figure 10) [52,53]. It was demonstrated that bis(terpyridine)-Fe(II) with a larger or due to the increase in the tunneling barrier. In addition, by applying gate voltage pulses with different more complex linkage component showed better retention, due to the increase in the tunneling barrier. amplitudes, multilevels in memory cells can be illustrated by altering the population of the In addition, by applying gate voltage pulses with different amplitudes, multilevels in memory cells reduced/oxidized molecules [53]. However, such multilevel memory realization depends on the gate can be illustrated by altering the population of the reduced/oxidized molecules [53]. However, such voltage applied to oxidize/reduce a portion of molecules in SAM. Further cell scaling or increasing multilevel memory realization depends on the gate voltage applied to oxidize/reduce a portion of the number of memory levels will be extremely difficult, as the complicated top-down device molecules in SAM. Further cell scaling or increasing the number of memory levels will be extremely fabrication and device structure will inevitably lead to significant device variation and a blurring of difficult, as the complicated top-down device fabrication and device structure will inevitably lead to the multiple storage states. In addition, the demonstrated device performance is still far below the significant device variation and a blurring of the multiple storage states. In addition, the demonstrated standards for on-chip memory applications. This is partly because of the back gate device structure, device performance is still far below the standards for on-chip memory applications. This is partly unclean steps in the nanowire FET device fabrication process and, most importantly, the absence of because of the back gate device structure, unclean steps in the nanowire FET device fabrication process protection for redox-active molecules. and, most importantly, the absence of protection for redox-active molecules. Figure 10. Comparison of designs and operations between (a) conventional silicon flash memory and (b) multilevel nonvolatile datadata storage; (c) comparison of multilevels in a two-bit (b) molecular molecularmemory memoryforfor multilevel nonvolatile storage; (c) comparison of multilevels in a silicon memory molecular memory; (d) molecular Fe2+ -terpyridine compound. two-bitflash silicon flash and memory and molecular memory; (d) structure molecularof structure of Fe2+-terpyridine Reproduced with permission [53,54],from © AIP Publishing 2004,2007. compound. Reproduced withfrom permission [53,54], © AIPLLC, Publishing LLC, 2004,2007. 10 Appl. Sci. 2016, 6, 7 Appl. Sci. 2016, 6, 7 11 of 15 Recently, the NIST NIST researchers researchers have have extended extended their their work work on on the the capacitor capacitor memory memory cell cell to to aa novel Recently, the novel top-gated nanowire molecular flash memory based on Si nanowire FETs [47,55]. The memory cell top-gated nanowire molecular flash memory based on Si nanowire FETs [47,55]. The memory cell consists consists of of aa self-aligned self-aligned top-gated top-gated Si Si nanowire nanowire FET FET with with α-ferrocenylethanol α-ferrocenylethanol redox-active redox-active molecules molecules attached to a Si nanowire surface (Figure 11). The molecules are effectively protected by engineered attached to a Si nanowire surface (Figure 11). The molecules are effectively protected by engineered top top dielectrics. injected charges are mainly located the redox centers of molecules, with gategate dielectrics. The The injected charges are mainly located in theinredox centers of molecules, with trace trace amount the molecule/Al 2O3 interface traps. The molecular flash memory cell exhibited amount storedstored in thein molecule/Al 2 O3 interface traps. The molecular flash memory cell exhibited fast 9 fast P/E speed and excellent P/E endurance cycles). These characteristics are attributed to P/E speed and excellent P/E endurance (>109(>10 P/EP/E cycles). These characteristics are attributed to both both the intrinsic charging properties of redox-active molecules the protection of the molecules the intrinsic charging properties of redox-active molecules and the and protection of the molecules obtained obtained by the self-alignment fabrication enabling clean solid-molecule and dielectric by the self-alignment fabrication enabling clean solid-molecule and dielectric interfaces. interfaces. However, However, similar to theircapacitor previousmolecular capacitor molecular memory, of the were molecules were similar to their previous memory, only ~20% only of the~20% molecules effectively effectively the redox process. Further research efforts are requiredthe to redox increase the redox involved ininvolved the redoxinprocess. Further research efforts are required to increase efficiency so efficiency so as to lower the operation voltage and improve the operation speed. The memory as to lower the operation voltage and improve the operation speed. The memory density can bedensity further can be further enhanced by using redox molecules with multiple redox centers. Such aconcept multi-bit enhanced by using redox molecules with multiple redox centers. Such a multi-bit memory is memory concept is more reasonable and feasible than that by just modulating the voltage level, as more reasonable and feasible than that by just modulating the voltage level, as the physically discrete the physically charged states of the precise molecule can enableofprecise controlling of the charged states. charged statesdiscrete of the molecule can enable controlling the charged states. Figure 11. 11. (Left) (Left) TEM TEM image image of of the the cross-section cross-section of of aa molecular molecular flash flash memory memory device; device; (Right) (Right) discrete discrete Figure charging behavior flash memory and the endurance properties. Reproduced with 2 molecular 2 molecular flash memory and the endurance properties. Reproduced charging behaviorofofthe theRu Ru permission from [55], © American Chemical Society, 2015. 2015. with permission from [55], © American Chemical Society, In addition to the traditional redox-active molecules, novel molecules and clusters have been synthesized and implemented in molecular memory. memory. In 2014, Busche et al. reported reported aa study on molecular nanowire flash memory using core-shell polyoxometalate (POM) molecules for charge storage (Figure 12) [56]. The The POM molecule molecule functions functions as the switching component component in the memory associated with the oxidation of selenite template at the cluster core and the reduction of the metal oxidation template oxide cluster cage. The The unique unique oxidation oxidation process process of of the the selenite selenite template template at at the the cluster cluster core was observed only after the initial excitation and cannot cannot be be recreated recreated with consecutive consecutive operations, leading to a new new type typeofof“write-once-erase” “write-once-erase”memory. memory. The flash memory with a 4-nm Si nanowire channel The flash memory with a 4-nm Si nanowire channel and and for charge storage has shown excellent retention properties no charge POMPOM for charge storage has shown excellent retention properties with with no charge store store decaydecay after after hours. the increasing state molecules, of POM molecules, theratio on/off can 336 h.336 With the With increasing oxidationoxidation state of POM the on/off canratio reach asreach high as 11 11 high[56]. as 10 Even thevoltage operation and the time of memory such molecular 10 Even[56]. though thethough operation and voltage the switching timeswitching of such molecular are still memory arefurther still quite large, further engineering to shorten from gate to the quite large, engineering to shorten the distance from the distance control gate tothe thecontrol nanowire channel nanowire channel and to reduce the number of POMs can be expected to effectively lower the voltage and the write time into the sub-picosecond region. 11 Appl. Sci. 2016, 6, 7 12 of 15 and to reduce the number of POMs can be expected to effectively lower the voltage and the write time region. Appl. 6, 7 into Sci. the2016, sub-picosecond Image of of the thenanowire nanowire flash flash memory memory device device and and the the drain drain current current behavior behavior with an applied applied Figure 12. Image Cross-sectional image (left) of the device and the top view voltage to tothe thecontrol controlgate. gate.(a)(a) Cross-sectional image (left) of memory the memory device and the top(right) view of a device with a 5-nm Si nanowire channel and side control gate; measurements of the logarithmic (right) of a device with a 5-nm Si nanowire channel and side control gate; measurements of the (b) and linear drain current versuscurrent gate voltage 0.5voltage V source-drain before deposition of logarithmic (b)(c)and linear (c) drain versus at gate at 0.5 V voltage: source-drain voltage: before the polyoxometalates (POMs) (green(POMs) dashes), after dashes), the deposition of deposition the POMs (orange dashes), after deposition of the polyoxometalates (green after the of the POMs (orange a ´20 V after pulsea (blue after a 120 pulse (redVline). with permission from [56], dashes), −20 Vline) pulseand (blue line) andVafter a 120 pulseReproduced (red line). Reproduced with permission © American Chemical Society, 2014. from [56], © American Chemical Society, 2014. As illustrated by the above experimental work, the performance performance of molecular molecular flash memory depends on not only the redox behavior of the molecules, but also the preparation of the transistor depends platform and the integration of the molecules in the memory structure. While the memory memory endurance is mainly determined by the mechanism of the charge storage, further improving the memory determined performance, such as the memory memory density, density, speed and power, requires optimized engineering on the transistor platform structure structure and and an an enhanced enhanced molecule/semiconductor molecule/semiconductor interface. For example, a high quality tunneling oxide layer in a molecular flash memory with with less less molecule/dielectric molecule/dielectric interface quality tunneling oxide layer in a molecular flash memory interface traps traps can significantly improve memory retention retention and and lower lower the the operation operation voltage. voltage. The The semiconductor semiconductor can significantly improve the the memory nanowire have been been shown shown to to be nanowire FETs FETs have be promising promising building building blocks blocks to to create create new new functional functional molecular molecular memory devices. A vast array of other device platforms, such as Si surfaces, metal oxide and carbon memory devices. A vast array of other device platforms, such as Si surfaces, metal oxide and nanotubes, can becan implemented for molecular memory if an appropriate carbon nanotubes, be implemented for molecular memory if an appropriatemodification modificationcan can be be designed to interface the molecules with such platforms. Therefore, the integration of redox-active designed to interface the molecules with such platforms. Therefore, the integration of redox-active molecules molecular flash memory is very attractive, attractive, because molecules as as the the active active component component in in aa molecular flash memory is very because it it will will leverage theadvantages advantagesafforded afforded redox-active molecules theinfrastructure vast infrastructure of leverage the byby thethe redox-active molecules with with the vast of current current semiconductor technology. semiconductor technology. Conclusions 6. Conclusions In the past few years, the performance performance of of molecular molecular memory memory has has been been pushed pushed to to new new frontiers. frontiers. molecules in Langmuir–Blodgett Langmuir–Blodgett film, more and more more new new Developed from the mechanical motion of molecules families of molecules molecules have been synthesized, synthesized, and and the redox properties have been investigated investigated for families memory applications. applications. Up Up to to now, now, redox-active redox-active molecules molecules have have already shown their potential and memory future low-voltage, high-density and high-reliability non-volatile memory. advantageous properties propertiesforfor future low-voltage, high-density and high-reliability non-volatile The current main barriers the CMOS compatibility and the issues introduced with the molecular memory. The current mainare barriers are the CMOS compatibility and the issues introduced with the integration integration with semiconductor devices. The realization of future molecular memory applications still molecular with semiconductor devices. The realization of future molecular memory requires a combination of empirical fabrication characterization with sophisticated application applications still requires a combination of and empirical fabrication and characterization with of rational designs for particular molecular devices. Uponelectronics this, theredevices. will no doubt be a sophisticated application of rational designselectronics for particular molecular Upon this, significant breakthrough in micro-/nano-electronics at replacing the SRAM, the CPU there will no doubt be a significant breakthrough inaiming micro-/nano-electronics aimingboosting at replacing the ability and creating portable/wearable electronic devices. 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