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4 This Week’s Citation Classic_________ 1Trumbore F A. Solid solubilities of impurity elements in germanium and silicon. I Bell Syst. Tech. J. 39:205-33, 1960. [Bell Laboratories, Murray Hill, NJ) ply proved troublesome, however, with repeated unsuccessful attempts to pull single crystals of very heavily arsenic-doped germanium. One evening, in despair, I suggested to my colleague Ed Porbansky that he not turn off the crystal pulling machine. The next morning we found a gorgeous, uniquely shaped single crystal which had grown due to evaporation of arsenic, the solvent! Processing these crystals resulted in a tunnel diode patent with Ralph Logan and 2 Forrest A. Trumbore William Spitzer which nearly brought the Bell Laboratories wrath of the physics community down upon Murray Hill, NJ 07974 us. A paper describing the work was in press in a well-known physics journal when the November 15, 1982 patent application was belatedly classified “On joining the infant solid-state revolu- secret by a branch of the armed forces. tion at Bell Laboratories in 1952, I was im- (Why, we never knew.) Reason prevailed, mediately seduced by the beauty of those fortunately, and the patent was declassified early germanium and silicon single crystals, just in time to prevent a proposed impoundthe forerunners of today’s bologna-size in- ing of the entire pressrun of the journal in gots from which the ubiquitous silicon chip question! is manufactured. The control of the distribu“Later, I extended my work on impurities tion and doping levels of impurities was, to gallium phosphide. Unexpectedly, this and still is, fundamental to the fabrication side project yielded crystals with very interof these chips and other solid-state devices; esting luminescence properties and I found hence, the frequent citation of the impurity myself in another collaborative effort with solubility data compiled in this Citation Logan, Harry White, and Michael Kowalchik Classic. Happily, my own work involved the which led to the world’s most efficient light 3 growth of crystals from solutions of the emitting diodes (LED5). Contrary to a widesemiconductors in the impurity elements, ly disseminated newspaper account of our thus indulging my fascination with crystals. work, the LEDs were not suitable for traffic One growth technique required up to three lights and we had to refuse a request to months to grow suitable crystals. The license our LEDs for lighthouse beacons! In growth and the subsequent chemical and 1970, in recognition of the work on imelectrical analyses of these hard-won crys- purities in the various semiconductors, I tals to yield the solubility data involved the received the first Electronics Division Award cooperation of many highly competent col- of the Electrochemical Society. The Citation leagues in a truly golden era at Bell Classic was also reprinted in a book in Laboratories. 1964.~ “Fortunately, my efforts were directed “This commentary would be incomplete primarily toward the more soluble impuri- without acknowledging Carl Thurmond, ties (e.g., gallium and arsenic). When Esaki,’ who inspired this paper. His tireless and in Japan, invented the tunnel diode, a de- stimulating efforts in educating, consulting, vice requiring heavily doped semiconduc- and arguing with his colleagues on materials tors, I became an instant authority on tunnel problems represented a truly significant diode materials by simply supplying my contribution to the solid-state revolution device-oriented colleagues with crystals which has not been adequately recognized from my desk drawer. Replenishing the sup- outside of Bell Laboratories.” Solid solubility data are reported for various impurity elements in germanium and silicon. These results and other available data are summarized and critically evaluated to yield sets of solidus and solvus curves for the major dopants in these semiconductor host materials. [The SC!® indicates that this paper has been cited in over 350 publications since 1961.1 I 1. Eaakl L New phenomenon in nanow germanium p-n junctions. Phys. Rev. 109:603-4, 1958. 2. Log,. k A, Spltzer W G & Tr.hore F A. Method for increasing the doping level of,cemiconduc:or material,s. US patent 3.111,433. 19 November 1963. 3. Logan Il A, White H 6 & Ti,bore F A. P-N junctions in GaP with external electroluminescence efficiency “2% at 25°C.AppI. Phys. Let:. 10:206-8. 1967. 4. Tt.abore F A. Solid solubilities of impurfly elements ingermanium and silicon. (Levine S N, ed.) Micro- and thin-film electronics: readings. New York: Holt, Rinehart and Winston, 1964. 16 ET&AS CURRENT CONTENTS® ®1983 by ISI®