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Micro Heater with PT-CR thin film Thermo-Couple for high speed Biological Measurements Fujita Laboratory, IIS, cIRMM, the University of Tokyo ,JAPAN F. Gillot, H. F. Araa, F. O. Morin, D. Collard and H. Fujita Tranducer 2007 報告人: 蘇聖欽 Outline • • • • • Introduction Manufacturing Process Biological Application Conclusion References Outline • • • • • Introduction Manufacturing Process Biological Application Conclusion References Thermo-Couple • Thermoelectric voltage : m : number of couples legs V m ABT ΔT : temperature between hot and cold junctions αAB : seebeck coefficient Outline • • • • • Introduction Manufacturing Process Biological Application Conclusion References Fabrication of PT-CR Hot junction has 2.5-um * 2.5-um area PT-CR couple offers a high Seebeck coefficient(17.4uV/K) Device Calibration Thermal device behavior using finite element analysis (FemLab 3.1) Micro TFTC coupled with a 471Ω CMS resistor ramping the voltage by steps of 0.1V (waiting time of at least 30s) Output voltage of Thermocouple 4-noctyl-4cyanobiphenyl(8CB) Separation line between the nematic and the smectic phase on 1.2V applied (a)-(c) pictures taken by a BX 51 Olympus(20x) Outline • • • • • Introduction Manufacturing Process Biological Application Conclusion References Unzipping dsDNA into ssDNA Syber green binds to dsDNA but not to ssDNA 16um long λDNA together with fluorecent on the thermodevice The final quick decrease corresponded to unzipping of a DNA that completed within 52 ms(stage 3) Outline • • • • • Introduction Manufacturing Process Biological Application Conclusion References Conclusion • Showing fast thermal shifting as well as thermal sensing in the ms range. • Thermocouple can use for other application (actuator). References [1] F. Gillot, H. F. Araa, F. O. Morin, D. Collard and H. Fujita, “Micro Heater with PT-CR thin film Thermo-Couple for high speed Biological Measurements”, Transducer, pp. 21-23, 2007. [2] F Gillot, FO Morin, HF Arata, R Guégan, H Tanaka, “On-chip thermal calibration with 8 CB liquid crystal of micro-thermal”, Lab on a Chip, pp. 1600 – 1602, 2007.