Survey
* Your assessment is very important for improving the workof artificial intelligence, which forms the content of this project
* Your assessment is very important for improving the workof artificial intelligence, which forms the content of this project
• The Tencor Alpha-Step is located in the Class-1000 cleanroom. • It is a contact, stylus-based surface profiler that is computerized to measure accurately surface characteristics such as step height, roughness, and etch depth on a wide variety of substrates, including semiconductor chips and wafers, thin films, polymers, and photoresist patterns. • Typical step heights range from 10 Angstroms to 300 microns